| 四氟化硅生产工艺研究进展 |
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| 引用本文： | 王喜恒,孙文哲,张玲.四氟化硅生产工艺研究进展[J].无机盐工业,2020,52(1):35-38. |
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| 作者姓名： | 王喜恒 孙文哲 张玲 |
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| 作者单位： | 上海海事大学商船学院,上海 201306 |
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| 基金项目： | 上海市科委项目(16040501600);川屹节能科技（上海）有限公司技术改造资助项目 |
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| 摘 要： | 四氟化硅作为生产多晶硅及其衍生物的原料,随着电子工业的发展以及硅基产业的扩大,对于四氟化硅的需求量逐渐增加。对四氟化硅生产工艺的研究越来越引起人们的重视。详细介绍了制备四氟化硅的4种方法,含硅源物质与含氟基团物质合成法、氟硅酸盐热解法、氟硅酸法、硫酸法,综述了国内外制备四氟化硅的研究进展情况,并评述了各工艺的特点。就目前研究表明,四氟化硅制备工艺需向环保、节能、高收率方向发展。
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| 关 键 词： | 四氟化硅 氟硅酸 氟硅酸盐 制备工艺 |
| 收稿时间： | 2019-07-26 |
Research progress in production process of silicon tetrafluoride |
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| Wang Xiheng,Sun Wenzhe,Zhang Ling.Research progress in production process of silicon tetrafluoride[J].Inorganic Chemicals Industry,2020,52(1):35-38. |
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| Authors: | Wang Xiheng Sun Wenzhe Zhang Ling |
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| Affiliation: | Merchant Marine College,Shanghai Maritime University,Shanghai 201306,China |
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| Abstract: | SiF4 is used as a raw material for the production of polycrystalline silicon and its derivatives.With the development of information technology and the advancement of silicon-based industry,the demand for SiF4 is increasing. Meanwhile,the research on production process of SiF4 has attract more and more attention.Four methods for preparing SiF4,such as synthetic method of substance containing Si and substance containing F group,hexafluorosilicate pyrogenetic method,hexafluorosilicic acid method and sulfuric acid method,were introduced in details. The research progress in production process of silicon tetrafluoride at home and abroad was summarized.The characteristics of the preparation processes were discussed.The present research showed that the SiF4 preparation process should develop in the direction of environmental protection,energy saving and high yield. |
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| Keywords: | silicon tetrafluoride fluorosilicic acid hexafluorosilicate preparation process |
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