An ultrasonic piezoelectric motor utilizing axial-torsional coupling in a pretwisted non-circular cross-sectioned prismatic beam

A rotary piezoelectric motor design with simple structural components and the potential for miniaturization using a pretwisted beam stator is demonstrated in this paper. The beam acts as a vibration converter to transform axial vibration input from a piezoelectric element into combined axial-torsional vibration. The axial vibration of the stator modulates the torsional friction forces transmitted to the rotor. Prototype stators measuring 6.5 x 6.5 x 67.5 mm were constructed using aluminum (2024-T6) twisted beams with rectangular cross-section and multilayer piezoelectric actuators. The stall torque and noload speed attained for a rectangular beam with an aspect ratio of 1.44 and pretwist helix angle of 17.7 degrees C were 0.17 mNm and 840 rpm with inputs of 184.4 kHz and 149 mW, respectively. Operation in both clockwise and counterclockwise directions was obtained by choosing either 70.37 or 184.4 kHz for the operating frequency. The effects of rotor preload and power input on motor performance were investigated experimentally. The results suggest that motor efficiency is higher at low power input, and that efficiency increases with preload to a maximum beyond which it begins to drop.     

A piezoelectric motor using flexural vibration of a thin piezoelectric membrane

This paper describes a new implementation of a disk-type piezoelectric motor, whose stator is a commercial available piezomembrane composed of a nickel alloy disk to which a piezoceramic disk is bonded. The two disks are concentric, and the total thickness is very small. Ultrasonic motors are based on the concept of driving a rotor by mechanical vibration excited on a stator, via the piezoelectric effect. The rotor is in contact with the stator, and the driving force is the frictional force between rotor and stator. To transform the mechanical vibration of the stator in the rotor rotation, a traveling wave must be excited on the stator surface. The proposed motor can be regarded as a disk-type, single wavelength motor in which the traveling wave is due to the natural flexural vibration of the piezomembrane at low frequency. The behavior of the stator is analyzed both theoretically, by using the theory of isotropic and homogeneous vibrating plates, and by means of a commercial finite element computer code, finding a good agreement with the experimental results. The main features of the motor are very small thickness, appreciable torque, and high speed, obtained with low input power at low voltage; the intended application is to substitute the moving-coil in analogic instrumentation.     

新型箝位式压电电机的设计研究

针对传统箝位式压电电机在谐振态下工作时,方波振动的箝位部分结构设计复杂问题,提出一种新型箝位式压电电机。该电机箝位部分与驱动部分均由同频正弦电压驱动实现正弦振动,通过定子对动子的箝位接触,实现动子单向输出运动。相较于传统箝位式压电电机和超声电机,该电机的定子结构设计无需采用模态简并,结构设计难度降低。利用有限元仿真确定定、动子结构参数,制造样机并搭建实验平台。对箝位部分分别采用正弦波与方波做激励,再对驱动部分进行波形对比,表明正弦波亦能达到预期效果。实验结果表明:准静态时,激励电压频率为250Hz、电压峰峰值Vp-p为10V时,步进距离为0.5μm,步进速度0.13mm/s;谐振态时,激励电压频率为540Hz、电压峰峰值Vp-p为70V时,步进距离为32μm,步进速度16.9mm/s;该电机可兼顾低频高分辨率和高频高速输出以实现跨尺度工作。     

Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate

This paper presents the design, fabrication, and characterization of a new type of standing wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or cymbal, to convert the contour mode vibrations of a square piezoelectric ceramic plate into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic-fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted, and the geometry was varied to include different material thicknesses, fin lengths, and inclinations. The best stall torque and no load speed for a 25-mm square motor were 0.72 Nmm and 895 r/minute, respectively. The behavior of the stator structure was analyzed by ANSYS finite element software using harmonic and modal analyses. The vibration mode estimated by finite element modeling (FEM) was confirmed by laser Doppler vibration measurements.     

Improvement of the longitudinal vibration system for the hybrid transducer ultrasonic motor

This paper presents a symmetric hybrid transducer ultrasonic motor designed to produce large longitudinal vibration stress in the rotor/stator contact interface for high-torque operation. The nodal plane of the longitudinal vibration mode was adjusted to match the rotor/stator contact interface, and the piezoelectric ceramic disks for the longitudinal vibration were installed at the nodal plane of the longitudinal vibration mode for effective excitation. An experimental motor, 20 mm in diameter, using the first torsional vibration mode and the second longitudinal vibration mode was manufactured. A maximum torque of 0.8 N.m was achieved in the prototype, an improvement over previous versions.     

A novel multi-degree-of-freedom thick-film ultrasonic motor

This paper describes a new multi-degree-of-freedom (MDOF) ultrasonic motor that comprises few parts and is based on low-cost thick-film technology. Conventional ultrasonic motors using bulk lead zirconate titanate (PZT) or thin-film PZT layers are relatively expensive at the present time. Thick-film printed PZT technology provides the opportunity to reduce the costs of ultrasonic motors. To demonstrate the feasibility of this approach, an ultrasonic motor was fabricated from alumina using thick-film printed PZT actuators. The thick-film PZT and electrode layers were printed on a thin alumina plate, and a tiny cylinder was mounted at its center. This cylinder magnifies the lateral displacement of the stator, holds the spherical rotor, and transmits the driving force to the sphere. Three bending vibrations, B₂₂, B₃₀, B₀₃, of the plate were applied to rotate the sphere. Sufficient displacements for rotating the sphere were obtained near the resonance of B₂₂ by applying an excitation voltage of 200 V peak-to-peak via a three-phase drive circuit. Rotations in three orthogonal directions have been observed by controlling the phase of the driving signal to the PZT electrodes, and a MDOF ultrasonic motor was successfully realized     

Modeling of a piezoelectric rotary ultrasonic motor

A piezoelectric rotary ultrasonic motor is modeled for the purpose of predicting, a priori, motor performance as a function of design parameters. The Rayleigh-Ritz assumed mode energy method is used to model the distributed piezoceramics and the traveling wave dynamics of the stator. Natural frequencies and modeshapes are obtained for a generally configured motor. Nonlinear normal and tangential interface forces between the rotor and stator are incorporated into the forcing function along with the linear piezoelectric forcing. Given the applied torque, applied axial loading, and piezo drive voltages as inputs to the model, general motor performance measures are obtained-namely speed, input power, output power, and efficiency. The approach presented here provides a general framework for modeling these motors as well as a design tool for optimizing prototypes with the added flexibility of allowing for a wide variety of geometries and materials     

Flextensional ultrasonic piezoelectric micro-motor

This paper presents the experimental design, construction, and operational characteristics of a new type of standing wave piezoelectric ultrasonic micro-motor. The motor uses a composite stator, consisting of a metallic flex-tensional mode converter, or "cymbal", bonded to a 2-mm-square piezoelectric plate. The cymbal converts contour-mode vibrations of the plate into oscillations in the cymbal, perpendicular to the stator plane. These are further converted into rotational movement in a rotor pressed against the cymbal by means of an elastic-fin friction drive to produce the required rotary actuation. The motor operates on a single-phase electrical supply, and direct control of the output speed and torque can be achieved by adjusting the amplitude and frequency of the supply voltage. Noncontact optical techniques were used to assess the performance of the developed micro-motor. The operational characteristics were developed from the acceleration and deceleration characteristics. No-load output speed (11 rev s(-1)) and stall torque (27 nNm) were derived using high-speed imaging and image analysis. Maximum efficiency was 0.6%.     

Analysis of a disk-type piezoelectric ultrasonic motor using impedance matrices

The dynamic behavior and the performance characteristics of the disk-type traveling wave piezoelectric ultrasonic motors (USM) are analyzed using impedance matrices. The stator is divided into three coupled subsystems: an inner metal disk, a piezoelectric annular actuator with segmented electrodes, and an outer metal disk with teeth. The effects of both shear deformation and rotary inertia are taken into account in deriving an impedance matrix for the piezoelectric actuator. The impedance matrices for each subsystem then are combined into a global impedance matrix using continuity conditions at the interfaces. A comparison is made between the impedance matrix model and the three-dimensional finite element model of the piezoelectric stator, obtaining the resonance and antiresonance frequencies and the effective electromechanical coupling factors versus circumferential mode numbers. Using the calculated resonance frequency and the vibration modes for the stator and a brush model with the Coulomb friction for the stator and rotor contact, stall torque, and no-load speed versus excitation frequencies are calculated at different preloads. Performance characteristics such as speed-torque curve and the output efficiency of the USM also are estimated using the current impedance matrix and the contact model. The present impedance model can be shown to be very effective in the design of the USM.     

Piezoelectric micromotor using a metal-ceramic composite structure

This paper presents a new piezoelectric micromotor design, in which a uniformly electroded piezoelectric ring bonded to a metal ring is used as the stator. Four inward arms at the inner circumference of the metal ring transfer radial displacements into tangential displacements. The rotor ends in a truncated cone shape and touches the tips of the arms. A rotation takes place by exciting coupled modes of the stator element, such as a radial mode and a second bending mode of the arms. The behavior of the free stator was analyzed using the ATILA finite element software. Torque vs. speed relationship was measured from the transient speed change with a motor load. A starting torque of 17 muNm was obtained at 20 Vrms. The main features of this motor are low cost and easy assembly because of a simple structure and small number of components.     

利用音叉共鸣结构的大振幅双足压电直线电机

本文提出了一种根据人类行走姿态加以抽象的新型双足压电直线电机。音叉共鸣结构的引入使得驱动足可以产生大振幅,而且提高了压电换能效率,低电压即可驱动。驱动足实现大振幅的意义在于大大降低了对于导轨的要求,木轨、塑料轨等首次成为压电超声波电机的驱动导轨。本文建立了该电机简化的动力学模型,分析了定子拓扑结构、配重等设计参数对于输出机械性能的影响,给出了设计准则。通过实验测出了该电机的输出特性,最高输出速度为210mm/s,最大输出力为0. 5N。     

大力矩径向驻波型超声波电机有限元分析与实验研究

提出了一种大力矩径向驻波型超声波电机,在实现电机大力矩输出的同时保持结构紧凑的特点。首先设计并分析了电机的结构和工作原理,采用有限元法分析了电机定子的振动特性。接着制作了超声波电机样机,样机直径为32 mm。采用激光测振仪测量了定子的共振频率及径向振动的振幅,测量结果与理论分析结果相吻合。最后,搭建了电机输出特性测试平台,测量了电机在不同电压下的转矩-转速特性。实验测试结果显示,定子工作模态的共振频率为73.3 kHz,当施加的电压幅值为100 V、频率为74 kHz时,电机的空载转速为45 r/min,堵转力矩达到0.41 N·m。与其他同尺寸的超声波电机相比,所提出的径向驻波型超声波电机具有更大的堵转力矩。     

Hybrid transducer type ultrasonic motor

A type of ultrasonic motor whose stator is composed of a torsional vibrator and multilayered piezoelectric actuators is proposed and has been fabricated for trial. The stator is operated at the resonance frequency of the torsional vibration. The vibrator generates the mechanical output force and the actuators control the frictional force. The construction provides for arbitrary Lissajous's figures at the contacting surface and contributes to large mechanical output power with high efficiency and bidirectional motion. It also gives greater freedom of design. The prototype motor produced a maximum torque of 7 kg-cm and a maximum efficiency of 33%     

Force transfer model and characteristics of hybrid transducer type ultrasonic motors

The characteristics of longitudinal-torsional hybrid transducer-type ultrasonic motors (HTUSM) are low speed and high torque. The discontinuous-surface-contact mode between the stator and the rotor is different from the many-point-contact mode of traveling wave motors, which is also an essential cause for high torque. Therefore, it is important to analyze its force transfer model between the rotor and the stator. In this paper, issues of using the method of equivalent circuit model are addressed. The relationships between the contact angle, preload, and physical parameters of frictional materials are given, according to the impulse conservation law axially. The equations describing output torque, amplitudes of longitudinal and torsional vibration, and parameters of the rotor are derived according to the principle that the work done by the load is equal to that by the driving force in one vibrating cycle. All factors that influence the mechanical characteristics are analyzed, and accuracy and suitability of the force transfer model are verified by comparison with the prototype motor. The formula for transfer efficiency on the stator/rotor interface is given, and the low-efficiency of this type motor is explained. The wide-working frequency range property of this type motor is shown with experimental results. Based on this study, the parameters of the rotor and preload are determined. The maximum torque of the prototype motor is up to 13.2 nm, and no-load speed of this type of motor is 12.5 rpm.     

Finite-element analysis of the rotor/stator contact in a ring-type ultrasonic motor

A way to understand mechanical characteristics of an ultrasonic motor is presented. First, the vibration mode of a stator is calculated using a finite-element method (FEM) code. The path of the elliptic motion of the stator's teeth is obtained. The computed vibration mode at the surface of the stator is compared with that measured by an electrooptical displacement transducer. Next, the contact condition of the rotor/stator is calculated. The displacement and velocity of the rotor/stator, the distortion of the stick/slip area, the rotational speed of the rotor, and the friction loss of the motor are obtained. The calculated rotor displacement and torque-rotational speed curve correspond closely to the experimentally measured ones. The internal loss of the rotor/stator and the loss of the supporting felt are measured. The total loss of these losses and the calculated friction loss agree with the measured total loss. The calculated and the measured efficiency of the motor also agree.     

Piezoelectric stepper motor with direct coupling mechanism to achieve high efficiency and precise control of motion

The paper describes a piezoelectric motor that combines the merits of piezoelectric materials, such as high power density generated at electromechanical resonance, and a precise control of displacement. In the motor, a standing shear wave is excited at the resonance in the piezoelectric tube, and it produces high-frequency torsional vibrations of the stator. The vibrations are converted into unidirectional rotation of a rotor by using a direct coupling mechanism between the stator and the rotor in which a clutch drives the rotor via locking it. The direct coupling makes it possible to transmit the whole power generated in the piezoelectric tube to the rotor, and thus achieve the high efficiency of the motor. It also allows combining two regimes of operation: continuous rotation and a stepwise motion within a 360 degrees interval with a high resolution of angular displacement.     

An ultrasonic motor driven by the phase-velocity difference between two traveling waves

This paper presents a new ultrasonic motor in which the rotor rotation speed is locked by the phase-velocity difference between the two traveling waves propagating on the stator and the rotor. First, the unique construction to excite two traveling waves both in the stator and the rotor is described. Then, the operation principle of the present motor is revealed by our careful experiments. Dynamics of the two traveling waves are measured by an in-plane laser Doppler vibrometer under various conditions, as well as the motor performances. Our experiments show that the rotation speed of the motor is equal to the phase-velocity difference between the two traveling waves on the contact surfaces of rotor and stator. It is confirmed that the rotor rotates so as to cancel the phase-velocity difference between the traveling vibrations along the circumferences of the rotor and stator. If the load does not exceed the maximum torque that is determined by the vibration amplitude, the rotation speed is subject only to the phase-velocity difference.     

Numerical analysis of the symmetric hybrid transducer ultrasonicmotor

In this paper, operation of a symmetric hybrid transducer ultrasonic motor with output produced by two rotors connected together via a drive shaft is numerically analyzed and compared with the traditional asymmetric hybrid transducer motor design that produces its output from only one rotor. A one-dimensional finite element model for torsional vibration in the stator and a Coulomb friction model for rotor/stator contact associated with the longitudinal vibration of the motor are introduced. The calculation results demonstrate that the symmetric design is capable of performance comparable with the traditional asymmetric design when an optimum static spring force in the rotor/stator contact interface is applied during operation     

Stator design of a new type of spherical piezoelectric motor

The stator design of a new type of spherical motor driven by piezoelectric actuators is developed. A curved piezoelectric actuator is designed to attach to the spherical surface. A series of the curved piezoelectric actuators is laid in a line around a spherical surface. By applying an appropriate voltage signal with phase difference on neighboring actuators, a traveling wave is generated on the hemispherical shell. Each set of curved piezoelectric actuators is designed to provide motion with a single degree-of-freedom (DOF). With two or three sets of the piezoelectric actuators constructed to be mutually perpendicular, the motor can provide 2-DOF or 3-DOF motion. Stator design and analysis and experiment for the 1-, 2-, and 3-DOF conditions are presented in this article. Analytical calculation and experiment results of several fundamental characteristics of the stator are in good agreement. Performance evaluation of rotation speed and torque of the stator and some implementation problems are also addressed.     

Y形旋转超声波马达的设计与动态特性分析

为了探索和丰富旋转超声波马达的结构,使其满足响应精准且速度快以及控制简便的要求,设计了Y形旋转超声波马达,并对其结构及动态特性进行了分析。Y形旋转超声波马达将3组压电陶瓷片的横向振动复合成驱动足端面对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子顺时针或逆时针旋转。运用Workbench软件中的Design Exporation组件对Y形旋转超声波马达定子组件的结构尺寸进行了优化设计,提升了定子组件的性能。构建优化后Y形旋转超声波马达定子组件的有限元仿真模型,并通过模态分析获得了定子组件工作所需的固有振型,通过谐响应分析获得了定子组件的幅频特性曲线,通过瞬态分析获得了1个激励周期内定子组件的振动模态,验证了Y形旋转超声波马达的驱动机理。结果表明,Y形旋转超声波马达压电陶瓷片表面施加电压的最佳频率为20 739 Hz,对应的驱动足端面的振幅为6.95 μm。Y形旋转超声波马达结构简单且具有对称性,能效利用率高,对拓宽超声波马达的应用领域有重要参考价值。