谐振锯齿波驱动型冲击直线压电马达

传统的冲击压电马达大都工作在准静态下,振幅和工作频率相对较低,速度和输出力均不是很高。基于机械波合成理论,设计了一种新型共振型冲击直线压电马达。分析了压电马达的驱动机理,采用有限元仿真法优化了压电振子的结构尺寸。通过合成频率比为1:2的两个谐振正弦波得到近似谐振锯齿波,设计加工了压电振子、研制了马达样机、进行了性能测试与分析。当预紧力是0.02 N、基频驱动电压是300 Vp-p（592.5 Hz）时,马达无负载最大速度为32.4 mm/s;当预紧力是10 N、基频驱动电压是400 Vp-p（592.5 Hz）时,马达最大负载力可达1 N。实验验证了设计的有效性,表明该种压电马达具有良好的性能。     

新颖微型压电旋转关节的建模与仿真

提出一种基于惯性冲击驱动原理的新颖微型压电旋转关节,用于关节臂式多自由度定位操作系统的旋转关节驱动.该旋转关节采用对称的整体结构设计,利用压电堆产生驱动力矩,通过碟形弹簧调整预紧力,具有运行稳定、驱动力矩大、易于微型化等优点.建立了该机构驱动模块的结构模型,运用ANSYS软件分析了定子结构的静态变形和固有振动特性;建立了该机构的动力学模型,应用MATLAB/Simulink软件获得了旋转轴的粘滑运动和步进位移特性.仿真结果表明,该压电旋转关节具有较好的步进位移输出能力和较宽工作频率范围,在1 000 V/mm激励电场下,步进位移达到0.07°,稳定的粘滑工作频率达到1 000 Hz以上.     

单相斜轨塔形直线超声电机设计与实验

对一种理论斜直线运动轨迹的单相驱动双向运动的直线超声电机进行了理论及实验研究.该电机由塔形定子和倾斜一定角度安装的导轨组成,定子的两个正交工作模态为y-z面内对称振动模态和x-z面内弯振模态,分别对应电机的正反运动方向,利用在工作模态下定子驱动足表面质点相对于导轨的理论斜直线运动来驱动导轨运动.分析了电机的工作原理,推导了电机运行的导轨倾角范围,研制了样机,并进行了模态实验和机械特性实验.实验表明:在导轨倾斜角为35°、激励电压500 Vp-p、预压力4.5 N下,当电机工作在y-z面内对称振动模态,电机正向运动,最大空载速度为79 mm/s,最大输出力为0.5 N;当电机工作在x-z面内弯振模态,电机反向运动,最大空载速度为756 mm/s,最大输出力0.8 N.     

十字形压电振子同型模态振动驱动的平面电机

提出十字形压电振子同型模态驱动的压电平面电机新原理,选定该振子的面外弯振、面内横杆弯振、面内纵杆弯振为工作模态,利用面外弯振分别与面内纵杆弯振、面内横杆弯振的振动耦合,在纵、横杆驱动足上生成沿x Oz、y Oz面行进的椭圆轨迹以推动动子沿x、y向移动。阐明电机驱动原理,优化出振子尺寸为60 mm×60 mm×7.8mm,厘定电机最适驱动频率为30 127 Hz。建立振子机电耦合模型,研究驱动足的振动特性,模拟出驱动足的椭圆轨迹,仿真得到在250 V电压激励时驱动足的x、y、z向振幅分别为1.6μm、1.6μm和1.2μm。建立电机的整机分析模型,探析驱动电压、频率、相位差、预紧力对电机速度的影响。在正常驱动条件下,电机速度可达50 mm/s。该电机在平面装置驱动中的应用前景广泛。     

双十字压电振子同型弯振模态驱动的平面超声电机

为了丰富平面超声电机的型式,提出一种双十字压电振子同型弯振模态驱动的平面超声电机。利用双十字压电振子的纵杆面内、面外弯振耦合以及横杆面内、面外弯振耦合,分别在两杆的驱动足上合成沿xoz、yoz面行进的两相椭圆轨迹,以交替地推动动子沿x、y向移动。分析了该平面超声电机的驱动机理,并推导出两相椭圆轨迹方程。建立了双十字压电振子机电耦合模型,对其三相工作模态的振型进行仿真分析,并在结构优化的基础上实现了三相工作模态频率一致,使它们分别为43 468,43 552和43 569 Hz。仿真了双十字压电振子的频响特性并实现了干扰模态分离,当驱动电压为250 V时,驱动足x、y、z向振幅分别为1.3,0.8和0.9 μm,满足电机驱动要求。模拟得到定频激励下双十字压电振子驱动足的两相椭圆运动轨迹,验证了所设计平面超声电机驱动机理的有效性。该平面超声电机可输出较大速度与动力,具有广阔的应用前景。     

双足驱动双压电晶片直线超声波电机运行机理研究

研究新型直线超声波电机运行机理,采用双压电晶片及双足驱动结构,具有结构简单、无需频率简并、易于小型化等优点。详述其结构、振形特点及工作机理。建立电机定子振动响应有限元模型,给出输入阻抗计算方法。用已建模型计算获得定子驱动足接触点在谐振频率点附近振幅,推导驱动足接触点运动轨迹。通过实测定子阻抗特性将所得结果与理论分析进行比较。     

面向介观尺度制造的螺杆型压电作动器

提出一种可应用于介观尺度零件精密加工进给的螺杆型直线压电作动器,该作动器定子与转子通过精密螺旋副相啮合.首先,建立了该直线压电作动器定子的有限元计算模型;然后,运用ANSYS软件进行了模态分析和谐响应分析,讨论了结构参数对定子谐振频率及振幅的影响,得出了一般规律;最后,根据定子优化设计结果制作了实验样机和专用驱动电源.实验结果表明:该作动器具有较好的输出性能,在电压峰峰值为300 V、驱动频率为16kHz的情况下,其最大空载速度为24 mm/s,最大输出力为6 N,基本可以满足介观尺度对象车铣复合加工对于驱动力和进给速度的要求.     

谐振式压电叠堆的高效换能结构研究

压电叠堆具有纵向机电耦合系数高、耐疲劳性强的特点,但在低频振动条件下,压电叠堆的机电转换效率低,从而限制了其在结构振动能量收集方面的应用。通过将谐振频率接近结构振动频率的谐振器附加在压电叠堆表面形成谐振式压电换能系统,可以有效提高谐振频率附近的机电能量转换效率。本文对谐振式压电换能结构进行参数建模,以压电叠堆所受纵向力与结构激励力的比值衡量谐振式压电叠堆的换能效率,确定系统有效换能频带的宽度与系统的结构设计参数的关系,从而给出谐振式压电换能系统参数优化设计方法。谐振式压电换能结构的实验表明谐振器能有效增加较低振动频率下的机电能量转换效率,提高输出的开路电压     

空间引力波望远镜超前瞄准机构致动器电荷驱动位移行为研究

超前瞄准机构(PAAM)是空间引力波探测望远镜的关键部件,其主要通过给压电致动器输入电压或电荷精确控制位移量,实现对望远镜高精度角度控制。因此,压电陶瓷致动器位移响应直接影响超前瞄准机构指向控制性能。本文提出等效电容量计算方法定量分析压电致动器在电荷驱动下的位移响应特性,并通过数值模拟仿真和实验验证等方式验证了计算方法的准确性和可行性。结果表明：在使用幅值5 V、频率0.05 Hz～5 Hz的正弦波信号控制的电荷放大器驱动某型号压电致动器时,采用本文方法分析结果与实验结果相比,二者位移响应最大偏差小于1.35%,为空间引力波探测望远镜超前瞄准机构的高精度指向控制提供了可能的分析方法和实现途径。     

基于压电陶瓷的大振幅振动台的研究

为实现对高频大振幅传感器的校准,研制了一种基于压电陶瓷的大振幅振动台。用PZT8材料的压电陶瓷片堆叠作为动元件,用功率放大器、电感箱和压电陶瓷片堆叠构成的LC谐振电路,对信号源输出信号进行功率和电压放大,驱动压电陶瓷堆叠振动。该振动台可以实现很小失真的振动,工作频率范围2~5 k Hz,振幅最大可达到7μm,失真度小于5%。     

Travelling wave ultrasonic motor using the B08 flexural mode of a circular membrane

This paper describes the design, construction, and performance of a piezoelectric motor that uses the travelling B₀₈ mode of an 80-mm diameter circular membrane to drive a rotor by frictional contact. The motor is of a thin planar design, giving high torque of up to 0.33 Nm at low speed and has been developed as a design that can be made with lithographic techniques for miniaturization. Investigations of the free stator with a vibration pattern imager and impedance analyser gave the resonance frequency, mode, and electromechanical coupling of the stator. Motor speed as a function of frequency for a constant voltage and performance charts of speed, output power, and efficiency against torque are presented for a particular input voltage and rotor pre-load. The effects of two different lead zirconate titanate (PZT) ring dimensions have been investigated. Excitation of the B₀₉ mode has been observed, incommensurate with the piezoelectric excitation of the stator. This is discussed with relation to edge-clamping of the stator. Single standing wave motoring was observed, believed to arise from asymmetry of the stator and its perturbation of the B₀₈ resonance mode. Sources of power loss, including frame vibration and friction interface slip, are considered and discussed     

A piezoelectric motor using flexural vibration of a thin piezoelectric membrane

This paper describes a new implementation of a disk-type piezoelectric motor, whose stator is a commercial available piezomembrane composed of a nickel alloy disk to which a piezoceramic disk is bonded. The two disks are concentric, and the total thickness is very small. Ultrasonic motors are based on the concept of driving a rotor by mechanical vibration excited on a stator, via the piezoelectric effect. The rotor is in contact with the stator, and the driving force is the frictional force between rotor and stator. To transform the mechanical vibration of the stator in the rotor rotation, a traveling wave must be excited on the stator surface. The proposed motor can be regarded as a disk-type, single wavelength motor in which the traveling wave is due to the natural flexural vibration of the piezomembrane at low frequency. The behavior of the stator is analyzed both theoretically, by using the theory of isotropic and homogeneous vibrating plates, and by means of a commercial finite element computer code, finding a good agreement with the experimental results. The main features of the motor are very small thickness, appreciable torque, and high speed, obtained with low input power at low voltage; the intended application is to substitute the moving-coil in analogic instrumentation.     

Traveling-wave piezoelectric linear motor. I. The stator design

A new type of piezoelectric linear motor incorporating a traveling wave has been developed. The linear motor is comprised of a stator and a carriage. The stator design, which consists of a meander-line structure and gear teeth mounted on the meander-line structure, is the focus of this article. The meander-line structure is constructed with bimorph actuators arranged in a line. These actuators are driven by two phased sets of alternating current (ac) in order to generate a traveling wave. The traveling wave is transferred to the gear teeth, by which the carriage is driven. Modeling of the stator is derived by use of a strain energy method. The performance of various materials is evaluated by analytical and experimental methods. The analytical and the experimental results are quite approximate. Modal analysis is investigated using ANSYS. Appropriate modes associated with ultrasonic levels of resonant frequency are selected to obtain desired motion and to enhance the output performance. Surface speed for various applied input voltage are studied and indicate a nearly linear relationship. The stator in combination with the carriage makes up the linear motor     

Traveling-wave piezoelectric linear motor Part I: the stator design.

A new type of piezoelectric linear motor incorporating a traveling wave has been developed. The linear motor is comprised of a stator and a carriage. The stator design, which consists of a meander-line structure and gear teeth mounted on the meander-line structure, is the focus of this article. The meander-line structure is constructed with bimorph actuators arranged in a line. These actuators are driven by two phased sets of alternating current (ac) in order to generate a traveling wave. The traveling wave is transferred to the gear teeth, by which the carriage is driven. Modeling of the stator is derived by use of a strain energy method. The performance of various materials is evaluated by analytical and experimental methods. The analytical and the experimental results are quite approximate. Modal analysis is investigated using ANSYS. Appropriate modes associated with ultrasonic levels of resonant frequency are selected to obtain desired motion and to enhance the output performance. Surface speed for various applied input voltage are studied and indicate a nearly linear relationship. The stator in combination with the carriage makes up the linear motor.     

高静水压下换能器阻抗特性的测量方法研究

针对在小腔体中阻抗分析仪发射连续波无法准确测得换能器阻抗的问题,提出一种在高静水压下使用脉冲正弦信号激励换能器测量阻抗的方法。以采样电阻法为基础,根据腔体尺寸确定发射脉冲个数以及可测频率范围来有效避免腔体边界反射对测量造成的影响。通过设置不同的发射频率,分别采集换能器两端及采样电阻两端的电压波形信号,利用已知频率的三参数正弦曲线拟合法分别得到波形信号的幅值和初始相位角,计算得到换能器的导纳值。改变静水压力,利用脉冲法测得0~10 MPa静水压下换能器导纳特性。实验结果表明,采用脉冲正弦信号激励的方法可在有限空间内准确测量换能器的阻抗特性;且随着静水压力的升高换能器的谐振频率发生偏移,导纳圆直径减小。     

Y形旋转超声波马达的设计与动态特性分析

为了探索和丰富旋转超声波马达的结构,使其满足响应精准且速度快以及控制简便的要求,设计了Y形旋转超声波马达,并对其结构及动态特性进行了分析。Y形旋转超声波马达将3组压电陶瓷片的横向振动复合成驱动足端面对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子顺时针或逆时针旋转。运用Workbench软件中的Design Exporation组件对Y形旋转超声波马达定子组件的结构尺寸进行了优化设计,提升了定子组件的性能。构建优化后Y形旋转超声波马达定子组件的有限元仿真模型,并通过模态分析获得了定子组件工作所需的固有振型,通过谐响应分析获得了定子组件的幅频特性曲线,通过瞬态分析获得了1个激励周期内定子组件的振动模态,验证了Y形旋转超声波马达的驱动机理。结果表明,Y形旋转超声波马达压电陶瓷片表面施加电压的最佳频率为20 739 Hz,对应的驱动足端面的振幅为6.95 μm。Y形旋转超声波马达结构简单且具有对称性,能效利用率高,对拓宽超声波马达的应用领域有重要参考价值。     

频谱分析法在测量封闭式制冷压缩机转速中的应用

采用频谱分析法测量封闭式压缩机的实际转速:通过电流互感器将变频器输出端电流信号转变成电压信号,对该电压信号进行数据采集并进行快速傅立叶变换获得定子电流的激磁分量频率和转子电流在定子电流中的反馈"负载分量"的频率,根据这两个频率计算出封闭式压缩机的实际转速.由于受外界磁场和噪声等的干扰,对所采集到的数据进行低通滤波处理.     

Flextensional ultrasonic piezoelectric micro-motor

This paper presents the experimental design, construction, and operational characteristics of a new type of standing wave piezoelectric ultrasonic micro-motor. The motor uses a composite stator, consisting of a metallic flex-tensional mode converter, or "cymbal", bonded to a 2-mm-square piezoelectric plate. The cymbal converts contour-mode vibrations of the plate into oscillations in the cymbal, perpendicular to the stator plane. These are further converted into rotational movement in a rotor pressed against the cymbal by means of an elastic-fin friction drive to produce the required rotary actuation. The motor operates on a single-phase electrical supply, and direct control of the output speed and torque can be achieved by adjusting the amplitude and frequency of the supply voltage. Noncontact optical techniques were used to assess the performance of the developed micro-motor. The operational characteristics were developed from the acceleration and deceleration characteristics. No-load output speed (11 rev s(-1)) and stall torque (27 nNm) were derived using high-speed imaging and image analysis. Maximum efficiency was 0.6%.     

Piezoelectric stepper motor with direct coupling mechanism to achieve high efficiency and precise control of motion

The paper describes a piezoelectric motor that combines the merits of piezoelectric materials, such as high power density generated at electromechanical resonance, and a precise control of displacement. In the motor, a standing shear wave is excited at the resonance in the piezoelectric tube, and it produces high-frequency torsional vibrations of the stator. The vibrations are converted into unidirectional rotation of a rotor by using a direct coupling mechanism between the stator and the rotor in which a clutch drives the rotor via locking it. The direct coupling makes it possible to transmit the whole power generated in the piezoelectric tube to the rotor, and thus achieve the high efficiency of the motor. It also allows combining two regimes of operation: continuous rotation and a stepwise motion within a 360 degrees interval with a high resolution of angular displacement.     

Coupled tangential-axial resonant modes of piezoelectric hollow cylinders and their application in ultrasonic motors

This paper describes a tangential-axial eigen-mode of a piezoelectric hollow cylinder. A new type of piezoelectric ultrasonic motor using this oscillation mode has been developed. The motor is a traveling-wave-type motor. The stator of such a motor consists of a solid piezoelectric hollow cylinder, which, excited in the tangential-axial resonant mode by a three-phase electrical signal, will exhibit elliptical displacement and transfer rotation to the rotor. The behavior of the stator has been simulated with finite element method (FEM) software. The simulation results have been checked with single-point contact measurements on the surface of the ultrasonic motors. The paper closes with the introduction of new ultrasonic motors based on this oscillation mode.