| Al靶溅射功率对CrAlN涂层组织结构及摩擦性能的影响 |
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| 引用本文： | 张钦英,陈颢,任兴润,文彦.Al靶溅射功率对CrAlN涂层组织结构及摩擦性能的影响[J].有色金属科学与工程,2017,8(5):109-114. |
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| 作者姓名： | 张钦英 陈颢 任兴润 文彦 |
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| 作者单位： | 1.江西理工大学材料科学与工程学院, 江西 赣州 341000 |
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| 基金项目： | 国家自然科学基金资助项目51464013江西省科技厅重点研发计划项目20151BBE50002江西理工大学青年英才支持计划资助项目 |
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| 摘 要： | 为探寻Al靶功率对CrAlN涂层性能的直接影响, 利用直流反应磁控溅射的方法在304不锈钢基体上沉积CrAlN涂层, 并研究不同Al靶功率对CrAlN涂层组织结构与摩擦性能的影响.采用SEM、XRD、AFM、往复摩擦磨损试验机、显微硬度计、三维轮廓仪对试样的物相组成、表面形貌、摩擦磨损性能、硬度和磨痕形貌进行表征.结果表明:随着Al靶功率的增加, CrAlN涂层的晶粒尺寸呈现轻微的先增大后减小的规律, Al靶功率为180 W时的晶粒尺寸最小; 随着Al靶功率的增加, 显微硬度、平均沉积速率呈现先增大后减小的规律而磨痕深度、平均体积磨损率呈现出相反的变化趋势.经综合比较, Al靶功率为150 W时CrAlN涂层的综合性能较优.
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| 关 键 词： | 磁控溅射 CrAlN 摩擦磨损 表面形貌 |
| 收稿时间： | 2017-04-26 |
Effect of Al target sputtering power on themicrostructure and tribological properties of CrAlN coatings |
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| Affiliation: | 1.School of Material Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China2.Engineering Research Center of the Ministry of Education for Effective Development and Application Technology of Tungsten Resources, Ganzhou 341000, China |
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| Abstract: | In order to explore the direct effects of Al target power on theproperties of CrAlN coatings, the coatings were deposited on 304 stainless steel substrate by DC reactive magnetron sputtering method. The experiment studied the effects of different AI target power on the microstructure and friction properties of the coatings. The phase composition, surface morphology, friction and wear property, wear track morphology and hardness of the samples were characterized by SEM, XRD, AFM, reciprocating friction and wear testing machine, microhardness tester and 3 D surface profiler. The results show that the grain size of the coatings has a slight tendency of increasing and then decreasing with the increase of Al target power. It is at minimum when the target power is 180w. With the increase of Al target power, the microhardness and average deposition rate have a tendency of increasing first and then decreasing. However, wear depth and average volume wear rateare just the opposite. After comparison, the comprehensive performance of CrAlN coatings is the best when the Al target power is 150 W. |
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