| 大口径快反镜面形测试系统设计 |
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| 引用本文： | 刘欣,杨忠明,刘兆军,王继红.大口径快反镜面形测试系统设计[J].红外与激光工程,2022,51(5):20210514-1-20210514-9. |
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| 作者姓名： | 刘欣 杨忠明 刘兆军 王继红 |
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| 作者单位： | 1.山东大学 信息科学与工程学院，山东 青岛 266237 |
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| 基金项目： | 国家自然科学基金（61905131）；山东省自然科学基金（ZR2019QF013）；江苏省光谱成像与智能感知重点实验室开放课题计划（3091801410413） |
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| 摘 要： | 大口径快速反射镜（快反镜）常被应用于空间光通信和激光武器等领域。为实现工作状态下大口径快反镜面形误差的实时检测，设计了大口径快反镜面形测试系统。该系统的口径参数为400 mm，工作波长为633 mm，由离轴式前置扩束系统和焦面附件系统组成。对测试系统的设计参数及元件参数选择进行了阐述，设计和仿真了光学系统结构，并基于光机热集成分析获得温度变化对光学系统的影响。测试大口径快反镜面形测试系统后结果表明该系统可实现实时记录和高精度测量，且在温度变化的工作环境下也可实现稳定测量，其测量稳定性为0.048λ（RMS，λ=633 nm）。
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| 关 键 词： | 快反镜 光学设计 面形测试系统 有效口径 稳定性 |
| 收稿时间： | 2021-07-28 |
Design of large aperture fast steering mirror surface figure test system |
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| Affiliation: | 1.School of Information Science and Engineering, Shandong University, Qingdao 266237, China2.The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China |
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| Abstract: | The large aperture fast steering mirror(FSM) are often used in the fields of space optical communications and laser weapons. The large aperture fast steering mirror surface figure test system with an effective aperture of 400 mm has a working wavelength of 633 nm. The system is mainly composed of an off-axis beam expanding system and a focal plane system to achieve real-time detection of the mirror surface figure error when the large aperture FSM is working. In this paper, the design parameters of the optical system and the selection of optical element parameters were described. The optical system was designed and simulated, and the effect of temperature variation on the optical system was obtained based on the integrated optical-mechanical-thermal analysis. The test results show that the large aperture fast steering mirror surface figure test system can achieve real-time recording and high precision measurement, meanwhile, the system has stability in a working environment with temperature changes. The stability of the surface figure test system is 0.048λ (RMS, λ=633 nm). |
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