| 高精度反射镜组件面形检测结构设计方法 |
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| 引用本文： | 王成彬,孙胜利,胡亭亮,胡凯.高精度反射镜组件面形检测结构设计方法[J].红外与激光工程,2016,45(1):117006-0117006(6). |
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| 作者姓名： | 王成彬 孙胜利 胡亭亮 胡凯 |
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| 作者单位： | 1.中国科学院上海技术物理研究所,上海 200083 |
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| 基金项目： | 中国科学院空间科学战略性先导专项(XDA04060500) |
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| 摘 要： | 在反射镜组件进行检测装配时,各零件加工过程中形成尺寸公差、形状位置公差会产生装配应力。装配应力通过反射镜体传到反射镜镜面使反射镜面形变差。针对该问题文中提出将柔性铰链应用于反射镜组件检测工装设计的方法。为验证该方法的可行性,针对某反射镜组件的特征参数和检测方法,应用柔性铰链设计理论及仿真分析软件设计了反射镜组件检测柔性工装。完成对反射镜组件重复性试验、拧紧力矩敏感性试验,试验结果表明柔性工装具有较好的稳定性。反射镜组件面形与反射镜单镜面形相比变化0.006 rms,满足工装设计要求。与刚性工装比,柔性铰链应用反射镜检测工装显著降低了装配应力对反射镜面形的影响。
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| 关 键 词： | 反射镜组件检测 柔性铰链 检测结构设计 装配应力 |
| 收稿时间： | 2015-05-09 |
Design method of high precision reflection mirror topography measurement structure |
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| Affiliation: | 1.Shanghai Institute of Technical Physics of the Chinese Academy of Sciences,Shanghai 200083,China |
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| Abstract: | When the reflection mirror component is assembled for topography measurement, the manufacturing tolerance of parts, including dimensional tolerance, contour tolerance could cause assembling stress, which induces to descend of surface figure accuracy. In order to resolve the problem, a method of applying flexure hinge in the design of reflection mirror component measurement tooling was proposed. To verify its reliability, using flexure hinge theory and finite element analysis software, considering the characteristic parameters and verifying method of the reflection mirror component, the reflection mirror topography measurement tooling was designed and manufactured. The reflection mirror component repetition topography measurement, the sensitivity tightening torque topography measurement test were taken respectively, which proved that the flexure tooling has well stability. Compared with the single reflection mirror, the surface figure of component changed 0.006 rms, which satisfied the requirement of tooling design. Using flexure hinge in reflection mirror component topography measurement is better in reducing assembling stress than rigidity tooling. |
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