| 基于 S-G 滤波与包络提取算法的半导体激光器自混合干涉微位移测量 |
| |
| 引用本文： | 李思嘉,刘晖,熊玲玲,马训鸣.基于 S-G 滤波与包络提取算法的半导体激光器自混合干涉微位移测量[J].机械与电子,2022,40(4):13-19. |
| |
| 作者姓名： | 李思嘉 刘晖 熊玲玲 马训鸣 |
| |
| 作者单位： | 1. 西安工程大学机电工程学院,陕西 西安 710048 ; 2. 西安市现代智能纺织装备重点实验室,陕西 西安 710048 |
| |
| 基金项目： | 陕西省自然科学基金项目(S2019-JC-QN-0533)； |
| |
| 摘 要： | 针对在半导体激光器自混合干涉( SMI )微位移测量中,测量噪声对 SMI 信号条纹计数极易引入误差,提出一种基于 Savitzky Golay ( S-G )滤波与包络提取的 SMI 信号处理算法,对自混合信号处理并识别条纹后,干涉条纹能够得到准确地计数。该算法采用 S-G 卷积均值滤波处理、三次样条函数插值包络分析和信号归一化处理,可以有效消除噪声高频信号和提取信号包络。采用电压调制模式下驱动压电陶瓷( PZT )产生微振动作为模拟振动源,实验中设置 3 组不同电压调制幅值下的振动源,采集并分析 SMI 信号及相应振幅信息。在 3 组实验当中,经过算法处理过的 SMI 信号,其干涉条纹数与电压调制 PZT 振动幅值由处理前偏离线性关系到处理后保持线性关系。实验结果表明,经 S-G 滤波与包络提取算法处理过的 SMI 信号能真实反映微米量级的微位移。
|
| 关 键 词： | 自混合干涉 S-G 滤波 包络分析 归一化 微位移测量 |
Micro-displacement Measurement of Semiconductor Laser Self-mixing Interference Based on S-G Filter and Envelope Extraction Algorithm |
| |
| LI Sijia,' target="_blank" rel="external"> ,LIU Hui,' target="_blank" rel="external"> ,XIONG Lingling,' target="_blank" rel="external"> ,MA Xunming,' target="_blank" rel="external"> .Micro-displacement Measurement of Semiconductor Laser Self-mixing Interference Based on S-G Filter and Envelope Extraction Algorithm[J].Machinery & Electronics,2022,40(4):13-19. |
| |
| Authors: | LI Sijia " target="_blank">' target="_blank" rel="external"> LIU Hui " target="_blank">' target="_blank" rel="external"> XIONG Lingling " target="_blank">' target="_blank" rel="external"> MA Xunming " target="_blank">' target="_blank" rel="external"> |
| |
| Affiliation: | (1.School of Mechanical and Electrical Engineering , Xi ’ an Polytechnic University , Xi ’ an 710048 , China ; 2.Xi ’ an Key Laboratory of Modern Intelligent Textile Equipment , Xi ’ an 710048 , China ) |
| |
| Abstract: | In the micro displacement measurement of semiconductor laser self-mixing interference( SMI ), the measurement noise can easily lead to errors in the fringe counting of SMI signal.A SMI signal processing algorithm based on Savitzky-Golay( S-G ) filtering and envelope extraction is proposed.After the self-mixing signal processing and fringe recognition , the interference fringe can be counted accurately. The algorithm adopts S-G convolution mean filtering processing , cubic spline interpolation envelope analysis and signal normalization processing , which can effectively eliminate high frequency noise signal and extract signal envelope.In the experiment , three groups of vibration sources with different voltage modulation amplitudes were set up to collect and analyze SMI signals and corresponding amplitude information.In the three experiments , the relationship between the number of interference fringes and the amplitude of voltage modulated PZT vibration changes from deviating linear before treatment to maintaining linear after treatment.The experimental results show that the SMI signal processed by S-G filtering and envelope extraction algorithm can truly reflect the micro displacement of micron scale. |
| |
| Keywords: | self-mixing interference S-G filter envelope analysis normalized microdisplacement measurement |
| 本文献已被 万方数据 等数据库收录！ |
| 点击此处可从《机械与电子》浏览原始摘要信息 |
|
点击此处可从《机械与电子》下载全文 |
|
