光学微结构的超精密加工技术

微结构光学元件在光电产品及光通讯产品中的应用日益广泛，采用多轴超精密机床加工光学微结构，可达到亚微米级形状精度和纳米级表面光洁度的高精度水平，详细介绍了光学自由曲面及光学微结构的超精密加工技术，并开发了适合超精加工微型槽和微透镜列阵的刀具轨迹自动生成软件。     

主轴回转误差分析仪校准方法北大核心CSCD

针对超精密机床主轴回转误差分析仪校准难的问题,分析了主轴回转误差分析仪的系统组成及测量原理,提出了一种基于示值误差、线性度、重复性等主要计量特性的校准方法;搭建了一种专用的校准装置,该装置采用纳米微动台进行位移驱动,采用高精度激光干涉仪作为计量标准,测量线符合阿贝原则,能够在普通实验环境条件下实现:位移范围±1mm内最佳测量能力优于10 nm,10 min内示值稳定性优于2 nm;进行了主轴回转误差分析仪校准试验,给出了不确定度评定方法。该校准方法及装置能够满足主轴回转误差分析仪以及各种纳米级位移传感器及仪器的溯源需要。     

使用SPM的纳米级加工技术新进展

扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵，该文介绍了用STM和AFM进行纳米级加工的各种最新方法：针尖直接雕刻，针尖光刻加工，局部阳极氧化，原子沉积形成纳米点，原子去除形成沟槽微结构，多针尖加工，原子自组装形成三维结构等．使用SPM的纳米级加工对发展微型机械、纳米电子学和微机电系统具有重要意义．     

长度计量基础知识讲座（十）第十 讲线纹计量器具

线纹计量是长度计量中的一项重要的参数。随着工业和科学技术的发展，线纹计量更广泛地应用于各个领域，如用于精密机床和加工中心的坐标位移测量、测绘中大长度的遥感精密测量等。     

主轴回转误差引入飞切加工表面微波纹的形成机理与解决方案

为分析超精密飞切机床加工表面微波纹的形成机理,研究了主轴回转误差信息提取与表面形貌仿真技术,获取微波纹误差来源并研究解决方案。首先,在超精密飞切机床主轴上搭载五通道在线电容位移检测系统,并对采集到的信号进行误差分析提取。然后,建立飞切加工表面微观形貌三维仿真模型,仿真分析主轴误差引入的加工表面微波纹,并与表面检测结果比对确定误差来源。最后,通过调整主轴电机控制系统抑制该误差。三维仿真和实测结果相吻合,证实超精密飞切机床主轴转速波动导致的回转误差造成了工件表面1 Hz左右的规律性条纹,对主轴转速控制系统进行数字化改造后,基本消除了该因素导致的表面微波纹,表面粗糙度从5 nm以上抑制到2 nm左右,PV值优于10 nm。超精密飞切机床主轴转速波动会对飞切加工表面微观形貌以及表面粗糙度产生显著影响,需至少控制在0.5 r/min以内。     

纳米结构PVD涂层可保护精密机加工产品

台湾纳米超晶格工艺公司开发出一项工艺，利用该工艺可在高真空环境中以离子注入和磁控溅射结合用于钛、铝、钒等的氮化物薄膜沉积。该公司可以用纳米结构PVD涂层包覆半导体、精密机床和长途通信等设施元件。     

浅谈超精密加工机床的新技术及发展

1引言 随着现代科技的发展应用,对零件的加工E精度要求从微米级提升到亚微米级、纳米级。超精密加工技术是实现这一目标的重要途径,其发展程度体现了一个国家制造技术的发展水平。     

大型非球曲面超精密复合加工机床

详细介绍了“大型非球曲面超精密复合加工机床”．该机床具有磨削、铣削、车削等多种加工功能，采用了高精度的FANUC系统，在X横向导轨上设计了独特的卸荷系统，在Z垂直导轨上设计了精确的配重系统，主轴转速为150r／min，可加工最大尺寸为φ1200mm的工件．用高精度的电感测微仪和自准直仪对机床进行了检测，结果表明：其数控系统位置及控制分辨率为0．05μm，主轴回转精度为26nm．最后，用该机床进行了超精密加工试验，经检测，其加工工件的表面粗糙度Ra优于15nm，实现了大型非球曲面的超精密加工．     

微纳米尺寸测量技术

随着精密和超精密加工技术的迅速发展,亚微米和纳米级的测量方法不断出现,本文对近年几种常见的微纳米计量技术的基本测量原理和方法作了简单的介绍。     

微纳米尺寸测量技术

随着精密和超精密加工技术的迅速发展,亚微米和纳米级的测量方法不断出现,本文对近年几种常见的微纳米计量技术的基本测量原理和方法作了简单的介绍。     

Study of Factors Affecting the Surface Quality in Ultra-Precision Diamond Turning

This paper deals with an investigation of the process factors and the material factors affecting the surface roughness in ultra-precision diamond turning. The process factors involve cutting conditions, tool geometry, and relative tool-work vibration which are related to the cutting geometry and the dynamic characteristics of the cutting process. The material factors considered are material anisotropy, swelling, and crystallographic orientation of the work materials. Experimental results indicate that the influence due to the process factors can be minimized through a proper selection of operational settings and better control of dynamic characteristics of the machine. The material factors, on the other hand, exert consistent influence on the surface roughness which can not be minimized solely by an optimization of process parameters and machine design. Based on these findings, some suggestions are proposed for the optimization of the surface quality in ultra-precision diamond turning.     

大尺寸蜗轮齿距累积误差的检测及数据处理

介绍了１种作为工厂机床检修中大尺寸蜗轮距累积误差的检测装置和检测方法，以及用计算机快速准确地进行数据处理。     

KDP晶体单点金刚石切削脆塑转变机理的研究

加工超光滑表面的KDP晶体是现代超精密加工技术领域的重点研究课题。实验采用维氏压痕法研究KDP晶体脆性材料(001)面不同晶向的硬度、断裂韧性的变化规律。通过建立KDP晶体脆塑转变临界切削厚度模型,研究了KDP晶体金刚石切削脆塑转变机理。结果表明,脆塑转变临界最小切削厚度出现在断裂韧性最小而硬度最大的[110]方向;脆塑转变临界切削最大厚度出现在断裂韧性最大而硬度最小的[001]方向。并利用超精密机床加工了KDP晶体,加工结果与理论推导结论相符合,在[001]方向加工出表面粗糙度为7.5nm(RMS)的超光滑表面。     

CK6163型数控机床主传动系统设计

CK6163属于经济型中档精度机床,其品种、用途、性能和结构都是普通型车床所共有的,通用机床的规格和类型有系列型谱作为设计时应该遵照的基础。数控车床的主传动系统的设计包括主轴电机、传动系统与主轴组件,与普通机床相比,结构简单。计算各传动副的传动比及齿轮齿数,再估算齿轮的模数和各轴的轴径,并对齿轮和轴的强度、刚度进行校核,还要对箱体内的主要结构进行设计,一些零件的选型,如电磁离合器的选择等,从而完成对整个主传动系统的设计。     

基于机床体误差模型的加工面形误差预测

零件面形精度满足要求是超精密装备实现其关键功能的重要保证.影响工件加工面形精度的因素很多,机床体误差是其中最关键的因素.通过构建机床误差元与加工面形误差之间的直接关系来进行面形误差预测研究.提出了一种基于机床体误差模型的频域多尺度面形误差预测方法,该方法可结合机床体误差模型、工艺参数、加工轨迹等进行频域多尺度面形误差预测,可为加工路径规划、机床设计等提供理论参考,从而提高加工精度.进行了低频PV面形误差预测的实例研究,采用的机床为一台五轴联动超精密机床,加工表面为凹形截圆锥台锥面.通过实验与理论分别获得PV面形误差,其相对误差为17.3%,证明基于机床体误差模型的低频PV面形误差预测是可行的.     

Ultra-precision: enabling our future

This paper provides a perspective on the development of ultra-precision technologies: What drove their evolution and what do they now promise for the future as we face the consequences of consumption of the Earth's finite resources? Improved application of measurement is introduced as a major enabler of mass production, and its resultant impact on wealth generation is considered. This paper identifies the ambitions of the defence, automotive and microelectronics sectors as important drivers of improved manufacturing accuracy capability and ever smaller feature creation. It then describes how science fields such as astronomy have presented significant precision engineering challenges, illustrating how these fields of science have achieved unprecedented levels of accuracy, sensitivity and sheer scale. Notwithstanding their importance to science understanding, many science-driven ultra-precision technologies became key enablers for wealth generation and other well-being issues. Specific ultra-precision machine tools important to major astronomy programmes are discussed, as well as the way in which subsequently evolved machine tools made at the beginning of the twenty-first century, now provide much wider benefits.     

无氧铜超精加工表面微观形貌的分形维数表征

单点金刚石超精密加工能够获得纳米级的低粗糙度表面。进一步的实验表明,采用该工艺进行退火态无氧铜切削,已加工表面在刀痕基础上还会出现清晰的晶界浮凸现象。传统的粗糙度概念无法有效表征与区分含有晶界浮凸信息的超精加工表面微观形貌。引入分形维数概念,采用该理论中尺码法对无氧铜超精加工表面的微观形貌进行分形维数计算;为降低切削刀痕信号干扰、突出晶界浮凸信息,设计表面信号带阻滤波方法。计算结果表明,超精加工后的表面分形维数包含了加工刀痕与晶界浮凸信息,由于两者尺度相近,传统的粗糙度测量无法区分其差异;采用带阻滤波与尺码法耦合方式,能够有效识别晶界浮凸特点,定量地反映微观尺度下超精加工表面的形貌特征信息。     

圆柱表面微结构阵列超精密车削加工技术

辊子是光学薄膜模压制造的关键零件,其圆柱表面微结构复杂,表面粗糙度要求也极高.超精密车削成形作为微结构的一种高效加工方式,其加工的可达性、伺服刀具动态特性的制约、海量微结构的加工长时一致性等是高质量辊子微结构加工所需解决的关键问题.本文以圆柱球面微结构阵列为例,从其数学描述入手,分析了刀具几何尺寸、伺服系统动态特性与微结构加工可达性之间的制约关系,并在自主研制的超精密车床和快刀伺服系统上进行了两种球面微结构的加工实验,得到了预期的微结构形貌,并对加工实验中发现的切深不一致现象给出了初步的解释.     

Tool path generation of ultra-precision diamond turning: A state-of-the-art review

With the increasing market demand for optical complex surface parts, the application of multi-axis ultraprecision single-point diamond turning is increasing. A tool path generation method is very important to decrease manufacturing time, enhance surface quality, and reduce cost. Compared with the tool path generation of the traditional multi-axis milling, that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency. This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues: cutter location(CL) points calculation, the topological form of tool path, interpolation mode, and G code optimization.     

A review of numerically controlled methods for finish-sculptured-surface machining

This paper presents a mathematical review of methods and algorithms used to compute milling cutter placement for multi-axis finished-surface machining. In general, these methods and algorithms compute tool path points based on tangent-plane contact between the milling cutter and the surface while maintaining a fixed tool orientation. This tangent-plane method of tool positioning and orientation is examined by discussing its strengths and weaknesses. Errors resulting from the tangent-plane approach are typically determined using a posteriori cutter path checking and graphic visualization techniques. Although these checking techniques have proved useful in identifying the tool path errors before actual machining, the problem of generating an error-free tool path remains. In this paper, we discuss the analysis of tool path position and orientation data as they are generated. This a priori analysis method is used to show error locations along the lateral face of the tool. The conclusion is reached that additional research is needed in the area of simultaneous multi-axis tool path planning, if errors are to be eliminated and the efficiency of the milling machine is to be improved. The reader is referred to research efforts that extend beyond the traditional or computer-aided design (CAD, vendor supplied) tool path planning methods. Some of these efforts show great promise in eliminating gouging and improves machine tool efficiency.