四腔并联压电泵结构设计

为提高压电泵的输出性能,设计了一种层叠型四腔并联有阀压电泵。在80 V正弦交流电驱动下,40~400 Hz工作频率内,以水和空气作为介质,分别选用不同数量的压电振子进行驱动,在不同的驱动方式(指振子间工作时的相位差)下对泵的输出性能进行试验测试。结果显示,当泵送空气时,不管多少个振子进行驱动,驱动方式对泵的输出流量几乎不产生任何影响,在测试频率范围内,输出流量随频率成线性变化,最大输出气体流量可达3600 mL/min;当泵送液体时,驱动方式对泵的输出流量影响很大,当同侧的压电振子为异步驱动时,输出流量的效果更好,在工作频率180 Hz时,最大输出液体流量可达830 mL/min。试验结果为多振子驱动压电泵选择合适的振子间驱动方式提供了参考依据。     

Switched capacitor charge pump reduces hysteresis of piezoelectric actuators over a large frequency range

Piezoelectric actuators exhibit large hysteresis between the applied voltage and their displacement. A switched capacitor charge pump is proposed to reduce hysteresis and linearize the movement of piezoelectric actuators. By pumping the same amount of charges into the piezoelectric actuator quantitatively, the actuator will be forced to change its length with constant step. Compared with traditional voltage and charge driving, experimental results demonstrated that the piezoelectric stack driven by the charge pump had less hysteresis over a large frequency range, especially at ultralow frequencies. A hysteresis of less than 2.01% was achieved over a frequency range of 0.01-20 Hz using the charge pump driver.     

组合式压电驱动芯片水冷系统

为了提高压电驱动芯片水冷系统的适用性、可维护性以及冷却效率,本文提出一种组合式压电驱动芯片水冷系统。首先,测试和分析了芯片水冷系统中组合式泵单元在220Vpp方波驱动下不同组合方式(串/并联)、泵工作数量以及相对位置时的输出性能,接着,基于组合式泵单元的试验结果进行芯片水冷系统的水冷效果研究。实验结果表明:串联组合双泵工作时,双泵位于串联组合首尾位置(AD)时性能较优,在30Hz时获得最大输出压力(25kPa);串联组合四泵工作时,分别在35Hz和55Hz获得了最大压力(23.5kPa)和最大流量(13.5mL/min);并联组合双泵工作时,双泵都位于组合首位(AC)时性能较差;并联组合四泵工作时,分别在50Hz和60Hz获得最大输出流量(22mL/min)和最大输出压力(12.6kPa);通过串并联以及泵工作数量的切换获得了芯片水冷系统的冷却效果,不同的组合方式以及泵工作数量可以获得不同的冷却效果。获得了组合式压电驱动芯片水冷系统的驱动参数,为计算机芯片有效散热提供一条新途径。     

单振子双腔体无阀压电泵结构设计与机理分析

提出了一种单振子双腔体无阀压电泵,应用小挠度弹性弯曲理论导出了圆形复合压电振子的弹性曲面微分方程,分析了采用一个压电振子形成两个工作腔体压电泵的结构和工作机理,并与单振子单腔体压电泵对比分析了该结构与输出流量的关系。设计研制了结构独特、输出性能更高的单振子双腔体无阀压电泵,通过试验表明:单振子双腔体无阀压电泵比单振子单腔体无阀压电泵输出流量有明显提高。     

Theory and Experimental Verification on Cymbal-shaped Slotted Valve Piezoelectric Pump

Valve piezoelectric pumps usually have larger flow rate than that of valveless ones. However, the traditional cantilever valve easily induces stress concentration which impacts the reliability of pumps. Therefore, a cymbal-shaped slotted check valve is proposed to be applied in a piezoelectric pump in order to reduce the stress concentration of the valve and thus improve the reliability of the piezoelectric pump. The structure and working principle of the piezoelectric pump are analyzed; the stress analysis of the cymbal-shaped slotted valve diaphragm is conducted. In addition, finite element software is employed to analyze the difference of the Von-Mises stress between the cymbal-shaped slotted diaphragm and the slotted flat diaphragm. The simulation results show that, the Von-Mises stress of cymbal-shaped slotted diaphragm is smaller than that of the slotted flat one. Furthermore, the cymbal-shaped slotted valve piezoelectric pump is also fabricated, and flow rate experiment is performed. The experimental results indicate that the flow rate of piezoelectric pump working in low frequencies(0 Hz f 50 Hz) is larger than that working in high frequencies(200 Hz f 2000 Hz). When driven at voltage of 160 V and frequency of 5 Hz, the pump reaches its maximum flow rate of 6.6 g/min. The experimental results validate the feasibility of the cymbal-shaped slotted check valve. This research can effectively solve the problem of stress concentration of valve piezoelectric pumps and is helpful for improving the reliability of them.     

Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes

Among most traditional piezo water cooling systems, piezoelectric valve pumps are adopted as their driving sources. The valves in these pumps induce problems of shock and vibration and also make their structure complicated, which is uneasy to minimize and reduce their reliability and applicability of the whole system. In order to avoid these problems caused by valve structure, a novel valveless piezoelectric pump is developed, which integrates both functions of transforming and cooling. The pump’s Y-shape tree-like construction not only increases the efficiency of cooling but also the system reliability and applicability. Firstly, a multistage Y-shape treelike bifurcate tube is proposed, then a valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes is designed and its working principle is analyzed. Then, the theoretical analysis of flow resistance characteristics and the flow rate of the valveless piezoelectric pump are performed. Meanwhile, commercial software CFX is employed to perform the numerical simulation for the pump. Finally, this valveless piezoelectric pump is fabricated, the relationship between the flow rates and driving frequency, as well as the relationship between the back pressure and the driving frequency are experimentally investigated. The experimental results show that the maximum flow rate is 35.6 mL/min under 100 V peak-to-peak voltage (10.3 Hz) power supply, and the maximum back pressure is 55 mm H2O under 100 V (9 Hz) power supply, which validates the feasibility of the valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes. The proposed research provides certain references for the design of valveless piezoelectric pump and improves the reliability of piezo water cooling systems.     

An improved resonantly driven piezoelectric gas pump

Piezoelectric pumps have the potential to be used in a variety of applications, such as in air circulation and compression. However, piezoelectric membrane pumps do not have enough driving capacity, and the heat induced during the direct contact between the driving part and the gas medium cannot be dissipated smoothly. When the gas is blocked, the piezoelectric vibrator generates heat quickly, which may eventually lead to damage. Resonantly driven piezoelectric stack pumps have high performance but no price advantage. In this situation, a novel, resonantly driven piezoelectric gas pump with annular bimorph as the driver is presented. In the study, the working principle of the novel pump was analyzed, the vibration mechanics model was determined, and the displacement amplified theory was studied. The outcome indicates that the displacement amplification factor is related with the original displacement provided by the piezoelectric bimorph. In addition, the displacement amplification effect is related to the stiffness of the spring lamination, adjustment spring, and piezoelectric vibrator, as well as to the systematic damping factor and the driving frequency. The experimental prototypes of the proposed pump were designed, and the displacement amplification effect and gas output performance were measured. At 70 V of sinusoidal AC driving voltage, the improved pump amplified the piezoelectric vibrator displacement by 4.2 times, the maximum gas output flow rate reached 1685 ml/min, and the temperature of the bimorph remained normal after 2000 hours of operation when the gas medium was blocked.     

Performance of a serial-connection multi-chamber piezoelectric micropump

1Introduction Micropumpsaretheessentialcomponentsin micro fluidicsystemwhichhasemergedasa popularareaofresearchwiththedevelopmentof micro electro mechanicalsystem(MEMS).Sinceoneoftheearlypiezoelectricmicropumps forinsulindeliverywasfabricatedin1978,more andmoreeffortshavebeenmadeintheresearch ofmicropumps[1].Duetotheirpreciselycon trolledflowrate,micropumpspresentpromising applicationsinanalyticalchemistry,medical treatment,pharmacy,bioengineering,fuel drop generatorforautomobileheater,etc.A…     

半柔性阀压电泵理论与实验

根据静脉瓣结构形式,设计了一种半柔性阀压电泵。首先,介绍了半柔性阀压电泵的结构及工作原理;其次,对阀体进行了理论分析;最后,加工了实验样机,对样机进行性能测试实验。实验结果表明:在驱动电压为220V、频率为7Hz时,半柔性阀压电泵的进出口压差可达到199mm;在驱动电压为220V、频率为11Hz时,半柔性阀压电泵的实验流量为44.5ml/min。随着驱动电压的升高,工作频率与流量出现单峰与双峰的现象。该研究证明了半柔性阀压电泵具有泵的功能并可以实现有阀和无阀状态,验证了其有效性和理论分析的正确性。     

非对称分叉流管无阀压电泵的设计及试验

具有微混合功能的多级Y型流管无阀压电泵存在着输出流量与振子带载能力不平衡的问题。为此,提出了一种非对称分叉流管无阀压电泵。首先,理论分析了该无阀压电泵输出流量与流管流阻间的关系;其次,利用有限元软件数值计算了多级Y型流管的流阻特性;最后,采用光固化快速成型技术加工了样机,并进行了泵特性试验和振子振动测试。试验结果表明：在峰峰值200 V正弦波交流电驱动下,该压电泵的流量、扬程和压电振子的振幅都随驱动频率增加呈现先增大后减小的趋势;当驱动频率为31 Hz时,最大流量为4 g/min;驱动频率为38 Hz时,最大扬程为40.5 mmH2O。在试验施加电压范围内,该泵的输出性能与驱动电压呈正相关性。本研究验证了非对称流道树型无阀压电泵的可行性,为非对称无阀压电泵在微流道滴灌和微混合等领域的应用提供了参考。     

Output characteristics and experiments of a novel low frequency rotary piezoelectric motor

In order to improve the output performance of a piezoelectric motor under low driving frequency, a novel rotary piezoelectric motor driven by two piezoelectric actuators is proposed that is actuated based on harmonic and friction driving mechanism. The motor uses two piezoelectric actuators to drive two amplifying mechanisms with π/2 phase difference to produce harmonic motion, and then drives the rotor to rotate through friction force. Based on the driving principle, the electromechanical coupling equations of the motor are established. And a test platform is built to test the output characteristics of the motor. The results show that fluctuation of harmonic force and output torque occurs when the motor operates at different positions. Under the driving voltage and frequency of 150 V and 5 Hz, the actual average output torque of the prototype is 3.08 Nmm. Moreover, fluctuation of harmonic force and output torque occurs when the motor operates at different positions.

     

钹型开槽式阀压电泵的设计

由于有阀压电泵内部阀体所受应力过大易导致阀体失效,本文提出了钹型开槽式截止阀来减小有阀压电泵内部阀体所受应力。基于钹型开槽式截止阀设计了有阀压电泵,分析了钹型开槽式阀压电泵的工作原理。对钹型开槽膜片进行了受力分析,研究了该压电泵的输出性能及耦合作用下的膜片应力。加工制作了钹型开槽式阀压电泵样机,建立了钹型开槽式阀压电泵的有限元模型,数值计算了流固耦合作用下的阀体应力值。计算结果表明:在压电泵正常输出的驱动频率范围内,当驱动频率为418Hz时,膜片所受应力的计算值也达到最大,为81.74 MPa。最后,进行了压电泵性能试验。试验结果显示:该压电泵的输出流量最大值和振子振幅最大值均出现在低频段;当驱动电压为160V,驱动频率为5Hz时,输出流量达到最大,为6.6g/min;驱动频率为4Hz时,压电振子振幅达到最大,为165.8μm。文中的研究验证了钹型开槽式阀体压电泵的有效性,并得出当钹型开槽式阀压电泵工作在低频段时,阀门所受应力远小于高频段时阀门的应力值。     

双腔串联两阀与三阀压电泵的性能研究

研究了双腔串联两阀压电泵与三阀压电泵的输出性能,分析了这两种泵的结构和工作原理,理论分析得出:三阀泵输出性能优于两阀泵。设计制作了两阀泵与三阀泵实验样机,并通过实验测试证明了理论分析的正确性。分别对两阀泵和三阀泵进口腔和出口腔独立工作时流量输出进行了实验测试,并把进口腔和出口腔独立工作时输出流量相加之和,与两腔一起交叉工作时进行了比较。实验测试表明:两阀泵和三阀泵样机在200 V交流驱动电压下,最大输出流量分别 为972 ml/min和1 035 ml/min,最大输出压力分别为28.7 kPa和40 kPa,最大自吸高度分别为0.41 m和0.43 m水柱高。     

磁力弹簧式压电共振型气泵的设计

利用压电振子的振动激励相连接的隔膜共振原理,提出了用磁力弹簧式压电共振型气泵来提高压电泵对气体的驱动能力.首先,分析磁力弹簧式共振泵的工作原理,建立了共振泵的动力学模型,计算得出了影响隔膜振幅的主要因素.接着,设计和制作了样机,使用阻抗分析仪和激光位移计分别测得系统的共振频率及压电振子的位移放大倍数.最后,设计了测量共振泵流量和输出压力的实验装置,得出了磁力弹簧轴向间距对输出流量和输出压力的影响.实验测试表明:当输入正弦电压为200 V,系统共振频率为134 Hz,磁力弹簧的轴向间距为9 mm时,压电振子的位移放大倍数约为4.3,其最佳输出流量为524 ml/min,最佳输出压力为9.2 kPa.结果显示,提出的磁力弹簧式压电共振型气泵提高了气体的输送能力.     

Resonating tactile stimulators based on piezoelectric polymer films

We have designed, fabricated and tested piezoelectric polymer (Polyvinylidene fluoride, PVDF) film-based resonating actuators for tactile stimulation. The proposed resonating tactile stimulators are composed of 3×4 stimulating dot arrays with polyimide membranes. The air chambers placed on the PVDF films aid in indirect piezoelectric actuation and produce lower spring stiffnesses than are associated with conventional direct piezoelectric actuation. They can achieve large displacements with low input voltages. The performance of the proposed resonating tactile stimulators was characterized. The stimulators achieve an output displacement of 257.0 ± 1.5 nm, output pressure of 339.1 N/m2, and response time of 0.7 ms when an input voltage of 80 Vpk (52.5 kHz) is switched at 2 ms intervals (250 Hz). It has been experimentally demonstrated that the proposed flexible resonating actuators are capable of stimulating human skin to support tactile or braille displays integrated into tactile interface systems.     

具有偏置结构的非对称惯性压电旋转驱动器

为改善惯性压电驱动器输出性能,提出了一种新型具有偏置结构的非对称惯性压电旋转驱动器。在非对称夹持的基础上,定义了一种偏置结构。为了解偏置结构对驱动器输出性能的影响,建立了机构的力学模型方程,推导并仿真分析了驱动器的动力学特性。设计、制作了试验样机,搭建了试验系统;进行了试验测试并与无偏置结构驱动器进行了性能对比。结果表明:偏置距离为15mm时,驱动器输出步距角速度最大。与无偏置结构驱动器相比,驱动电压为100V、23Hz时,驱动器输出最大角速度从3.48rad/s增加至5.39rad/s,增幅达54.88%,驱动器最大驱动力矩从2.41N·mm增加至3.62N·mm,增幅达50.2%;驱动电压为100V,4Hz时,驱动器稳定运行时的承载量达1 300g。理论与试验结果表明,提出的有偏置结构的驱动器具有输出步距角速度和驱动力矩更大的特点。     

3D打印的锥管坡面腔底无阀压电泵

为提高无阀压电泵的流量特性和解决泵加工工艺性差的问题,研制出了锥形流管坡面腔底无阀泵。首先,提出并设计了锥形流管坡面腔底无阀泵,分析了该泵的工作原理;然后,利用ansys软件对泵腔内流场做了模拟分析,分析结果表明该泵具有传输流体的能力;最后,利用3D打印技术制作了锥形流管坡面腔底无阀泵,并对泵的频率-流量特性进行了试验,驱动频率为8Hz时,锥形流管坡面腔底无阀泵的流量达到最大值26.8ml/min,比相同尺寸坡面腔底无阀压电泵在相同驱动电压条件下输出的最大流量增加了18.6%。试验结果表明,锥形流管坡面腔底无阀泵的流量特性优于坡面腔底无阀压电泵,且采用3D打印技术制作压电泵,提高了泵加工的工艺性,缩短了加工周期,降低了加工成本。     

双腔薄膜阀压电泵的实验研究

实验研究了理论所不能解释的多种因素对双腔压电泵输出流量的影响规律。选取了一种高效的橡胶薄膜阀片,设计并制作了具有较高输出能力的双腔泵样机。120 V交流信号下,双腔串联压电泵最佳工作频率为180 Hz,输出参数为520 ml/min、22 kPa;双腔并联压电泵最佳工作频率为420 Hz,输出参数为980 ml/min、28 kPa。通过实验确定了双腔压电泵的最佳腔体高度及双腔串联、并联压电泵压电片的最佳驱动方式。     

多级“Y”型流管无阀压电泵的原理与试验验证(实验视频)

针对目前微流体混合器多需要外接动力源,且多数微混合器只能进行液体混合而不能输送液体的问题,提出将无阀压电泵引入微混合器领域,并研制了一种集混合与输送于一体的多级“Y”型流管无阀压电泵。首先,提出了多级“Y”型流管,进而设计了多级“Y”型流管无阀压电泵,并分析其工作原理;然后,对该无阀压电泵的流管流阻特性及泵流量进行理论分析;同时,利用有限元软件对多级“Y”型流管无阀压电泵进行了流场模拟,结果表明该压电泵具有单向传输作用。最后,制作了多级“Y”型流管无阀压电泵样机,并进行了泵流量与背压试验。试验结果显示：驱动电压峰峰值为100 V,频率为16 Hz时,流量达到最大,为16.2 ml/min;驱动电压峰峰值为100 V,频率为14 Hz时,输出背压最大,约为64 mm水柱。得到的试验数据证明了多级“Y”型流管无阀压电泵的有效性。(实验视频)     

螺旋线形阀压电泵的理论与试验研究*

有阀压电泵在精细化工、MEMS、生物医学工程等领域具有重大应用前景。为了克服有阀压电泵结构复杂、跟从与截止性差、成本高等缺点,设计一种异形拟悬臂梁结构的螺旋线形弹性固支阀,其螺旋臂长是简单悬臂梁阀的数倍,工作时开启度大,且因其螺旋线形弹性结构,阀体不仅可以上下回位,左右也具有对中功能,并把这种阀安装在有阀压电泵的泵腔内形成螺旋线形阀压电泵。在深入分析有阀压电泵优缺点的基础上分析螺旋线形阀压电泵的工作原理,依照泵内部能量传递的路径建立压电驱动(电压、频率)为输入与泵流动(流量、压差)为输出之间的关系式,加工试验样机,并进行性能测试试验,螺旋线形阀压电泵具有泵功能,证明了其有效性和理论分析的正确性。试验结果表明：随着驱动电压的增大,泵的输出流量和压差呈上升趋势,这个结果与Matlab数值仿真计算结果趋势一致。在电压为220 V、频率为30 Hz时,得到仿真流量41.26 mL/min,实际试验流量为10.2 mL/min,误差75.3%;在电压为220 V、频率为20 Hz时,得到仿真流量27.51 mL/min,实际试验流量为22.8 mL/min,误差17.2%。