共查询到18条相似文献,搜索用时 158 毫秒
1.
一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点.通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较.结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声.以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率. 相似文献
2.
随着MEMS加速度传感器技术的发展与大规模应用,为多维度位移测量提供了技术手段.根据MEMS加速度传感器所具有的高精度、高可靠性等技术特点,设计了一种空间结构呈线阵分布规律的、由多个MEMS加速度传感器组成的长跨度位移传感器,为大坝、边坡等大型结构体的水平位移或沉降位移监测提供了一种全新的自动化测量系统. 相似文献
3.
一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点。通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较。结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声。以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率。 相似文献
4.
5.
6.
针对目前使用的深部位移监测系统普遍采用的基于角度传感器的地下位移监测方式所存在的采集数据不能准确反应岩土体形变程度,难以对多个滑面同时监测等问题,设计了一种基于MEMS的多滑面深部位移监测装置。装置采用STM32嵌入式控制器和SCL3300传感器,运用欧拉角法,实现对地下多滑面的位移数据采集及监测单元的空间姿态解算,完成多滑面深部位移监测工作。实验表明:该装置具备检测微小位移(最少0.5 mm的位移量变化)、解算数据准确(相对误差保持在±2%以内)、多滑面同时监测等优点,能够有效解决多滑面边坡的深部位移监测问题。 相似文献
7.
8.
基于Flex技术制备了一种大位移传感器,可用于土体内部大位移的实时监测,研究中的Flex大位移传感器,具有体积小、耐腐蚀、成本低、线性度好、量程大等优点.Flex大位移传感器主要由Flex传感器和铰链弯曲结构组成.通过标定试验可知,在0~60°的测量范围内Flex大位移传感器信号与弯曲角度呈现良好的线性关系,其分辨率可达到0.5°~0.7°.在室内模型箱试验中,对Flex位移传感器与灵敏度较高的FBG(fiber Bragg grating)位移传感器测量结果进行比较,得到的数据结果吻合良好,验证了Flex大位移传感器的可靠性. 相似文献
9.
为了实现对物体运动位移的检测,设计了一种以国产高精度MEMS电容式加速度传感器MSCA3002为核心,24位高精度A/D转换器ADS1255,高性能ARM处理器LM3S2B93为主控制器的位移检测系统,并详细给出该系统的硬件电路及其软件算法设计。系统将传感器检测到的物体运动的加速度,经过积分算法转换为物体运动位移。实验结果表明:系统采样精度高、速度快、误差小,A/D转换器对加速度信号的检测精度能达到0.4%,积分后对位移的测量精度能控制在3%左右,很好地实现了对运动位移的检测。 相似文献
10.
11.
The performance of micro-machined sensors is primarily determined via the sensitivity of sensing electrode to displacement. This paper presents the design, modelling, optimization and fabrication of an active gap reduction mechanism used on a conventional comb drive to enhance the capacitance in a three axes capacitive micro accelerometer. The design parameters of the active gap reduced comb drive (AGRCD) are optimized for best performance. The finite element analysis of the AGRCD is performed for design verification. The modeling and simulation results demonstrated a 534 % increase in sensitivity of the three axes capacitive micro accelerometer. The three axes capacitive micro accelerometer with AGRCD is fabricated using a commercially available standard metal-multi user MEMS processes. 相似文献
12.
Andrea Mura 《Microsystem Technologies》2012,18(5):575-579
This work proposes a new detection strategy suitable for MEMS sensors with up to 6 degrees of freedom. Parallel structures based on the Stewart theory are commonly adopted as actuators in many fields such as high precision manipulators, aircraft and vibration simulators and machine tools; the same configuration was used here to define the kinematics of a displacement sensor in the microscale based on the optical detection. The algorithm for the estimation of absolute positions and orientations of the platform is presented. The described sensing approach considerably simplifies the platform architecture and design and introduces a promising solution for many MEMS sensors and devices. 相似文献
13.
C. K. Chung Y. J. Fang C. M. Cheng Y. Z. Hong C. H. Wang 《Microsystem Technologies》2007,13(3-4):299-304
This paper reported the effect of seed layer stress on the fabrication of monolithic polymer-metal MEMS microstructure and
what is a better material for the seed layer. The monolithic microstructure is gaining more and more attentions in MEMS application,
especially in three-dimensional microstructure and inkjet printhead. The polymer–metal MEMS microstructure can be fabricated
by combining the lithography and electroforming technologies. It is an integrated technology by batch process at low cost.
The metal seed layer with large stress will lead to cracks and failure during the process integration. Several metal materials
and thicknesses were studied to find a better candidate as the seed layer for the monolithic MEMS microstructure. The relationship
between the monolithic MEMS structure and seed layer selection is also discussed. The lower residual stress of seed layer
will result in a better surface condition for the followed integration process. The pure Ti metal and two-layer Ti/Au composite
are the better seed layer materials in this study for the followed electroforming process of the monolithic polymer-metal
MEMS microstructure. 相似文献
14.
飞行控制器是无人机飞行控制系统的核心。采用ARM做为微处理器,结合MEMS传感器设计小型无人机飞行控制器。分析系统的功能和结构,并分为微处理器单元、导航传感器单元和气压传感器单元分别进行详细的功能和结构介绍。此设计符合飞行控制器的性能好、可靠性高、综合化能力强的发展趋势,具有广泛的应用前景。 相似文献
15.
Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator 总被引:1,自引:1,他引:0
This paper introduces a new theoretical model of plate capacitor for MEMS comb actuator. In this model, bulk fabrication process
and edge effect are both considered using integration method and conformal transformation theory. In order to verify the correctness
of the model, FEM software is used to calculate the value of the capacitance of the MEMS comb actuator. The simulated result
is 1.441 pF. Relative errors to the model calculated result 1.401 pF and ideal model calculated result 1.267 pF are 2.78 and
12.07% respectively. Then, high precision capacitance measuring device is used to measure the micro-fabricated comb actuator.
The tested result is 1.517 pF. Its relative error to the rectified value is 7.65%, much less than the relative error to ideal
result 16.48%. This further indicates the correctness of the rectified model. 相似文献
16.
17.
为解决目前MEMS 梳齿电容驱动器由于边缘效应导致的理想计算模型计
算误差较大问题,利用有限单元法中的能量法,提出了一种对梳齿驱动器电容量进行精确仿
真计算的方法并以实际制作的微机械陀螺质量块上的90 对梳齿驱动器为对象,分别利用该
方法及常用的CMATRIX 仿真方法对其电容值进行了仿真计算。两种方法得到的电容量的计
算结果分别为1.5283pF 和1.5793pF。二者与利用高精度LCR 测试仪得到的结果1.5172pF
的相对误差分别为0.73%和4.09%。实验结果表明,该方法对考虑边缘效应的MEMS 梳齿
电容驱动器具有较高的计算精度。 相似文献