数字全息信息记录最大化及简化相移技术

本丈从信息论的角度研究了数字全息信息量与记录光路的关系,证明了同轴傅里叶变换全息是实现全息信息量最大记录的光路.同时提出了一种新的简化相移数字全息显微技术,本技术采用四分之一波片作为相移器,结合计算机模拟原参考光,只需进行一次相移,拍摄两次全息图和一次物光强度分布图就可以有效的消除数字全息再现像中的零级像和共轭像.将新的相移技术与同轴无透镜傅里叶变换全息相结合,简化了相移步骤,实现了数字全息再现实像最高像素输出,从而提高了数字全息再现像分辨力.     

四步相移数字全息干涉术相移提取和物光重建

提出广义相移干涉术中结合广义四步公式改进最小二乘法抽取任意相移进而重建复波的方法.利用广义相移数字全息算法的物波重建公式替代传统最小二乘法来提取参考光相位和重建物体波前,大幅减小迭代循环的计算量.使用该方法,每一次迭代计算参考相位只需要一个最小二乘法,同时利用物波前重建公式计算物光相位.这种方法的可行性和有效性已被计算...     

基于EALCD的数字全息的研究

采用一种新的数字全息再现方法,将电荷耦合器件CCD与电寻址液晶EALCD相结合实现数字全息的再现.同时将数字图像处理技术与数字全息术相结合,应用MATLAB软件对记录的全息图进行数字图像处理,实验结果表明,该方法简单快速.通过图像增强等方法对全息图进行数字图像处理,在全息再现中,全息干涉图的对比度得到了显著的提高,有利于全息干涉条纹的自动判读.     

随机相移误差的Lissajous标定与校正

将Lissajous标定技术应用到相移干涉测量的相移算法(PSA)中,提出一种基于Lissajous标定技术的随机相移误差校正算法。该算法不需要计算各帧干涉图之间的实际相移量,直接用Lissajous标定和椭圆拟合的方法计算相移算法的相位提取误差(包括离焦、偏倚、相移量偏差)然后进行校正。数值模拟结果表明:该算法不需要迭代运算就能从大于3帧的带有随机相移误差的干涉图中有效恢复出正确的相位信息,运算时间少,计算精度高并且适合于所有的相移算法。实验结果表明:基于Lissajous标定技术的随机相移误差校正算法与现有的迭代随机相移算法(AIA)精度相当,但计算速度得到明显提升。     

相移数字散斑干涉计量系统

本建立了一套相移激光数字散斑干涉自动测量系统,运用一系列的图象处理方法,实现了高精度的自动测量,显地提高了数字散斑干涉计量技术的可靠性、实用性及自动化程度。该计量系统被应用于变形、振动等参数的测量中,取得了较为理想的结果。     

位相测量轮廓术中相移误差和最佳相移次数的研究

位相测量轮廓术是三维面形测量的一种重要方法,它采用的离散相移技术要求精确的相移,在实际系统中不可避免地存在着相移误差,它将导致计算位相和重建面形的误差,本文利用已建立的三维面形仿真系统,定量研究了不同线性相移误差下所引起的位相误差和面形误差大小,本文还讨论了应如何选取最佳的相移次数,本文的工作可为实际测量的校准提供理论数据,对实际测量工作具有指导意义。     

相移剪切ESPI测量精度分析

条纹信噪比、相移量误差和探测器非线性是影响相移剪切ＥＰＳＩ测量精度的三个主要因素。本文分析了这些因素对相移剪切ＥＳＰＩ测量精度的影响，并对相移剪切ＥＳＰＩ系统的整体误差进行了估计。     

相移条纹投影三维形貌测量技术综述

结构光三维形貌测量系统目前得到了越来越广泛的应用和研究,相移条纹投影三维形貌精密测量技术是其重要的发展方向。对结构光相移条纹投影三维形貌测量系统的应用发展、工作过程、不同系统构成方式、相移条纹的各种形式及特点、相位误差校正方法、不同相位解包裹算法及其优缺点和适用场合、测量系统数学模型的实现方法及其相应的优缺点、高动态范围测量技术等进行了详细的分析。对相移条纹投影系统的工作流程、实现方法、关键技术的发展及其存在问题等进行了比较全面的梳理,为三维形貌精密测量技术进一步满足先进制造中更高精度的要求指出了后续的研究方向。     

基于格莱姆-施密特正交化两步相移轮廓术

将格莱姆-施密特正交化法引入投影栅形貌测量,提出了一种新的两步相移轮廓术.首先将2幅随机相移正弦条纹通过DLP投影仪投射到待测物体上,由CCD相机采集受物体形貌调制的变形光栅条纹图,再选择合适大小窗口经像素逐点均值法消除变形栅线图中的背景成分,然后对消背景栅线图进行格莱姆-施密特正交化,得到2幅消背景相移栅线图对应的正交基,由正交基解调出相位数据.最后对面膜样品进行了实际测量,并与其它方法进行了比较分析,实验结果证明了该方法的有效性.     

基于白光相移干涉术的微结构几何尺寸表征

将Carré等步长相移法与白光垂直扫描相结合形成了一种白光等步长相移算法,该方法快速、准确、非接触,垂直分辨力可达亚纳米级.测量系统集成了Mirau显微干涉物镜,并通过高精度压电陶瓷纳米定位器带动物镜进行垂直扫描.分析了Carré法应用于白光干涉信号的相位提取的精度,对不同扫描步距以及不同信噪比情况下的测量进行了计算机仿真,确定了测量参数.结合重心法将相位计算的数据范围直接定位于干涉信号的零级条纹,从而省去了相位解包裹过程.通过对微谐振器和标准台阶的测量说明了该方法的有效性,并使用白光相移干涉、白光垂直扫描和单色光相移干涉对44 nm标准台阶进行了测量,并对测量结果进行了比较.     

Phase-shifting with computer-generated holograms written on a spatial light modulator

We propose a new computer-controlled phase-shifting method based on computer-generated holograms (CGHs) displayed on a spatial light modulator (SLM). In this method the accurate phase shifts required in phase-shifting digital holography or interferometry are induced by a suitable transformation of the encoding patterns of the CGH displayed on a SLM. Both the theoretical analysis and the experimental results demonstrate the feasibility of this approach. We also discuss possible applications of this method in the field of interferometric null testing of aspheres.     

Three-dimensional Displacement Analysis by Windowed Phase-shifting Digital Holographic Interferometry

Abstract:  Phase-shifting digital holography is a new method for measuring the displacement distribution on the surface of an object. The authors previously proposed a windowed phase-shifting digital holographic interferometry (windowed PSDHI). This method provides accurate displacement distributions by decreasing the effect of speckle patterns. In this study, the method is extended to analyse three-dimensional displacement components in a microscope. Three object laser beams in the optical system are used. Four phase-shifted holograms are recorded for each object laser beam. The complex amplitude of each reconstructed light at the object is calculated by the Fresnel diffraction integral of the complex amplitude of the hologram. The reconstructed distance is obtained at the point with the maximum of the standard deviation of the intensities of the object reconstructed with changing the reconstruction distance. The three phase-difference values between before and after deformation provide the three-dimensional displacement components. Theoretical treatment and experimental results of three-dimensional displacement measurement using this method are shown.     

Phase-shifting digital holography with a phase difference between orthogonal polarizations

Phase-shifting digital holography with a phase difference between orthogonal polarizations is proposed. The use of orthogonal polarizations can make it possible to record two phase-shifted holograms simultaneously. By combining the holograms with the distributions of a reference wave and an object wave, the complex field of the object's wavefront can be obtained. Preliminary experimental results are shown to confirm the proposed method.     

Three-dimensional displacement measurement for diffuse object using phase-shifting digital holography with polarization imaging camera

The amount of displacement of a diffused object can be measured using phase-shifting digital holography with a polarization imaging camera. Four digital holograms in quadrature are extracted from the polarization imaging camera and used to calculate the phase hologram. Two Fourier transforms of the phase holograms are calculated before and after the displacement of the object. A phase slope is subsequently obtained from the phase distribution of division between the two Fourier transforms. The slope of the phase distribution is proportional to the lateral displacement of the object. The sensitivity is less than one pixel size in the lateral direction of the movement. The longitudinal component of the displacement can be also measured separately from the intercept on the phase axis along the phase distribution of the division between two Fourier transforms of the phase holograms.     

Effects of quantization in phase-shifting digital holography

We discuss quantization effects of hologram recording on the quality of reconstructed images in phase-shifting digital holography. We vary bit depths of phase-shifted holograms in both numerical simulation and experiments and then derived the complex amplitude, which is subjected to Fresnel transformation for the image reconstruction. The influence of bit-depth limitation in quantization has been demonstrated in a numerical simulation for spot-array patterns with linearly varying intensities and a continuous intensity object. The objects are provided with uniform and random phase modulation. In experiments, digital holograms are originally recorded at 8 bits and the bit depths are changed to deliver holograms at bit depths of 1 to 8 bits for the image reconstruction. The quality of the reconstructed images has been evaluated for the different quantization levels.     

Quantization noise and its reduction in lensless Fourier digital holography

Digital holography is an imaging technique that enables recovery of topographic 3D information about an object under investigation. In digital holography, an interference pattern is recorded on a digital camera. Therefore, quantization of the recorded hologram is an integral part of the imaging process. We study the influence of quantization error in the recorded holograms on the fidelity of both the intensity and phase of the reconstructed image. We limit our analysis to the case of lensless Fourier off-axis digital holograms. We derive a theoretical model to predict the effect of quantization noise and we validate this model using experimental results. Based on this, we also show how the resultant noise in the reconstructed image, as well as the speckle that is inherent in digital holography, can be conveniently suppressed by standard speckle reduction techniques. We show that high-quality images can be obtained from binary holograms when speckle reduction is performed.     

Parallel three-step phase-shifting digital holography

We propose parallel three-step phase-shifting digital holography as a technique capable of noiseless instantaneous measurement of three-dimensional objects based on phase-shifting interferometry. The proposed digital holography carries out three-step phase shifting at the same time by using a phase-shifting array device located in the reference beam. The array device has a periodic three-step phase distribution, and its configuration is simplified compared with that required for conventional parallel phase-shifting digital holography. Therefore the optical system of the proposed parallel phase-shifting digital holography is more suitable for the realization of the proposed holography. We conduct both a numerical simulation and a preliminary experiment. The results of the simulation and experiment agree well with those of the conventional phase-shifting method and are superior to the results obtained by conventional digital holography by using the Fresnel transform alone. Thus the effectiveness of the proposed technique is verified.     

Binary representation of interference patterns for phase-shifting digital hologram

Phase-shifting digital holograms can completely record the complex (amplitude and phase) wavefront information, containing three-dimensional object shape and relative position. In this study, we examine a binary representation for a phase-shifting digital hologram and apply it to three-dimensional object recognition and reconstruction. For this purpose, we derive an optimal threshold and quantized value for the binary representation of the interference patterns. The recognition results indicate that even with only one bit to represent the digital hologram, there is still enough information for us to recognize the three-dimensional objects. By using the proposed algorithms, one can easily implement the overall recognition process in real-time applications.     

Parallel two-step phase-shifting digital holography

We propose a parallel two-step phase-shifting digital holography technique capable of instantaneous measurement of three-dimensional objects, with a view toward measurement of dynamically moving objects. The technique is based on phase-shifting interferometry. The proposed technique carries out the two-step phase-shifting method at one time and can be optically implemented by using a phase-shifting array device located in the reference beam. The array device has a periodic two-step phase distribution, and its configuration is simplified compared with that required for three-step and four-step parallel phase-shifting digital holographies. Therefore the optical system of the proposed technique is more suitable for the realization of a parallel phase-shifting digital holography system. We conduct both a numerical simulation and a preliminary experiment in the proposed technique. The results of the simulation and the experiment agree well with those of sequential phase-shifting digital holography, and results are superior to those obtained by conventional digital holography using the Fresnel transform alone. Thus the effectiveness of the proposed technique is verified.     

相移干涉显微镜中移相误差分析

本文具体分析了影响移相误差的多种因素，比较了在不同移相术中移相误差量对检测精度的影响，从而论证了五步移相术的合理性和利用压电陶瓷微位移传感器的现有定位精度实现０．１ｎｍ级检测精度的可行性。文中还给出了有关的数值计算结果和测试结果，并就有关问题进行了讨论。