New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems

A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection.

     

Concave microlens array mold fabrication in photoresist using UV proximity printing

This paper presents a simple and effective method for fabricating a polydimethyl-siloxane (PDMS) microlens array with a high fill factor. The proposed method utilizes the UV proximity printing and photoresist replication methods. A concave microlens array mold is made using a printing gap in a lithography process. Optical UV light diffraction of UV light is used to deflect light away from the aperture edges to produce a certain exposure in the photo-resist material outside the aperture edges. This method can precisely control the geometric profile of a concave microlens array. The experimental results show that a concave micro-lens array can be formed automatically in photo-resist when the printing gap ranges from 240 to 720 μm. A high fill factor microlens array can be produced when the control pitch distance between the adjacent apertures of the concave microlens array is decreased to the aperture size.     

Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system

This paper reports a new technique of fabricating polystyrene microlenses with both convex and concave profiles that are integrated in polymer-based microfluidic system. The polystyrene microlenses, or microlens array, are fabricated using the free-surface thermal compression molding method. The laser fabricated poly(methyl methacrylate) (PMMA) sheet is used as the mold for the thermal compression molding process. With different surface treatment methods of the PMMA mold, microlenses with either convex or concave profiles could be achieved during the thermal molding process. By integrating the microlenses in the microfluidic systems, observing the flow inside the microchannels is easier. This new technique is rapid, low cost, and it does not require cleanroom facilities. Microlenses with both convex and concave profiles can be easily fabricated and integrated in microfluidic system with this technique.     

A self-converging atomized mist spray device using surface acoustic wave

This paper presents an innovative versatile method aiming at rapid fabrication of a master for polydimethylsiloxane (PDMS) molding. This technology is relying on liquid dielectrophoresis electromechanical microfluidic transduction for programmable ultraviolet (UV) glue manipulation. It enables formation of the master in a tailor-made approach, avoiding the need of micromachined structures unlike in conventional methods. The principle is simple: UV glue, while in liquid phase, is actuated onto an array of electrodes patterned on a Si substrate and cured afterward by UV exposure. The silicon chip and the glue microstructures defined atop of it then play the role of a master for PDMS molding. The glue microstructures’ shape is hemispherical which is of high interest for many microfluidic applications. This concept is assessed and validated with two different PDMS chip replica designs, both of them illustrating representative applications in continuous microfluidic: a T-junction design for inflow droplet generation and a “Quake” type valve. Lastly, this protocol has shown to be recyclable since the UV glue microstructures once formed can be easily removed by immersion in an acetone bath, such as the chip is reset and can be reprogrammed afterward to build another glue channels geometry.     

Viewing angle enhanced integral imaging display based on double‐micro‐lens array

A viewing angle enhanced integral imaging display, which consists of a double microlens array, and a display panel is proposed. The double microlens array includes a convex microlens array and a concave microlens array. The display panel is used to display original elemental image array. The convex microlens array, located near the display panel, is used to provide a virtual elemental image array for the concave microlens array. The concave microlens array, located far away from the display panel, is used to display integral images with the virtual elemental image array. Compared with the original elemental image, the pitch for each virtual elemental image is magnified by the corresponding convex microlens. As a result, the viewing angle is expanded. Simulations based on ray‐tracing are performed and the results agree well with the theory.     

Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)

Out-of-plane microlens, as its in-plane counterpart, is an important micro optics component that can be used in building integrated micro-optic systems for many applications. In earlier publications from our group, an ultra violet (UV) lithography based technique for out-of-plane microlens fabrication was reported. In this paper, we report a replication technology for time-efficient fabrication of out-of-plane microlens made of a curable polymer, NOA73. Microlens of cured SU-8 polymer was fabricated using a unique tilted UV lithography process, polydimethylsiloxane (PDMS) was molded using the resulting SU-8 master to form a negative mold, curable polymer NOA73 was then casted in the PDMS mold and out-of-plane microlens replica made of NOA73 was finally obtained after curing. The entire replication process took less than 5 h. Since PDMS negative mold was reusable, multiple replications of the microlens could be done with the same mold and each replication only took about 30 min. Scanning electron microscopic (SEM) images showed that NOA73 microlens replica had almost identical shape as the SU-8 master. In Comparison to the SU-8 microlens, microlens replica of UV curable polymer had slightly longer focal length and smaller numerical aperture due to the lower refractive index of NOA73. In addition, NOA73 microlens replica also had improved spectral transmission. Because of its compatibility with soft lithography technique, the reported replication process may also be used to integrate out-of-plane microlens into micro-opto-electro-mechanical-systems (MOEMS) and BioMEMS chips.     

In-situ fabrication of an out-of-plane microlens with pre-definable focal length

Out-of-plane microlenses are an important component for integrated optics. Unlike their in-plane counterparts, the fabrication of out-of-plane microlenses is more complicated, which limits their applications. In this paper, a new technique that is capable of fabricating out-of-plane microlenses is described. The resulting lenses have pre-definable focal length and can focus light beams not only in the horizontal plane, but also in the vertical plane. The fabrication process is completely compatible with the soft lithography technique. The lens chamber with two thin polydimethylsiloxane (PDMS) membranes was designed and fabricated together with microfluidic or other components using the same UV lithography mask. The lens was then formed in an in-situ fashion. Curable polymers were injected into the lens chamber and cured while pneumatic pressure was applied to keep the PDMS membranes deformed in a quasi-spherical profile. Pneumatic pressure and membrane thickness can be adjusted to control the resulting lens focal length. With a group of lens chambers with different membrane thickness, a single pressure line can be used to fabricate microlenses with different focal lengths. Since cured polymer was used as the lens filling material, the resulting lens can be used without a pressure source. Different polymers can be selected for desirable optical properties. The simulation and experimental results have proved the feasibility of this technique and resulting lens showed good focusing ability for a divergent light beam from an on-chip multi-mode optical fiber. The small design footprint, total compatibility with soft lithography and technical versatility of this technique make it particularly useful for intergrating out-of-plane microlens into microfluidic chips, which may open new possibilities for the development of on-chip optical detection system.     

Fabrication of multilayer systems combining microfluidic andmicrooptical elements for fluorescence detection

This paper presents the fabrication of a microchemical chip for the detection of fluorescence species in microfluidics. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar chemical systems, the detection system is realized with the help of microfabrication techniques and directly deposited on both sides of the microchemical chip. The detection system is composed of the combination of refractive microlens arrays and chromium aperture arrays. The microfluidic channels are 60 μm wide and 25 μm deep. The utilization of elliptical microlens arrays to reduce aberration effects and the integration of an intermediate (between the two bonded wafers) aluminum aperture array are also presented. The elliptical microlenses have a major axis of 400 μm and a minor axis of 350 μm. The circular microlens diameters range from 280 to 300 μm. The apertures deposited on the outer chip surfaces are etched in a 3000-Å-thick chromium layer, whereas the intermediate aperture layer is etched in a 1000-Å-thick aluminum layer. The overall thickness of this microchemical system is less than 1.6 mm. The wet-etching process and new bonding procedures are discussed. Moreover, we present the successful detection of a 10-nM Cy5 solution with a signal-to-noise ratio (SNR) of 21 dB by means of this system     

SU-8 microchannels for live cell dielectrophoresis improvements

In this work a novel highly precise SU-8 fabrication technology is employed to construct microfluidic devices for sensitive dielectrophoretic (DEP) manipulation of budding yeast cells. A benchmark microfluidic live cell sorting system is presented, and the effect of microchannel misalignment above electrode topologies on live cell DEP is discussed in detail. Simplified model of budding Saccharomyces cerevisiae yeast cell is presented and validated experimentally in fabricated microfluidic devices. A novel fabrication process enabling rapid prototyping of microfluidic devices with well-aligned integrated electrodes is presented and the process flow is described. Identical devices were produced with standard soft-lithography processes. In comparison to standard PDMS based soft-lithography, an SU-8 layer was used to construct the microchannel walls sealed by a flat sheet of PDMS to obtain the microfluidic channels. Direct bonding of PDMS to SU-8 surface was achieved by efficient wet chemical silanization combined with oxygen plasma treatment of the contact surface. The presented fabrication process significantly improved the alignment of the microstructures. While, according to the benchmark study, the standard PDMS procedure fell well outside the range required for reasonable cell sorting efficiency. In addition, PDMS delamination above electrode topologies was significantly decreased over standard soft-lithography devices. The fabrication time and costs of the proposed methodology were found to be roughly the same.

     

New high fill-factor dual-curvature microlens array fabrication using UV proximity printing

A new high fill-factor dual-curvature microlens array fabrication method using lithographic proximity printing process is reported. The proposed technology utilizes UV proximity printing by controlling a printing gap between the mask and substrate. The designed microlens array pattern with high density can produce a high fill-factor dual-curvature microlens array in photoresist. Because the UV light diffraction deflects away from the aperture edges and produces exposure in photoresist material outside the aperture edges, this method can precisely control the geometric profile of a high fill factor dual-curvature microlens array. The experimental results showed that the dual-curvature micro-lens array can be formed automatically in photoresist when the printing gap ranged from 360 to 600 μm. The gapless dual-curvature microlens array will be used to enhance the luminance uniformity for light-emitting diodes (LEDs).     

Fabrication techniques to realize CMOS-compatible microfluidicmicrochannels

With microfluidic systems becoming more prominent, fabrication techniques for microfluidic systems are increasingly more important. An interesting alternative to existing fabrication techniques is to embed fluidic systems within an integrated circuit by micromachining materials in the integrated circuit itself. This paper describes novel methods for fabricating one component in the complementary metal-oxide-semiconductor (CMOS) microfluidic system, the microchannel. These techniques allow direct integration of sensors, actuators, or other electronics with the microchannel. This method expands the functional applications for microfluidic systems beyond their current abilities. By utilizing the methods described within this paper, a complete “smart” microfluidic system could be batch fabricated on a single integrated circuit (IC) chip     

A post-bonding-free fabrication of integrated microfluidic devices for mass spectrometry applications

This paper presents a novel process for fabricating integrated microfluidic devices with embedded electrodes which utilizes low-cost UV curable resins. Commercial UV glue is sandwiched between two substrates and is used for both the structural material and the bonding adhesive. During the exposure procedure, the pattern of micro-fluidic channels is defined using a standard lithography process while the two substrates are bonded. The un-cured UV glue is then removed by vacuum suction to form the sealed microfluidic channel. With this simple approach, conventional high-temperature bonding processes can be excluded in the fabrication of sealed microfluidic structures such that the developed method is highly advantageous for fabricating microchip devices with embedded electrodes. The overall time required to fabricate the sealed microchip device is less than 10 min since no time-consuming etching and bonding process is necessary. An innovative micro-reactor integrated with an in-channel micro-plasma generator for real-time chemical reaction analysis is fabricated using the developed process. On-line mass-spectrum (MS) detection of an esterification reaction is successfully demonstrated, which results in a fast, label-free, preparation-free analysis of chemical samples. The developed process can thus show its potential for rapid and low-cost microdevice manufacturing.     

Microfluidic chips for capillary electrophoresis with integrated electrodes for capacitively coupled conductivity detection based on printed circuit board technology

A simple and low budget microfabrication method compatible with mass production was developed for the integration of electrodes for capacitively coupled contactless conductivity detection (C4D) in Lab on a Chip devices. Electrodes were patterned on a printed circuit board using standard processing. This was followed by lamination-photolithography-lamination to cover the electrodes in dry film photoresist (DFR) using an office laminator. This resulted in a flush, smooth surface on top of the detection electrodes, enabling subsequent integration of a microfluidic network at a distance dictated by the thickness of the DFR (17 μm, 30 μm and 60 μm were used in this work). This process was applied to create two types of detectors, re-usable detectors to be used in combination with a separate microfluidic network and integrated detectors where the microfluidic network is irreversibly sealed to the detector. A poly(dimethylsiloxane) (PDMS) slab containing the microfluidic network was positioned on top of the re-usable detectors to create the PDMS hybrid devices. The integrated DFR devices were created by patterning and sealing the microchannel in DFR using subsequent lamination and lithographic steps. The sensitivity of the C4D made using this new technology for small inorganic cations was between 6 and 20 μM, which is comparable with devices made using significantly more advanced technologies. Where the 17 μm film slightly improved the sensitivity, the use of 30 μm thick insulating films was preferred as these did not impose significant restrictions on the applicable field strengths.     

Femtosecond laser-induced modification of surface wettability of PMMA for fluid separation in microchannels

The modification of polymer surface wettability is receiving increasing interest in recent years. As surface wettability affects the flowing resistance, and thus the separation ratio and/or mixing ratio of samples in different microchannels, the controlled modification of surface wettability is highly desirable. In this study, microfluidic channels with controlled surface wettability were achieved and fabricated using femtosecond (fs) laser direct ablation of polymethyl methacrylate at various fluences. Varied flow velocities and separation ratio of water in microfluidic channels have been successfully obtained through fs laser-induced modification in wetting characteristics of the microchannel surfaces. A concave flow front was observed in a microchannel with hydrophilic surface. Correspondingly, a convex flow front was observed with hydrophobic surface. For an untreated channel, a straight flow front was observed. These results would be attractive for various microfluidic chip applications, such as control of the reagent reaction through controlling liquid medium separation or control of mixing ratio in different channels.     

A microfluidic capacitance sensor for fluid discrimination and characterization

A microfluidic device with embedded capacitive sensing is proposed. The purpose of the device is fluid discrimination and characterization in a microchannel on the basis of the dielectric permittivity. The device is fabricated in a hybrid cost-effective technology which innovatively combines PDMS (PolyDiMethylSiloxane) soft photolithography and screen printing techniques. A microchannel, realized in a PDMS layer, is placed in the field of a sensing capacitor formed by electrodes screen-printed on a glass substrate. Fluids inside the microchannel affect the capacitance, that is in the order of femtofarads, which is measured by a tailored electronic interface system. The electronic system features a sensitivity of 100 V/pF and a resolution threshold of 0.06 fF. Experimental results obtained for different fluids injected in the microchannel demonstrate the ability of the system to discriminate the fluids and to estimate their dielectric permittivity both as pure samples and as mixtures at varying solute fractions. This makes the device a promising building block for fluid mixing monitoring in microfluidic systems.     

Experimental characterization of electrical current leakage in poly(dimethylsiloxane) microfluidic devices

Poly(dimethylsiloxane) (PDMS) is usually considered as a dielectric material and the PDMS microchannel wall can be treated as an electrically insulated boundary in an applied electric field. However, in certain layouts of microfluidic networks, electrical leakage through the PDMS microfluidic channel walls may not be negligible, which must be carefully considered in the microfluidic circuit design. In this paper, we report on the experimental characterization of the electrical leakage current through PDMS microfluidic channel walls of different configurations. Our numerical and experimental studies indicate that for tens of microns thick PDMS channel walls, electrical leakage through the PDMS wall could significantly alter the electrical field in the main channel. We further show that we can use the electrical leakage through the PDMS microfluidic channel wall to control the electrolyte flow inside the microfluidic channel and manipulate the particle motion inside the microfluidic channel. More specifically, we can trap individual particles at different locations inside the microfluidic channel by balancing the electroosmotic flow and the electrophoretic migration of the particle.     

Experimental study on self-flowing speed in microchannel related to micro-/nanoscale surface topographies

The microfluidic flowing on chip surface depends on the external load such as centrifugal force, magnetic force and bubbles, but it leads to the complexity of microsystem. Hence, a self-flowing is proposed inside microchannel on chip surface without any external load. The objective is to explore how micro-/nanoscale surface topographies of microchannel influence the microfluidic flowing. First, the microgrinding with a diamond wheel microtip was employed to fabricate the accurate and smooth V-shaped microchannel with the height of 300 µm and less; then, the microfluidic flowing state was modeled by the flowing concave with the parameterization of flow-end height; finally, the microfluidic flowing speed was experimentally investigated with reference to microchannel angle, gradient, surface roughness and chip material. It is shown that the microfluidic self-flowing is mainly induced by the microchannel tip and the nanometer-scale surface cracks around the microchannel tip. Small microchannel angle, large microchannel gradient and smooth microchannel surface may enhance the flowing speed on chip surface. The brittle quartz glass produces the nanometer-scale surface cracks around the microchannel tip, leading to an increase about 40 times in the self-flowing speed compared with the ductile polymer. It is confirmed that the self-flowing speed in dynamic state may be characterized by the proposed concave flow-end height.     

Microfluidic patterning of nanoparticle monolayers

A microfluidic technique was developed to pattern nanoparticle monolayer controllably in a tentative polydimethylsiloxane (PDMS) microchannel. It was found that nanoparticle monolayer could be achieved in a two-step fluidic process: nanoparticle sedimentation and DI water rinsing. When nanoparticle suspension flows through a tentative PDMS microchannel, the particles will settle down due to the gravity effect and the Brownian motion and be captured onto the amino-functionalized substrate via electrostatic attraction. Aggregation on the substrate followed by a necessary DI water rinsing transforms hill-like nanoparticle aggregates into monolayer. Removing the tentative PDMS microchannel, pattern of nanoparticle monolayer following the channel shape was obtained. Experimental results indicated that the final monolayered nanoparticle coverage decreases when the flowing velocity in the sedimentation and/or the rinsing steps increases. Based on the continuity essence of fluid flow, different flowing velocities could be realized in one microchannel by varying the channel size. Therefore, monolayer patterns with controllable coverage could be achieved by carefully designing the microchannel width. The present approach is believed to be a promising nanoparticle monolayer patterning technique.     

Integration of microfluidic sample delivery system on silicon nanowire-based biosensor

Silicon nanowire-based (SiNW) biosensors have gained a lot of attention during recent years. However, studies often totally neglect, or only briefly describe, the incorporation of microfluidic channel into the sensor architecture, although it is a crucial step towards a real lab-on-chip device. This paper proposes a process that can be applied to integration of microfluidic sample delivery system onto different SiNW biosensors. The sample delivery system includes a hydrophilic channel that enables the use of capillary action in delivering sample directly onto the sensor array, which leads to reduced sample loss, faster detection process, and frees from the use of external pumps. In addition, the microfluidic channel system protects the fragile SiNWs from mechanical shocks, chemical spatters, and dust. The sample delivery system was fabricated of surface treated polydimethylsiloxane (PDMS), using a four-step approach, as follows: (1) master molds for soft lithography were etched onto Si. (2) PDMS replicas of the molds were fabricated and (3) bonded onto example sensor chips using oxygen plasma. (4) Oxygen plasma treatment also enabled the attachment of polyvinylpyrrolidone (PVP) to the sample channel surfaces to synthesize hydrophilic polymer coating. A contact angle for the PVP treated PDMS was 21 after 17 days, indicating the formation of a long-term hydrophilic PDMS surface. Finally, the example SiNW sensor is modified to allow direct real-time detection of thyroid-stimulating hormone (TSH). The sensor was able to detect as low TSH concentration values as 0.5 mIU/l, which indicates a successfully integrated sample delivery system.