| 射频CO2激光陶瓷基板划片机光路设计及分析 |
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| 引用本文： | 侯廉平,陈培峰,王圩,朱洪亮.射频CO2激光陶瓷基板划片机光路设计及分析[J].激光技术,2004,28(2):137-140. |
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| 作者姓名： | 侯廉平 陈培峰 王圩 朱洪亮 |
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| 作者单位： | 1.中国科学院, 半导体研究所, 国家光电子工艺中心, 北京, 100083; |
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| 摘 要： | 介绍了RFCO2激光陶瓷基板划片的特点。分析了导光系统的设计原则,讨论了圆偏振镜和伽利略离焦望远镜的作用和特点。对导光系统进行了优化和模拟,给出了导光系统的光路图及成像质量图。试验结果和理论相符。利用该陶瓷划片机加工的氧化铝陶瓷基片可与国外同类划片机相媲美。
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| 关 键 词： | 陶瓷基板 划片机 光路 设计 |
| 文章编号： | 1001-3806(2004)02-0137-04 |
| 收稿时间： | 2003/4/9 |
| 修稿时间： | 2003年4月9日 |
The design of beam delivery system of RF CO2 laser ceramic substrate scriber |
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| HOU Lian-ping ,CHEN Pei-feng ,WANG Wei ,ZHU Hong-liang.The design of beam delivery system of RF CO2 laser ceramic substrate scriber[J].Laser Technology,2004,28(2):137-140. |
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| Authors: | HOU Lian-ping CHEN Pei-feng WANG Wei ZHU Hong-liang |
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| Affiliation: | HOU Lian-ping 1,CHEN Pei-feng 2,WANG Wei 1,ZHU Hong-liang 1 |
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| Abstract: | The characteristic of RF CO 2 laser ceramic substrate scribing has been presented. The design principle of beam delivery system is analyzed. Function and characteristic of circular polarizer and Galileo defocusing telescopic system are particularly discussed. The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.The experimental outcome conforms to theory. Processing quality to alumina ceramic substrate by our scriber is up to that of the same kind of foreign products. |
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| Keywords: | ceramic substrate scriber beam delivery system design |
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