| 基于变速扫描技术的大尺寸台阶测量 |
| |
| 引用本文： | 雷李华,李源,蔡潇雨,魏佳斯,傅云霞,邵力.基于变速扫描技术的大尺寸台阶测量[J].红外与激光工程,2017,46(7):717003-0717003(8). |
| |
| 作者姓名： | 雷李华 李源 蔡潇雨 魏佳斯 傅云霞 邵力 |
| |
| 作者单位： | 1.上海市计量测试技术研究院,上海 201203 |
| |
| 基金项目： | 国家重大科学仪器开发专项（2014YQ090709） |
| |
| 摘 要： | 为了提高大尺寸台阶结构的单边测量精度、缩短测量时间，基于变速扫描技术，并利用傅里叶变换提取法及单边台阶评价算法进行扫描干涉信号的处理，提出并搭建了具有变速扫描功能的白光干涉测量系统。并且利用该系统对标称值为9.9760.028 m的台阶标准样板进行了测量，10次重复性测量结果为9.971 m，标准偏差量为0.007 m，测量时间仅为35 s，远小于常规扫描方法的222 s，大大缩短了测量时间，因此说明了该系统在大尺寸台阶结构测量中，具有较高的精确性与高效性。
|
| 关 键 词： | 白光干涉 变速扫描 台阶标准样板 |
| 收稿时间： | 2016-11-15 |
Measurement of large step structure with a speed-variable scanning technology |
| |
| Affiliation: | 1.Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China |
| |
| Abstract: | A white light interference system was developed with a speed-variable scanning technology to improve signal utilization precision and short measuring time for a large step structure measurement. A Fourier transform and unilateral step evaluation algorithm were performed for processing the scanning interference images. A calibrated standard step height of 9.9760.028 m was measured by the white light interference system using the speed-variable scanning method, the measuring time was 35 s, which was much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurement shows a result of 9.971 m with a standard deviation of 0.007 m, illustrates that the system has accuracy and high-efficiency in the measurement of large step structure. |
| |
| Keywords: | |
|
| 点击此处可从《红外与激光工程》浏览原始摘要信息 |
|
点击此处可从《红外与激光工程》下载全文 |
|
