| 室温微测辐射热计太赫兹探测阵列技术研究进展(特邀) |
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| 引用本文： | 王军,蒋亚东.室温微测辐射热计太赫兹探测阵列技术研究进展(特邀)[J].红外与激光工程,2019,48(1):102001-0102001(10). |
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| 作者姓名： | 王军 蒋亚东 |
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| 作者单位： | 1.电子科技大学 光电科学与工程学院 电子薄膜与集成器件国家重点实验室,四川 成都 610054 |
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| 基金项目： | 国家自然科学基金研究创新群体（61421002）;国防预研项目（41414020903） |
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| 摘 要： | 在室温太赫兹探测技术领域中，热敏微桥结构的太赫兹探测器具有探测波段宽、阵列规模大、集成度高、实时成像等显著特点。文中对室温太赫兹探测技术、基于热敏材料的太赫兹探测技术国内外发展现状进行了综述，分析了基于氧化钒薄膜微桥结构的非制冷长波红外焦平面探测技术，存在着太赫兹波低吸收探测性能弱的不足，针对太赫兹波探测进行优化设计，同时介绍了电子科技大学在太赫兹探测阵列吸收结构方面的部分研究工作。
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| 关 键 词： | 非制冷红外焦平面探测器 微桥结构 太赫兹探测器 金属吸收薄膜 |
| 收稿时间： | 2018-08-18 |
Research development about room temperature terahertz detector array technology with microbolometer structure (invited) |
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| Affiliation: | 1.Sata Key Laboratory of Electric Thin Films and Integrated Devices,School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054,China |
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| Abstract: | Terahertz (THz) detector with thermal sensitive microbolometer structure indicates many prominent features, such as wide band detecting region, large array pixels, high integrated device, real-time imaging, comparing with some other room-temperature THz technologies. Microbolometer structure using VOx thin film as sensitive material has been successfully fabricated uncooled infrared focal plane array detector, but unsuitable for THz detection for very low THz wave absorption ratio. So some special design should be presented in the microbolometer structure to achieve high performance THz detector. Room-temperature THz technologies and development of microbolometer type THz detector array were introduced in this article briefly, and also the research about THz absorption material or structure in University of Electronic Science and Technology of China was presented in the paper. |
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