高结构对称性微半球陀螺设计与制造
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梅松(1991-),男,重庆市人,硕士生,主要从事惯性器件设计及工艺技术的研究。

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Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry
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    摘要:

    针对陀螺高精度小型化需求,该文设计了一种微半球陀螺结构,建立微半球陀螺三维有限元模型,研究了微半球谐振子结构对称性对陀螺性能的影响规律。提出了谐振子圆度及1~4阶质量不对称误差的评价方法,实现了谐振子制造工艺优化,优化后的谐振子圆度误差≤2 μm,在此基础上研制了微半球陀螺样机。结果表明,封装后陀螺样机的周向品质因数(Q)值分布为(9.024~9.183)×105,均匀性为±0.87%;速率模式下,陀螺量程为±20 (°)/s时,陀螺零偏不稳定性为0.013 8 (°)/h,角度随机游走为0.006 8 (°)/,展现了高结构对称性微半球陀螺的性能潜力。

    Abstract:

    In response to the demand for high-precision miniaturization of gyroscopes, a micro shell resonator gyroscope (mHRG) structure is designed in this paper. The three-dimensional finite element model is established and the effect of structural symmetry on the gyro performance is investigated. An evaluation method for the roundness of resonator and the asymmetric error of 1-4 order mass is proposed. The process of resonator fabrication is optimized, and the roundness error of the optimized resonator is ≤2 μm, on this basis, a micro shell resonator gyroscope (mHRG) prototype is developed. The performance of the encapsulated mHRG is tested.The results showed the circumference quality factor (Q) distribution is between (9.024-9.183)×105 with a uniformity of ±0.87%.In the force-rebalance mode, the gyroscope range is ±20 (°)/s , the bias instability (Allan deviation) of the gyroscope is 0.013 8 (°)/h, and the angle random walk(ARW) is 0.006 8 (°)/. This study demonstrates the performance potential of the micro-hemisphere gyros with high structural symmetry.

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梅松,杨峰,文路,卢昱瑾,贺韵祺,陈朝春,韩世川,雷霆,林丙涛.高结构对称性微半球陀螺设计与制造[J].压电与声光,2023,45(2):220-225. MEI Song, YANG Feng, WEN Lu, LU Yujin, HE Yunqi, CHEN Chaochun, HAN Shichuan, LEI Ting, LIN Bingtao. Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2022-11-10
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  • 在线发布日期: 2023-06-01
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