共查询到19条相似文献,搜索用时 906 毫秒
1.
生物微机电系统 (BioMEMS)集微传感器、微驱动器、微流体系统、微光学系统及微机械元件于一体 ,广泛应用于生物学、医学和生物医学工程等领域 ,是一个新的交叉研究学科。本文概述了BioMEMS的研究内容和发展方向 ,给出了部分BioMEMS研究结果 相似文献
2.
生物微机电系统(BioMEMS)集微传感器、微驱动器、微流体系统、微光学系统及微机械元件于一体,广泛应用于生物学、医学和生物医学工程等领域,是一个新的交叉研究学科.本文概述了BioMEMS的研究内容和发展方向,给出了部分BioMEMS研究结果. 相似文献
3.
BioMEMS--生物医学诊断和治疗的桥梁 总被引:2,自引:0,他引:2
生物微机电系统(BioMEMS)集微传感器、微驱动器、微流体系统、微光学系统及微机械元件于一体,广泛应用于生物学、医学和生物医学工程等领域,是一个新的交叉研究学科。本文概述了BioMEMS的研究内容和发展方向,给出了部分BioMEMS研究结果。 相似文献
4.
微机电系统(MEMS)是在微电子及微机械等学科基础上发展起来的新兴多学科交叉研究领域,是当今科学技术最具潜力的发展方向之一,而微型流体分析系统是这一研究领域中的热点。本文综述了MEMS技术以及作为MEMS技术一个重要研究方向的微型流体分析系统的起源及其广阔的市场应用前景.并对MEMS产品的市场化存在的问题进行了讨论。MEMS技术及微型流体分析系统的诞生必将对今后的化学、医学及生物学等领域的研究工作产生重大影响。 相似文献
5.
6.
基于微加工技术的微流体系统是微机电系统(MEMS)的一个重要分支,可广泛应用于航空航天、生物、医学、化工、电子等领域。本文主要综述了微流体系统中的微型泵结构、工作原理以及国内外研究现状。 相似文献
7.
8.
9.
亚洲加速MEMS研发和微系统组装 总被引:2,自引:0,他引:2
亚洲是全球微电子产品增长较快的地区。MEMs是业内人士公认的21世纪的新的技术增长点,而封装技术在微电子与MEMS制造中发挥着越来越重要的作用。本文论述了亚洲,尤其是中国和中国台湾在MEMS研究与微系统组装技术领域的发展现状与趋势。 相似文献
10.
微机电系统(MEMS)是在微电子技术的基础上兴起的一个多学科交叉的前沿领域,集约了当今科学技术发展的许多尖端成果,在汽车电子、航空航天、信息通讯、生物医学、自动控制、国防军工等领域应用前景广阔.该文介绍了微机电系统发展的背景与基础理论研究,综述了微机电系统所涉及的器件设计、制作材料、3大加工工艺(硅微机械加工、精密微机械加工与光刻、电铸和注塑(LIGA)技术)、微封装与测试等关键技术,总结了微机电系统在微纳传感器、微执行器、微机器人、微飞行器、微动力能源系统、微型生物芯片等方面的典型应用,最后指明了MEMS技术的发展趋势,有望在近几十年将大量先进的MEMS器件从实验室推向实用化和产业化. 相似文献
11.
MEMS传感器和智能传感器可以被称为新时代传感器的典型代表,在智能化以及集成化方面体现出独特的优势。随着我国科学技术发展水平的提高,MEMS传感器和智能传感器也处于不断发展的过程中,同时应用的范围不断拓宽,为各行各业带来了极大的便利。文章对此展开分析。 相似文献
12.
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices 总被引:1,自引:0,他引:1
Bharat Bhushan 《Microelectronic Engineering》2007,84(3):387-412
The micro/nanoelectromechanical systems (MEMS/NEMS) need to be designed to perform expected functions typically in millisecond to picosecond range. Expected life of the devices for high speed contacts can vary from few hundred thousand to many billions of cycles, e.g., over a hundred billion cycles for digital micromirror devices (DMDs), which puts serious requirements on materials. For BioMEMS/BioNEMS, adhesion between biological molecular layers and the substrate, and friction and wear of biological layers may be important. There is a need for development of a fundamental understanding of adhesion, friction/stiction, wear, and the role of surface contamination, and environment. Most mechanical properties are known to be scale dependent. Therefore, the properties of nanoscale structures need to be measured. MEMS/NEMS materials need to exhibit good mechanical and tribological properties on the micro/nanoscale. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. Methods need to be developed to enhance adhesion between biomolecules and the device substrate. Component-level studies are required to provide a better understanding of the tribological phenomena occurring in MEMS/NEMS. The emergence of micro/nanotribology and atomic force microscopy-based techniques has provided researchers a viable approach to address these problems. This paper presents a review of micro/nanoscale adhesion, friction, and wear studies of materials and lubrication studies for MEMS/NEMS and BioMEMS/BioNEMS, and component-level studies of stiction phenomena in MEMS/NEMS devices. 相似文献
13.
A BioMEMS review: MEMS technology for physiologically integrated devices 总被引:11,自引:0,他引:11
GRAYSON A.C.R. SHAWGO R.S. JOHNSON A.M. FLYNN N.T. YAWEN LI CIMA M.J. LANGER R. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》2004,92(1):6-21
MEMS devices are manufactured using similar microfabrication techniques as those used to create integrated circuits. They often, however, have moving components that allow physical or analytical functions to be performed by the device. Although MEMS can be aseptically fabricated and hermetically sealed, biocompatibility of the component materials is a key issue for MEMS used in vivo. Interest in MEMS for biological applications (BioMEMS) is growing rapidly, with opportunities in areas such as biosensors, pacemakers, immunoisolation capsules, and drug delivery. The key to many of these applications lies in the leveraging of features unique to MEMS (for example, analyte sensitivity, electrical responsiveness, temporal control, and feature sizes similar to cells and organelles) for maximum impact. In this paper, we focus on how the biological integration of MEMS and other implantable devices can be improved through the application of microfabrication technology and concepts. Innovative approaches for improved physical and chemical integration of systems with the body are reviewed. An untapped potential for MEMS may lie in the area of nervous and endocrine system actuation, whereby the ability of MEMS to deliver potent drugs or hormones, combined with their precise temporal control, may provide new treatments for disorders of these systems. 相似文献
14.
15.
计算机的出现使得人类的生产效率取得了巨大的提升,社会不断发展进步,而计算机科学与技术的应用也给人类的生活带来了翻天覆地的变化。想要抓住工业革命所带来的无限发展机遇,就要深入探讨计算机科学与技术的发展和应用。文章从计算机和计算机科学与技术的概念出发,探讨了计算机的发展历程、发展方向和计算机科学与技术的发展方向与应用领域,以期能够抓住时代发展的命脉,在计算机科学与技术上引领潮流。 相似文献
16.
Lee Y.C. Amir Parviz B. Chiou J.A. Shaochen Chen 《Advanced Packaging, IEEE Transactions on》2003,26(3):217-226
Packaging is a core technology for the advancement of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). We discuss MEMS packaging challenges in the context of functional interfaces, reliability, modeling and integration. These challenges are application-dependent; therefore, two case studies on accelerometers and BioMEMS are presented for an in-depth illustration. Presently, most NEMS are in the exploratory stage and hence a unique path to identify the relevant packaging issues for these devices has not been determined. We do, however, expect the self-assembly of nano-devices to play a key role in NEMS packaging. We demonstrate this point in two case studies, one on a silicon nanowire biosensor, and the other on self-assembly in molecular biology. MEMS/NEMS have the potential to have a tremendous impact on various sectors such as automotive, aerospace, heavy duty applications, and health care. Packaging engineers have an opportunity to make this impact a reality by developing low-cost, high-performance and high-reliability packaging solutions. 相似文献
17.
18.
随着社会的快速发展,计算机电子信息工程技术也在不断发展,其作用越来越明显,已经成为促进我国高科技发展的重要力量。但在实践中,该技术仍有很多地方需要改进。基于这一背景,文中全面探讨了计算机电子信息工程技术应用中的安全问题。 相似文献
19.
随着科学技术的不断发展与进步,计算机网络信息已经成为人们生活中不可缺少的一部分,不仅给人们的生活带来了诸多便利,而且技术创新使得技术更加符合人性化需求,特别是在计算机领域中应用云计算技术。云计算技术是一种新型的科学技术,在多个领域被广泛应用。因此,重点阐述计算机数据处理中云计算技术的应用,并研究顺应时代发展潮流的发展方案。 相似文献