| 半导体激光器光束匀化系统的光学设计 |
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| 引用本文： | 孙玉博,熊玲玲,张普,王明培,刘兴胜.半导体激光器光束匀化系统的光学设计[J].红外与激光工程,2019,48(12):1205003-1205003(6). |
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| 作者姓名： | 孙玉博 熊玲玲 张普 王明培 刘兴胜 |
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| 作者单位： | 1.中国科学院西安光学精密机械研究所 瞬态光学与光子技术国家重点实验室,陕西 西安 710119; |
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| 基金项目： | 国家自然科学基金（61334010） |
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| 摘 要： | 为了提高半导体激光器光束的均匀性，设计了非球面与微柱透镜阵列相结合的匀光系统。快轴方向利用光线追迹设计非球面匀化透镜；慢轴方向采用微柱透镜阵列对光束进行分割叠加。半导体激光器输出光束通过该匀光系统，在目标面上可以得到能量匀化的方形光斑。利用Zemax光学软件对半导体激光器单管和阵列进行匀化仿真，验证了该匀化系统应用于半导体激光器整形的可行性，得到了目标面动态范围变化对均匀度的影响程度，研究了微柱透镜阵列间距变化及快轴匀化透镜旋转对光斑均匀度的影响。单管和阵列在输出面上的光斑均匀度均大于90%，能量传输效率分别为95.4%和96.2%。该设计结果对半导体激光器光束匀化具有一定的参考价值。
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| 关 键 词： | 光束匀化 半导体激光器 微透镜阵列 光学设计 激光光学 |
| 收稿时间： | 2019-08-05 |
Optical design of laser diode beam-homogenizing system |
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| Affiliation: | 1.Tianjin Port Engineering Institute Co.,Ltd. of CCCC First Harbor Engineering Co.,Ltd.,Key Laboratory of Port Geotechnical Engineering,Ministry of Communication,Key Laboratory of Port Geotechnical Engineering of Tianjin,Tianjin 300222,China;2.University of Chinese Academy of Sciences,Beijing 100049,China;3.Focuslight Technologies Inc,Xi'an 710119,China |
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| Abstract: | In order to improve the uniformity of the laser diode beam, a homogenization system combined aspheric and microlens lens array was designed. The aspheric homogenization lens was designed by using ray tracing in the direction of the fast axis, and the microlens array was used to segment and overlay the beam in the slow axis direction. Laser diode output beam passed through the honogenizing system, the energy homogenization of the square spot can be obtained on the target surface. By using Zemax optical software to simulate the single tube and array, the feasibility of the optical system was verified. The influence of target dynamic range change on uniformity was obtained, and the influence of the change of the distance between micro-cylindrical lens arrays and the rotation of fast-axis homogenizing lens on the uniformity was studied. The homogeneity of single tube and laser array on the output surface was over 90%, and the energy efficiency was 95.4% and 96.2%, respectively. The design results have certain reference value for the beam homogenization of laser diode. |
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