双分量环形磁通门测斜传感器测量原理分析

在地下勘测,钻井探矿等领域,需要测斜仪对钻头的姿态进行精确定位与控制,实时监测地底下钻头的姿态变化。现有的测斜仪通常为三分量磁通门传感器与三分量加速度传感器相结合,其结构复杂,且磁通门传感器与加速度传感器的轴向要求方向一致,因此需要人工调节与算法调节,加大了前期传感器布置与补偿的计算难度。本文研究了新型测斜传感器,采用环形铁芯设计和铁芯不固定的方法,设计了双分量环形磁通门传感器,并通过铁芯与磁通门传感器的敏感轴方向上磁通量之间的角度关系,通过三维坐标轴旋转计算得出测量被测物体的俯仰角等姿态变化。经过试验表明,新型测斜传感器能对物体的姿态角进行精准测量,精度高,且省去了加速度传感器,简化了传感器结构和测量参数,并且简化了角度测量算法与正交度补偿算法。     

电力变压器直流偏磁检测方法研究

电力变压器发生直流偏磁会引起变压器异常运行甚至损坏,而现有的方法不能准确检测其偏磁状态。本文提出一种新结构的磁通门传感器,该传感器从变压器铁芯磁通中提取部分分量,采用脉冲幅值法量化传感器的检测线圈输出信号从而表征变压器偏磁程度。作为验证,本文设计样机并采用10kVA电力变压器进行实验。实验结果表明,当外加偏置电流从0A到0.5A变化时,磁调制输出信号幅值呈单调变化。     

用于电流测量的柔性基底磁通门传感器

得益于可折叠弯曲的特性,在柔性基底上制备的磁通门传感器近年来得到人们的关注。在用于电流测量时,柔性结构可以在不断开电流导体的情况下,通过打开－闭合方式将导体包裹在铁芯中间,提高测量效率。然而,磁通门中的核心部件———铁芯,在弯曲之后会展现出不同的磁特性,进而影响磁通门性能。本文采用钴基非晶带材作为磁通门铁芯,研究了一种可用于电流测量的柔性磁通门制备方法,通过仿真和实物测量两种方式研究了铁芯弯曲与否对柔性磁通门性能的影响。结果表明,这种采用钴基非晶带材作为铁芯的柔性磁通门传感器展现出了非常优异的性能,其弯曲成环形之后,退磁效应下降带来的积极影响远大于铁芯磁性能下降带来的消极影响,其灵敏度不但未下降反而有大幅提高,将传感器多次弯曲后,其 灵敏度和线性范围没有大的变化。因此,这种可弯曲的柔性基底磁通门适用于电流测量。     

基于三端式磁通门传感器的弱磁测量系统设计

利用三端式磁通门传感器测量微弱低频弱磁信号原理,设计了磁通门测磁系统用于测量不同质量的磁性材料。该系统可以直接测量一定质量的磁纳米粒子感应磁场强度并将其转化为直流值电压,然后让电压值与质量建立对应关系。在分析三端式磁通门传感器的工作原理的基础上,基于二次谐波法,设计了包含差分放大、选频放大、带通滤波、相敏检波和低通滤波的测量电路,然后在此基础上设计了差分式双探头磁通门传感器弱磁测量系统,最后通过实验测试和数据采集与分析,证明利用此种原理设计的测量系统可以检测不同质量的磁性材料。     

长条形阵列铁芯磁通门性能研究

为了提高微型磁通门传感器的性能,改进铁芯结构,基于MEMS工艺制作了35组不同结构的长条形阵列铁芯。利用双铁芯线圈结构磁通门对制作的35组长条形阵列铁芯进行了磁通门性能指标的测试,分析了长条形阵列铁芯排列密度以及单条铁芯宽度对磁通门最佳激励电流、线性范围、灵敏度以及噪声的影响规律。研究结果表明,当单条铁芯相邻宽度为35μm以及单条铁芯宽度为60μm时,长条形阵列铁芯的磁通门综合性能指标优于传统薄膜铁芯的磁通门性能。     

微型磁通门性能指标的综合测试与分析

对铁芯结构的改进有利于提高微型磁通门传感器的性能,采用MEMS工艺制备了多孔铁芯结构微型磁通门,并对所制备的微型磁通门进行主要的工作参数和性能指标的综合测试,分析了激励电流和激励频率对灵敏度、线性范围、噪声、剩磁误差等性能指标的影响规律.对实验结果的分析结论为传感器选择合适工作参数提供了数据支持.     

磁通门测量地磁信号的数字化分析

针对现有的磁通门信号处理电路仍以模拟元件为主,电路较为复杂的缺点,提出了一种以数字信号处理器(DSP)为主的信号处理系统,优化磁通门传感器的结构,提高了磁通门传感器的抗干扰能力.根据双磁芯磁通门的基本原理,建立了磁通门数学模型并采用Simulink信号处理模块模拟DSP对磁通门输出信号进行处理;针对双磁芯磁通门上、下磁芯不一致产生的磁通门信号噪声,采用带通滤波方法进行了滤波,仿真结果与理想状态下双铁芯磁通门的输出一致,系统分辨力达到3 nT.通过实验数据与仿真数据的对比,验证了DSP信号处理系统的可行性.     

低功耗微型磁通门的制备与分析

针对微型磁通门传感器降低功耗的要求,利用标准MEMS工艺制备了具有多孔结构铁芯的微型磁通门传感器.经过对器件的测试与分析,这一结构的铁芯能够降低器件功耗,提高传感器的整体性能.通过比较不同多孔铁芯对磁通门最佳激励电流的影响,综合考虑器件性能和制备工艺的要求,确定了最佳的设计参数.     

三分量磁通门传感器轴定向问题研究

利用三分量磁通门传感器进行磁场测量时需知传感器的三个方向轴,而在传感器的安装工程中其三轴方向难于固定,这给磁场测量带来了不便。针对上述问题,从三分量磁通门传感器测量原理出发推导了传感器三轴定向计算公式和有背景干扰磁场时的轴定向误差计算公式;设计了三分量磁通门传感器三轴定向的仿真实验和物理实验,以实验数据为基础分析了背景磁场干扰源对磁通门传感器三轴定向的影响。研究表明:在高精度磁场测量中必须严格控制背景干扰磁场大小来减小传感器轴定向误差,所得结论对磁场测量有一定的实际指导意义。     

微型磁通门的优化分析与性能测试

对铁芯结构的改进有利于满足微型磁通门传感器降低功耗的要求,但不同的拓扑结构所取得的效果不同,为此对铁芯结构进行了优化分析,并采用MEMS工艺制备了不同铁芯结构的微型磁通门进行性能测试与对比验证.测试结果表明,优化后的多孔铁芯结构能更好的降低微型磁通门传感器的功耗与噪声,提高灵敏度,改善器件的整体性能.     

Improved micro fluxgate sensor with double-layer Fe-based amorphous core

A rapid manufacturing process for the micro solenoid fluxgate sensor integrating multilayer amorphous ribbon core has been established, which combines the micro assembling method and the MEMS technologies. We select Fe-based amorphous soft magnetic ribbons for core materials and have fabricated the micro fluxgate sensors by MEMS technologies, with single-layer core and double-layer core respectively. The micro fluxgate sensors with double-layer core show the advantageous to that with single-layer core and exhibit sensitivity of 1089.2 V/T at excitation current of 120 mA rms, wide linear range of ?900 to 900 μT and power consumption of 24.48 mW. The noise power density of the single core fluxgate sensor is 2.48nT/Hz^1/2@1 Hz.     

Improved performance of the micro planar double-axis fluxgate sensors with different magnetic core materials and structures

As a classic weak magnetic field sensor, the fluxgate sensors have great potential application in many fields. This paper presents four kinds of the micro planar double-axis fluxgate sensors based on the MEMS technologies, which have different core materials and core structures. The core materials include electroplated permalloy, Co-based amorphous ribbon and Fe-based amorphous ribbon, and the core structures include single-layer open magnetic loop structure and double-layer closed magnetic loop structure. The sensor with closed double-layer Fe-based ribbon core exhibits a best sensitivity of 238 V/T due to reducing the magnetic flux leakage. The results show that the magnetic core with closed magnetic loop, high permeability and high saturation induction density will help increase the sensitivity of the micro double-axis fluxgate sensor.     

A low power micro fluxgate sensor with improved magnetic core

The influence of an improved magnetic core on the micro fluxgate sensor about sensitivity and power consumption is investigated and discussed in this paper. We have fabricated the micro solenoid fluxgate sensors based on the MEMS technologies, with the electroplating permalloy cores, which are easy to process and used in common; and the amorphous soft magnetic ribbon cores, which have better soft magnetic performances but be hard to be integrated, respectively. Four magnetic core structures are designed, including rectangular structure, unequal width rectangular structure, multi rectangular ring structure and spiral structure. Spiral structure can improve the performances of the fluxgate sensor significantly, both sensitivity and power consumption. The micro fluxgate sensors with the amorphous soft magnetic ribbon cores are promoted in all aspects than those with the electroplating permalloy cores, including ultra low power consumption of 2.4 mW with unequal width rectangular structure, and high sensitivity of 118 V/T with rectangular structure in wide linear range of 0–800 μT.     

MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils

As a classic Earth magnetic field sensor, fluxgate magnetic sensors have great potential applications in many fields. This paper presents a new 3D micro-solenoid fluxgate magnetic sensor based on the MEMS technique. The excitation coils were placed vertically to the detection coils on the chip plane, around a rectangular shaped magnetic core. Polyimide was used to insulate coils and magnetic core. Width of copper conductor lines is 50 μm, and line space is 50 μm. The design of such fluxgate magnetic sensor followed second harmonic signal selecting method. Phase-lock amplifier was used to get second harmonic signal output by detection coils. The linear range of 0–80 μT with sensitivity of 6.7 V/T was achieved from the fabricated sensor with excitation current of 430 mA and the operational frequency of 40 KHz. As the excitation current was 470 mA, linear range of 0–50 μT with sensitivity of 21.7 V/T was achieved.     

新型测斜仪测量误差分析

在地下勘测,钻井探矿等领域,需要测斜仪对钻头的姿态进行精确定位与控制,实时监测地底下钻头的姿态变化。新型测斜仪采用环形双分量磁通门传感器和铁芯不固定的方法,具有结构简单,测量参数少,算法简单,正交度补偿算法简单等特点。但是新测斜仪在测量过程中,受到外界的误差干扰和内部传感器的安装设置误差等问题的干扰。本文针对新型测斜仪的传感器模型和电路设计方面,进行了新型测斜仪的测量误差原理分析,应用合理的电路设计减少电气间电磁干扰误差、应用了软件正交校正及物理校正的方法,有效的抑制了测斜仪传感器本身的姿态误差,提高了测斜传感器的测量准确度。     

Two-axis micro fluxgate sensor on single chip

We present a two-axis micro fluxgate sensor on single chip for electronic compassing function. To measure X- and Y-axis magnetic fields, functional two fluxgate sensors were perpendicularly aligned and connected each other. The fluxgate sensor was composed of square-ring shaped magnetic core and solenoid excitation and pick-up coils. The solenoid coils and magnetic core were separated by benzocyclobutane which had high insulation and good planarization characters. Copper coil patterns of 10 μm width and 6 μm thickness were electroplated on Ti (300 Å)/Cu (1,500 Å) seed layers. 3 μm thick Ni_0.8Fe_0.2 (permalloy) film for the magnetic core was also electroplated under 2,000 gauss. Excellent linear response over the range of ?100 μT to +100 μT was obtained with the sensitivity of ～280 V/T. Actual chip size was 3.1×3.1 mm². The sine and cosine signals of two-axis fluxgate sensor had a good function of azimuth compass.