| 光学薄膜常数的测试与分析 |
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| 引用本文： | 季一勤,刘华松,张艳敏.光学薄膜常数的测试与分析[J].红外与激光工程,2006,35(5):513-518. |
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| 作者姓名： | 季一勤 刘华松 张艳敏 |
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| 作者单位： | 天津津航技术物理研究所,天津,300192 |
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| 摘 要： | 光学薄膜常数—折射率、消光系数和膜层厚度是光学薄膜制备的基础，通过透射光谱法测试计算得到的薄膜常数具有较高的精度。Ta2O5是一种常用的氧化物薄膜，研究了两种透射光谱法计算光学薄膜常数的精度，利用Lambda900分光光度计获得了Ta2O5薄膜样品的透过率光谱数据，采用透射光谱包络线法对单层Ta2O5薄膜样品的光学常数进行计算，得到的折射率和消光系数较为准确，并且认为所得到的消光系数为广义消光系数，对精确地测试、计算提出了建议，为不同薄膜样品的制备奠定了技术基础。
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| 关 键 词： | 光学常数 测试分析 透射光谱 拟合 |
| 文章编号： | 1007-2276(2006)05-0513-06 |
| 收稿时间： | 2006-09-16 |
| 修稿时间： | 2006-09-16 |
Test and analysis of optical film constants |
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| JI Yi-qin,LIU Hua-song,ZHANG Yan-min.Test and analysis of optical film constants[J].Infrared and Laser Engineering,2006,35(5):513-518. |
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| Authors: | JI Yi-qin LIU Hua-song ZHANG Yan-min |
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| Affiliation: | Tianjin Jinhang Institute of Technology Physics, Tianjin 300192, China |
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| Abstract: | The optical constants of the thin film are the basic of optical manufacture.The optical constants are computed by using transmission spectrum with high precision. Ta2O5 is common oxide film materials.The thesis focused on the precision of the optical constants which was computed by two means of Ta2O5 film transmission spectrum obtained by Lambda900 spectrophotometer. Transmission spectrum envelope method was adopted to calculate the optical constants for single Ta2O5 thin film.And refractive index and extinction coefficient were exact, extinction coefficient was taken as wide extinction coefficient. In this paper the research of optical constants of thin films was the technique base of the manufacture for different thin films sample. |
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| Keywords: | Optical constant Test and analysis Transmission spectrum Fitting |
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