| 基于LabVIEW的准分子激光器控制系统 |
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| 引用本文： | 潘冰冰,梁勖,潘宁,林颖,徐健,方晓东.基于LabVIEW的准分子激光器控制系统[J].激光技术,2020,44(3):343-348. |
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| 作者姓名： | 潘冰冰 梁勖 潘宁 林颖 徐健 方晓东 |
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| 作者单位： | 1.中国科学院 合肥物质科学研究院 安徽光学精密机械研究所，合肥 230031 |
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| 基金项目： | 中国科学院青年创新促进会项目;安徽省重点研究与开发计划资助项目;脉冲功率激光技术国家重点实验室开放基金 |
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| 摘 要： | 为了实现基于准分子激光光源的应用系统集成和激光的功能扩展,设计了一种新型的准分子激光器控制系统,PC端基于LabVIEW软件实现人机交互,激光端基于微控制单元(MCU)主控模块控制硬件电路及检测传感器信号等,LabVIEW与MCU采用光隔离的RS232通讯,通过虚拟仪器实现计算机对准分子激光器的实时监测和控制。结果表明,该系统结合PC端的良好人机交互以及MCU端高效稳定实时控制等特点,有效地实现了放电激励准分子激光器强电磁干扰下的整体控制系统的设计。该研究对基于准分子激光光源的应用系统的集成和功能扩展有参考意义。
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| 关 键 词： | 激光技术 LABVIEW 信号处理 监测与控制 串口通讯 虚拟仪器 |
| 收稿时间： | 2019-05-10 |
Excimer laser control system based on LabVIEW |
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| PAN Bingbing,LIANG Xu,PAN Ning,LIN Ying,XU Jian,FANG Xiaodong.Excimer laser control system based on LabVIEW[J].Laser Technology,2020,44(3):343-348. |
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| Authors: | PAN Bingbing LIANG Xu PAN Ning LIN Ying XU Jian FANG Xiaodong |
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| Affiliation: | (Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China;University of Science and Technology of China, Hefei 230026, China;School of Electronic Science & Applied Physisc, Hefei University of Technology, Hefei 230009, China) |
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| Abstract: | In order to realize the application system integration and laser function expansion based on excimer laser source, a new type of excimer laser control system was designed in this paper. The personal computer (PC) terminal was based on LabVIEW software platform to realize human-computer interaction, and the laser terminal was based on microcontroller unit (MCU) main control module to control the hardware circuit and detect sensor signal. Optically isolated RS232 communication was adopted in LabVIEW and MCU. Real-time monitoring and control of excimer laser was achieved through virtual instruments on the computer. By theoretical analysis and experimental verification, it is proved that the system combines the good human-computer interaction with the PC terminal and the high-efficiency and stable real-time control of the MCU terminal. It effectively realizes the design of the overall control system under the strong electromagnetic interference of the discharge excitation excimer laser. The control system has great significance for the integration and functional expansion of excimer laser source based application system. |
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| Keywords: | laser technique LabVIEW signal processing monitoring and control serial communication virtual instrument |
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