| 可用于多波段融合的超结构/阻挡杂质带复合结构探测器（特邀） |
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| 引用本文： | 崔慧源,陈雨璐,王晓东.可用于多波段融合的超结构/阻挡杂质带复合结构探测器（特邀）[J].红外与激光工程,2021,50(1):20211012-1-20211012-13. |
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| 作者姓名： | 崔慧源 陈雨璐 王晓东 |
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| 作者单位： | 中国电子科技集团公司第五十研究所，上海 200331 |
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| 摘 要： | 太赫兹辐射是指频率在30 μm~1 mm范围内的电磁波，具有穿透性强、安全性高、特征性强及定向性好等特点，因此，太赫兹技术在天文观测、安全监控、物质鉴定及生物医学等领域具有广阔的应用前景。阻挡杂质带探测器具有灵敏度高、阵列规模大、探测谱段宽等核心优势，是太赫兹辐射探测的优良选择。阻挡杂质带探测器目前主要采用三种材料体系，分别为Si、Ge、GaAs。基于这三种材料体系的阻挡杂质带探测器可实现在3~500 μm的超宽波段探测。超结构是由亚波长结构单元构成人工复合结构，在光电探测器上引入超结构，利用等离激元共振、偶极共振调控特性，可以将电磁场能量强烈的局域在金属/探测器界面位置。因此，超结构与阻挡杂质带结合，可有效调控探测峰位、缩小探测峰半高宽、强化光谱分辨能力，并有望大规模应用于3~500 μm的多波段融合探测。同时，超结构与阻挡杂质带探测器结合，可进一步提高器件响应率，减小器件尺寸，降低工艺难度。文中简要叙述了阻挡杂质带探测器的工作机理，介绍了国内外阻挡杂质带探测器的研究历史及研究现状。最后，在探测器波段调控、光谱分辨、增强吸收等角度详细介绍了Si、Ge、GaAs基超结构/阻挡杂质带复合结构探测器的研究现状，并结合目前该技术发展瓶颈问题，在高纯材料生长、光场局域效应机理研究等方面提出了下一步的研究展望。
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| 关 键 词： | 阻挡杂质带 太赫兹 光电探测器 超结构 |
| 收稿时间： | 2020-11-12 |
Multiband fusion detection based on superstructure/ blocking-impurity-band combination detector (Invited) |
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| Affiliation: | The 50th Research Institute of China Electronics Technology Group Corporation, Shanghai 200331, China |
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| Abstract: | Terahertz radiation refers to electromagnetic waves with a wavelength range of 30 μm-1 mm, characterized by strong penetration, high safety, strong specificity and good orientation. Therefore, terahertz technology has broad application prospects in the fields of astronomical observation, safety monitoring, substance identification and biomedicine. Blocking-impurity-band detector has the advantages of high sensitivity, large array size and wide detection spectrum, which is an excellent choice for terahertz radiation detection. At present, the blocking-impurity-band detector is mainly based on three material systems, namely Si, Ge and GaAs. Si, Ge and GaAs-based blocking-impurity-band detectors can be used for ultra-wide band detection from 3 μm to 500 μm. Superstructure is an artificial composite structure composed of subwavelength structural units. By introducing superstructure into the photoelectric detector, the electromagnetic field energy will be strongly localized at the interface between the metal and the detector through plasmon resonance and dipole resonance modes. So, the combination of superstructure and blocking-impurity-band detector can effectively regulate the detection peak, reduce the full width at half maximum (FWHM) of detection peak and enhance the spectral resolution ability. So it is expected to be widely used in multiband fusion detection of 3-500 μm. At the same time, the combination of the two technologies can further improve the response rate of the device, reduce the size of the device and reduce the process difficulty. This paper briefly described the working mechanism of the blocking-impurity-band detector. And the research history and status of blocking-impurity-band detector at home and abroad are also introduced. Finally, the superstructure/blocking-impurity-band detector was described in detail in terms of band regulation, spectral resolution and absorption enhance. Combining with the bottleneck problem of this technology, the future research prospect was proposed in the aspects such as high purity material growth and the mechanism of local effect of light field. |
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