| 应用于环形激光束的低阶哈特曼波前传感器设计 |
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| 引用本文： | 冯亚飞,韦承甫,刘现魁,任晓明,王振华,孟昭荣.应用于环形激光束的低阶哈特曼波前传感器设计[J].红外与激光工程,2021,50(7):20210016-1-20210016-6. |
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| 作者姓名： | 冯亚飞 韦承甫 刘现魁 任晓明 王振华 孟昭荣 |
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| 作者单位： | 中国船舶重工集团公司第七一八研究所，河北 邯郸 056027 |
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| 基金项目： | 国家高技术发展计划（51326010201） |
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| 摘 要： | 针对高能化学激光器出光过程中存在着大比例、大PV值低阶像差这一现象，设计了专用于前5项Zernike像差检测的低阶哈特曼波前传感器。该传感器的透镜部分采用呈环形分布的6单元微透镜阵列与凸透镜组合的方法，且均用CaF2材料制作。该方法不仅可以同时用于可见光和红外光的低阶像差测量，还具有成本低、光路结构简单、探测范围大等优点，适用于环形激光束的大PV值低阶像差检测。之后还搭建了测试光路系统，测试结果表明，该低阶哈特曼波前传感器的波面测量PV值量程为±8λ （λ=3.39 μm），测量精度优于λ/10 （λ=3.39 μm）。
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| 关 键 词： | 哈特曼波前传感器 低阶像差 高能激光 波前畸变 |
| 收稿时间： | 2020-12-03 |
Design of low-order Hartmann-Shack wavefront sensor for annular laser beam |
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| Affiliation: | The 718 Research Institute, China State Shipbuilding Corporation Limited, Handan 056027, China |
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| Abstract: | Based on the fact that there were a large percentage of low-order aberrations which had large PV values in high-energy laser beam, a Hartmann-Shack wavefront sensor for measuring first five-order Zernike aberrations was presented and designed. The lens part of the sensor adopted a method with combination of a 6-units micro-lens array and a convex lens, and the micro-lens array was distributed in annular. Since the lens material of this sensor was GaF2, the designed sensor could be applied to the low-order aberrations measurement of visible and infrared laser beam. This method had the advantages of low cost, simple structure and large detection range, which was suitable for the measurement of large PV-value low-order aberrations of the annular laser beam. Afterwards, a measurement system for the low-order Hartmann-Shack wavefront sensor had been set up, and the results show that the measuring range was ±8λ (λ=3.39 μm) and the accuracy was less than λ/10 (λ=3.39 μm). |
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