| 微圆弧金刚石刀具车削锗单晶衍射元件 |
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| 引用本文： | 李军琪,张云龙,苏军,汪志斌,郭小岗,宗文俊,张磊.微圆弧金刚石刀具车削锗单晶衍射元件[J].红外与激光工程,2013,42(11):3053-3058. |
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| 作者姓名： | 李军琪 张云龙 苏军 汪志斌 郭小岗 宗文俊 张磊 |
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| 作者单位： | 1.西安应用光学研究所,陕西 西安 710065; |
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| 基金项目： | 国防基础科研计划（A0920110019） |
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| 摘 要： | 锗单晶衍射光学元件具有特有的色散和温度特性，在红外光学领域，具有广阔的应用前景。衍射元件必须同时满足光学镜面及相位转变点的要求，采用微圆弧金刚石单点车削是解决这一途径的主要方法之一，但采用微圆弧刀具加工时，要求同时满足粗糙度和相位突变点是加工衍射元件的难点，因此，研究微圆弧金刚石刀具车削锗单晶衍射元件具有重大意义。基于DEFORM 3D切削仿真软件，对金刚石刀具车削锗单晶材料进行了仿真分析，分析了切削参数、刀具参数对锗单晶材料粗糙度的影响，并依据仿真试验结果优选切削参数以及刀具参数进行试验，R0.1mm微圆弧刀具车削单晶材料粗糙度达到4 nm。
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| 关 键 词： | 单点金刚石车削 切削仿真 衍射光学元件 表面粗糙度 |
| 收稿时间： | 2013-03-10 |
Turning of DOE Ge single crystal with micro-circle diamond tool |
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| Affiliation: | 1.Xi'an Institute of Applied Optics,Xi'an 710065,China;2.Center for Precision Engineering,Harbin Institute of Technology,Harbin 150006,China |
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| Abstract: | Single crystal germanium material diffractive optical element (DOE), which possesses unique negative chromatic dispersion and thermal expansion coefficient, has been widely used in the IR optical field. DOE requires optical surface and transition of phase profile well. Micro-circle single point diamond turning is one of the ways to solve it. Actually it's difficult to have the proper cutting tool parameters to fit the surface roughness and the transition of phase profile. So there is great sense to study the micro-circle single point diamond turning of DOE. This paper studied the roughness of single crystal Germanium materials affections on the turning parameters and the tool parameters by using the DEFORM 3D software. Then the test was done according to the optimization results of the simulation. The results show that the surface roughness is 4 nm when the micro-circle radius of single point diamond turning is 0.1 mm. |
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