| 脉冲激光沉积低内应力多层类金刚石膜 |
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| 引用本文： | 陆益敏,郭延龙,黄国俊,黎伟,万强,唐璜.脉冲激光沉积低内应力多层类金刚石膜[J].红外与激光工程,2017,46(9):921001-0921001(6). |
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| 作者姓名： | 陆益敏 郭延龙 黄国俊 黎伟 万强 唐璜 |
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| 作者单位： | 1.武汉军械士官学校 光电技术研究所,湖北 武汉 430075 |
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| 基金项目： | 国家部委预先研究项目（51318060212） |
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| 摘 要： | 为解决类金刚石膜内应力极大的问题，利用很薄的岛状结构锗层与较厚的类金刚石层循环，设计并制备了具有低内应力的多层类金刚石膜。其中，类金刚石层为主要功能膜层，起到硬质保护和光学增透的作用；而锗层作为缓冲层，起到缓解纯类金刚石膜内应力过大的问题，同时由于锗层很薄，对整个膜层的机械性能和红外特性的影响很小。测试表明，制备的多层类金刚石膜内应力为2.14 GPa，比纯类金刚石膜降低了39%，通过了GJB2485-95《光学膜层通用规范》中的重摩擦测试；同时，其纳米硬度仍保持在47 GPa的高水平。该多层类金刚石膜可以作为实际应用的红外窗口保护膜。
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| 关 键 词： | 脉冲激光沉积 多层类金刚石膜 锗缓冲层 低内应力 |
| 收稿时间： | 2017-01-10 |
Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition |
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| Affiliation: | 1.Opto-Electronics Institute,Wuhan Mechanical College,Wuhan 430075,China |
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| Abstract: | Multilayers diamond-like carbon film, which was composed of several thick diamond-like carbon layers and thin germanium island layers, was prepared on the germanium substrate in order to resolve the high inner-stress in the diamond-like carbon film. The diamond-like carbon layers had the main function of protection, and the germanium island layers had the buffer function to reduce the inner-stress in the diamond-like carbon film. Meanwhile, the thicknesses of the germanium layers were very thin, so they had no influence on the mechanical and infrared performances of the whole film nearly. Inner-stress in the multilayers diamond-like carbon film was 2.14 GPa, 39% lower than that of the pure diamond-like carbon film, and the multilayers diamond-like carbon film could pass the friction test stipulated in the GJB2485-95'general specification for optical coatings. The hardness of the multilayers diamond-like carbon kept high hardness of 47 GPa, and had the same surface roughness to the pure diamond-like carbon film. Therefore, the multilayers diamond-like carbon film could be used as practical protective film for infrared window. |
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