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内耦合型EBCCD的技术研究 总被引:1,自引:0,他引:1
电子轰击电荷耦合器件(EBCCD)是一种微弱光信号成像器件,由于采用了内耦合的背照电荷耦合器件(CCD)结构,大大提高了该器件的探测灵敏度以及信噪比,使其探测的弱光下限能更低.采用国产面照CCD,成功研制出了具有背照功能的CCD以及能耐电子轰击的EBCCD.简单介绍了这种器件的工作原理、结构特点以及关键研究内容,并列出了实验分析及结果. 相似文献
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本文在国内首次提出了统计平均的方式为基础的红外电荷耦合器件计算机自动测试方案,概述了测试系统构成和测试结果分析,介绍了新型红外电荷耦合器件驱动电路的设计。 相似文献
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作者采用多碱光电阴极、静电聚焦的电子透镜系统、背照CCD、高密度引脚的玻封结构以及超高真空处理技术,成功研制出了具有实时电子成像功能的电子轰击电荷耦合器件(Electron Bombarded Charge-CoupledDevice,简称EBCCD)。该器件的主要结构和性能参数为:有效光阴极直径18 mm、光谱响应范围400~850nm、光电阴极灵敏度200μA/lm、CCD像素数512×512、暗信号不均匀性18%。图1为该EBCCD样管实物照片,图2为该样管所输出的图像。图1制成的EBCCD样管的实物照片图2 EBCCD的输出图像电子轰击电荷耦合器件是一种对微弱光信号敏感的成像型… 相似文献
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EBS-CCD背照器件的寿命计算 总被引:1,自引:0,他引:1
本文根据背照器件SiO_2层吸收的x射线总剂量所造成的电子损伤,计算了背照器件的寿命。计算值和实验值十分一致。背照器件的有效寿命可达几千小时以上,这在作者的加速寿命试验中得到进一步证实。 相似文献
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A 2-phase charge-coupled device (c.c.d.) is proposed. It makes use of charge storage in an m.n.o.s. structure to define in the silicon substrate the asymmetrical potential wells required for unidirectional charge flow. The fabrication and operation of the device are described. The structure permits substantial simplification of the fabrication method as compared with other c.c.d.s. 相似文献
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《Electron Devices, IEEE Transactions on》1980,27(9):1809-1816
The low charge-transfer efficiency of the basic bucket-brigade circuit and the speed limitation of the tetrode approach have so far prevented bucket-brigade devices (BBD's), in spite of their greater fabrication simplicity, from competing with charge-coupled devices, excepting for audio applications. A novel charge-transfer device is presented and experimentally evaluated. The "dual-gate BBD" is a two-step-transfer device (a CCD transfer followed by a BBD transfer), showing operational performances comparable to surface-channel CCD's and, at the same time, enjoying the fabrication simplicity proper to bucket-brigade circuits. The concept is implemented using conventional p-channel aluminum-gate technology combined with an additional shadowed-gap float-off process. The characteristic features and the performance capabilities of the device are discussed. 相似文献
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Joe Campbell Dentai A. Burrus C. Ferguson J. 《Quantum Electronics, IEEE Journal of》1981,17(2):264-269
We describe the fabrication and device characteristics of experimental back-illuminated InP/InGaAs n-p-n heterojunction phototransistors. These devices exhibit photoresponse in the wavelength range of0.95-1.6 mu m. An optical gain of 40 at an input power of 1 nW (an improvement of 1000 in sensitivity over previously reported phototransistors) has been observed. Gains as high as 1000 have been achieved for higher incident power levels. 相似文献
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Reich R.K. Mountain R.W. McGonagle W.H. Huang J.C.-M. Twichell J.C. Kosicki B.B. Savoye E.D. 《Electron Devices, IEEE Transactions on》1993,40(7):1231-1237
A novel electronic shutter has been integrated into the structure of a back-illuminated frame-transfer charge-coupled device (CCD) to permit short optical exposure times and to reduce the smear that occurs during the transfer of an image from the CCD detection area. The shutter consists of an n+ shutter drain placed in the vertical channel stop regions and stepped p-type buried layers formed by a high-energy implantation (1.0-1.5 MeV) located between the CCD n-type buried channel the and p substrate. These structures create electric fields that direct the photoelectrons to either the CCD detection region or the n+ shutter drain. The ratio of photons detected with the shutter open to photons detected with the shutter closed has been measured to be greater than 75000 for wavelengths below 540 nm. The corresponding shutter rise and fall times are less than 55 ns 相似文献
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The letter proposes a useful technique for the nondestructive tapping of charge-coupled devices, with a presentation of both theoretical and experimental results for device operation. The usefulness of the technique lies primarily in its simplicity of fabrication and operation. 相似文献
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We summarize our work on back-illuminated photodiodes based on the As-Ga-In-P III-V semiconductor system which, with InP substrates, can provide photodetectors to cover the wavelength range of0.93-1.65 mu m. LPE layer growth and material purification techniques are described, as well as the fabrication and characterization of p-i-n photodiodes made from these compounds. The relevant device parameters and their optimization are discussed, and the performance of high-bit-rate optical receivers employing the new detectors is noted. Finally, we suggest some areas where further research might lead both to a better understanding of carrier transport in these heterojunction configurations and to improved devices made from them. 相似文献
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Hiang Teik Tan Hunter I.C. Snowden C.M. 《Electron Devices, IEEE Transactions on》2007,54(7):1597-1604
This paper describes the modeling, design, and fabrication of quarter-micrometer double delta-doped AlGaAs/InGaAs charge-coupled devices (CCDs) whose epitaxial layers and geometry were based around the device structure of commercial pHEMTs. A quasi-2-D physical model has been developed to investigate the properties of this novel 2-D electron gas CCD. This physical model allows the characteristics of the InGaAs transport channel as well as the dc characteristics of the device to be predicted within a reasonable amount of time. This model also shows how "individual" charge packets can be controllably transferred through the device when appropriate clocking voltages are applied to the gates of the CCD. This capacitive gate structure device is then shown to be successfully fabricated using established GaAs heterostructure fabrication techniques to ensure good repeatability. The dc characteristics of the fabricated CCD delay line are included. 相似文献
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The application of a mask-level butting technique to the design and fabrication of a very long, monolithic silicide infrared (IR) charge-coupled device (CCD) line array is described. This technique gives a continuous line of 896 IR sensing elements. The number of IR detectors (the length of the array) can be varied as required at the device dicing and packaging stages. The maximum array length is limited only by the silicon wafer size and the processing yield 相似文献
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Charge-coupled imaging devices: Experimental results 总被引:1,自引:0,他引:1
《Electron Devices, IEEE Transactions on》1971,18(11):992-996
The design and fabrication of a 96-element 3-phase linear charge-coupled device are described. A transfer efficiency of ∼95 percent over 288 transfers at a 1-MHz clock rate was measured. The use of the device as an analog delay line is demonstrated and its imaging properties are illustrated with reproductions of black and white text and a picture with gray scale. The results demonstrate the feasibility of using self-scanned imaging devices in practical applications. Configurations are presented for both an improved linear and an area imaging device. In both cases the problem of image smear, which occurs if stored charge is transferred along the light-sensitive region and if significant light integration takes place during this transfer, can be avoided. 相似文献