基于FPGA的悬臂梁品质因数提高方法

随着微悬臂梁在信号检测方面的广泛应用,需要一种简单高效的方法来提高微悬臂梁的灵敏度.本文提出一种基于FPGA的数字式提高微悬臂梁品质因数的方法.利用FPGA的可编程数字信号处理功能实现信号的移相,并与可变增益放大、滤波处理模块一起构成正反馈环路.该电路对微悬臂梁的振动能量损耗进行补偿,将微悬臂梁的品质因数提高一个数量级.实验结果表明,该方法简单易行,可显著提高微悬臂梁检测的灵敏度.     

基于微悬臂梁的传感技术研究

本文对基于微悬臂梁的传感技术从四方面展开讨论,分别介绍了微悬臂梁的制造工艺,修饰技术,激励、检测和控制技术,以及与其它电路的工艺集成技术。微悬臂梁在液体中,工作在动态模式时,品质因数的提高问题一直是国内外研究的焦点。本文的重点便是介绍国际上最新出现的两种品质因子控制技术,一种是对微悬臂梁的材料进行了改进,使其在水溶液的品质因数达到40,另一种是把液体环境转移到悬臂梁内部,使其在水溶液中的品质因数达到700。     

低温环境下MEMS微构件的动态特性及测试系统

研究了微机电系统(MEMS)微构件的谐振频率等动态特性在低温环境下的变化规律,从理论上分析了改变环境温度对微悬臂梁谐振频率的影响,并对低温环境下微构件的动态特性测试技术进行了研究。研制了低温环境下MEMS动态特性测试系统,采用半导体冷阱实现低温环境,利用压电陶瓷作为底座激励装置的驱动源,通过底座的冲击激励,使微悬臂梁处于自由衰减振动状态,使用激光多普勒测振仪对微悬臂梁的振动响应进行检测,从而获得微悬臂梁的谐振频率。利用研制的测试系统,在-50℃～室温的环境下对单晶硅微悬臂的谐振频率进行了测试,结果表明,随着温度的降低,微悬臂梁的谐振频率略有增大,其谐振频率的温度变化率约为-0.263 Hz/K,与理论分析的结果基本一致。该测试装置能够有效地完成在-50℃～室温环境下微构件的动态特性测试。     

振动轮式微机械陀螺仪中滑膜阻尼机理的研究

对空气阻尼进行定性和定量分析是MEMS器件设计中非常重要的一个步骤，直接影响MEMS器件的动态性能。研究了第三个区域中振动轮式微机械陀螺仪的滑膜阻尼，提出了滑膜阻尼模型，分析了滑膜阻尼的动态性能，包括速度分布、阻尼机制以及由此产生的能量损耗。根据滑膜阻尼分析结果，给出了品质因数的计算公式。试验表明，空气条件下振动轮式微机械陀螺仪品质因数的测试结果与理论值的误差约为16%。研究结果为振动轮式微机械陀螺仪结构设计中定量分析空气阻尼提供了理论依据。     

曲面过载保护的新型高g值冲击硅微机械加速度传感器的设计

给出一种测量高g值冲击加速度的硅微机械加速度传感器的结构和动力学模型，此传感器为整体式悬臂梁结构，采用硅微机械加工技术制作，便于封装和大批量低成本制造，其敏感方向在硅片平面内，两个压敏电阻分布在悬臂梁的顶端，两个完全相同的悬壁梁沿相反方向分布，四个压敏电阻构成惠斯通全桥连接，悬臂梁的过载保护采用上下两个曲面，一方面有效地提高悬壁梁的过载保护能力，另一方面调节加速度传感器的压膜阻尼，使之接近临界阻尼，有效抑制自由振动模态，提高测量精度。     

基于微型悬臂梁的发电机制探索

微机电系统(MEMS)微型化过程中,要求电源装置也必须向微型化发展.在现有微电源研究基础上,结合微型硅悬臂梁的力学分析以及压电晶体材料压电效应特性,提出一种新的压电陶瓷(PZT)微型硅悬臂梁发电装置.借助微型硅悬臂梁质量块的振动和PZT的正压电效应,实现振动机械能向电能转换.该装置结构简单、体积小、质量小,可以用MEMS集成加工工艺实现结构加工,因此与其他微型MEMS器件可以集成在一个基础上.     

基于自适应滤波的悬臂梁振动速度反馈控制

分析PVDF(polyvinylidene fluoride)压电效应振动速度测量和悬臂梁振动的主动阻尼控制原理，指出基于压电效应的振动速度测量将引入并放大噪声信号，严重降低振动主动阻尼控制算法的稳定性以及振动控制的效果：提出利用自适应滤波技术对时变的振动速度信号进行滤波，提高速度反馈的主动阻尼控制算法的稳定性，实现悬臂梁振动的有效抑制。最后以一悬臂粱为例，进行数值仿真，验证该方法的有效性。     

多晶硅薄膜离面疲劳特性研究

多晶硅薄膜材料为微电子机械系统(MEMS)器件最重要的材料之一,对其疲劳特性的研究是现阶段失效分析研究的热点和重点.利用表面加工的多晶硅矩形微悬臂梁结构对该问题展开实验研究.通过干法刻蚀在微悬臂梁根部制作纵向应力集中区,利用静电激励激励微悬臂梁进行离面振动,谐振频率检振方法跟踪微悬臂梁机械性能的变化.结果证明在1010～1011次循环振动载荷作用后,微悬臂梁结构刚度下降,谐振频率减小,频率最大绝对偏移量达到1.544 kHz,相对偏移量达到结构本征频率的1.3%.这些结果首次验证了MEMS结构在离面振动方向上也存在显著疲劳现象.和已有文献相比,实验中结构所受应力幅度较其小2个数量级(约1～10 MPa量级),而频率偏移量却高于其数十倍.这很可能是因为纵向干法刻蚀引入了较大的粗糙度,显著加速了多晶硅结构的晶界分离速度,因而也加速了疲劳.     

硬涂层阻尼结构的随机振动疲劳寿命分析

为了研究硬涂层阻尼结构的疲劳寿命合理的分析方法和对结构寿命影响的基本规律，利用有限元模拟技术进行带硬涂层阻尼的悬臂薄壁梁结构的随机振动疲劳寿命计算。以一个悬臂薄壁梁为对象，首先，对该结构涂敷硬涂层前后的模态和谐响应进行计算，获得模态频率和危险部位应力响应函数；其次，采用随机振动疲劳寿命频域分析法对涂层前后悬臂梁进行有限元仿真计算，获得相应的寿命和损伤云图；最后，在电磁振动台上进行随机振动基础激励的编谱加载，获得涂层前后悬臂梁的振动疲劳寿命和损伤行为。结果表明，硬涂层能够延长悬臂梁振动疲劳寿命，可以减缓疲劳裂纹扩展速率。通过对比模拟和试验结果的误差分析，证明振动疲劳寿命模拟方法的合理性。     

压电微悬臂梁传感器性能的数值模拟研究

基于力-电双向耦合理论,采用有限元方法,数值模拟研究压电微悬臂梁的灵敏度,并进行参数分析,为设计性能优良的悬臂梁提供理论依据。理论分析微悬臂梁在空气和液体中的共振频率和自身结构参数的定量关系,灵敏度与共振频率变化量、被测物质量的关系,通过数值模拟得到悬臂梁长度、宽度、厚度及共振阶数对微质量检测压电悬臂梁灵敏度的影响。在长期研究OPCM压电传感材料的基础上,进一步提出纵向振动的OPCM材料制作悬臂梁,数值模拟结果表明OPCM比PZT悬臂梁具有更高的灵敏度。数值模拟结果为设计性能优良的悬臂梁提供理论依据。     

Parametric noise squeezing and parametric resonance of microcantilevers in air and liquid environments

In this work, parametric noise squeezing and parametric resonance are realized through the use of an electronic feedback circuit to excite a microcantilever with a signal proportional to the product of the microcantilever's displacement and a harmonic signal. The cantilever's displacement is monitored using an optical lever technique. By adjusting the gain of an amplifier in the feedback circuit, regimes of parametric noise squeezing/amplification and the principal and secondary parametric resonances of fundamental and higher order eigenmodes can be easily accessed. The exceptionally symmetric amplitude response of the microcantilever in the narrow frequency bandwidth is traced to a nonlinear parametric excitation term that arises due to the cubic nonlinearity in the output of the position-sensitive photodiode. The feedback circuit, working in both the regimes of parametric resonance and noise squeezing, allows an enhancement of the microcantilever's effective quality-factor (Q-factor) by two orders of magnitude under ambient conditions, extending the mass sensing capabilities of a conventional microcantilever into the sub-picogram regime. Likewise, experiments designed to parametrically oscillate a microcantilever in water using electronic feedback also show an increase in the microcantilever's effective Q-factor by two orders of magnitude, opening the field to high-sensitivity mass sensing in liquid environments.     

石英音叉扫描探针显微镜

石英音叉是一种谐振频率稳定、品质因数高的时基器件,其音叉臂的谐振参数(谐振振幅和谐振频率)对微力极其敏感。利用石英音叉对外力的敏感性,与钨探针结合,构成一种新型的表面形貌扫描测头。该测头与xyz压电工作台结合,利用测头音叉臂谐振频率对扫描微力的敏感性,研制基于相位反馈控制的扫描探针显微镜。首先介绍石英音叉测头的构成、工作原理和特性测试,以及由该测头构建的扫描探针显微镜的结构和测试、分析。通过对测头和系统的测试结果分析,系统达到1.2 nm的垂直分辨率,并通过对一维栅的测量,给出扫描获得的试样表面微观形貌图以及相位图,证明系统的有效性。另外,由于采用大长径比的钨探针,该系统具有测量大深宽比微器件表面轮廓的能力。     

Ultra stable tuning fork sensor for low-temperature near-field spectroscopy

We report on a distance control system for low-temperature scanning near-field optical microscopy, based on quartz tuning fork as shear force sensor. By means of a particular tuning fork-optical fiber configuration, the sensor is electrically dithered by an applied alternate voltage, without any supplementary driving piezo, as done so far. The sensitivity in the approach direction is 0.2nm, and quality factors up to 2850 have been reached. No electronic components are needed close to the sensor, allowing to employ it in a liquid He environment. The system is extremely compact and allows for several hours of stability at 5 K.     

Effect of surface conjugation chemistry on the sensitivity of microcantilever sensors

Microcantilever sensors are an offshoot of atomic force microscopy and are useful tools for effectively detecting a target biomolecule. The recognition of the target molecule on the biosensor is based on the physical bending of the microcantilever, which is driven by a specific molecular interaction between the target molecule and the sensor surface. In this study, to enhance the sensitivity of the microcantilever sensor, the sensor surface was modified through a surface conjugation method using self-assembled monolayers (SAMs) and heterobifunctional cross-linkers. After the surface modification of the microcantilever sensor, the sensitivity for L-cysteine was recorded. The detection of L-cysteine was influenced by the active site and the molecular size of the cross-linked compound attached onto the surface of the microcantilever.     

Influence of the tip mass and position on the AFM cantilever dynamics: Coupling between bending,torsion and flexural modes

The effects of the geometrical asymmetric related to tip position as a concentrated mass, on the sensitivity of all three vibration modes, lateral excitation (LE), torsional resonance (TR) and vertical excitation (VE), of an atomic force microscopy (AFM) microcantilever have been analyzed. The effects of the tip mass and its position are studied to report the novel results to estimating the vibration behavior of AFM such as resonance frequency and amplitude of the microcantilever. In this way, to achieve more accurate results, the coupled motion in all three modes is considered. In particular, it is investigated that performing the coupled motion in analysis of AFM microcantilever is almost necessary. It is shown that the tip mass and its position have significant effects on vibrational responses. The results show that considering the tip mass decreases the resonance frequencies particularly on high-order modes. However, dislocating of tip position has an inverse effect that causes an increase in the resonance frequencies. In addition, it has been shown that the amplitude of the AFM microcantilever is affected by the influences of tip and its position. These effects are caused by the interaction between flexural and torsional motion due to the moment of inertia of the tip mass.     

The tuning fork as sensor for dynamic force distance control in scanning near-field optical microscopy

The dynamic force distance control for scanning near-field optical microscopy on the basis of a tuning fork as piezoelectric force sensor is remarkably sensitive. In order to gain a better understanding of this sensitivity the vibrational properties of the tuning fork are modelled within the framework of two coupled harmonic oscillators. As a result, the effective force constant of the tuning fork at resonance frequency is determined. Furthermore, the influence of the additional mass by the attachment of the near-field probe is investigated.     

The tuning fork as sensor for dynamic force distance control in scanning near-field optical microscopy

The dynamic force distance control for scanning near-field optical microscopy on the basis of a tuning fork as piezoelectric force sensor is remarkably sensitive. In order to gain a better understanding of this sensitivity the vibrational properties of the tuning fork are modelled within the framework of two coupled harmonic oscillators. As a result, the effective force constant of the tuning fork at resonance frequency is determined. Furthermore, the influence of the additional mass by the attachment of the near-field probe is investigated.     

A bi-material microcantilever temperature sensor based on optical readout

As one of the simplest MEMS sensors, microcantilever can sense temperature faster and more sensitively than traditional thermometers as its small size and low thermal mass. In this paper, an Au/SiNx bi-material microcantilever temperature sensor based on optical readout is presented. The deflection of the cantilever varies with the change of temperature due to the differences in thermal expansion coefficients between gold and silicon nitride. Then, the temperature could be accurately measured by detecting the deflection of the cantilever with optical lever method. By experiments, the theoretical model is verified and the temperature characteristics of the sensor are also determined. With a commercial microcantilever, the temperature resolution of the sensor is tested to be 0.02 K when 25 mm length of optical arm set. By optimizing the microcantilever parameters, the temperature resolution of the sensor could be 0.1 mK. High sensitivity makes it suitable for some special precise temperature measurements.     

An improved dynamic model of tuning fork probe for scanning probe microscopy

This paper presents a two coupled oscillators model to describe the dynamics of a tuning fork with a probe attached. The two coupled oscillators are unbalanced only in their effective masses and the damping ratios. By applying a frequency domain system identification approach in experimental investigation of various probe attachment cases, a good accuracy of the model is demonstrated. The effectiveness of the model is further demonstrated in quantitative analysis of the noise performance and the sensitivity of force sensing with a tuning fork probe. Compared with existing models, the proposed model can more accurately characterize the dynamics of a tuning fork probe.     

Optical microcantilever consisting of channel waveguide for scanning near-field optical microscopy controlled by atomic force

We develop a novel optical microcantilever for scanning near-field optical microscopy controlled by atomic force mode (SNOM/AFM). The optical microcantilever has the bent channel waveguide, the corner of which acts as aperture with a large tip angle. The resonance frequency of the optical microcantilever is 9 kHz, and the spring constant is estimated to be 0.59 N/m. The optical microcantilever can be operated in contact mode of SNOM/AFM and we obtain the optical resolution of about 200 nm, which is as same size as the diameter of aperture. We confirm that the throughput of optical microcantilever with an aperture of 170 nm diameter would be improved to be more than 10(-5).