Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2

We studied supercritical carbon dioxide fluid deposition of titanium oxide (TiO₂) in trench features on Si substrates using a flow-type deposition apparatus from titanium diisopropoxide bis(dipivaloylmethanate), aiming at fabricating conformal films at a relatively low temperature. We investigated the deposition rate and step coverage under a fluid temperature from 40 to 60 °C, a pressure from 8.0 to 10.0 MPa, and a substrate temperature from 80 to 120 °C. They were dependent on the fluid density, indicating that the solubility difference between the bulk fluid and the neighborhood of the substrate surface plays a decisive role for the deposition. An excellent conformal filling of the trench features was achieved from the fluid of 60 °C under 8 MPa on the substrate kept at 80–100 °C. The XPS spectra of the deposited film suggested partial formation of TiO₂, and the XRD spectra showed the existence of some crystalline TiO₂ (anatase).     

Photocatalytic activities of N-doped nano-titanias and titanium nitride

TiO₂ doped with various loadings of nitrogen was prepared by nitridation of a nano-TiO₂ powder in an ammonia/argon atmosphere at a range of temperatures from 400 to 1100 °C. The nano-TiO₂ starting powder was produced in a continuous hydrothermal flow synthesis (CHFS) process involving reaction between a flow of supercritical water and an aqueous solution of a titanium salt. The structures of the resulting nanocatalysts were investigated using powder X-ray diffraction (XRD) and Raman spectroscopy. Products ranging from N-doped anatase TiO₂ to phase-pure titanium nitride (TiN) were obtained depending on post-synthesis heat-treatment temperature. The results suggest that TiN started forming when the TiO₂ was heat-treated at 800 °C, and that pure phase TiN was obtained at 1000 °C after 5 h nitridation. The amounts and nature of the Ti, O and N at the surface were determined by X-ray photoelectron spectroscopy (XPS). A shift of the band-gap to lower energy and increasing absorption in the visible light region, were observed by increasing the heat-treatment temperature from 400 to 700 °C.     

Synthesis of fine dispersed titanium diboride from nanofibrous carbon

This paper presents the experimental data on the synthesis of titanium diboride (TiB₂) fine dispersed powder carried out in laboratory scale. TiB₂ powder was prepared by the reduction of titanium dioxide with boron carbide and nanofibrous carbon in an argon atmosphere. The powders of TiB₂ were characterized by X-ray diffraction (XRD), elemental analyses, scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), low-temperature nitrogen adsorption, particle size analysis, simultaneous thermogravimetry and differential scanning calorimetry (TG-DSC). The resulting material contains a single phase – titanium diboride. The particles of the powder were predominantly aggregated. The average size of the particles and the aggregates were 7.4–8.0 µm with a wide size of distribution. The specific surface values of samples obtained were 2.4–5.8 m²/g. The oxidation of titanium diboride began from the temperature of 450 °C. In this work, the optimal synthesis conditions were estimated: the molar ratio was TiO₂:B₄C:C=2:1:3 (according to stoichiometry), the temperature was 1600 °C, the process duration was 20–30 min.     

Synthesis of diamond at sub 300 °C substrate temperature

Sulfur-assisted hot-filament chemical vapor deposition (HFCVD) was employed to grow nanocrystalline diamond at low substrate temperature, ∼ 300 °C, on molybdenum (Mo), and ∼ 250 °C, on polyimide film. The polyimide films remained flexible and strong after the deposition, clearly indicating that they did not experience temperatures near or above the glass transition temperature at ∼ 360 °C. The relative intensity of the diamond peak in the Raman spectra increases when the substrate temperature is decreased from ∼ 500 to ∼ 300 °C, a result that is inverted with respect to HFCVD without sulfur. This behavior was employed to obtain microcrystalline diamond on Mo at ∼ 270 °C. Profound changes induced to the gas phase chemistry and surface reactions when a trace amount of H₂S is added to the HFCVD process seem to enable these results.     

The effects of deposition temperature on structure and dielectric properties of Ba0.6Sr0.4TiO3 thin films produced by pulsed laser deposition

The effects of deposition temperature on orientation, surface morphology and dielectric properties of the thin films for Ba_0.6Sr_0.4TiO₃ thin films deposited on Pt/Ti/SiO₂/Si substrates by pulsed laser deposition were investigated. X-ray diffraction patterns revealed a (2 1 0) preferred orientation for all the films. With rising substrate temperature from 650 °C to 700 °C, the crystallinity and crystal grain size of the films increase, the relative dielectric constant increases, but the dielectric losses have not obvious difference. The film deposited at 350 °C and annealed at 700 °C has strongly improved roughness and dielectric permittivity compared with the film only deposited directly at 700 °C. Three distinct relaxation processes within tan(δ) were found for the Ba_xSr_1?xTiO₃ film: a broadened process of the film relaxation, an intermediate peak which originates from Maxwell–Wagner–Sillars polarization, and an extremely slow process ascribed to leak current. The complex dielectric permittivity and loss can be fitted by an improved Cole–Cole model corresponding to a stretched relaxation function.     

Characterization of single crystalline a-TiO2 films on MgAl2O4(100) substrates by MOCVD

Anatase phase TiO₂ (a-TiO₂) films have been deposited on MgAl₂O₄(100) substrates at the substrate temperatures of 500–650 °C by the metal organic chemical vapor deposition (MOCVD) method using tetrakis-dimethylamino titanium (TDMAT) as the organometallic (OM) source. The structural analyses indicated that the TiO₂ film prepared at 600 °C had the best single crystalline quality with no twins. The out-of-plane and in-plane epitaxial relationships of the film were a-TiO₂(001)||MgAl₂O₄(100) and TiO₂[100]||MgAl₂O₄[100], respectively. A uniform and compact surface with stoichiometric composition was also obtained for the 600 °C-deposited sample. The average transmittance of all the TiO₂ films in the visible range exceeded 91% and the optical band gap of the films varied from 3.31 to 3.41 eV.     

Decomposition of nonionic surfactant on a nitrogen-doped photocatalyst under visible-light irradiation

A visible-light-active N-containing TiO₂ photocatalysts were prepared from crude amorphous titanium dioxide by heating amorphous TiO₂ in gaseous NH₃ atmosphere. The calcination temperatures ranged from 200 to 1000 °C, respectively. UV–vis/DR spectra indicated that the N-doped catalysts prepared at temperatures <400 °C absorbed only UV light (E_g = 3.3 eV), whereas samples prepared at temperatures ≥400 °C absorbed both, UV (E_g = 3.10–3.31 eV) and vis (E_g = 2.54–2.66 eV) light. The chemical structure of the modified photocatalysts was investigated using FT-IR/DRS spectroscopy. All the spectra exhibited bands indicating nitrogen presence in the catalysts structure. The photocatalytic activity of the investigated catalysts was determined on a basis of a decomposition rate of nonionic surfactant (polyoxyethylenenonylphenol ether, Rokafenol N9). The most photoactive catalysts were those calcinated at 300, 500 and 600 °C. For the catalysts heated at temperatures of 500 and 600 °C Rokafenol N9 removal was equal to 61 and 60%, whereas TOC removal amounted to 40 and 35%, respectively. In case of the catalyst calcinated at 300 °C surfactant was degraded by 54% and TOC was removed by 35%. The phase composition of the most active photocatalysts was as follows: (a) catalyst calcinated at 300 °C—49.1% of amorphous TiO₂, 47.4% of anatase and 3.5% of rutile; (b) catalyst calcinated at 500 °C—7.1% of amorphous TiO₂, 89.4% of anatase and 3.5% of rutile; (c) catalyst calcinated at 600 °C—94.2% of anatase and 5.8% of rutile.     

Synthesis of titanium oxide particles in supercritical CO2: Effect of operational variables in the characteristics of the final product

A new chemical precursor is proposed for the synthesis of TiO₂ anatase nanoparticles in supercritical CO₂: the organometallic diisopropoxititanium bis(acetylacetonate) (DIPBAT). DIPBAT thermohydrolysis in supercritical carbon dioxide (SC-CO₂) has been studied in the range 10.0–20.0 MPa and 200–300 °C, and compared with that of titanium tetraisopropoxide (TTIP). The proposed reaction mechanism is a thermohydrolysis, where the hydrolysis of acetylacetonate groups is the limiting step of the reaction rate. The addition of water directly to the reaction favours the growth of formed particles, whereas ethanol offers better results as hydrolysing reactant, leading to smaller particles. Experiments have been performed first in a batch process and secondly in a semi-continuous one, varying the residence time in the reactor from 30 s to 2 min. The effect of operational variables in the final product and their influence in the different steps of the process have been studied. Results have shown that product crystallinity is related with temperature, and temperatures higher than 250 °C are necessary to obtain well-crystallized TiO₂ anatase. In the same sense, area Brunauer–Emmett–Teller (BET) is connected with crystallinity, and amorphous product, Ti(OH)₄, shows the highest surface area. Particle size and particle size distribution (PSD) are controlled by instantaneously supersaturation degree, and precursor concentration together with pressure are the main responsible of particle size control. Operational conditions influence solubility of species, mass transfer, chemical reaction and nucleation and particle growth and they mark the final characteristics of the product and its application. In such a way, good crystallized TiO₂ anatase particles of about 200 nm in diameter have been obtained working at 300 °C, 20.0 MPa and residence time of 2 min, with a reaction medium composed by CO₂/ethanol (80/20, v/v). Such particles present good optical properties and specific surface area BET of around 150 m²/g. At lower working temperatures the obtained particles present worse crystallinity; however, their specific surface area increases to 350 m²/g and they are suitable as support of metal clusters in heterogeneous catalysis.     

Dispersant-assisted low frequency electrophoretically deposited TiO2 nanoparticles in non-aqueous suspensions for gas sensing applications

The effect of dispersant on deposition mechanism of TiO₂ nanoparticles at 1 Hz under non-uniform AC fields was investigated. It was found that by adding Dolapix to suspension, deposition pattern is drastically changed enabling particles to enter the gap leaving the electrodes intact. Using low frequency AC electrophoretic deposition technique in the presence of dispersant, we succeeded in fabricating gas sensor in less than 2 min. Gas sensing measurements were performed in the temperature range of 450–550 °C. The results explained that the sensor has good stability in time and repeatability performance toward high response. The maximum sensitivity of about 180 for the TiO₂ nanoparticles sensor is observed with 47 ppm NO₂ gas and the response and recovery times is about 60–150 s. The optimum temperature of the gas sensor was obtained in 450 °C where sensor showed a linear trend up to 50 ppm of NO₂ gas. This sensing behavior in un-doped TiO₂ as NO₂ sensor can be mainly ascribed to the porous structure of the sensing film and its good contacts to the substrate and electrode assembly.     

Low temperature sintering and microwave dielectric properties of TiO2 ceramics

The TiO₂ ceramics were prepared by a solid-state reaction in the temperature range of 920–1100 °C for 2 h and 5 h using TiO₂ nano-particles (Degussa-P25 TiO₂) as the starting materials. The sinterability and microwave properties of the TiO₂ ceramics as a function of the sintering temperature were studied. It was demonstrated that the rutile phase TiO₂ ceramics with good compactness could be readily synthesized from the Degussa-P25 TiO₂ powder in the temperature range of 920–1100 °C without the addition of any glasses. Moreover, the TiO₂ ceramics sintered at 1100 °C/2 h and 920 °C/5 h demonstrated excellent microwave dielectric properties, such as permittivity (Ɛ_r) value >100, Q × f  > 23,000 GHz and τ_f ≅ 200 ppm/°C.     

Ultra-high elevated temperature strength of TiB2-based ceramics consolidated by spark plasma sintering

Spark plasma sintering of TiB₂–boron ceramics using commercially available raw powders is reported. The B₄C phase developed during reaction-driven consolidation at 1900 °C. The newly formed grains were located at the grain junctions and the triple point of TiB₂ grains, forming a covalent and stiff skeleton of B₄C. The flexural strength of the TiB₂–10 wt.% boron ceramic composites reached 910 MPa at room temperature and 1105 MPa at 1600 °С. Which is the highest strength reported for non-oxide ceramics at 1600 °C. This was followed by a rapid decrease at 1800 °C to 480–620 MPa, which was confirmed by increased number of cavitated titanium diboride grains observed after flexural strength tests.     

Substrate temperature dependent bolometric properties of TiO2−x films for infrared image sensor applications

In this study, we investigated the substrate temperature (T_S) dependent bolometric properties on TiO_2−x films for infrared image sensor applications. The film crystallinity was changed from amorphous to rutile phase with increasing the T_S. The decrement of resistivity with temperature in TiO_2−x test-devices confirms the typical semiconducting property. All the test pattern devices have linear I-V characteristic performance which infers that the ohmic contact was well formed at the interface between the TiO_2−x and the Ti electrode. The resistivity, activation energy (E_a) and the temperature coefficient of resistance (TCR) values of the device samples were decreased up to 200 °C of T_S. The sample deposited at 200 °C had a significantly low 1/f noise parameter and a high universal bolometric parameter (β). However, at the substrate temperature of 250 °C, the E_a, TCR and the 1/f noise values were increased due to increase of the resistivity. The TCR and the 1/f noise values are proportional to the resistivity of TiO_2−x films. As a result, the low resistivity of TiO_2−x sample deposited at 200 °C is a viable bolometric material for uncooled IR image sensors.     

High-quality diamond film deposition on a titanium substrate using the hot-filament chemical vapor deposition method

Diamond film on titanium substrate has become extremely attractive because of the combined properties of these two unique materials. Diamond film can effectively improve the properties of Ti for applications as aerospace and biomedical materials, as well as electrodes. This study focuses on the effects of process parameters, including gas composition, substrate temperature, gas flow rate and reactor pressure on diamond growth on Ti substrates using the hot-filament chemical vapor deposition (HFCVD) method. The nucleation density, nuclei size as well as the diamond purity and growth tendency indices were used to quantify these effects. The crystal morphology of the material was examined with scanning electron microscopy (SEM). Micro-Raman spectroscopy provided information on the quality of the diamond films. The growth tendency of TiC and diamond film was determined by X-ray diffraction analysis. The optimal conditions were found to be: CH₄:H₂ = 1%, gas flow rate = 300 sccm, substrate temperature T_sub = 750 °C, reaction pressure = 40 mbar. Under these conditions, high-quality diamond film was deposited on Ti with a growth rate of 0.4 μm/h and sp² carbon impurity content of 1.6%.     

Synthesis and characterization of titanium oxide nanotubes and its performance in epoxy nanocomposite coating

Titanium oxide nanotubes (TiO₂ nanotube, TNT) were prepared from hydrothermal treatment of TiO₂ particles in NaOH at 140 °C, followed by neutralization with HCl. The structure of the nanotubes was characterized by transmission electron microscopy (TEM) and X-ray diffraction (XRD). TNT synthesized under the optimal conditions with approximately 10–20 nm wide, and several (100–200) of nanometers long. TNT is used as white pigment for two component epoxy-based coating. Ultrasonication followed by mechanical stirring has been applied for dispersion of TNT powder in an epoxy matrix. The resulting perfect dispersion of TNT particles in epoxy coating revealed by scanning electron microscopy (SEM) ensured white particles embedded in the epoxy matrix. The effects of TNT particle concentrations on thermal, mechanical and corrosion resistance of epoxy coatings composite were studied and compared to that of submicron particles. It was found that the TNT significantly enhances the heat resistance, the thermal stability and the glass transition temperature of epoxy resin. Epoxy/TNT nanocomposite with 5.0 wt.% TNT shows the highest thermal stability, the temperature of 50% weight loss increased from 365 to 378 °C, the amount of char yields or residues at 600 °C increased from 7.13 to 13.50 wt.%, respectively to 1.0 and 5.0 wt.% TNT. The glass transition temperature (Tg) increased from 182 to 220 °C too. The mechanical properties and corrosion resistance of epoxy resin greatly improved by using reinforcing TNT and this improvement increases with increase TNT wt.%.     

Composition,structure and mechanical properties of the titanium surface after induction heat treatment followed by modification with hydroxyapatite nanoparticles

Coatings of titania (TiO₂) and "titania–hydroxyapatite" were prepared by oxidation of commercially pure titanium VT1-00 using induction heat treatment (IHT), followed by modification with colloidal hydroxyapatite (HAp) nanoparticles. The IHT treatment was performed at temperatures within 600–1200 °C for 300 s. According to the results of scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive X-ray fluorescent analysis (EDX), nanoindentation and in vitro testing, titania coatings of high morphological heterogeneity, and high mechanical properties and biocompatibility were formed on the titanium surface after IHT. The coatings were found to consist of nano- and submicron crystals of oval, needle-like, plate and prismatic shapes. A subsequent modification with HAp nanoparticles of the coated titanium substrate leads to accelerated formation of mechanically strong oxidebioceramic composite coatings. It was established that the porous oxide coatings modified with nanoparticles of HAp that were formed at temperatures from 800 to 1000 °C and holding for at least 30 s had a high biocompatibility.     

Pulsed laser deposition of hard and superhard carbon thin films from C60 targets

In the present study, carbon films were deposited by a pulsed laser deposition method. A C₆₀ fullerene target has been irradiated by a frequency doubled Nd:YAG laser with a pulse duration of 7 ns. The carbon films grown on Si(111) substrates at different substrate deposition temperatures (30, 300 and 500 °C) were characterized by Raman, X-ray Photoelectron and X-ray Auger Electron Spectroscopies, Energy Dispersive X-Ray Diffraction, Scanning Electron and Atomic Force Microscopies, and Vickers microhardness technique. The composition, structure, morphology and mechanical properties of films were found to be strongly dependent on the substrate temperature. At 30 °C and 300 °C deposition temperature, superhard and hard diamond-like films have been obtained, respectively. In the case of 500 °C deposition, a hard film, composed of crystalline C₆₀ and diamond-like carbon, has been prepared.     

Low-temperature sintering of coarse alumina powder compact with sufficient mechanical strength

Coarse alumina powder compacts doped with various amounts of titania and copper oxide were pressurelessly sintered from 900 °C to 1600 °C. Their phase assemblages and microstructural evolution, as well as their properties, were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), differential scanning calorimetry/thermogravimetric (DSC/TG) analysis, and three-point bending and wetting test. The role of TiO₂ and CuO during the sintering is discussed in detail. The experimental results show that the liquid phase from the copper oxide appeared at approximately 1200 °C, so the solid-state reaction between alumina and titania took place at a lower temperature. Such solid state-reaction sintering had a strong impact on the grain growth and greatly promoted the densification of the alumina compact. In addition, the liquid phase inhibited the abnormal grain growth and microcracking. As a result, the coarse alumina powder compacts doped with 5 wt% TiO₂–CuO were fully densified and exhibited sufficient flexural strength (342±21 MPa) when sintered at a temperature of 1450 °C for 2 h.     

Protective properties of Al2O3 + TiO2 coating produced by the electrostatic spray deposition method

Mechanical resistance of Al₂O₃ + TiO₂ nanocomposite ceramic coating deposited by electrostatic spray deposition method onto X10CrAlSi18 steel to thermal and slurry tests was investigated. The coating was produced from colloidal suspension of TiO₂ nanoparticles dispersed in 3 wt% solution of Al₂(NO₃)₃, as Al₂O₃ precursor, in ethanol. TiO₂ nanoparticles of two sizes, 15 nm and 32 nm, were used in the experiments. After deposition, coatings were annealed at various temperatures, 300, 1000 and 1200 °C, and next exposed to cyclic thermal and slurry tests. Regardless of annealing temperature and the size of TiO₂ nanoparticles, the outer layer of all coatings was porous. The first five thermal cycles caused a rapid increase of aluminum content of the surface layer to 30–37 wt%, but further increase in the number of thermal cycles did not affect the aluminum content. The oxidation rate of coating-substrate system was lower during the thermal tests than during annealing. The oxidation rate was also lower for smaller TiO₂ particles (15 nm) forming the coating than for the larger ones (32 nm). The protective properties of Al₂O₃ + TiO₂ coating against intense oxidation of substrate were lost at 1200 °C. Slurry tests showed that coatings annealed at 1000 °C had the best slurry resistance, but thermal tests had weakened this slurry resistance, mainly due to decreasing adhesion of the coating.     

Microwave performance of thin film ferroelectric varactors in the wide temperature range of −223 °C to +227 °C

Parallel-plate Au(Pt)/Ba_0.25Sr_0.75TiO₃/(Pt)Au thin film varactors are fabricated on high resistive Si substrate and characterized at 1 MHz and microwave frequencies up to 45 GHz in the temperature range of −223 °C to +227 °C. The relative tunability of capacitance decreases with temperature, as capacitance does, from 80 to 90% at −193 °C down to 10% at +227 °C. The temperature coefficient of capacitance in the temperature range −55 to +125 °C is approximately 0.3% at 20 GHz and zero dc field. The temperature dependence of the varactor loss tangent, in general, follows that of the capacitance. The loss tangent at zero dc field and 20 GHz is less than 0.1 at −193 °C and less than 0.02 at +227 °C. The figure of merit of the varactor, taking into account both the tunability and the loss tangent, at 20 GHz is more than 1000 at −193°C and 50 at +227 °C.     

Pressureless sintering of titanium carbide doped with boron or boron carbide

Titanium carbide ceramics with different contents of boron or B₄C were pressureless sintered at temperatures from 2100 °C to 2300 °C. Due to the removal of oxide impurities, the onset temperature for TiC grain growth was lowered to 2100 °C and near fully dense (>98%) TiC ceramics were obtained at 2200 °C. TiB₂ platelets and graphite flakes were formed during sintering process. They retard TiC grains from fast growth and reduced the entrapped pores in TiC grains. Therefore, TiC doped with boron or B₄C could achieve higher relative density (>99.5%) than pure TiC (96.67%) at 2300 °C. Mechanical properties including Vickers’ hardness, fracture toughness and flexural strength were investigated. Highest fracture toughness (4.79 ± 0.50 MPa m^1/2) and flexural strength (552.6 ± 23.1 MPa) have been obtained when TiC mixed with B₄C by the mass ratio of 100:5.11. The main toughening mechanisms include crack deflection and pull-out of TiB₂ platelets.