| 采用干法刻蚀进行微通道板扩口理论模型研究 |
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| 引用本文： | 邱祥彪,闵信杰,金戈,孙建宁,王健,丛晓庆,张正君,徐昭,潘凯,任玲,张振,乔芳建,聂慧君,黄国瑞,陈晓倩,胡泽训,林焱剑,刘丹,杨晓明.采用干法刻蚀进行微通道板扩口理论模型研究[J].红外技术,2022,44(8):818-823. |
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| 作者姓名： | 邱祥彪 闵信杰 金戈 孙建宁 王健 丛晓庆 张正君 徐昭 潘凯 任玲 张振 乔芳建 聂慧君 黄国瑞 陈晓倩 胡泽训 林焱剑 刘丹 杨晓明 |
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| 作者单位： | 北方夜视科技(南京)研究院有限公司, 江苏 南京 211106 |
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| 摘 要： | 开口面积比是微通道板（MCP）重要的性能指标，在MCP输入面进行扩口，对于MCP的探测效率、噪声因子等参数有显著的提升作用，在微光夜视仪、粒子探测器等军用、民用领域具有巨大的应用潜力。采用湿法腐蚀进行微通道板扩口，面临工艺一致性差、选择性腐蚀造成锥度尺寸难以达标等难题，实质性批量应用非常困难。针对扩口MCP难以制作和应用的问题，提出一种采用干法刻蚀进行MCP扩口的方法，阐述了干法刻蚀进行MCP扩口原理及可行性。通过建立理论模型研究干法刻蚀工艺参数如刻蚀角度、刻蚀时间等对于MCP开口面积比、通道内刻蚀深度、通道内壁刻蚀锥度等性能参数的影响，计算出合适的工艺参数范围，为开展实验研究奠定了基础。
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| 关 键 词： | 扩口微通道板 干法刻蚀 开口面积比 理论模型 |
| 收稿时间： | 2022-06-02 |
Theoretical Model of Funnel Microchannel Plate Fabricated through Dry Etching |
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| Affiliation: | North Night Vision Science & Technology (Nanjing) Research Institute Co. Ltd., Nanjing 211106, China |
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| Abstract: | The open area ratio is an important performance index for microchannel plates(MCPs). The detection efficiency and noise factor of MCPs can be significantly improved by expanding the entrance of the pores, which has potential application in the military and civil fields, such as low-light-level night-vision devices and particle detectors. MCPs with funneled pores prepared through wet etching are difficult to apply on a mass scale because of problems such as poor consistency of the process and difficulty in conforming funnel size caused by selective corrosion. A dry-etching method for MCP flaring was proposed for the first time. The principle and feasibility of dry etching for MCP flaring are described in this paper. A theoretical model was established to investigate the effects of dry etching process parameters, such as etching angle and etching time, on the MCP opening area ratio, etching depth in the channel, etching taper on the channel wall, and other performance parameters. The appropriate range of the process parameters was calculated theoretically, which provides a foundation for experimental research. |
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