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制作传统声表面波(SAW)器件晶圆芯片表面的材料是Al,Al在空气中被氧化,极易生成致密的氧化铝(Al_2O_3)薄膜,由于Al_2O_3薄膜和Al及基底压电材料的刻蚀速率存在差异,会导致SAW的离子束调频过程复杂。该文介绍了一种用于SAW的离子束调频方法,采用该方法对制作的SAW器件进行离子束调频后,实现了目标频率的调高和调低,并进一步提高了频率集中度,从而解决了低频窄带SAW器件及2 GHz以上SAW高频器件频率精度难以提高的工艺难题。 相似文献
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当声表面波叉指换能器的指条重叠包络按照小波函数的包络设计时,得到的声表面波叉指换能器脉冲响应函数等于小波函数,从而制造出了声表面波式小波变换器件。本文提出了利用两只声表面波式小波变换器件构造小波变换重构器件的新方法。对器件误差的来源作了分析,提出减小误差的方法。 相似文献
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《Microwave Theory and Techniques》1981,29(12):1327-1333
A 375-MHz surface-acoustic-wave (SAW) resonator controlled oscillator was developed for application in the Transit satellite marine navigation system. The SAW oscillator, in a 2-in/sup 3/ hybrid package, contains a heater, voltage regulator, and divider and is a direct replacement for a bulk wave oscillator and its multiplier chain. A short term stability of 2E - 10 and an aging rate of 3E - 8/day were achieved at 75°C. Comparison tests showed that the accuracy of the navigation system with the SAW oscillator was equivalent to the accuracy using the bulk oscillator. 相似文献
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Various applications of surface-acoustic-wave (SAW) technologies are investigated in which the use of SAW devices would result in reduced volume and weight for VHF/UHF radio communication transceivers. Attention is given to improved insertion loss and power requirements reported for SAW filters. In particular, by analyzing the loss mechanisms of a previously developed high-performance SAW filter for mobile telephones, a new extremely low-loss SAW filter (loss of as low as 1.2-2.0 dB at 600 MHz) has been developed. The results of fundamental experiments for a SAW antenna duplexer using this new SAW filter as the transmitter filter with a semicoaxial filter as the receiver filter at 800 MHz are presented 相似文献
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声表面波谐振器传播状态的ANSYS仿真 总被引:2,自引:1,他引:1
为描述声表面波的传播状态,利用ANSYS软件对声表面波(SAW)谐振器进行了仿真。在对声表面波产生机理和SAW谐振器工作原理分析的基础上,建立了SAW谐振器仿真模型,讨论了网格划分不同对仿真结果精度的影响,得出了在每个SAW波长尺寸内划分30~40个网格可以得到较精确的仿真结果。对不同长度声孔径的声表面波谐振器进行了仿真分析,得出了声表面波只在固体表面1~2个波长深度范围内传播的仿真效果图,与理论分析有很好的一致性。最后对IDT/ZnO/金刚石/Si结构的声表面波器件进行了仿真,得出该结构声表面波器件SAW传播速度与ZnO的厚度成反比,其大小是IDT/ZnO结构器件SAW传播速度的2~3倍。 相似文献
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声表面波射频识别无源电子标签 总被引:2,自引:0,他引:2
简述声表面波射频识别无源标签的原理与特点,介绍了434 MHz和915 MHz标签的试验结果:工作频率915 MHz、434 MHz,码容量>1 000,读写距离0.5~5 m。讨论了声表面波标签研究过程中的一些技术关键。 相似文献
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本文介绍了石英声表面波延迟线在扩频通信系统中频积累技术的应用,分析了其性能对中频积累环的影响。根据分析结果制作了与255位声表面波抽头延迟线配套使用的石英声表面波宽带延迟线。 相似文献
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Microwave SAW bandpass filters for spacecraft applications 总被引:1,自引:0,他引:1
Microwave SAW bandpass filters for spacecraft applications are described. Two SAW bandpass filters were designed and fabricated in the 1.5 GHz band using temperature-stable ST-cut quartz substrates. The SAW bandpass filters were then assembled in a SAW filter bank. One unique feature of the SAW filter bank is that a broader band is available merely by adding the outputs of SAW bandpass filters adjacent in the frequency domain. Measured electrical responses as well as results of a transmission experiment show satisfactory performance. Effects of the temperature and aging stability characteristics are investigated based on the measured and calculated responses 相似文献
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LIU Ji-xue ZHONG Xian-xin 《半导体光子学与技术》2006,12(1):35-38
A new surface acoustic Wave differential quadraphase shift key(SAW DQPSK) spread spectrum (SS) signal matched filter based on the fusion of SS and differential modulation is reported. The design of multi-phase coded SAW matched filter is proposed rather than another design of SAW DQPSK filter, which can cut in a half of the delay time of SAW DQPSK matched filter and SAW fixed delay line(FDL) used for differential demodulation. This breakthrough is made the system largely reduce a size and process much easily. This method can also be feasible in other SAW MPSK matched filter design especially when the modulation phase number is larger than 4. The design example and its experimental results are given. 相似文献
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A flip-chip bonding (FCB) method suitable for the surface acoustic wave (SAW) filter was developed. In this method, the gold-ball bumps formed on the chip are directly bonded onto the ceramic substrate by thermosonic bonding. After FCB, they are sealed with a cap without using underfill resin. To obtain high bond strength, characteristic properties of the substrate electrode and the ball bump, were optimized. Furthermore, bondability has been improved by adopting a ramp-up loading profile. The reliability test was carried out with 6-pin SAW chips, and we confirmed the sufficient reliability of bonds. 相似文献
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用声表面波滤波器实现高速光纤传输系统的定时恢复 总被引:1,自引:0,他引:1
在高速光纤数字传输系统中,尤其在长中继链路系统中,定时恢复的质量直接影响到传输系统的性能。本文分析了100Mbit/s以上光纤数字传输系统用声表面波滤波器(SAW—F)定时提取电路。首先给出SAW—F的基本原理;然后讨论了SAW—F定时提取实现方案并分析了其抖动积累特性,得出SAW—F定时提取电路的设计依据;最后,根据理论分析的结果,我们设计了一个可用于155.520Mbit/s光纤数字传输系统的SAW—F定时提取电路。分析和实验表明,SAW-F适合用作100Mbit/s以上数字传输系统的定时提取。 相似文献
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用于频率合成器的低损耗声表面波滤波器 总被引:2,自引:2,他引:0
简述了产生声表面波滤波器插入损耗的主要机理和获得低损耗的原则;介绍了根据此原则对100~500MHz5种滤波器的研制过程和结果。实验表明,采用镜像阻抗连接换能器结构可达到3~4dB的低损耗,并成功地应用于频率合成器中。 相似文献
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相较于传统的压电单晶声表面波器件,薄膜型声表面波器件具有成本低、易小型化、易集成化等优点。文章对几种薄膜型声表面波器件的研究进展进行了综述。首先,总结了几种常见的薄膜制备方法。然后,根据应用范围的不同将薄膜型声表面波器件分为高频器件和高温器件。根据这两大类型,综述了近年来较典型的五种薄膜型声表面波器件,介绍其制备流程、基本结构和高频/高温等特性。最后,对五种薄膜型声表面波器件进行对比,并对薄膜型声表面波器件的未来发展提出展望。该综述对薄膜型声表面波器件的实际应用及推广具有一定借鉴意义。 相似文献