| 基于压力反馈的玻璃基板形变预测研究 |
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| 引用本文： | 钟伟,顾小玉,王佳,刘芳华.基于压力反馈的玻璃基板形变预测研究[J].液压与气动,2019,0(6):42-46. |
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| 作者姓名： | 钟伟 顾小玉 王佳 刘芳华 |
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| 作者单位： | 1. 江苏科技大学机械工程学院， 江苏镇江212003；
2. 江苏科技大学江苏省船海机械先进制造及工艺重点实验室， 江苏镇江212003 |
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| 基金项目： | 国家自然科学基金（51675247） |
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| 摘 要： | 在输运过程中大型玻璃基板如发生较大变形,将会降低薄膜晶体管(TFT)阵列缺陷的检测精度。使用激光位移传感器进行大范围形变检测时效率较低,据此提出一种基于气膜压力反馈的玻璃基板形变间接检测方法。建立了包含多孔质流量特性和间隙流特性的气膜压力模型,在假设玻璃基板形变为二次曲线的前提下,基于模型分别利用单点压力和多点压力反馈的方法进行形变预测。搭建了玻璃基板形变测量装置,对形变计算结果与测量结果进行了对比分析。结果表明,多点压力反馈的方法能够更准确地预测玻璃基板的形变。
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| 关 键 词： | 气膜 压力分布 玻璃基板 形变 |
| 收稿时间： | 2018-08-31 |
Deformation Prediction of Glass Substrate Based on Pressure Feedback |
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| ZHONG Wei,GU Xiao-yu,WANG Jia,LIU Fang-hua.Deformation Prediction of Glass Substrate Based on Pressure Feedback[J].Chinese Hydraulics & Pneumatics,2019,0(6):42-46. |
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| Authors: | ZHONG Wei GU Xiao-yu WANG Jia LIU Fang-hua |
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| Affiliation: | 1. School of Mechanical Engineering, Jiangsu University of Science and Technology, Jiangsu, Zhenjiang212003;
2. Jiangsu Provincial Key Laboratory of Advanced Manufacture and Process for Marine Mechanical Equipment,
Jiangsu University of Science and Technology, Jiangsu, Zhenjiang212003 |
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| Abstract: | When the glass sheet exhibits a considerable deformation during transportation, quality defects of the thin-film transistor (TFT) cannot be easily inspected. The use of laser sensors for large-scale deformation detection have some problems such as poor efficiency and low real-time performance. This paper propose an indirect measuring method for glass deformation based on film pressure feedback. A pressure model including the characteristics of porous media and gap flow was established. In the premise that the glass deformation appears a quadratic curve, two methods with one pressure measuring point and multiple pressure measuring points used as feedback are applied for estimation of the deformation. Moreover, experimental apparatus for measuring glass deformation is established, and the theoretical results are compared with the measured results. The results indicate that the method with multiple pressure measuring points can better predict the glass deformation. |
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| Keywords: | air film pressure distribution glass substrate deformation |
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