Short note on parallel illumination in the TEM

Parallel illumination conditions are required for several experiments in the transmission electron microscope (TEM). The image rotation induced by the helical trajectory of electrons passing through the magnetic field of the TEM lenses inevitably induces an inclination of the beam relative to the optical axis in the object plane--even for an electron which travels parallel to the optical axis in the far field. This angle (shear angle) is vectorially added to the convergence angle; it depends both on the distance to the optical axis and the magnetic field. By using a beam tilt compensation method, the minimum shear angle is found to be of the order of 1 mrad for a field of view of 2 microm in a 200 kV TEM. In practice, "parallel illumination" can only be obtained for fields of view 1 microm.     

Imaging of soft and hard materials using a Boersch phase plate in a transmission electron microscope

Using two levels of electron beam lithography, vapor phase deposition techniques, and FIB etching, we have fabricated an electrostatic Boersch phase plate for contrast enhancement of weak phase objects in a transmission electron microscope. The phase plate has suitable dimensions for the imaging of small biological samples without compromising the high-resolution capabilities of the microscope. A micro-structured electrode allows for phase tuning of the unscattered electron beam, which enables the recording of contrast enhanced in-focus images and in-line holograms. We have demonstrated experimentally that our phase plate improves the contrast of carbon nanotubes while maintaining high-resolution imaging performance, which is demonstrated for the case of an AlGaAs heterostructure. The development opens a new way to study interfaces between soft and hard materials.     

Variable multimodal light microscopy with interference contrast and phase contrast; dark or bright field

Using the optical methods described, specimens can be observed with modified multimodal light microscopes based on interference contrast combined with phase contrast, dark‐ or bright‐field illumination. Thus, the particular visual information associated with interference and phase contrast, dark‐ and bright‐field illumination is joined in real‐time composite images appearing in enhanced clarity and purified from typical artefacts, which are apparent in standard phase contrast and dark‐field illumination. In particular, haloing and shade‐off are absent or significantly reduced as well as marginal blooming and scattering. The background brightness and thus the range of contrast can be continuously modulated and variable transitions can be achieved between interference contrast and complementary illumination techniques. The methods reported should be of general interest for all disciplines using phase and interference contrast microscopy, especially in biology and medicine, and also in material sciences when implemented in vertical illuminators.     

Resolution enhancing using cantilevered tip-on-aperture silicon probe in scanning near-field optical microscopy

Scanning near-field optical microscopy (SNOM) achieves a resolution beyond the diffraction limit of conventional optical microscopy systems by utilizing subwavelength aperture probe scanning. A problem associated with SNOM is that the light throughput decreases markedly as the aperture diameter decreases. Apertureless scanning near-field optical microscopes obtain a much better resolution by concentrating the light field near the tip apex. However, a far-field illumination by a focused laser beam generates a large background scattering signal. Both disadvantages are overcome using the tip-on-aperture (TOA) approach, as presented in previous works. In this study, a finite difference time domain analysis of the degree of electromagnetic field enhancement is performed to verify the efficiency of TOA probes. For plasmon enhancement, silver is deposited on commercially available cantilevered SNOM tips with 20nm thicknesses. To form the aperture and TOA in the probes, electron beam-induced deposition and focused ion beam machining were applied at the end of the sharpened tip. The results show that cantilevered TOA probes were highly efficient for improvements of the resolution of optical and topological measurement of nanostructures.     

Design of a microfabricated, two-electrode phase-contrast element suitable for electron microscopy

A miniature electrostatic element has been designed to selectively apply a 90 degrees phase shift to the unscattered beam in the back focal plane of the objective lens, in order to realize Zernike-type, in-focus phase contrast in an electron microscope. The design involves a cylindrically shaped, biased-voltage electrode, which is surrounded by a concentric grounded electrode. Electrostatic calculations have been used to determine that the fringing fields in the region of the scattered electron beams will cause a negligible phase shift as long as the ratio of electrode length to the transverse feature size is greater than 5:1. Unlike the planar, three-electrode einzel lens originally proposed by Boersch for the same purpose, this new design does not require insulating layers to separate the biased and grounded electrodes, and it can thus be produced by a very simple microfabrication process. Scanning electron microscope images confirm that mechanically robust devices with feature sizes of approximately 1 microm can be easily fabricated. Preliminary experimental images demonstrate that these devices do apply a 90 degrees phase shift between the scattered and unscattered electrons, as expected.     

Improved Zernike‐type phase contrast for transmission electron microscopy

Zernike phase contrast has been recognized as a means of recording high‐resolution images with high contrast using a transmission electron microscope. This imaging mode can be used to image typical phase objects such as unstained biological molecules or cryosections of biological tissue. According to the original proposal discussed in Danev and Nagayama (2001) and references therein, the Zernike phase plate applies a phase shift of π/2 to all scattered electron beams outside a given scattering angle and an image is recorded at Gaussian focus or slight underfocus (below Scherzer defocus). Alternatively, a phase shift of ‐π/2 is applied to the central beam using the Boersch phase plate. The resulting image will have an almost perfect contrast transfer function (close to 1) from a given lowest spatial frequency up to a maximum resolution determined by the wave length, the amount of defocus and the spherical aberration of the microscope. In this paper, I present theory and simulations showing that this maximum spatial frequency can be increased considerably without loss of contrast by using a Zernike or Boersch phase plate that leads to a phase shift between scattered and unscattered electrons of only π /4, and recording images at Scherzer defocus. The maximum resolution can be improved even more by imaging at extended Scherzer defocus, though at the cost of contrast loss at lower spatial frequencies.     

Optimizing phase contrast in transmission electron microscopy with an electrostatic (Boersch) phase plate

Imaging of weak amplitude and phase objects, such as unstained vitrified biological samples, by conventional transmission electron microscopy (TEM) suffers from poor object contrast since the amplitude and phase of the scattered electron wave change only very little. In phase contrast light microscopy the imaging of weak phase objects is greatly enhanced by the use of a quarter-wave phase plate, which produces high signal contrast by shifting the phase of the scattered light. An analogous quarter-wave plate for the electron microscope, designed as an electrostatic einzel lens, was proposed by Boersch in 1947 but the small dimensions of the device have impeded its realization up to now. We here present the first fabrication and application of a miniaturized electrostatic einzel lens driven as TEM quarter-wave phase plate. Phase modulation is generated by the electrostatic field confined to the inside of a microstructured ring electrode. This field affects the phase velocity of the unscattered part of the electron wave. By varying its strength the phase shift of the primary beam can be adjusted to pi/2, producing strong phase contrast independent of spatial frequency. The phase plate proves to be mechanically stable and does not impair image quality, in particular it does not reduce the high-resolution signal. The expected residual lens effect of the einzel lens is minimal. Our microlens is supported by conducting rods arranged in a threefold symmetry. This particular geometry provides optimized single-sideband signal transfer for spatial frequencies otherwise obstructed by the supporting rods.     

A method of using the incident beam tilt as a eucentric goniometer in transmission electron microscopy

The principal difficulties in constructing and operating a eucentric specimen tilting goniometer in a transmission electron microscope are discussed, together with the goniometric function of the incident beam tilt. The latter function is found easy to operate in a eucentric manner. The imaging beam then will have a non-axial path, which will increase particularly the field chromatic aberration. Earlier, however, a technique for the compensation of the chromatic aberration during displaced aperture dark field image formation has been developed. In combination with this technique, it proved possible to use the ordinary incident beam tilt as a eucentric goniometer. Image sequences were obtained, with accurately varied diffraction conditions. The tilt angles and the direction of the tilt axis can be very accurately determined from the displacements of the diffraction pattern.     

Effect of a physical phase plate on contrast transfer in an aberration-corrected transmission electron microscope

In this theoretical study we analyze contrast transfer of weak-phase objects in a transmission electron microscope, which is equipped with an aberration corrector (C(s)-corrector) in the imaging lens system and a physical phase plate in the back focal plane of the objective lens. For a phase shift of pi/2 between scattered and unscattered electrons induced by a physical phase plate, the sine-type phase contrast transfer function is converted into a cosine-type function. Optimal imaging conditions could theoretically be achieved if the phase shifts caused by the objective lens defocus and lens aberrations would be equal to zero. In reality this situation is difficult to realize because of residual aberrations and varying, non-zero local defocus values, which in general result from an uneven sample surface topography. We explore the conditions--i.e. range of C(s)-values and defocus--for most favourable contrast transfer as a function of the information limit, which is only limited by the effect of partial coherence of the electron wave in C(s)-corrected transmission electron microscopes. Under high-resolution operation conditions we find that a physical phase plate improves strongly low- and medium-resolution object contrast, while improving tolerance to defocus and C(s)-variations, compared to a microscope without a phase plate.     

Influence of the elliptical illumination on acquisition and correction of coherent aberrations in high-resolution electron holography

In high-resolution off-axis electron holography, the interpretable lateral resolution is extended up to the information limit of the electron microscope by means of a correcting phase plate in Fourier space. A plane illuminating electron wave is generally assumed. However, in order to improve spatial coherence, which is essential for holography, the object under investigation is illuminated with an elliptically shaped electron source. This special illumination imposes a variation of beam directions over the field of view. Therefore, due to the interaction of beam tilt and coherent wave aberration, the effective aberrations vary over the field of view yielding a loss of isoplanicity. Consequently, in the past the aberrations were only corrected successfully for a small part of the field of view. However, a thorough analysis of the holographic imaging process shows that the imaging artifacts introduced by the elliptical illumination can be corrected under reconstruction by means of a phase curvature, which models the illuminating wave front. Applied in real space, this phase curvature is seamlessly incorporated into the correction process for coherent wave aberration resulting in an improvement of interpretable lateral resolution up to the information limit for the whole field of view.     

The importance of beam alignment and crystal tilt in high resolution electron microscopy

The relative influences of crystal tilt and beam alignment on high-resolution electron-microscopic imaging have been investigated. With the use of contrast transfer theory in generalised dimensionless form, the major effect of slight beam misalignment has been shown to be the introduction of an antisymmetric phase shift in the diffracted beams so that the presence of any such misalignment cannot be detected by the standard diagnostic tool of high-resolution electron microscopy, namely the optical diffractogram. Specific image simulations, at 100 and 500 keV, for materials of both small and large unit cells (SnO₂ and Ti₂Nb₁₀O₂₉ respectively) show, however, that even slight beam tilt can have a marked effect on the images of crystalline materials, causing considerable spurious detail and a loss of expected symmetry. The various options for ensuring accurate beam and crystal alignment are briefly reviewed, and some aspects of the alignment problems are demonstrated using some recent experimental images recorded at 500 kV.     

Axial Phase-Darkfield-Contrast (APDC), a new technique for variable optical contrasting in light microscopy

Axial phase-darkfield-contrast (APDC) has been developed as an illumination technique in light microscopy which promises significant improvements and a higher variability in imaging of several transparent 'problem specimens'. With this method, a phase contrast image is optically superimposed on an axial darkfield image so that a partial image based on the principal zeroth order maximum (phase contrast) interferes with an image, which is based on the secondary maxima (axial darkfield). The background brightness and character of the resulting image can be continuously modulated from a phase contrast-dominated to a darkfield-dominated character. In order to achieve this illumination mode, normal objectives for phase contrast have to be fitted with an additional central light stopper needed for axial (central) darkfield illumination. In corresponding condenser light masks, a small perforation has to be added in the centre of the phase contrast providing light annulus. These light modulating elements are properly aligned when the central perforation is congruent with the objective's light stop and the light annulus is conjugate with the phase ring. The breadth of the condenser light annulus and thus the intensity of the phase contrast partial image can be regulated with the aperture diaphragm. Additional contrast effects can be achieved when both illuminating light components are filtered at different colours. In this technique, the axial resolution (depth of field) is significantly enhanced and the specimen's three-dimensional appearance is accentuated with improved clarity as well as fine details at the given resolution limit. Typical artefacts associated with phase contrast and darkfield illumination are reduced in our methods.     

Phase contrast without phase plates and phase rings—optical solutions for improved imaging of phase structures

Using the optical methods described, phase specimens can be observed with a modified light microscope in enhanced clarity, purified from typical artifacts which are apparent in standard phase contrast illumination. In particular, haloing and shade‐off are absent, lateral and vertical resolution are maximized and the image quality remains constant even in problematic preparations which cannot be well examined in normal phase contrast, such as specimens beyond a critical thickness or covered by obliquely situated cover slips. The background brightness and thus the range of contrast can be continuously modulated and specimens can be illuminated in concentric‐peripheral, axial or paraxial light. Additional contrast effects can be achieved by spectral color separation. Normal glass or mirror lenses can be used; they do not need to be fitted with a phase plate or a phase ring. The methods described should be of general interest for all disciplines using phase microscopy. Microsc. Res. Tech., 76:1050–1056, 2013. © 2013 Wiley Periodicals, Inc.     

Optical shadowing in the electron microscope

Optical shadowing offers a valuable technique for the study of many transmission electron microscope specimens. Simply blocking half of the illumination with the objective aperture produces an image with a striking shadowed effect which gives a distinctly three-dimensional appearance to the specimen's surface topography. Theoretical analysis shows that this is due primarily to a discrimination between electrons refracted in opposite directions, and that the characteristic features of the effect are successfully explained by a refraction model. The capability of visualizing surface topography is applicable up to the full resolving power of the instrument and accordingly opens many new avenues of investigation.     

A method for producing hollow cone illumination electronically in the conventional transmission microscope.

An electronic device manipulates the primary beam in the conventional transmission microscope to produce a hollow cone of illumination with its apex located at the specimen. The device uses the existing tilt coils of the microscope, and modulates the D.C. signals to both x and y tilt directions simultaneously with various waveforms to produce Lissajous figures in the back-focal plane of the objective lens. Electron diffraction patterns can be recorded which reflect the manner in which the direct beam is tilted during exposure of a micrograph. In the bright-field imaging mode the device provides a microscope transfer function without zeros in all spatial directions and has been used to obtain high resolution images which are also free from the effect of chromatic aberration. A standard second condenser aperture is employed and the width of the cone annulus is readily controlled by defocusing the second condenser lens. The cone azimuthal angle is also controlled electronically; hence the device can also be used in the dark-field imaging mode. This device has been applied to imaging both amorphous and crystalline materials including biomolecular specimens.     

Optimum condition of convergent beam illumination for observation of local structure by high resolution transmission electron microscopy

We propose the convergent beam illumination as a technique for the local structural analysis by high resolution transmission electron microscopy. The image contrast is lower in the convergent beam illumination than in the parallel beam illumination because of the lower coherency. However the intensity oscillation around an atom image, which appears due to interference effect, is much reduced with the convergent beam illumination, and pseudo-images do not appear at termination of crystal periodicity. The convergent beam illumination, rather than parallel beam illumination, precisely reveals non-periodic local structures, such as interfaces, surfaces and fine particles, which are even embedded in a crystal. From theoretical analysis the optimum condition is derived as divergence of q(s )* = 0.44 and focus of delta(z)* = 1.35 in generalized coordinates. Using the convergent beam illumination the point resolution is improved by 20% compared to conventional parallel beam illumination.     

Enhanced contrast in electron microscopy of unstained biological material. 3. In-focus phase contrast of large objects

In-focus phase contrast electron microscopy has been investigated for the enhancement of bulk contrast (i.e. the contrast of large regions) of model biological specimens. Carbon film phase plates, of measured thickness, were introduced into the back focal plane of the objective lens. Image contrast was determined from Faraday-cage intensity measurements. A contrast enhancement was observed but was measured to be less than that obtained using a very small objective aperture. This was attributed to the smaller proportion of elastic scattering and the limited spatial frequency region over which the phase contrast transfer function was uniform. Electron beam interferometry established the ability of the phase plates to preserve the coherence of the beam traversing them. Carbon granularity, of specific dimensions, was significantly enhanced by the phase plate in accordance with the phase contrast transfer function and this enhanced granularity dominated the images of biological specimens.     

Observation of the loss of the hydroxyapatite sixfold symmetry in a human fetal tooth enamel crystal

A deviation from the hydroxyapatite hexagonal symmetry of a human tooth enamel crystal observed by high-resolution electron microscopy is reported. This symmetry deviation is characterized by: (1) ‘preferential’ planes that can be indexed as (100) with an intensity that differs from the (300) and the other {100} hexagonal equivalent planes; and (2) streaking of higher order reflections in the optical diffractogram of the image of the crystal. Computer simulations show that similar ‘preferential’ planes can also be observed at specific crystal tilt angles (and/or beam tilt and/or objective aperture misalignment) and at crystal thickness/microscope defocus values in images of hydroxyapatite crystals observed along the [0001] or [] zone axes. The streaking of higher order reflections in the optical diffractogram is related to a deformation of the crystal itself and does indeed show a symmetry deviation of the crystal under observation.     

Beam convergence effects in the weak-beam imaging of inclined planar defects

When defects are imaged using weak beam techniques it is common to use a higher beam convergence than when they are imaged under strong two beam conditions because of the way specimen drift limits the exposure times that can be used. It is demonstrated that, for a typical illumination system, as the convergence is increased the range of tilt across the probed area is also increased. This can affect the weak beam imaging behaviour of a defect, and the α-fringe contrast of thin twins is examined in this context. The contrast changes in the field of view associated with the local variation in tilt are discussed in relation to the degree to which the relative effects of convergence on α-fringe and thickness fringe contrast can be qualitatively understood kinematically. However, some effects, such as the observed increase in α-fringe contrast at moderate convergence, are more difficult to model but are also potentially of greater concern in the characterization of the differences in contrast to be expected for intrinsic and extrinsic faults as well as for twins.     

Electron microscope image contrast with double beam illumination from crystal supports

When a cluster of atoms on the bottom side of a crystal is viewed in the vicinity of a bend contour, a double image of the cluster is formed. The crystal acts as a beam splitter so that an object on the bottom of the crystal is illuminated by two coherent but non-parallel electron waves. The possibility of using double beam illumination to enhance the contrast of amorphous phase objects is discussed. Experimental results are presented for the image contrast of clusters formed by evaporating gold and aluminium on to the bottom side of graphite and silicon crystals.