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1.
采用反应磁控溅射的方法在Ti6Al4V基板上沉积(TiN/Ti)n多层膜,交替沉积Ti层和TiN层,以通入/关闭氮气实现对TiN含量的控制.共溅射10层,每层TiN膜和Ti膜的厚度之和即调制周期不变,二者之间的厚度比即调制比分别为1∶9、1∶5、1∶3和1∶2.利用XRD、SEM分别研究了薄膜的微观结构和表面形貌,利用显微硬度仪和划痕仪测量了薄膜的硬度和膜基结合力.研究结果表明:随着调制比的增大,TiN(200)逐渐消失,出现Ti2N等新相;硬度、结合力有明显增大的趋势,与单层膜相比,多层膜的硬度和结合力最多分别增加250 HV和22 N.  相似文献   

2.
在不同沉积时间和基板温度下,采用反应磁控溅射的方法在Ti6Al4V基板上沉积Ti N薄膜,溅射过程中固定溅射总压、溅射功率、氮氩流量比等沉积条件.利用XRD、SEM分别研究了薄膜的微观结构和表面、截面形貌,利用显微硬度仪和划痕仪分别测量了薄膜的硬度和膜基结合力.研究结果表明:随着沉积时间的增加,薄膜硬度和膜基结合力均有增大趋势;随着基板温度的升高,Ti N薄膜择优取向由(111)转向(200)晶面,表面形貌由三角锥转变为片层状,硬度和膜基结合力均呈现升高趋势.  相似文献   

3.
以制备出性能优异成本低廉的低辐射镀膜玻璃为目的.通过直流磁控反应溅射技术在玻璃(或单晶硅)表面制备(Al,Ti)N薄膜作为低辐射镀膜玻璃的内层介质层,在此基础上进行单因素变量分析铝靶功率、钛靶功率、氮气流量和溅射时间对薄膜可见光透过率、表面粗糙度的影响以及测定最优条件下薄膜的结晶状态、表面形貌和元素含量.结果表明,当铝靶功率为100 W、钛靶功率为80 W、氮气流量为2.5 ml/min、溅射时间为90 min时可见光范围内透过率均在96%以上,表面粗糙度11.3 nm,膜基结合力强,膜质优异适宜低辐射镀膜玻璃功能膜的附着.  相似文献   

4.
利用脉冲磁控溅射法分别在工业纯钛TA2表面和高能喷丸(HESP)工业纯钛TA2表面沉积Ti N薄膜,采用扫描电镜(SEM)、X射线衍射仪(XRD)分析Ti N薄膜的形貌、晶体结构,采用划痕仪、纳米压痕仪测量Ti N薄膜的膜基结合力、硬度和弹性模量,研究TA2基材HESP对Ti N薄膜生长和力学性能的影响。结果表明:在脉冲磁控溅射条件下,基材HESP可改变Ti N薄膜生长择优取向,原始基材表面Ti N薄膜为(200),(220)晶面共同择优生长,而HESP 20 min基材表面(200)面择优取向十分明显;基材HESP可改变Ti N薄膜生长方式,原始基材表面Ti N薄膜为混合生长,HESP基材表面薄膜变成层状生长,使薄膜更致密;基材HESP可提高Ti N薄膜膜基结合力,原始态基材表面Ti N薄膜结合力为21.4 N,HESP 20 min基材表面Ti N薄膜结合力达到42.3 N,提高了约一倍;基材HESP可以提高Ti N薄膜抵抗塑性变形能力,且原始基材表面Ti N薄膜硬度和弹性模量最小,分别为30.1,343.6 GPa,HESP 20 min基材表面Ti N薄膜硬度达到35.1 GPa,弹性模量达到347.9 GPa。  相似文献   

5.
采用一步烧结法, 通过改变原材料中TiN的添加量研究其对硬质合金组织结构及性能的影响。采用扫描电子显微镜、X射线能谱分析仪、X射线衍射分析仪、粗糙度测量仪、划痕测试仪等, 探究TiN添加量对WC-TiC-TaNbC-10Co硬质合金物理力学性能、微观组织结构、物相组成、表面形貌以及与涂层的结合力等性能的影响。结果表明: TiN添加量在0~1.6%范围内, 随着TiN添加量的增加, 合金的相对磁饱和强度和密度减小, 矫顽磁力增大、硬度和抗弯强度增大, 合金的脱β层厚度增加, 表面粗糙度先减小后增加, 与CVD涂层的结合力先增加后减小; 当TiN添加量为0.8%时, 合金与CVD涂层的结合力最好。   相似文献   

6.
采用XRD、SEM、纳米压痕仪、纳米划痕仪等分析了磁控溅射工艺参数对TiAlN薄膜物相、微观组织、力学性能及结合力的影响规律。结果表明,所有样品生成相均为面心立方的TiAlN,且在(111)晶面择优生长,薄膜表面形成三棱锥状密排晶粒。选定硬度与结合力两个指标对TiAlN薄膜进行评价,通过正交实验发现,硬度与结合力的最优工艺参数均为基底偏压-100 V,工作气压0.3 Pa,溅射电流8 A,氮流量40 sccm。  相似文献   

7.
罗学萍  赖奇 《钢铁钒钛》2019,40(6):52-56
采用直流反应磁控溅射法,通过改变溅射时间在不锈钢表面溅射氮化钛薄膜。采用分析天平、SEM、XRD和显微硬度计等对薄膜的质量增加率、微观结构、外观形貌和显微硬度进行研究。结果发现随着溅射时间增加,薄膜的质量增大,厚度逐渐增加。XRD分析表明,TiN薄膜晶体结构为面心立方结构。溅射沉积氮化钛膜具有择优取向性:随溅射时间增加,由混合晶面生长向(111)择优取向变化;随着溅射时间增加,显微硬度总体呈上升的趋势。  相似文献   

8.
《稀土》2017,(6)
以烧结Nd-Fe-B磁体为基体,采用多弧离子镀,通过调节氮分压比获得不同颜色和性能的TiN和TiAlN镀层薄膜。利用X射线衍射仪、金相分析技术、盐雾试验和维氏硬度计等研究镀层薄膜的宏观和微观形貌、维氏硬度和耐腐蚀性能。研究结果表明,TiN和TiAlN镀层薄膜都能够极大地提高烧结Nd-Fe-B磁体的防腐蚀性能;TiN镀层中,氮分压比增加会使TiN镀层薄膜的颜色加深,氮氩比为1∶1时镀层薄膜的结合力和防腐蚀性能最好;而TiAlN镀层的结合力和耐腐蚀性能明显优于TiN镀层。  相似文献   

9.
采用多弧离子镀膜技术在硬质合金基体表面沉积TiN涂层,研究了气体总流量对TiN涂层表面形貌和力学性能的影响。通过SEM观察涂层表面形貌,利用ImageJ图像处理软件对涂层的像素分布进行统计和分析,并通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明,随着气体总流量的增加,涂层表面大颗粒的数量和尺寸均在增加,涂层附着力先增大后减小,而显微硬度先减小后增大;当气体总流量为300mL/min时,涂层气坑数量最多,附着力最大,为106.4N;当气体总流量为100mL/min时,涂层显微硬度最大,为HV3 021。  相似文献   

10.
TiAlBN多元膜的性能与组织结构研究   总被引:2,自引:0,他引:2  
采用电弧离子镀技术、TA5钛合金靶沉积TiAlBN薄膜,研究了这种多元膜的显微硬度、高温氧化性能和组织结构,结果表明:这种多元膜具有优于TiN膜的显微硬度;不同于TiN膜的显微组织,其最显著的特征是存在一些细小的钛滴;双靶工作状态下,这些钛滴与膜之间的融合效果较好,膜层表面孔隙较少;薄膜具有TiN的面心立方结构,与TiN膜相比,具有更加明显的择优取向趋势。  相似文献   

11.
The tribological properties of ceramic composites of the system TiN?AlN are studied in the concentration range 10–90% AlN. It was found that materials which contain 25, 50, and 75% AlN have a low friction coefficient. Their rate of wear when paired with steel is neglible—2.9–6.0 μm/km (the wear rate of a steel-steel 024 couple is 1000 μm/km). Thin oxide films are formed during friction at high velocities and pressures. These films have relatively high adhesion with respect to materials of the TiN?AlN system and relatively low adhesion with respect to steel. The films may act as a solid lubricant, thus reducing the friction coefficient and wear. This is particularly true of the materials 25% TiN?75% AlN and 50% TiN?50% AlN.  相似文献   

12.
High-velocity oxy-fuel (HVOF) thermal spraying is one of the best methods for depositing conventional WC–Co cermets. The aim of the present work was to optimize the WC–17Co coating deposited using HVOF spraying process. Taguchi fractional factorial experimental design (L18) and ANOVA were used to optimize the process parameters. Seven factors (spray distance, oxygen flow rate, carrier gas flow rate, powder feed rate, coating thickness, substrate preheat temperature and grit type) were selected. Grit type had two levels, and the others had three levels. The coating properties measured were wear resistance, microhardness and roughness. Pin-on-disk wear tests were used for measuring wear. Scanning electron micrographs were used to investigate the cross sections of the coatings and the morphology of the as-sprayed coatings, and their relationship between the process parameters and energy-dispersive X-ray was used to analyze the coatings. In Taguchi method, “lower the better” quality was used for optimizing roughness and “higher the better” quality was used for optimizing wear resistance and microhardness. The most influential factor on increasing wear resistance and microhardness was powder feed rate and on reducing the roughness was oxygen flow rate. In addition, the influence of grit type on wear resistance and microhardness and the influences of grit type and substrate preheat temperature on the coating roughness were negligible.  相似文献   

13.
Fe基非晶涂层具有优异的耐磨、耐蚀性能,以及较高的性价比,适合在表面防护涂层领域广泛应用。本文通过正交试验研究了煤油流量、氧气流量、送粉速率、喷涂距离对超音速火焰喷涂制备的Fe基非晶涂层的孔隙率、硬度、耐磨性能的影响。采用图像法、显微硬度计和摩擦磨损试验机分别对Fe基非晶涂层的孔隙率、硬度、耐磨性能进行了表征。采用X射线衍射仪和扫描电镜分别对涂层的相组成和显微结构进行了表征。通过极差分析法分析得出以涂层孔隙率最低为目标的优化制备工艺,最佳喷涂工艺参数为:煤油流量0.41 L/min,氧气流量830 L/min,喷涂距离430 mm,送粉速率40 g/min。结果表明:送粉速率和氧气流量对涂层孔隙率影响较大,进而影响涂层的硬度及耐磨性能。孔隙率随着氧气流量和送粉速率的增加而增加,随着煤油流量和喷涂距离的增加而降低。制备的Fe基非晶涂层硬度达到1158.9HV0.2,孔隙率为1.22%,磨损实验的质量损失量只有316L不锈钢的一半。  相似文献   

14.
This work presents the densification behavior, microstructural features, microhardness, and wear property of in situ TiN/Ti5Si3 composite parts prepared by a novel Selective Laser Melting (SLM) process. The occurrence of balling phenomenon at a low laser energy density combined with a high scan speed and the formation of thermal cracks at an excessive laser energy input generally decreased densification rate. The in situ-formed TiN reinforcing phase experienced a successive morphological change: an irregular polyangular shape—a refined near-round shape—a coarsened dendritic shape, as the applied laser energy density increased. The variations in liquid-solid wettability and intensity of Marangoni convection within laser molten pool accounted for the different growth mechanisms of TiN reinforcement. The TiN/Ti5Si3 composite parts prepared under the optimal SLM conditions had a near-full 97.7 pct theoretical density and a uniform microhardness distribution with a significantly increased average value of 1358.0HV0.3. The dry sliding wear tests revealed that a considerably low friction coefficient of 0.19 without any apparent fluctuation and a reduced wear rate of 6.84 × 10−5mm3/Nm were achieved. The enhanced wear resistance was attributed to the formation of adherent strain-hardened tribolayer covered on the worn surface.  相似文献   

15.
采用阴极弧离子镀法在GH4169合金表面制备了TiAlSiN涂层,通过扫描电镜和能谱仪分析了其表面和界面的形貌和能谱,用轮廓仪测试了涂层表面粗糙度.在往复式摩擦磨损试验机上进行了涂层摩擦与磨损实验,通过能谱仪分析了涂层表面磨损后点能谱和面能谱,考察了TiAlSiN涂层的摩擦因数和磨损性能,对其磨损机理进行了讨论.实验结果显示涂层表面组织结构较为致密,表面粗糙度为194.57 nm;涂层主要成分为Ti、Al、Si和N元素,Si原子细化了TiN和AlN晶粒;涂层结合界面发生了化学反应和成分的相互扩散,其结合形式为化学结合;涂层摩擦因数平均值为0.493,磨损形式为磨粒磨损;磨损痕迹面扫描结果表明,磨损后Al和Ti形成的氮化物减少,Si和N原子无明显的减少现象,涂层耐磨性增强主要依赖于Si和N形成的化合物.   相似文献   

16.
为探寻Al靶功率对CrAlN涂层性能的直接影响, 利用直流反应磁控溅射的方法在304不锈钢基体上沉积CrAlN涂层, 并研究不同Al靶功率对CrAlN涂层组织结构与摩擦性能的影响.采用SEM、XRD、AFM、往复摩擦磨损试验机、显微硬度计、三维轮廓仪对试样的物相组成、表面形貌、摩擦磨损性能、硬度和磨痕形貌进行表征.结果表明:随着Al靶功率的增加, CrAlN涂层的晶粒尺寸呈现轻微的先增大后减小的规律, Al靶功率为180 W时的晶粒尺寸最小; 随着Al靶功率的增加, 显微硬度、平均沉积速率呈现先增大后减小的规律而磨痕深度、平均体积磨损率呈现出相反的变化趋势.经综合比较, Al靶功率为150 W时CrAlN涂层的综合性能较优.   相似文献   

17.
In aluminum extrusion process, tool steels used as die materials suffer from mechanical, thermal and tribological stresses causing plastic deformation, wear and heat checking during hot metal flow. Thin hard film coatings like TiN, (Ti,Al)N and CrN are preferred in order to improve the surface properties of the tools. These coatings can reduce the friction force, minimize the adhesive interaction between the die and billet pairs and decrease the plastic deformation of the tool. In this study, effect of single (CrN and AlTiN) and duplex (CrN + AlTiN) thin hard films on the hot wear behavior of DIN 1.2343 tool steel was investigated. Wear tests were performed both at room temperature and elevated temperature to simulate the conditions of aluminum extrusion process. Based on the evaluation of coefficient of friction values, specific wear rates and worn surface examinations, the duplex coating, which had the best performance in the RT wear test showed good resistance to high temperature wear under the simulated aluminum extrusion conditions.  相似文献   

18.
Conclusions The relationship of the intensity of wear of a copper-graphite material containing 10% graphite to porosity has an extreme character. The optimum antifriction properties are obtained with a porosity of 6–12%. In this interval of porosities the minimum degree of deformation of the surface layer in friction is observed. The minimum values of the intensity of wear and of the coefficient of friction of copper-graphite materials are observed in the 2.6–22 m/sec range of sliding rates, at which solid films of secondary structures distinguished by low roughness are formed on the surface.Translated from Poroshkovaya Metallurgiya, No. 8(296), pp. 81–85, August, 1987.  相似文献   

19.
Zn and Zn–Ni alloy coatings were electrodeposited on mild steel from sulfate-based bath containing Sn as additive. The effect of Ni content on the microstructure, morphology, microhardness and the tribological behavior of these coatings were studied and discussed. Adding Sn in the sulfate bath had a significant effect on the surface morphology, particularly on the Zn–8 wt% Ni coatings. By increasing the Ni concentration from 8 to 14 wt%, the X-ray patterns showed that the phase structure of Zn–Ni alloy coatings was changed from η-phase Ni3Zn22 to γ-phase Ni5Zn21. The plastic deformation and delamination were found to be wear mechanisms for the investigated coatings. While the Zn–14 wt% Ni alloys had the best wear resistance, Zn films had the most severe wear volume loss and the highest friction coefficient.  相似文献   

20.
采用超音速等离子喷涂法在1045钢表面制备NiCr-Cr_3C_2涂层,分析涂层的微观结构及化学成分以及涂层的晶粒结构,利用MICROMET-6030显微硬度仪和Nano-test 600纳米压痕仪测定涂层的显微硬度与弹性模量,通过油润滑微动摩擦磨损试验测试涂层的微动磨损性能。结果表明,NiCr-Cr_3C_2涂层为明显的层状结构,具有单晶、纳米多晶与过渡区共存的复杂晶体学结构,显微硬度HV0.3高达998,约为基体材料硬度的3倍,弹性模量为224.6GPa;涂层的微动摩擦因数随载荷增大而减小,随温度升高而增大。喷涂层的抗微动摩擦磨损性能较基体优异,摩擦因数及体积磨损量分别比基体降低36.7%和55.6%。涂层的磨损机理以磨粒磨损和疲劳剥落为主。  相似文献   

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