使用二维视觉测头实现三维测量的方法研究

提出了探针扫描和深度聚焦的两种方法,实现了使用二维视觉测头对Z向的测量。两种方法均基于自动聚焦原理。对采集到的图像去噪和聚焦曲线平滑后,使用峰值附近点进行高斯函数拟合,寻找准焦点。根据得到的XYZ向的数据实现三维重构。与接触式测量相比,本文方法Z向测量的最大偏差不到6μm。     

虚拟齿轮测量中心工件模型预处理算法研究

在虚拟齿轮测量中心对复杂模型进行测量时,存在大量碰撞检测数据,提出一种碰撞检测前对模型表面数据提前预处理的方法。该方法采用空间体素数据结构算法思想,使测头能够准确获得有可能发生碰撞的模型表面数据,相比于原有遍历式扫描检测算法,避免了频繁计算测头到模型各个三角面片的距离,提高了算法效率。结合开发的虚拟齿轮测量中心软件系统进行预处理算法的测试评估,通过试验验证了预处理算法的可行性和正确性,最终实现了工件模型预处理功能。     

Model for surface-roughness parameters determination in a virtual machine shop environment

A virtual reality machine shop environment was developed and integrated with a graphical model for the calculation of quantitative data affecting the roughness of a machined surface. During the machining process simulation in the virtual environment, material removal and milling machine axes kinematics are visualized in real time and qualitative parameters related to the process feasibility are evaluated. The model determines the machined surface topomorphy as a cloud of points retrieved from the visualization system Z buffer and surface roughness is calculated. The current study is focused on the methodology for the verification of the quantitative data acquired by the system. Results were verified with data determined in cutting experiments and by another numerical model that was integrated into the system. The results were found to be in agreement with both the numerical model and the experiments.     

Machining and dimensional inspection of spatial cams on 5-axis machine tools

An analytical methodology is developed for NC data generation to produce and measure spatial cams on 5-axis machine tools. The Denavit-Hartenberg notation is used for expressing the ability function of the employed machine tool and in the generation of the desired cutter/measuring-probe location. NC data equations are determined by equating the corresponding elements of the machine tool's ability function to the desired tool location matrices. To validate this methodology, a designed cam was machined and its surfaces were measured by an online measurement system equipped with a touch-trigger probe on a 5-axis machine tool. The resultant cutting speed and material-removal rate during machining are also investigated. This methodology is a general one and is applicable to various spatial cams. It also combines the activities of design, manufacturing, and measurement, thus making the production process more flexible, automatic, and controllable.     

<Emphasis Type="Bold">Determination of the Optimal Parameters for Freeform Surface Measurement and Data Processing in Reverse Engineering</Emphasis>

One objective of this work is to determine the optimal combination of the probe diameter and grid distance for freeform surface measurement, and another is to determine the optimal parameters for the local Shepard interpolation. The optimal combination of the probe diameter and grid distance for freeform surface measurement was determined through a Taguchi matrix experiment. The smaller the probe diameter and grid distance, the better the accuracy of the surface normal based on the configured matrix experimental result. The optimal parameters, namely the exponent and the radius R, for the local Shepard interpolation were determined by using the minimisation method of the root-mean-square normalised error (RMSNE) between the measured data points and the theoretical data points on a standard steel ball surface. The optimal parameters determined were actually applied to the measurement of a freeform surface (mouse surface) on a coordinate measuring machine (CMM). The local Shepard interpolation method was used to interpolate 16 control points from 1054 measured data points. Bi-cubic Bezier- and B-spline surface CAD models were constructed through these interpolated control points.     

Study on the spatial filtering and sensitivity characteristic of inserted electrostatic sensors for the measurement of gas–solid two-phase flow parameters

A velocity measuring method using an inserted electrostatic sensor with spatial filtering effects is obtained using the point charge mathematical model established in this paper. Employing the established mathematical model helps determine the spatial filtering and spatial sensitivity characteristics of the probe. The spatial sensitivity distribution is obtained by simulating the point charge mathematical model, and when the point charge is near the probe (a>0), the sensitivity of the probe is higher and the spatial sensitivity of the probe has symmetry. The relation between the probe length L inserted into a pipe and the charge induced on the probe can also be obtained using simulation, where the longer the probe length L is, the larger the signal amplitude is. However, the signal amplitude is almost invariant when the probe length L is larger than the radius of the pipe. Experiments prove that the spatial filtering and sensitivity characteristics of the probe are consistent with the simulation results. When the free fall velocity of particles is the same, the probe has a low-pass characteristic for the measured signals. It is proven that the fluid velocity measurement method using spatial filtering effects can completely measure the fluid velocity using the spatial filtering characteristic experiments of the probe. The spatial filtering measurement velocity method is also feasible when measuring continuous objects.     

Testing the diagonal measuring technique

This paper describes the results of a set of linear displacement accuracy measurements performed on two vertical CNC machining centers. The main scope of the work is to verify or disprove some of the recently claimed limitations of the conventional diagonal measurement method and of the “laser vector” or “sequential diagonal” method. Basically, we tested the effect of a large linear error deliberately introduced into one of the machine tool's axes. It is concluded that the laser vector method has not correctly identified this error and distributed the error into the remaining axes of the machine tool.     

纳米结构陶瓷涂层磨削表面残余应力的实验设计

以近年来新出现的纳米结构碳化钨/钴(n-WC/12Co)陶瓷涂层材料为磨削对象,巧妙选择磨削实验用磨床和三种砂轮,利用X射线衍射仪等设备,通过设计磨削参数,为纳米结构陶瓷涂层的磨削实验和表面残余应力的测量及后续研究"磨削参数对磨削表面残余应力的影响规律"提供依据。     

Intermittent Process Measurement of a Freeform Surface Profile with a Circular Triangulation Laser Probe on a Machining Centre

This paper describes the development of a non-contact type system for measuring a freeform surface on a machine tool. A laser probe, model OTM-3A20 made by Wolf & Back Co., was integrated into a CNC machining centre as a non-contact sensor. An adjustment device for the laser probe was designed to minimise the cosine error caused by assembly inaccuracy. An alignment test of the measuring laser beam was carried out using a calibrated specimen. The systematic accuracy of the circular triangulation laser probe and a standard triangulation laser probe, with respect to the surface roughness, surface slope, and coating colour of the workpiece, was investigated by using an HP5529A laser interferometer system. The measuring system, which consists of a personal computer, a CNC controller of a machining centre, a Renishaw MP10 touch-trigger probe system, and the controller of the laser probe system, was integrated information-technically. Automatic measuring software was developed for the purpose of measuring path simulation, generation of NC codes, and error analysis of the measured data. The profile error of the tested object, measured by the laser probe and the coordinate measuring machine respectively was found to be within 45 μm. In this case, the tolerance of the designed part is about 50 μm, so the developed system can be applied to the inspection of mould production in bakelite according to the experimental results. ID="A1"Correspondance and offprint requests to: Dr Fang-Jung Shiou, Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Section 4, Keelung Rd. 106 Taipei, Taiwan. E-mail: shiou@mail.ntust.edu.tw     

在机测量线激光传感器安装位姿的全局标定

针对三轴数控机床激光测头安装位姿误差造成测量误差且不易调整和校准的问题,提出了一种在机测量线激光传感器 安装位姿标定方法。 建立了线激光在机测量系统的数学模型,通过机床运动带动线激光测头对标定基准点的空间位置进行测 量,基于手眼标定原理给出了关于测头安装位姿参数的线性求解算法,完成了对测头安装误差的全局标定。 考虑了机床定位误 差对于标定结果精度的影响,采用蒙特卡洛模拟进行了误差分析。 采用半径为 35 mm 的圆孔进行测量验证,实验结果表明,标 定后圆孔测量误差为 0. 051 6 mm,测量精度提高了约 96% ,实验结果验证了该标定方法的有效性和可行性。     

机械零件三维形貌的光栅投影测量系统

建立了一种基于虚拟复合光栅的三维形貌测量系统 ,利用两种频率光栅的合成投影 ,实现物体表面突变部分的测量。测量系统适用于机械零件的三维形貌检测 ,并且得到令人满意的测量结果。     

逆向工程中基于Delaunay三角剖分的测头半径补偿

实物原型数字化是逆向工程中的第一步,所获取的数据点精确度直接影响着最终CAD模型的质量。用三坐标测量机(CMM)获取的数据点通常是测头的中心,而不是实物的表面,因此本文提出了一种基于Delaunay三角剖分方法解决测头半径补偿问题。     

新型自由曲面三维激光扫描系统

从机械结构、控制系统及操作系统结构等几个角度介绍一种三维激光扫描系统设计方案。系统集成了先进的数据处理技术、激光扫描技术、先进控制技术及机器人技术,有效地借助于光机电一体化技术实现了表面检测及三维表面模型重构智能化及自动化。系统由具有电驱动装置的激光测头、C形滑臂、升降旋转台、电控系统及主控计算机组成。通过所设置测量参数,系统能够对不同的被测物体进行扫描路径规划,进而通过激光测头、C形滑臂及转台的全自动协调控制完成无盲点三维表面测量任务。试验结果表明,该三维激光扫描系统的扫描精度达到0.1 mm,速度为10 000点/s,能够应用于小型工件及模型、模具表面数据检测及模型重构。     

Concept for the integration of geometric and servo dynamic errors for predicting volumetric errors in five-axis high-speed machine tools: an application on a XYC three-axis motion trajectory using programmed end point constraint measurements

A modelling approach for volumetric error prediction taking into account geometric and servo dynamic errors in a five-axis high-speed machine tool is proposed in this paper. Polynomial functions are used to represent and then predict the geometric errors. A simple second-order transfer function model is used to model and predict the servo dynamic error. The servo dynamic errors are added to the axis position geometric errors and propagated to the tool and workpiece using matrix transformations. The validity of the error integration concept is tested for a XYC three-axis motion trajectory. Two experimental setups are used. The first experimental test used the KGM grid encoder instrument to estimate the parameters of the servo dynamic error models of the X- and Y-axes. The second experimental test used a programmed end point constraint procedure with measurement of the 3D volumetric positioning errors between a point on the tool holder and another fixed to the machine table. The tests involve maintaining the nominal coincidence of these two points whilst exercising the three axes. These last tests are used to estimate the geometric error parameters and also to validate the prediction performance of the integrated geometric and dynamic model. The result shows the effectiveness of the error integration concept.     

在机测量激光测头位姿的线性标定

针对在机激光扫描测量中激光测头安装位置和姿态引起的测量误差,提出了一种适用于在机激光测量的测头标定方法。构造了在机激光扫描测量原型系统,建立了激光测头随机床运动的测量模型;通过多角度扫描标准球球面拟合球心,给出了一种线性求解测头安装位姿参数的算法,避免了非线性优化求解中的大量计算和不稳定问题。分析了测量过程中机床各个轴的运动误差对测量结果的影响,建立了误差模型,并给出补偿机床系统误差的方法。实验显示,对直径已知的标准球进行测量时,测头在不同摆角测得的标准球直径误差小于0.05 mm,误差补偿后球心位置误差减小了83%。实验结果验证了该标定方法的可行性,以及机床误差对测量精度影响的模型及补偿方法的正确性。     

Maximum entropy reconstruction of compositional depth profiles from electron probe microanalysis data

Electron probe microanalysis (EPMA) is a powerful method for the quantitative determination of the elemental composition of micro-regions of a sample surface. Here, we report on the development of a method of reconstructing compositional depth profiles in thin films from EPMA data measured over a range of electron beam energies, using maximum entropy data processing. The method gives quantitative information on film compositions up to approximately 1 μm in depth, with a lateral spatial resolution of approximately 1 μm. The method is tested using both simulated data and measured experimental data from well-characterized model sample structures.     

Geometric error modeling and compensation for large-scale grinding machine tools with multi-axes

Synthesis modeling of a geometric error-based traditional method for large-scale grinding machine tools with six axes is too complicated to perform in a real-time compensator with a built-in position control system, and it is difficult to obtain all of the error elements corresponding to the model. This paper proposed a novel strategy in which a machine may be considered as translation axes and rotary axes, and geometric errors of the translation axes and rotary axis are modeled and the geometric error models of the machine are very simple for real-time error compensation. The volumetric errors of the translation axes are measured using spatial circular curve ball bar test, and every element of the rotary axis is also obtained by a series of considerate ball bar tests. According to the characteristics of a position controller used in the machine, a synthesis error compensation system based on the NUM numerical control system was developed. Error compensation experiments were carried out, and the results show that the accuracy of the machine is improved significantly.     

环面蜗轮滚刀测量机

基于圆柱坐标系测量原理,采用电子展成法研制了一台环面蜗轮滚刀测量机用于环面蜗轮滚刀的快速测量。该测量机通过对3个运动轴的闭环控制,使测头沿着被测误差项的路径运动来获取数据并完成测量。介绍了测量机的工作原理与构成,其为卧式结构,由花岗石床身、精密密珠主轴、滑动导轨和闭环控制系统构成。开发了环面蜗轮滚刀测量软件,实现了环面滚刀各项误差的快速精密测量。实验显示:该仪器可以对切削刃螺旋线误差、刃口齿形误差和容屑槽周节误差进行测量,测量的合成不确定度分别为2.35、2.45和2.94μm,均小于圆柱齿轮滚刀标准GB/T6084-2001中对应误差项公差的1/3,满足AA级精度的环面滚刀各项误差的测量要求,验证了该测量机的功能与可靠性。该测量机也可以用于环面蜗杆、圆柱蜗杆及圆柱滚刀的测量。     

Characterisation of electronic and structural properties of thin silicon dioxide films by scanned probe microscopy

This paper concerns the application of scanned probe microscopy to the study of thin silicon dioxide films. We show how the formation of 7 nm diameter silicon carbide particles on a silicon surface during high temperature processing affects the quality of subsequently grown oxide. To measure the local dielectric properties of thin oxides we have developed a new type of probe measurement which allows high resolution surface imaging, based on an atomic force microscope, combined with local electrical measurements. The spatial resolution of the electrical measurements was shown to be < 40 nm. Applying the technique to 500 nm capacitors fabricated on device quality oxide it was shown that some capacitors broke down during imaging while others remained stable at electric fields up to 30 MVcm^?1. This higher breakdown strength may have substantial impact on future electronic device reliablity and performance.     

大尺寸回转体型面点坐标及形心轴线测量系统的研制

针对大型回转体型面测量问题,根据柱坐标机的测量原理,研制了大尺寸回转体型面点坐标及形心轴线测量系统。对影响系统测量精度的不确定度因素进行了量化分析。应用双频激光干涉仪和激光跟踪仪与该系统进行了测量数据比对。该系统不仅能测量回转体工件的任意截面点坐标和形心轴线,还可测量圆柱度、径向跳动、同轴度等,具有高精度、高效率、操作简单等特点。