Absolute distance measurement with an optical feedback interferometer

An important use of the self-mixing effect inside a frequency-modulated single-mode laser diode is in laser velocimetry and range-finding applications. The optical beam reflected by a target and injected into the laser diode cavity modulated by a reshaped current is mixed with the light inside the cavity, causing variations of the optical output power. A theoretical analysis of this effect is proposed, based on the determination of the beat frequencies of the optical power variations, to improve the accuracy of laser distance measurement. A resolution of ?1.5 mm from 50 cm to 2 m is obtained when thermal effects are taken into account.     

Mode-locking external-cavity laser-diode sensor for displacement measurements of technical surfaces

A novel laser sensor for position measurements of technical solid-state surfaces is proposed. An external Fabry-Perot laser cavity is assembled by use of an antireflection-coated laser diode together with the technical surface. Mode locking results from pumping the laser diode synchronously to the mode spacing of the cavity. The laser cavity length, i.e., the distance to the measurement object, is determined by evaluation of the modulation transfer function of the cavity by means of a phase-locked loop. The mode-locking external-cavity laser sensor incorporates a resonance effect that results in highly resolving position and displacement measurements. More than a factor-of-10 higher resolution than with conventional nonresonant sensing principles is achieved. Results of the displacement measurements of various technical surfaces are reported. Experimental and theoretical investigations are in good agreement.     

Fringe pattern analysis with a parametric method for measurement of absolute distance by a frequency-modulated continuous optical wave technique

Interferometry associated with an external cavity laser of long coherence length and broad wavelength tuning range shows promising features for use in measurement of absolute distance. As far as we know, the processing of the interferometric signals has until now been performed by Fourier analysis or fringe counting. Here we report on the use of an autoregressive model to determine fringe pattern frequencies. This concept was applied to an interferometric device fed by a continuously tunable external-cavity laser diode operating at a central wavelength near 1.5 microm. A standard uncertainty of 4 x 10(-5) without averaging at a distance of 4.7 m was obtained.     

Sub-micrometre distance measurements with a broadly tunable short-external-cavity InGaAsP/InP diode laser

Measurement of distance using a custom-designed, broadly tunable InGaAsP/lnP short-external-cavity diode laser is described. A tuning range of over 100 nm was achieved with the custom-designed laser in a diffractive optical element short external cavity. This tuning range made it possible to achieve a sub-micrometre resolution in measurement of distance with a single laser source for an interferometer. A non-linear, least squares fitting method was used to extract the displacement from the raw data. This fitting method showed a potential for extraction of accurate displacement in the presence of noise.     

一种用于纳米计量的原子力显微镜测头的设计

介绍了我们研制的一种高精度、具有计量学意义的原子力显微镜测头.该显微测头与其它部件协同工作在50 mm×50 mm×2 mm的测量范围内实现纳米级精度的测量.测头采用光束偏转法检测探针悬臂的微小偏移,由单模保偏光纤引入半导体激光作为光源.该测头安装有3个立体反射镜作为激光干涉仪的参考镜.样品与原子力显微镜测头的相对位置可以由激光干涉仪直接读数,可溯源到米国际定义及国家基准上.激光干涉仪的布置无阿贝误差.测头采用立体光路设计,结构紧凑.测头厚度小于20 mm,质量约200 g,却实现了100 mm的反射光程.使用该测头测得与量块表面的力-距离曲线,还测得标称高度300 nm SiO2台阶样板的图像,分辨率优于0.05 nm.     

Amplitude-stabilized frequency-modulated laser diode and its interferometric sensing applications

A direct frequency-modulated (FM) laser diode light source without light power variation is developed. The amplitude variation of the FM laser diode is compensated by means of a feedback system with use of a superluminescent diode as an external light power controller. Output power greater than 1 mW is obtained at the modulation frequency to 5 kHz with a >10 stabilization factor. By use of the amplitude-stabilized FM laser diode, we measured subfringes with high accuracy in FM continuous wave interferometry, increased the dynamic range of the displacement measurement, and improved the stabilization factor in the laser diode feedback interferometer.     

Measurement uncertainty and temporal resolution of Doppler global velocimetry using laser frequency modulation

A Doppler global velocimetry (DGV) measurement technique with a sinusoidal laser frequency modulation is presented for measuring velocity fields in fluid flows. A cesium absorption cell is used for the conversion of the Doppler shift frequency into a change in light intensity, which can be measured by a fiber coupled avalanche photo diode array. Because of a harmonic analysis of the detector element signals, no errors due to detector offset drifts occur and no reference detector array is necessary for measuring the scattered light power. Hence, large errors such as image misalignment errors and beam split errors are eliminated. Furthermore, the measurement system is also capable of achieving high measurement rates up to the modulation frequency (100 kHz) and thus opens new perspectives to multiple point investigations of instationary flows, e.g., for turbulence analysis. A fundamental measurement uncertainty analysis based on the theory of Cramér and Rao is given and validated by experimental results. The current relation between time resolution and measurement uncertainty, as well as further optimization strategies, are discussed.     

Disturbance-free distributed Bragg reflector laser-diode interferometer with a double sinusoidal phase-modulating technique for measurement of absolute distance

A new range-finding technique that uses both double sinusoidal phase modulation and quasi-two-wavelength interferometry is described. Two independent interference signals are generated with respect to two different wavelengths on a time-sharing basis. We clarify that external disturbances of these interference signals are eliminated by both feedback control and differential detection and that the feedback control does not affect the distance measurement. A single distributed Bragg reflector laser diode allows us to simplify the optical setup and to improve the measurement accuracy. After discussing a measurement range, we estimate a measurement error by making several measurements.     

CO2 laser-grooved long period fiber grating temperature sensor system based on intensity modulation

A long period fiber grating (LPFG) temperature sensor system based on intensity modulation is developed. The LPFG employed is fabricated by the use of a focused CO2 laser beam to carve periodic grooves on the fiber. The temperature measurement resolution of up to 0.1 degrees C has been obtained within the temperature range between 20 degrees C and 100 degrees C. The system uses a simple intensity measurement method and exhibits the advantages of convenient intensity measurement, double temperature sensitivity, high resolution, simple configuration, and low cost.     

Laser diode facet modal reflectivity measurements

A simple and accurate method for measuring the front facet modal reflectivity of a Fabry-Perot laser diode is presented. In this method, optical feedback from an external mirror of known reflectivity, R(ext), is used to alter the laser diode threshold current. The effect of the external mirror and front facet reflectivities on the threshold current then allows for a measurement of the front facet modal reflectivity of the laser diode and is theoretically and experimentally studied. This method was used to measure a facet reflectivity of R(2) = 0.0151(+0.0018/-0.0032) [R(2) = 0.00592(+0.00085/-0.00123)] for a commercially antireflection-coated facet of a laser diode with a center wavelength of 795 nm (935 nm). The results of the reflectivity measurements based on the threshold current as a function of the external mirror reflectivity are compared with the results of the reflectivity measurements based on modulation depth of the optical spectrum [IEEE J. Quantum Electron. QE-19, 493 (1983)].     

Phase-shifting laser diode interferometer using pulse modulation

A phase-shifting laser diode interferometer that uses direct pulse modulation is proposed and demonstrated. We found that a laser beam with a wide range of wavelength variation at constant optical power could be generated when a pulsed current was injected into the laser diode. We constructed a highly accurate interferometer by using a pair of interferometers. Several experiments, such as observations of temporal interference signals and spatial interferograms, measurement of a concave mirror, and duplicate measurements, confirmed the characteristics of pulse modulation and demonstrated the effectiveness of our technique.     

Measurement of absolute distance employing a tunable CW dye laser

With a tunable CW dye laser oscillating in a single longitudinal mode, measurement of an absolute distance is demonstrated with the method of excess fractions. Five beams which have different wavelengths are emitted sequentially from the dye laser, and the interferometric phase is measured for each wavelength. An interferometric order number for a wavelength can be calculated from values of wavelengths and phases. Then a precise value of length is obtained. This method is similar to measuring distances by using group delay as used in VLBI and microwave ranging. The measured accuracy was within ±8.8 nm between 0 and 10 mm (at an absolute distance of 0.1-10.1 mm)     

Distributed measurement of static strain in an optical fiber with multiple bragg gratings at nominally equal wavelengths

The Fourier transform relationship between the reflected light froma Bragg grating and the complex spatial modulation of the Bragg grating is used to produce a distributed strain sensing system. A tunable external cavity diode laser along with a reference reflector in anoptical fiber are used to produce a measurement of the phase and amplitude of the reflected light from the modulated Bragg grating as a function of wavelength. The system is demonstrated with 22 Bragg gratings in a single fiber on a cantilever beam and compared with foil strain gauge readings.     

Phase-stepped gauge block interferometry using a frequency-tunable visible laser diode

Frequency changes induced by bias or temperature modulation of injection diode lasers can provide an economical and effective method of applying phase-stepping interferometry to optical metrology. However, the intrinsic frequency instability of these devices limits their use in gauge block interferometry where precise and repeatable phase steps must be maintained simultaneously on two discontinuous surfaces and over relatively long path lengths. We demonstrate a method using a visible injection diode laser, the frequency of which is locked by using a Fabry-Perot interferometer. Small changes to the length of the Fabry-Perot interferometer shift the frequency of the laser producing proportional and repeatable phase steps to the gauge block interferogram. This method has been successfully implemented with a Fizeau-type gauge block interferometer with a phase measurement resolution of 0.005 lambda. The phase data are then processed to map the surface form of gauge blocks up to 100 mm in length and to objectively assess surface shape parameters.     

High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser

A high-accuracy optical distance meter with a mode-locked femtosecond laser is proposed for distance measurements in a 310-m-long optical tunnel. We measured the phase shift of the optical beat component between longitudinal modes of a mode-locked laser. A high resolution of 50 mum at 240-m distance was obtained without cyclic error correction. The group refractive index of air is automatically extracted to an accuracy of 6 parts per million (ppm) by two-color measurement with the pulses of fundamental and second-harmonic wavelengths. Finally, an absolute mechanical distance of 240 m was obtained to within 8-ppm accuracy by use of a series of beat frequencies with the advantage of a wide range of intermode frequency, together with the results of the two-color measurement.     

Binocular vision system calibration based on a one-dimensional target

This paper proposes an adjustment method for binocular vision measurement to calibrate a camera's internal and external parameters based on a one dimensional (1D) target in the field of view. A 1D target with two feature points lying randomly in the field of view is used to get the images of the feature points. The distance between the two feature points is known. The internal and external parameters can be acquired by solving equations combining the photograph measurement collinear equations and the feature points' distance equations. To solve these equations, we use linearization of nonlinear equations and the adjustment method. During the process, we deal with the equations as measurement equations and the internal/external parameters and the 3D target points as the unknown parameters to calculate them. According to field experiment results, in about a 600 mm×600 mm field of view, the relative error of the distance of two points is less than two ten-thousandths, obtained by using the calculated results of the binocular vision system. The calibration process is simple, convenient, and suitable for calibrating a camera on the spot.     

Tunable Diode Laser Spectroscopy for Industrial Process Applications: System Characterization in Conventional and New Approaches

Tunable diode laser spectroscopy (TDLS) can only be successfully implemented if a number of system characterization procedures and critical parameter measurements can be made accurately. These include: application of a wavelength/frequency scale to the signals recovered in time; measurement of the frequency dither applied to the laser; measurement of the relative phase between the laser power modulation and frequency modulation; determination of the background amplitude modulation for normalization purposes and measurement of required cross broadening coefficients for the host/target gas mixtures. Easy to implement, accurate and low-cost systems and procedures for achieving these are described and validated below. They were developed for two new approaches to TDLS measurements, viz the residual amplitude modulation (RAM) technique and the phasor decomposition (PD) method, but are equally applicable to all forms of TDLS. Following full system characterization using the new techniques, measurements of the absolute transmission function of the 1650.96 nm absorption line of methane over a wide range of concentration and pressure were made using the RAM technique. The close agreement with theoretical traces derived from HITRAN data validated the entire approach taken, including the system characterization procedures. In addition, measurements of a wide range of gas concentration and pressure were made by curve fitting theoretical traces to the measured transmission functions obtained using a variety of operating conditions. Again, the low errors confirmed the validity of the new methods and the system characterization/measurement procedures described here.     

Sinusoidal nonlinearity in wavelength-sweeping interferometry

We report the influence of the nonlinearities in the wavelength-sweeping speed on the resulting interferometric signals in an absolute distance interferometer. The sweeping signal is launched in the reference and target interferometers from an external cavity laser source. The experimental results demonstrate a good resolution in spite of the presence of nonlinearities in the wavelength sweep. These nonlinearities can be modeled by a sum of sinusoids. A simulation is then implemented to analyze the influence of their parameters. It shows that a sinusoidal nonlinearity is robust enough to give a good final measurement uncertainty through a Fourier transform technique. It can be concluded that an optimal value of frequency and amplitude exists in the case of a sinusoidal nonlinearity.     

Stabilized phase-shifting fringe analysis by use of current-induced frequency modulation of laser diodes

A closed-loop phase-shifting Fizeau-type interferometer was constructed that uses direct frequency modulation of a laser diode. The interferometer is servo controlled entirely in the phase domain, where optical phases are detected by two-frequency optical heterodyning. A detailed study of stabilization of the interferometer under feedback control was conducted both experimentally and theoretically. The interferometer showed good stability against vibration up to 200 Hz. The stabilization factors obtained experimentally are in good agreement with the theoretical calculations. The phase-shifting experiment was accomplished with high precision as well as with high stability against external disturbances. The profile measurement of a mirror surface was made with a phase-shifting analysis algorithm, and good measurement reproducibility of lambda/60 in the root-mean-square value was obtained for ten measurements within a period of 20 min.     

半导体激光端点测长干涉仪实验系统

半导体激光端点干涉测长法是利用半导体激光频率调制特性的一种在长度的两个端点干涉测量长度的新方法。本文介绍基于这种测长方法研制的半导体激光端点测长干涉仪实验的基本原理,构成,定标方法和测量结果。