With the development of computer technology and MEMS(Micro-Electro-Mechanical System), the computer simulation of micro machining etching process has been developed rapidly. The research status of the etching process and several kinds of typical simulation technologies about etching process were summarized. The advantages and drawbacks of these simulation technologies were also discussed. The cellular automation(CA) method that widely used in the anisotropic etching simulation was mainly introduced. The advantages of CA compared with other methods were analyzed. The basic principle model, development and research applications of CA were expounded.