纳米复合Ti-B-N薄膜的结构和摩擦学性能

研究了射频等离了体辅助化学气相沉积（PCVD）技术获得的Ti-B-N薄膜的组织结构和力学性能。结果发现，B元素的加入使薄膜中出现TiN纳米晶和BN非晶（nc-TiN／a-BN）的复合结构，其硬度显著高于TiN薄膜，最高可达40GPa。用球盘式摩擦磨损实验考察了薄膜的磨损特性。结果表明：与TiN薄膜相比，Ti-B-N薄膜抗磨损性能有显著提高，磨损机制与TiN薄膜不同，摩擦系数较TiN稍高。     

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 利用磁过滤阴极电弧镀分别在硬质合金和高速钢基体上沉积厚度约2～3μm的TiN薄膜,并用MEVVA源离子注入装置对TiN薄膜注入金属离子V+和Nb+。应用北京同步辐射装置（BSRF）的同步辐射光源,采用掠入射X射线衍射（GIXRD）的方法对TiN薄膜表面离子注入层的微观结构进行了分析研究。结果表明：未经过离子注入的TiN薄膜均存在特定方向的择优取向,而较小剂量(1×10ˇ17ions/cm2)的离子注入可以使晶粒细化、择优取向减弱或改变;当离子注入的剂量达到5×10ˇ17ions/cm2时,TiN薄膜表面离子注入层被非晶化。结合透射电镜的研究结果,观察到TiN薄膜表面非晶层的厚度约为50～100nm,并简要地讨论了离子注入过程对微观结构的影响机制。     

调制周期对TiN/Ti多层膜组织结构和结合力的影响

为了阐明调制周期对薄膜微观组织及薄膜与基体结合力的影响,采用反应磁控溅射在Ti6Al4V基板上交替沉积了Ti层及TiN层制备了TiN/Ti多层膜。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、显微硬度仪和划痕仪测量分析了薄膜的晶体结构、微观组织、硬度以及薄膜与基体之间的结合力。研究结果表明:TiN/Ti多层膜中均存在TiN,Ti和Ti2N 3种相。TiN/Ti多层膜均以柱状晶方式生长,在调制周期较大(5层)时,TiN和Ti层的界面清晰;随着调制周期的减小(层数增加),TiN和Ti层的界面逐渐消失。与单层TiN薄膜相比,多层TiN/Ti薄膜的硬度显著提高;但随着薄膜层数的增加,多层TiN/Ti薄膜硬度略微降低。当调制周期为80nm(30层)时,薄膜与基体的结合力明显提高,达到73N。     

Ti-Si-N纳米复合薄膜的结构与性能

用工业型脉冲直流等离子体增强化学气相沉积技术,在高速钢(W18Cr4V)表面沉积了Ti-Si-N复合薄膜,研究了Ti-Si-N复合薄膜的微观组织和力学性能.结果显示,薄膜相结构为纳米晶TiN和纳米晶或非晶TiSi2以及非晶相Si3N4;在Si含量为5.0 at%～28.0 at%范围内,薄膜的晶粒尺寸逐渐变大;Ti-Si-N薄膜的显微硬度相对于TiN有明显增加,最高硬度可达40 GPa;高温退火后,Ti-Si-N纳米复合薄膜的显微硬度与晶粒尺寸在800℃高温下仍然保持稳定.     

不同偏压下铀表面多弧离子镀TiN薄膜性能研究

不同偏压下利用多弧离子镀技术在U基体上制备了TiN薄膜。利用X射线衍射（XRD）分析了薄膜的微观组织结构，用扫描电镜（SEM）观察其表面形貌。结果表明：所得薄膜为单一TiN结构，薄膜表面平整、致密，但局部仍存在大颗粒。摩擦磨损实验测定了薄膜的磨损性能。随偏压的上升，摩擦系数由0．421变为0．401。同时利用X射线光电子能谱分析仪（XPS）对湿热腐蚀20d后的样品进行了分析，并利用电化学极化实验在0．5μg/g CT溶液中测试了基体及薄膜耐蚀性能。结果表明：TiN涂层提高了贫铀的抗腐蚀性能。     

磁控溅射制备TiWN/MOS2薄膜及其微观结构和摩擦学性能研究

采用磁控溅射方法在40Gr不锈钢基体上,沉积了TiN及TiWN单层薄膜、TiN/MoS2及TiWN/MoS2双层薄膜,对比分析了薄膜的成分、相结构、微观形貌及摩擦学性能.结果表明:根据W含量的不同,TiWN薄膜中,Ti0.67W0.33N膜层具有较高的硬度和弹性模量;TiWN/MoS2薄膜中,TiWN层主要含有TiN和...     

钛合金表面非平衡磁控溅射制备TiN薄膜的冲击磨损性能

文中利用非平衡磁控溅射技术在Ti6Al4V合金表面沉积TiN薄膜.固定冲击频率、改变冲击载荷,在小载荷冲击磨损试验机上进行了系列周次的冲击磨损试验,用台阶仪、扫描电子显微镜、X射线衍射仪分析磨痕深度、形貌及相结构,并探讨了TiN薄膜的磨损机理.试验表明:TiN薄膜的冲击磨损机理主要为塑性变形和疲劳剥落,与基体材料作比较,TiN薄膜破坏的临界冲击周次比基体材料Ti6Al4V合金明显提高.     

IBED Si_3N_4和TiN薄膜的成份、结构与摩擦学性能

本文考察了工艺参数对离子束增强沉积（IBED）氮化硅、氮化钛薄膜的成分和微观组织的影响。测定了薄膜的硬度以及薄膜与基体之间结合力，分析了成分和结构与薄膜的硬度和结合力的关系。考察了在不同载荷和速度条件下St_3N_4、TiN薄膜和52100钢试样的摩擦系数和耐磨性。结果显示，与无膜的52100相比，IBEDSt_3N_4和IBEDTiN的耐磨性成倍提高。探讨了薄膜的磨损机理。     

TiN、AlN薄膜的摩擦磨损和抗高温氧化性能及机制

采用电弧离子镀工艺在1Cr18Ni9Ti奥氏体不锈钢表面沉积TiN、AlN薄膜,通过扫描电镜、摩擦磨损试验和高温氧化试验等方法研究了薄膜的微观结构、化学成分与其摩擦性能和抗高温氧化性能之间的关系,同时探讨了薄膜的摩擦磨损机制和高温氧化机制.     

等离子体浸没离子注入与沉积合成TiN薄膜的滚动接触疲劳寿命和机械性能

采用等离子体浸没离子注入与沉积（PIII＆D）技术在AISI 52100轴承钢表面合成了高硬耐磨的TiN薄膜.膜层元素分布、化学组成和表面形貌分别用XRD,XPS表征.合成薄膜前后试样的滚动接触疲劳寿命和摩擦磨损性能分别由球棒疲劳磨损试验机和球-盘磨损试验机测定;疲劳破坏后的微观形貌通过SEM观察;薄膜力学性能经纳米压痕和纳米划痕实验评价.结果表明,TiN膜中还含有少量的TiO2和Ti,N,O的化合物.在优化条件下,TiN膜层致密均匀,与基体结合良好,纳米硬度和弹性模量分别达到25和350 GPa;最低摩擦系数由基体的0.92下降到0.2.被处理薄膜试件在90%置信区间下的最大L10,L50,La和-↑L寿命较基体分别提高了约4.5,1.8,1.3和1.2倍,疲劳寿命的分散性得到了显著改善.     

Frictional property of Ti-B-N coating with preferred grain orientations deposited by arc ion plating under dry condition

It was shown in the previous paper that the low coefficients of friction of TiN coatings with (111) preferred grain orientation were measured under dry condition. In this paper, the new Ti-B-N coatings with (111) preferred grain orientation were developed for the industrial application. The coefficients of friction of the Ti-B-N coatings against steel materials were measured by ball-on-disc friction tester. As a result, it was found that the Ti-B-N coatings were able to maintain the low coefficients of friction over long sliding distance under severe sliding condition in comparison with the TiN coatings. It is understood that the Ti-B-N coatings have the possibility of being applied to the sliding parts of industrial machines under dry condition.     

硼含量对Ti-B-N纳米复合涂层显微结构与性能的影响

将硼加入Ti－N涂层,使用活化离子镀制备出了硼含量为（5～16）at％的Ti－B－N涂层,并着重研究了硼含量对Ti－B－N涂层结构与性能的影响。EPMA与AES分析表明,Ti－B－N涂层元素Ti、B、N在涂层内分布均匀,但在膜／基界面处有一界面扩散区。TEM显微分析表明,Ti－B－N涂层为致密微细的纳米晶多相复合结构,晶粒度不超过50nm。XRD与XPS综合分析表明,Ti－B－N涂层主要由面心立方TIN、简单正交TiB、立方BN与简单六方Ti－B－N相组成,且随着硼含量的增加,含硼相含量增加。Ti－B－N涂层的硬度、韧性与附着强度等力学性能比相应的Ti－N涂层要好得多,且其沉积温度更低。     

W、Mo离子注入对离子镀TiN薄膜表面结构和性能的影响

目的进一步改善氮化钛薄膜的摩擦学性能。方法利用金属蒸汽真空弧源(MEVVA)在离子镀TiN薄膜表面进行等剂量W、Mo离子注入。采用扫描俄歇系统、光学三维形貌仪、X射线衍射仪和纳米压痕仪,分别分析了TiN薄膜的离子注入深度、表面形貌及粗糙度、相结构和不同压入深度的薄膜硬度。在球盘滑动摩擦磨损试验机上考察了TiN薄膜的摩擦学性能,并利用扫描电子显微镜和三维形貌仪对其磨损形貌进行分析。结果等剂量离子注入后,TiN表面注入层中W离子的含量明显大于Mo离子,两种离子注入对TiN薄膜的表面形貌和硬度的影响较小。XRD结果表明,W离子和Mo离子注入后均发现了Ti_2N硬质相。两种离子注入均可以不同程度地降低TiN薄膜的摩擦系数和磨损率。结论 W、Mo离子注入均可显著改善TiN薄膜的摩擦学性能,但Mo离子更有利于其摩擦系数的降低,而W离子注入更有利于TiN薄膜磨损率的降低。     

TiN/TiCN/Al2O3/TiN与TiN/TiCN/Al2O3/TiCNO多层涂层的组织性能比较

目的对比TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层的组织性能。方法采用化学气相沉积(CVD)技术在硬质合金基体上沉积TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层。通过X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析涂层的物相和组织形貌,采用纳米力学测试系统测试涂层顶层的硬度和弹性模量,利用显微维氏硬度计和划痕仪分别测量涂层的显微硬度和结合强度,利用往复式多功能摩擦磨损试验机研究涂层的摩擦磨损性能。结果顶层TiN晶粒为柱状晶,顶层TiCNO晶粒呈细针状。与顶层TiN相比,顶层TiCNO硬度更大,抗塑性变形能力更强。与以TiN为顶层的多层涂层相比,以TiCNO为顶层的多层涂层表面粗糙度、摩擦系数较大,结合强度较低。当磨损只发生在顶层时,耐磨性取决于顶层涂层的性能,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率为TiN/TiCN/Al_2O_3/TiCNO的1.2倍。当磨损进行到顶层与Al_2O_3层界面时,结合强度对耐磨性也有重要影响,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率是TiN/TiCN/Al_2O_3/TiCNO的82%。结论与TiN/TiCN/Al_2O_3/TiN相比,TiN/TiCN/Al_2O_3/TiCNO的顶层TiCNO硬度较大,抗塑性变形能力强,其顶层耐磨性较好。改善TiN/TiCN/Al_2O_3/TiCNO多层涂层表面粗糙度和结合强度将进一步提高该涂层的摩擦磨损性能。     

Structure-property-performance relations of high-rate reactive arc-evaporated Ti-B-N nanocomposite coatings

This study demonstrates the successful synthesis of hard and wear resistant nanocomposite Ti-B-N coatings by high-rate reactive arc-evaporation from Ti/B compound targets in a commercial industrial-sized deposition chamber. Morphological investigations by profilometry and scanning electron microscopy indicate that the coatings exhibit a lower droplet density as compared to a TiN reference as well as a compositionally graded multilayer structure. These results will be related to the previously reported microstructural characterization, which revealed a highly stressed nanocrystalline TiBN solid solution formed at lower N₂ fractions and a stable TiN/(amorphous) BN dual-phase structure obtained at higher N₂ partial pressures. Emphasis is further laid on mechanical and tribological characterization. A maximum hardness of 34.5 GPa is detected for the TiBN solid solution decreasing to 24 GPa for the coatings containing approximately 30-40 vol.% amorphous BN. The maximum in hardness coincides with the minimum in wear, while the coefficient of friction is fairly constant at 0.7-0.8.     

Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings

The structural, morphological, mechanical and tribological characterization of nanoscaled multilayer TiN/TaN coatings deposited by magnetron sputtering technology were investigated by low angle X-ray diffractometry, high angle X-ray diffractometry, atomic force microscopy, microhardness, pin-on-disc testing and 3-D surface profiler. The results show that the TiN/TaN coatings exhibit good modulation period and sharp interface between TiN and TaN layers. In mutilayered TiN/TaN coatings, TiN layers have cubic structure, but hexagonal structure emerged among TaN layers besides cubic structure as modulation period is beyond 8.5 nm. The mierohardness is affected by modulation period and the maximum hardness value of 31.5 GPa appears at a modulation period of 8.5 rim. The coefficient of friction is high and the wear resistance is improved for TiN/TaN coatings compared with those of TiN coating; the wear mechanism exhibits predominantly ploughing, material transfer and localized spallation.     

Friction and wear properties of TiN,TiAlN, AlTiN and CrAlN PVD nitride coatings

Four nitride coatings, TiN, TiAlN, AlTiN and CrAlN were deposited on YG6 (WC + 6 wt.% Co) cemented carbide by cathodic arc-evaporation technique. The friction and wear properties were investigated and compared using ball-on-disc method at high speed with SiC ball as a counter material. The tests were evaluated by scanning electron microscopy, X-ray diffractometer, energy dispersive X-ray, micro hardness tester and an optical profilometer. The results showed that TiN and TiAlN coatings presented lower friction coefficient and lower wear rate, and that high Al content AlTiN and CrAlN coatings didn't present better anti-wear properties in this test. Oxidation and abrasive wear were the main wear mechanism of TiN coating. In spite of the observation of micro-grooves and partial fractures, TiAlN possessed perfect tribological properties compared with the other coatings. High Al content increased the chemical reactivity and aroused severe adhesive wear of AlTiN coating. CrAlN coating presented better properties of anti-spalling and anti-adhesion, but abundant accumulated debris accelerated wear of the coating under this enclosed wear environment.     

多弧离子镀制备CrAlSiN/TiAlSiN纳米涂层的结构和性能研究

目的研究调制周期对CrAlSiN/TiAlSiN纳米复合涂层结构和力学性能的影响。方法采用多弧离子镀技术,以AlCrSi靶和AlTiSi靶作阴极弧靶材料,通过改变衬底的转速(转速分别为2、4、6、8r/min)来调整涂层结构的周期,制备不同调制周期CrAlSiN/TiAlSiN纳米复合涂层。用X射线衍射仪、X射线光电子能谱仪、扫描电子显微镜和原子力显微镜,测量了涂层的组织结构、化学成分、表面及截面形貌,用显微硬度计、划痕试验仪和摩擦仪测量了不同调制周期的涂层的力学性能。结果不同转速下,CrAlSiN/TiAlSiN纳米复合涂层具有相同的晶相结构,包含CrAl、CrN和TiN,其中Al元素几乎全部固溶在CrAl相中。Si元素在涂层中以非晶相的形式存在或被非晶化合物所包裹。随着转速的增大,复合涂层的硬度呈现先增大后减小的趋势,而摩擦因数与均方根粗糙度则呈现出先减小后增大的趋势,即硬度越大,摩擦因数和均方根粗糙度越小。结论CrAlSiN/TiAlSiN纳米复合涂层的硬度和摩擦因数受调制周期的影响较大。当转速为6r/min时,制备的涂层具有最大的显微硬度(38GPa)和最小的摩擦因数(0.375)。     

TiN-Coating Effects on Stainless Steel Tribological Behavior Under Dry and Lubricated Conditions

The tribological properties of magnetron sputtered titanium nitride coating on 316L steel, sliding against Si₃N₄ ceramic ball under dry friction and synthetic perspiration lubrication, were investigated. The morphology of the worn surface and the elemental composition of the wear debris were examined by scanning electron microscopy and energy dispersive spectroscopy. TiN coatings and 316L stainless steel had better tribological properties under synthetic perspiration lubrication than under dry friction. Among the three tested materials (316L, 1.6 and 2.4 μm TiN coatings), 2.4 μm TiN coating exhibits the best wear resistance. The difference in wear damage of the three materials is essentially due to the wear mechanisms. For the TiN coating, the damage is attributed to abrasive wear under synthetic perspiration lubrication and the complex interactive mechanisms, including abrasive and adhesive wear, along with plastic deformation, under dry friction.