多弧离子镀制备的大厚度Cr/Cr_2N/CrN多层涂层的结构和力学性能（英文）

采用多弧离子镀制备一种厚度为24.4μm的Cr/Cr2N/CrN多层结构涂层。采用场发射扫描电子显微镜(FESEM)、X射线光电子能谱(XPS)、能量散射谱(EDS)、X射线衍射(XRD)和透射电镜(TEM)对涂层进行表征,并用纳米压痕和划痕仪测试其硬度和结合力。用UMT-3MT往复式摩擦磨损试验机对涂层在大气和海水环境中的摩擦性能进行测试。结果表明,该涂层由3种相结构组成,分别是Cr相、Cr2N相和CrN相。相对于单层CrN涂层,多层涂层的结合力明显提高,该涂层的硬度为(21±2)GPa。多层结构涂层在人工海水中的耐蚀性能显著优于单层CrN涂层的耐蚀性能,且在大气和海水中多层结构涂层的摩擦因数均低于单层CrN涂层的摩擦因数。     

多弧离子镀制备的CrCN涂层组织及摩擦磨损性能

采用多弧离子镀技术在硅片和316L不锈钢上制备了CrN和CrCN涂层,利用扫描电镜(SEM)、电子能谱(EDS)、透射电镜(TEM)、X射线光电子能谱仪(XPS)对其表面形貌及成分进行表征,采用纳米压痕仪、划痕测试仪及摩擦磨损试验机测试涂层力学及摩擦学性能,观察试样磨损形貌,并分析其磨损机理。结果表明:较之于CrN涂层,所制备的CrCN涂层具有更均匀、致密的结构,与基体结合良好;涂层主要成分为Cr、C和N,其中C元素主要以sp2、sp3和C—Cr键的形式存在;CrCN涂层中由于强化相Cr7C3的产生和杂化C的形成等多种强化作用,显著提高了其硬度和耐摩擦磨损性能。     

调制周期对Cr/CrN多层膜结构及性能的影响

采用电弧离子镀技术在6Cr13Mo低碳马氏体不锈钢基材表面沉积不同调制周期的Cr/CrN多层膜。利用扫描电镜、显微硬度仪、划痕仪、压痕仪、摩擦磨损试验机、3D轮廓仪研究Cr/CrN多层膜的结构和性能。结果表明:调制周期的变化对Cr/CrN多层膜硬度影响较小;随着调制周期的减小,Cr/CrN多层膜致密性逐渐提高;不同调制周期下,Cr/CrN多层膜与基体结合力均在100 N以上,其中调制周期为321 nm的Cr/CrN多层膜的韧性及与基体结合性能最优;调制周期为569 nm的Cr/CrN多层膜的磨损率最低。     

CrN过渡层对CrWN涂层结构和力学性能的影响

为改善CrWN涂层力学性能,采用多弧离子镀技术,在硬质合金和不锈钢基底上沉积不同厚度CrN过渡层的CrWN涂层。分别采用X射线衍射仪(XRD)、扫描电镜(SEM)、显微硬度计和摩擦磨损试验机对涂层的物相结构、表面及截面形貌、显微硬度、结合强度进行分析。结果表明:CrWN涂层主要呈CrN面心立方多晶结构,并含有W置换CrN晶格中的Cr后形成的固溶体。随着CrN过渡层厚度的增加,涂层表面大颗粒数量及尺寸逐渐增多,涂层内部缺陷增多。该工艺生产的CrWN涂层的显微硬度可达2000HV以上,保证了涂层的硬质特性;膜基结合强度提升最为明显,带有过渡层的各参数下沉积的涂层样品均超过100N。     

TiN、TiCN和CrN涂层在海水环境下的摩擦学性能

为提高海洋机械系统关键摩擦零部件的摩擦学性能,分别用多弧离子镀制备的TiN、TiCN和CrN涂层进行其表面防护。通过扫描电子显微镜(SEM)、能谱仪(EDS)和X-射线衍射仪(XRD)表征涂层的结构,用纳米压痕和划痕仪测试其硬度和结合力,并用UMT-3往复式摩擦磨损试验机测试涂层的摩擦磨损性能。结果表明,在海水环境中CrN涂层具有最低的摩擦因数。TiN和TiCN涂层已被磨穿,而CrN涂层在海水中最大磨痕深度为1.5μm左右,表明CrN在海水环境中具有良好的耐磨性。CrN涂层在海水中涂层的磨损率小于在蒸馏水中,说明海水的腐蚀作用在磨损过程中不明显,而海水环境良好的润滑性能起了主导作用,导致磨损率较低,这表明CrN涂层在海水环境中主要的磨损机理为机械磨损。     

调制周期对Cr/CrN纳米多层膜的结构与性能的影响

采用多弧离子镀技术在65Mn钢表面制备了不同调制周期的Cr/CrN纳米多层膜.采用俄歇能谱仪(AES)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米硬度仪、轮廓仪和划痕仪,分析了不同调制周期Cr/CrN纳米多层膜的成分分布、微观结构、力学性能、残余应力和结合强度.结果表明,Cr/CrN纳米多层膜的表面平整致密,截面层状调制结构清晰,其调制结构为Cr层-过渡层-CrN层的"三明治"结构,调制比约为1∶ 1.多层膜由CrN、Cr2N和Cr相组成,在CrN(200)方向上出现择优取向.当调制周期为80 nm时,多层膜的硬度值相对较高.随调制周期的增大,Cr/CrN多层膜的残余应力值减小,结合强度值先增大后减小.当调制周期为120 nm时,涂层的划痕临界载荷值相对较高,为69 N.     

多弧离子镀制备Cr/CrN多层厚膜的微观结构和力学性能

通过多弧离子镀（MAIP）在室温下将具有不同调制比（1:2、1:3、1:5）的多层Cr/CrN厚涂层沉积在A100钢基底上。腔室温度在沉积过程中由室温逐渐升高到160~170 ℃。设计调制结构是为了使膜/基结合强度和机械性能最大化。调制比为1:2的Cr/CrN多层涂层表现出最高的膜/基结合强度（L_c=63.8 N）,这可能归因于最高的材料硬度(H)/弹性模量(E)和H³/E²数值比（分别为0.083和0.138）。Cr层越厚,多层Cr/CrN厚涂层的塑性和摩擦学性能越好。干摩擦试验表明,与单层CrN相比,Cr/CrN多层涂层的平均摩擦系数和比磨损率分别最高降低了24%和94%。随着Cr层变厚,磨损机理从表面疲劳磨损转变为磨料磨损,这种现象可归因于硬度和塑性的协调变化。     

TC4钛合金表面涂层改性:CrN素多层

目的 提高TC4钛合金的硬度和耐磨损性,改善CrN硬质涂层与TC4钛合金的适应性.方法 采用等离子体增强磁控溅射系统,通过调节热丝放电电流,在TC4钛合金基体表面沉积疏密CrN单层和素多层涂层.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱仪(EDS)、纳米压痕仪、洛氏压痕仪、摩擦磨损仪以及台阶仪,表征涂层形貌、成分、物相及性能.采用动电位极化法表征涂层的耐腐蚀性.结果 当热丝放电电流为较低的4 A×4时,沉积的CrN单层涂层为具有针孔、孔洞等缺陷的疏松结构,8 A×4沉积的CrN单层涂层具有致密结构,周期性调节热丝放电电流则获得疏密交替的CrN素多层涂层.CrN涂层均由单一面心立方结构的CrN相组成,疏松CrN单层涂层的衍射晶面为(111)、(200)、(220)及(222),致密CrN单层涂层沿(111)晶面择优生长,随着疏密子层调制比的增大,CrN素多层涂层的(111)衍射峰不断增强.疏松CrN单层涂层的最小H和最大E分别为13.0 GPa和207.5 GPa,调制比为1:4的疏密CrN素多层涂层的最小H和最大E分别为17.0 GPa和257.4 GP.在1470 N载荷下洛式压痕法表明,致密CrN单层涂层的结合强度最低,等级为HF5,其余涂层均为HF1—HF4.CrN涂层的自腐蚀电位较TC4钛合金均发生了正移.结论 CrN硬质涂层可以有效提高TC4钛合金的硬度和耐磨损性,表面得到明显强化.周期性调节等离子体密度所沉积的疏密CrN素多层涂层与单层相比,涂层性能明显改善.     

Cr/CrN/CrNC/CrC/Cr-DLC梯度膜层的研究

采用中频磁控溅射结合离子源技术沉积Cr／CrN／CrNC／CrC／Cr-DLC膜层。利用扫描电镜（SEM）、电子能谱（EDS）、Raman光谱和俄歇深层剥层分别对膜层微观形貌、成分组成、键结构及梯度成分深层分布进行分析；采用努氏显微硬度计、摩擦磨损试验机、划痕仪及洛氏硬度计测评膜层机械性能。结果表明：采用中频磁控溅射可沉积出大面积Cr／CrN／CrNC／CrC／Cr-DLC梯度膜层；Cr溅射功率对C键结构影响不大，但表层DLC中Cr的含量和膜层厚度随中频功率增大而增大；随DLC中掺Cr量增多，膜层硬度及摩擦因数略有上升；采用梯度过渡层及掺入金属Cr提高了膜层附着力，但过高的中频功率使沉积离子能量偏高，膜层压应力增加反而降低了膜层附着性能。     

TiN/TiCN/Al2O3/TiN与TiN/TiCN/Al2O3/TiCNO多层涂层的组织性能比较

目的对比TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层的组织性能。方法采用化学气相沉积(CVD)技术在硬质合金基体上沉积TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层。通过X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析涂层的物相和组织形貌,采用纳米力学测试系统测试涂层顶层的硬度和弹性模量,利用显微维氏硬度计和划痕仪分别测量涂层的显微硬度和结合强度,利用往复式多功能摩擦磨损试验机研究涂层的摩擦磨损性能。结果顶层TiN晶粒为柱状晶,顶层TiCNO晶粒呈细针状。与顶层TiN相比,顶层TiCNO硬度更大,抗塑性变形能力更强。与以TiN为顶层的多层涂层相比,以TiCNO为顶层的多层涂层表面粗糙度、摩擦系数较大,结合强度较低。当磨损只发生在顶层时,耐磨性取决于顶层涂层的性能,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率为TiN/TiCN/Al_2O_3/TiCNO的1.2倍。当磨损进行到顶层与Al_2O_3层界面时,结合强度对耐磨性也有重要影响,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率是TiN/TiCN/Al_2O_3/TiCNO的82%。结论与TiN/TiCN/Al_2O_3/TiN相比,TiN/TiCN/Al_2O_3/TiCNO的顶层TiCNO硬度较大,抗塑性变形能力强,其顶层耐磨性较好。改善TiN/TiCN/Al_2O_3/TiCNO多层涂层表面粗糙度和结合强度将进一步提高该涂层的摩擦磨损性能。     

Optimum Me-DLC coatings and hard coatings for tribological performance

In this study, hard coatings (TiN, TiCN, CrN, and CrCN) and Me-DLC coatings (Ti _x%-C:H and Cr _x%-C:H) were deposited on tungsten carbide (WC) substrate by multiarc physical vapor deposition (MAPVD) and unbalanced magnetron (UBM) sputtering, respectively. Counterbodies of the AISI 1045 steel cylinder and the AA7075T651 aluminum cylinder were used in the cylinder-on-disk, line-contact wear mode under dry condition; a counterbody of the AISI 52100 steel ball was used in the ball-on-disk, point-contact wear mode, under both dry and lubricated conditions. All wear tests were conducted with a reciprocating machine. After the tests, the most suitable coating for various counterbodies and test environments was selected. For the coating/1045 steel cylinder, the Ti_10%-C:H coating possesses excellent tribological characteristics. For the coating/7075T651 aluminum cylinder, hard coatings display excellent wear resistance. For the coating/steel ball, CrCN and CrN coatings display very little wear under both dry and lubricated conditions. On TiN and TiCN coatings, special wear mechanisms of material transfer, adhesion wear, and fatigue fracture occurred during initial tests under kerosene lubrication.     

Influence of interlayers on corrosion resistance of diamond-like carbon coating on magnesium alloy

Diamond-like carbon coating (DLC) was deposited on AZ31 magnesium alloy by ion beam deposition technique in this study. A columnar Cr layer with a (110) preferred texture and a columnar CrN layer with a (111) preferred texture were applied as interlayers in the DLC coating/AZ31 substrate systems. The addition of these interlayers improved the adhesion between coating and substrate effectively, but did not enhance the corrosion resistance of the DLC/AZ31 systems due to the formation of galvanic cell between substrate and interlayer in the region of through-thickness defects in 3.5 wt.% NaCl solution. In addition, the effect of bias voltage on the corrosion resistance of CrN/Cr coatings on magnesium alloys was investigated. Although the application of bias voltage induced the coating denser, it was still difficult for CrN/Cr coating to reduce the corrosion current density of AZ31 due to the large difference between coating and substrate in galvanic series.     

Cr基过渡层对钛合金表面类金刚石薄膜摩擦学性能的影响

采用磁控溅射技术在钛合金(Ti6Al4V)表面制备Cr、Cr/Cr N和Cr/Cr N/Cr NC过渡层结构的类金刚石(DLC)薄膜。采用扫描电子显微镜、拉曼光谱仪与原子力显微镜分析薄膜的结构和表面形貌,利用纳米压痕仪、薄膜内应力测试仪、划痕测试仪、摩擦试验机和二维轮廓仪研究薄膜的硬度、内应力、结合力和摩擦磨损性能。结果表明:随着Cr基梯度过渡层的引入,DLC薄膜的内应力逐渐下降,结合力逐渐上升。Cr/Cr N/Cr NC/DLC薄膜具有优异减摩抗磨性能,摩擦因数和磨损率低至0.09±0.02和(1.89±0.15)×10-7 mm3/N·m。试验结果对钛合金表面高性能DLC薄膜制备及应用具有一定的参考价值和指导意义。     

Effects of Cr interlayer on mechanical and tribological properties of Cr-Al-Si-N nanocomposite coating

Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr interlayer on the microhardness, adhesion, and tribological behavior of Cr-Al-Si-N coatings were systematically investigated. The results indicate that the microhardness of the Cr-Al-Si-N coatings gradually deceases with increasing thickness of Cr interlayers. The adhesion between Cr-Al-Si-N and SUS 304 substrate is improved by addition of the Cr interlayers. A peak critical load of ～50 N is observed for the coating containing Cr interlayer of 60 nm as compared ～ 20 N for the coating without Cr interlayer. The thicker Cr interlayers result in reduced critical load values. Moreover, the wear resistance of the Cr-Al-Si-N coatings is greatly enhanced by introducing the Cr interlayer with thickness of 60 nm in spite of the decreased microhardness. The friction coefficient of the coating system is also moderately reduced.     

Effects of Cr interlayer on mechanical and tribological properties of Cr-Al-Si-N nanocomposite coating

Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr interlayer on the microhardness, adhesion, and tribological behavior of Cr-Al-Si-N coatings were systematically investigated. The results indicate that the microhardness of the Cr-Al-Si-N coatings gradually deceases with increasing thickness of Cr interlayers. The adhesion between Cr-Al-Si-N and SUS 304 substrate is improved by addition of the Cr interlayers. A peak critical load of ~50 N is observed for the coating containing Cr interlayer of 60 nm as compared ~ 20 N for the coating without Cr interlayer. The thicker Cr interlayers result in reduced critical load values. Moreover, the wear resistance of the Cr-Al-Si-N coatings is greatly enhanced by introducing the Cr interlayer with thickness of 60 nm in spite of the decreased microhardness. The friction coefficient of the coating system is also moderately reduced.     

Wear and corrosion behavior of CrCN/CrN coatings deposited by cathodic arc evaporation on nitrided 42CrMo4 steel substrates

In the paper, the results of wear and corrosion tests of the CrCN/CrN multilayer coatings, formed by cathodic arc evaporation on 42CrMo4 (AISI 4140) steel substrates are presented. The substrates were subjected to thermo-chemical treatment–nitriding with various nitriding potential. The results of nitriding were determined by XRD and the hardness profile in the samples cross-section. The morphology of thin coatings was examined with SEM. A Vickers FV-700 and Fisherscope HM2000 hardness testers enabled to investigate hardness of steel substrates and CrCN/CrN coatings respectively. A pin-on-disc wear tests were used to determine the hardness and tribological parameters of the coatings: the coefficient of the friction and wear rate. The scratch test and Rockwell test were applied to assess the adhesion of the coatings to the substrates. The corrosion properties of coating–steel substrate systems were investigated using potentiodynamic polarisation tests. Corrosion potential, corrosion current density and polarization resistance were determined. It was found that that the nitriding of steel substrates improves properties of the coating–substrate system. The nitriding 42CrMo4 steel substrate with low nitriding potential enable to obtain substrates without surface “white layer” what favours good adhesion of the coating to the substrate. The CrCN/CrN multilayer coating–steel substrate systems show good mechanical and tribological properties and corrosion resistance.     

Hard CrCN/CrN multilayer coatings for tribological applications

Hard coatings were deposited using a cathodic arc evaporation method. The results of investigations of multilayer CrCN/CrN coatings are presented in this article. The microstructure and crystallinity of films have been investigated using X-ray diffraction (XRD). The composition was determined with energy dispersive spectroscopy (EDS). The adhesion of films was estimated on the basis of an analysis of scratch-test results. The hardness and tribological properties of films deposited on hardened and tempered HSS substrates were also investigated. The tribological tests were carried out in a pin-on-disc geometry. The influence of a normal load, sliding speed and a counterpart material on the friction coefficient and the specific wear rate of the coatings were studied. The counterparts were made of HSS and four types of wood: oak, beech, spruce and pine. The hardness and adhesion of multilayer CrCN/CrN coatings are respectively 25 GPa and 120 N.     

不同过渡层对钢基金刚石薄膜的影响

采用超高真空热丝化学气相沉积(HFCVD)系统,以甲烷和氢气为反应气体,在高速钢W18Cr4V基体上利用3种不同的过渡层(WC、Cr、WC/Cr)制备金刚石薄膜。采用场发射扫描电子显微镜(FE–SEM)、X射线衍射仪(XRD)、显微激光拉曼光谱仪(Raman)以及洛氏硬度计对过渡层和金刚石薄膜进行检测分析,研究了不同过渡层对金刚石薄膜形貌质量和附着性能的影响。结果表明,3种过渡层均可以有效减少钢基中Fe对金刚石薄膜的负面影响,提高金刚石的形核率;其中,采用WC/Cr过渡层时膜基间残余应力最小,仅为0.25 Gpa,附着性能最好。     

Critical parameters in hot filament chemical vapor deposition of diamond films on tool steel substrates with CrN interlayers

The accomplishment of adherent and continuous diamond coatings on tool steel substrates with CrN interlayers is determined by many key parameters such as appropriate surface finish, interlayer thickness, substrate temperature and system pressure. A detailed study is carried out to probe the effect of these parameters on diamond nucleation and growth. Substrates with different surface finishes are prepared by electrical discharge machining (EDM) and CrN interlayers of various thicknesses are deposited onto these substrates by arc plating. Samples with a CrN interlayer of 2.5 μm are found to provide a continuous diamond film at a low pressure value of about 5 mbar. Nonetheless, the process window for obtaining such diamond layers is small, which results in limited reproducibility.