| 基于激光位移传感器圆径测量的角度安装误差研究 |
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| 作者姓名： | Ma Jinyu Chen Xin Ding Guoqing Chen Jigang |
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| 作者单位： | 1.上海交通大学 电子信息与电气工程学院，上海 200240 |
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| 摘 要： | 基于激光位移传感器的工件圆径和圆度测量被广泛应用于工业现场的产品质量检测过程中。文中研究了激光位移传感器的角度安装误差对工件圆径测量结果的影响，并提出校准方法。首先，将定量分析位移传感器的角度安装误差与计算得到的圆径结果的误差之间的关系。其次，提出了一种位移传感器角度安装误差校准方法，该方法可在标准圆圆径未知的情况下，根据不同位置下的3个位移传感器的测量值，精确计算出传感器的角度安装误差。详细说明了该校准方法的建模过程，通过仿真确认角度安装误差校准方法的有效性。最后，利用三坐标测量仪对角度安装误差进行校准。实验结果表明，校准后的圆径测量误差从20 μm提高到1.5 μm。
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| 关 键 词： | 角度安装误差 圆径测量 激光位移传感器 最小二乘法 |
| 收稿时间： | 2020-08-27 |
Research on angle setting error of diameter measurement based on laser displacement sensors |
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| Ma Jinyu,Chen Xin,Ding Guoqing,Chen Jigang.Research on angle setting error of diameter measurement based on laser displacement sensors[J].Infrared and Laser Engineering,2021,50(5):20200316-1-20200316-7. |
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| Affiliation: | 1.School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China2.Shanghai Precision Metrology and Test Research Institute, Shanghai 201109, China |
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| Abstract: | The diameter and roundness measurement of ring workpieces based on the laser displacement sensors is widely used in the measuring process of the product quality in the industrial site. The effect of angle setting errors of laser displacement sensors on the measurement of the workpiece’s diameter was studied, and the calibration method of them was proposed. Firstly, the relationship between angle setting errors of displacement sensors and calculated errors of the diameter was analyzed quantitatively. Secondly, a calibration method was proposed, which could calculate the angle setting errors of the sensors in accordance with the measurement data of three displacement sensors, and the diameter of the standard circle was unknown. The modeling process of the calibration method was illustrated and the effectiveness of the method through simulations was confirmed. Finally, the angle setting errors were calibrated by using coordinate measuring machine. The experiment result shows that the absolute errors of diameter are improved from 20 μm to 1.5 μm after calibration. |
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