Performance improvement of rectangular-plate linear ultrasonic motors using dual-frequency drive

To improve the performances of a rectangular-plate linear ultrasonic motor for specific applications, a dual-frequency drive has been proposed and investigated. Through careful design of the rectangular piezoelectric ceramic plate, its first longitudinal resonant frequency coincides with its second lateral bending resonant frequency and is one-third of its higher lateral bending resonant frequency. When a square-wave voltage is used to drive the motor, its first longitudinal and second bending and the higher bending vibration modes are excited. Experimental results show that the maximum thrust force and maximum velocity of the motor are over 170% of those obtained from the single-frequency sine-wave drive when the voltage performance of the motor becomes saturated.     

High-frequency, silicon-based ultrasonic nozzles using multiple Fourier horns

This paper presents the design, simulation, and characterization of microfabricated 0.5 MHz, silicon-based, ultrasonic nozzles. Each nozzle is made of a piezoelectric drive section and a silicon resonator consisting of multiple Fourier horns, each with half wavelength design and twice amplitude magnification. Results of finite element three-dimensional (3-D) simulation using a commercial program predicted existence of one resonant frequency of pure longitudinal vibration. Both impedance analysis and measurement of longitudinal vibration confirmed the simulation results with one pure longitudinal vibration mode at the resonant frequency in excellent agreement with the design value. Furthermore, at the resonant frequency, the measured longitudinal vibration amplitude at the nozzle tip increases as the number of Fourier horns (n) increases in good agreement with the theoretical values of 2(n). Using this design, very high vibration amplitude gain at the nozzle tip can be achieved with no reduction in the tip cross-sectional area for contact of liquid to be atomized. Therefore, the required electric drive power should be drastically reduced, decreasing the likelihood of transducer failure in ultrasonic atomization.     

双足型直线超声电机的结构及实验

研制了一种新型直线超声电机，首先对其驱动机理进行探讨，设计电机的具体结构，其次对定子进行频率响应实验，模态实验，实验显示电机可有效激励出所需振型，正反向运动灵活，电机的工作频率42550Hz；最大无负载速度可达76mm／s，最大输出推力2N。     

Novel method for driving the ultrasonic motor

This paper reports a novel driving method for an annular plate-type ultrasonic motor. Instead of the direct current/alternating current (DC/AC) converter type driver using a conventional electromagnetic transformer, a compact disc-type piezoelectric transformer is used to obtain a high voltage output for driving the ultrasonic motor. The piezoelectric transformer is operated in the radial vibration mode at resonance frequency close to the resonance frequency of the ultrasonic motor. Later, it was found that the piezoelectric transformer could drive the ultrasonic motor, even if their resonance frequencies are not exactly the same by incorporating a matching network in the circuit. The maximum speed of the ultrasonic motor obtained by using this driving method is over 300 rpm. It is believed that the results of this study will have impact on the integration and miniaturization of the ultrasonic motor and its driving circuit.     

Piezoelectric ultrasonic motor using longitudinal-torsional composite resonance vibration

A piezoelectric ultrasonic motor, which uses longitudinal and torsional composite vibration, is examined in order to obtain high torque characteristics with small diameter. Piezoelectric ceramic elements, oscillating in both longitudinal and torsional modes, respectively, are used as piezoelectric stiffened modes having high electromechanical coupling factors k(33) and k(15), respectively. It is found that the resonant frequencies for longitudinal mode and torsional mode could coincide with each other in the ultrasonic motor, according to finite element method analysis and experimental measurement. The motor operating in both resonant vibrations indicated good performance. The 20-mm diameter motor exhibited 4 kgfcm maximum torque, 450 r/min maximum rotational speed, 40% maximum efficiency, and quick responsiveness, within 2.5 ms.     

Development of a radial-torsional vibration hybrid type ultrasonic motor with a hollow and short cylindrical structure

A longitudinal-torsional hybrid-type ultrasonic motor has larger torque and lower revolution speed compared with other kinds of ultrasonic motors. It drives devices directly and precisely, so it is adaptable to many fields, especially aeronautics and astronautics, as a servo actuator. Due to the different sound propagation speeds of longitudinal and torsional vibrations in the stator, it is difficult to match resonant frequencies of longitudinal and torsional vibrations. In this paper, a new radial-torsional vibration hybrid-type ultrasonic motor is put forward, which utilizes longitudinal vibration derived from radial vibration by the Poisson effect. The short, hollow cylindrical structure easily makes resonant frequencies of first-order radial and torsional vibrations into degeneracy. First, the new structure of the motor is presented. Second, the principle of matching the resonant frequencies is developed, and the motor geometry is optimized by ANSYS software. Finally, a 60-mm diameter prototype is fabricated, which performs well. The no-load velocity and maximum torque are 25 r/min and 5 N·m, respectively. This kind of motor is small, light, and noiseless.     

A novel driver with adjustable frequency and phase for traveling‐wave type ultrasonic motor

Abstract

This paper describes the design of a traveling‐wave ultrasonic motor (TWUSM) drive circuit, intended to simultaneously employ both driving frequency and phase modulation control. The operating principles and a detailed analysis of the proposed driving circuit, consisting of voltage‐controlled oscillator (VCO), voltage‐controlled phase‐shifter circuit and non‐resonant power amplifier converter, are introduced. To drive the USM effectively, a two‐phase power amplifier converter using non‐resonant output was designed to provide a balanced two‐phase voltage source. Two‐phase output driving voltages could be maintained at the same peak voltage value as the driving frequency under varying phase‐modulation processes. Detailed experimental results are provided to demonstrate the effectiveness of the proposed driving circuit.     

Development of a novel ultrasonic motor resonator using topology optimization

The use of topology optimization in the design of a novel stator for an ultrasonic motor (USM) is investigated. The design challenge is to produce a stator, with two resonant modes whose frequencies are in a ratio of 1:2. When driven together, these modes result in a contact point trajectory in a figure of eight shape. As a result, only one electronic amplifier is required to drive the proposed device. In contrast traditional travelling wave USM, with elliptical contact point trajectories, require two modes with equal resonant frequencies to be driven 90° out of phase, and therefore require two amplifiers, one for each mode. To achieve a suitable stator design, a slightly unconventional topology optimization problem formulation is proposed, in which the objective function is to minimize the amount of material with intermediate density, while satisfying a constraint related to the frequency ratio of selected resonant modes. The planar design produced using the optimization procedure was refined using a detailed three dimensional finite element analysis. A prototype of the proposed stator design was manufactured and experimentally characterized. Scanning laser vibrometry measurements from two positions were used to measure the figure of-eight motion. Finally, the stator was fitted with a preloaded slider to form a simple linear motor demonstrator which was characterized experimentally. The prototype motor produced a slider speed of 14 mm/s reversibly and a maximum force of 50 mN.     

蛋糕超声波辅助切割刀的优化设计

为了适应切割大尺寸、粘性食品的要求,设计了频率为20k Hz的食品用超声切割刀。采用有限单元法对其进行模态分析,获取各阶固有频率、刀具刃口振幅分布等参数。通过对切割刀刀身结构进行敏感性分析,得到了切割刀结构尺寸对切割刀输出端位移的均匀性、纵向振动固有频率与邻近频率的影响。对影响程度大的结构参数进行了二次优化,使所设计的切割刀在20k Hz频率附近以纵向振动模式为主,谐振频率与邻近固有频率间距足够大,刃口振幅位移分布均匀性得到较大的提高。     

电液疲劳试验系统的变谐振控制技术研究

随着激振频率的增加,电液疲劳试验机激振输出幅值急剧衰减,激振频率和激振输出幅值两者之间存在相互矛盾的关系,因此提出了利用谐振能量来提高激振输出幅值的方案。该方案通过改变阀控单出杆液压缸无杆腔容积的方法来改变系统的谐振频率,使得谐振频率与激振频率重合,在谐振点进行激振。在对液压动力机构的运动过程进行分析的基础上,建立系统的数学模型,运用四阶龙格库塔的数值方法对其进行求解,并对仿真结果进行理论分析;理论分析表明可以通过改变无杆腔容积来改变系统的谐振频率,且在谐振点处的激振输出幅值有较大幅度的提升;从负载流量曲线上看,由于谐振能量的输出使得在谐振点处的负载流量急剧降低。最后建立实验系统对以上仿真结果进行实验验证。实验结果表明：在谐振点出的激振输出幅值为饱和输出幅值的25%左右,负载流量反而减小了90%左右;通过改变无杆腔的容积能有效改变谐振频率,拓宽电液疲劳试验机应用范围。     

Design and fabrication of a PZT cantilever for low frequency vibration energy harvesting

In this study, a PZT cantilever with a Si proof mass is designed and fabricated for a low frequency energy harvesting application. A mathematical model of a multi-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. Our cantilever design was based on MATLAB and ANSYS simulations. For this simulation, the proof mass volumes were varied from 0 to 0.5 mm3 and resonant frequencies were calculated from 833.5 Hz to 125.5 Hz, respectively. Based on simulation, we fabricated a device with beam dimensions of about 4.10 mm x 0.48 mm x 0.012 mm, and an integrated Si proof mass with dimensions of about 0.481 mm x 0.48 mm x 0.45 mm. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 224.8 Hz, 4.8 mV, and 2.24 nW, respectively.     

旋转超声内圆磨削砂轮变幅器的设计与试验研究

砂轮变幅器是旋转超声内圆磨削谐振系统的关键部件,其设计质量直接影响超声磨削的工艺效果。但目前内圆磨削砂轮变幅器缺乏较为完善的理论分析模型。为提高砂轮变幅器理论分析模型的通用性,基于非谐振设计理论建立了纵向谐振砂轮变幅器的理论分析模型,并利用砂轮变幅器各振动单元间的力、位移连续条件与边界条件推导了其频率方程。然后,针对频率方程进行编程求解,并通过ANSYS有限元仿真分析进行验证。最后,加工制作了纵向谐振砂轮变幅器,并开展阻抗特性分析试验、超声谐振试验和振动位移测量试验,分析了其谐振特性。试验结果表明,所研制的砂轮变幅器的谐振试验频率与理论设计频率一致,其输出端振动位移的试验值与仿真值的相对误差为7.83%,符合旋转超声内圆磨削的要求,验证了理论分析模型求解的正确性。研究结果为旋转超声内圆磨削砂轮变幅器的设计提供了便捷且有效的方法。     

A double-mode piezoelectric single-crystal ultrasonic micro-actuator

Ternary Pb(In(1/2)Nb(1/2))O(3)-Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PIN-PMN-PT) single crystals with higher coercive field (E(C) ~9 kV/cm) and higher ferroelectric-transition temperature (T(R-T) = 108°C) were grown, and correspondingly, a double-mode piezoelectric ultrasonic micro-actuator made of PIN-PMN-PT crystal brick (5 x 1.5 x 1.32 mm) and operated in the first longitudinal and the second bending modes was developed. The ferroelectric, dielectric, electromechanical, and resonance displacement properties of the micro-actuator were characterized for miniature linear piezo-motor applications. The longitudinal displacement of the actuator is ~0.11 μm (with an applied voltage of 5 V), which is comparable to that of a multilayer piezoelectric-ceramic actuator of the same size. This crystal micro-actuator was successfully used to drive a slider moving linearly.     

Performance evaluation of dual-frequency driving plate ultrasonic motor based on an analytical model

An analytical model is presented to explain the effects of dual-frequency drive on the plate ultrasonic motor in this paper. The experimental prototype is a plate ultrasonic motor using single-phase asymmetric excitation, which can work under a single vibration or multiple vibration modes. Based on the linear superposition of vibrations with two different excitation frequencies, an analytical model is established using the classic Coulomb friction model, and the non-load rotation speed and maximum stall torque are deduced. Moreover, some crucial parameters such as preload and dead-zone in dual-frequency superposition model are identified or modified automatically by searching for the maximum correlation coefficient between simulation and experimental data using single-frequency drive. It is found that simulation and experiment results agree well when no excitation frequency component is at resonance.     

双十字压电振子同型弯振模态驱动的平面超声电机

为了丰富平面超声电机的型式,提出一种双十字压电振子同型弯振模态驱动的平面超声电机。利用双十字压电振子的纵杆面内、面外弯振耦合以及横杆面内、面外弯振耦合,分别在两杆的驱动足上合成沿xoz、yoz面行进的两相椭圆轨迹,以交替地推动动子沿x、y向移动。分析了该平面超声电机的驱动机理,并推导出两相椭圆轨迹方程。建立了双十字压电振子机电耦合模型,对其三相工作模态的振型进行仿真分析,并在结构优化的基础上实现了三相工作模态频率一致,使它们分别为43 468,43 552和43 569 Hz。仿真了双十字压电振子的频响特性并实现了干扰模态分离,当驱动电压为250 V时,驱动足x、y、z向振幅分别为1.3,0.8和0.9 μm,满足电机驱动要求。模拟得到定频激励下双十字压电振子驱动足的两相椭圆运动轨迹,验证了所设计平面超声电机驱动机理的有效性。该平面超声电机可输出较大速度与动力,具有广阔的应用前景。     

Dynamic and contact analysis of a bimodal ultrasonic motor

A bimodal ultrasonic motor, which operates with only one power amplifier, uses two simultaneously excited modes to drive the rotor; a longitudinal mode and a flexural mode. The equations of motion describing the vibrations and contact behavior are derived by Hamilton's principle and the geometry constraint. The Lagrange multiplier method is used to treat the frictional contact problem. The finite element method and numerical integration scheme are used to simulate the dynamic responses of this system with and without contact. Some important factors are studied for the bimodal ultrasonic motor design. The factors include structure design, amplitude of input voltage, phase displacement, exciting frequency, and contact behavior.     

Standing wave bi-directional linearly moving ultrasonic motor

A standing wave bi-directional linearly moving ultrasonic motor has been studied for the purpose of implementing a practical linear ultrasonic motor with simple structure, simple driving and high resolution. The fundamental principle of this linear motor is projections on the right sides of a standing wave crests generating thrust force right-diagonally on the slider pressed against the projections. Correspondingly, projections on the left sides of the wave crests make the slider move toward the left. In order to realize bi-directional actuating, vibration mode B3 or B4 is excited in a rectangular plate-type vibrator to make the projections on the right sides or the left sides of the wave crests. In this paper, the operation principle of the linear motor is demonstrated. Furthermore, a prototype linear ultrasonic motor of 40 mm in length, 10 mm in width is fabricated and investigated. The following performances have been achieved: maximum speed 200 mm/s, maximum force output 150 gf, and resolution less than 0.1 mum.     

微量注射泵用直线超声电机的结构设计

改进了一种螺纹杆直线超声电机,并用于驱动微量注射泵。螺纹杆直线超声电机具有体积小、精度高、推力足、无磁干扰等特点。为了满足微量注射泵推力要求,针对螺纹杆直线超声电机不能施加预压力问题,提出了一种可施加预压力的螺纹杆直线超声电机。该直线超声电机包括底座、柱状定子、分体式螺纹杆动子。动子由动子主轴、套筒、预压力施加装置组成。当预压力调至33.9 N时,电机达到最大堵推力21 N,此时空载最大速度为4.5 mm/s。并设计了一款微量注射泵,该微量注射泵结构简单、抗磁干扰,分辨率达到nl级别,满足各种微量药物注射要求。     

一种锥形定位节面变幅杆结构优化设计研究

为提高变幅杆的振动传递及振幅输出特性,基于解析法设计了具有锥形定位节面结构的旋转超声加工变幅杆,通过预应力模态分析与谐响应分析进行了优化设计;通过响应面优化方法建立27个优化设计点,分别以放大系数最大化、最大等效应力最小化与谐振频率最接近理论设计频率为第一、第二与第三优化目标,并提出一种5阶模态频响曲面验证方法,通过(2~6)阶5个模态频响曲面分析结果对优化设计点的最优优化解进行验证。研究表明,基于该研究提出的方法,结构优化设计后的变幅杆能够提高放大系数,降低最大等效应力,并使谐振频率接近理论设计频率,提高超声加工的能量利用率。对旋转超声加工装备的性能研究与开发具有一定的指导意义。     

Low-frequency meandering piezoelectric vibration energy harvester

The design, fabrication, and characterization of a novel low-frequency meandering piezoelectric vibration energy harvester is presented. The energy harvester is designed for sensor node applications where the node targets a width-to-length aspect ratio close to 1:1 while simultaneously achieving a low resonant frequency. The measured power output and normalized power density are 118 μW and 5.02 μW/mm(3)/g(2), respectively, when excited by an acceleration magnitude of 0.2 g at 49.7 Hz. The energy harvester consists of a laser-machined meandering PZT bimorph. Two methods, strain-matched electrode (SME) and strain-matched polarization (SMP), are utilized to mitigate the voltage cancellation caused by having both positive and negative strains in the piezoelectric layer during operation at the meander's first resonant frequency. We have performed finite element analysis and experimentally demonstrated a prototype harvester with a footprint of 27 x 23 mm and a height of 6.5 mm including the tip mass. The device achieves a low resonant frequency while maintaining a form factor suitable for sensor node applications. The meandering design enables energy harvesters to harvest energy from vibration sources with frequencies less than 100 Hz within a compact footprint.