一种基于法布里-珀罗干涉仪的位移测量方法

介绍了一种基于法布里-珀罗干涉仪的位移测量方法,为了克服通常的法布里-珀罗干涉仪在位移测量范围方面的局限,采用两束可调激光分别对法布里-珀罗腔的两个相邻谐振峰的光频率进行追踪测量,能够得到任意时刻法布里-珀罗腔的长度,从而实现对测量镜位移的测量,测量范围可以达到毫米量级。对影响测量精度的主要因素进行了简要分析,结果表明采用本方法能够实现纳米级精度位移测量。     

基于法布里-珀罗干涉仪的微位移测量方法研究

介绍了一种基于法布里-珀罗干涉仪的微位移测量方法,通过将位移测量转化为频率变化量的测量,实现了亚纳米级测量分辨力.建立了基于法布里-珀罗干涉仪的微位移测量实验装置,完成了320 nm范围内的位移测量,并将测量结果与精密电容传感器的测量结果进行了比较.     

激光干涉仪非线性的测量

激光干涉仪和高精度位移传感器的非线性一般为1～5nm,为了对这样的非线性进行测量,必须使用高精度测量方法,并建立高精度测量装置。文中描述了高精度拍频法布里 珀罗激光干涉仪,和利用它对工业激光干涉仪的非线性进行的测量实验。测量范围大于1.3μm,测量不确定度约为2nm。     

光学方法在真空计量中应用研究进展

光学方法在真空计量中的应用研究是真空计量中的新学科。固定长度法布里-珀罗光学谐振腔应用在粗低真空校准技术、可调谐二极管激光吸收光谱(TDLAS)应用在分压力校准技术、迈克尔逊干涉仪动态真空校准技术以及基于法布里-珀罗(Fabry-Pérot)光学干涉法应用在气体微流量测量技术。文中介绍了原理、校准装置的结构及性能等。从中可以看出,近年来随着学科的交叉融合,采用光学方法的真空计量技术大幅减小了现有真空计量标准的测量不确定度,促进真空计量由实物标准向量子标准转变,并对真空基本量复现,以及今后真空国际单位制的重新定义具有重要的意义。     

激光双法布里--珀罗干涉纳米测量系统的理论分析

本文设计了一种基于双法布里-珀罗干涉仪、采用计算机实时处理、以轻拍式探针为传感器的新型纳米测量系统,描述了该系统的工作原理,详细进行了系统的理论分析.提出了通过测量双法布里-珀罗干涉仪透射光强基波幅值差或基波等幅值过零时间间隔的方法进行纳米测量的理论基础,分析了轻拍式探针的振动模型,给出了检测探针振幅变化的新方法及理论依据.     

激光双法布里：珀罗干涉纳米测量系统的理论分布

本文设计了一种基于双法布里－珀罗干涉仪、采用计算机实时处理、以轻拍式探针为传感器的新型纳米测量系统，描述了该系统的工作原理，详细进行了系统的理论分析。提出了通过测量双法布里－珀罗干涉仪透射光强基波幅差值差或等幅值过零时间间隔的方法进行纳米测量的理论基础，分析了轻拍式探针的振动模型，给出了检测探针振幅变化的新方法及理论依据。     

基于ACPT技术的纳米振动测量激光干涉仪

为实现高精度、高稳定的微小振动测量,设计了一种改进型迈克尔逊干涉仪,对其所采用的光学结构和解调算法进行了分析.信号解调方案基于载波调制和交流相位跟踪（ACPT）技术,相对应的光路采用双压电陶瓷（PZT）和准平面猫眼动镜以构成参考臂和测量臂,设计以改善信噪比、抑制低频干扰、增强系统稳定性、提高测量分辨力为目标.建立了纳米振动发生装置,搭建了振动信号测量系统,研究了激光干涉仪对振动信号的输出特性.实验结果表明,测量动态范围达到120 dB,信噪比高于40 dB,系统分辨力达到0.25 nm.该干涉仪可有效抑制诸如温度、湿度、压强、低频振动等带来的相位噪声的干扰,满足高精度、稳定、可靠的要求.     

用于微位移测量的迈克尔逊激光干涉仪综述

迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段.以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量...     

用于大范围纳米测量的法布里—珀罗干涉仪

本在中国计量科学研究院研究的差拍法－珀干涉仪基础上，分析了其测量范围过小的本质原因，提出扩大差拍法－珀干涉仪测量范围的方法－换精锁定法，将激光频率依次锁定于法－珀腔的各个干涉级次，从而突破了激光器调谐范围的限制拓深了该系统实现大范围纳米测量的能力。     

光栅纳米测量中的系统误差修正技术研究

详细研究了光栅纳米测量系统的误差特性 ,以及利用激光干涉仪对高精度光栅测量系统的系统误差进行检测、并在信号处理中予以补偿和修正的方法。实验表明 ,通过这种系统误差修正方法对周期累计误差和细分误差同时进行修正 ,能够大幅度地将计量光栅系统的测量准确度从微米或亚微米量级提高到纳米级水平 ,以实现光栅纳米测量。     

Experimental demonstration of resonant sideband extraction in a sagnac interferometer

Sagnac interferometers have recently been proposed as a potential alternative to Michelson interferometers for the purpose of large-scale laser interferometric gravitational-wave detectors. We report on an experimental investigation of the Sagnac interferometer in two configurations: with arm cavities, and with resonant sideband extraction. Resonant sideband extraction was shown to increase the signal bandwidth by a factor of 6.5 compared with the arm cavity device, corresponding to an increase in sensitivity of as much as 6 dB for signals outside the arm cavity bandwidth. Moreover, we compare the performance of a Sagnac interferometer with resonant sideband extraction to a Michelson interferometer with resonant sideband extraction.     

Multiplex Fabry-Perot interferometer: II. Laboratory prototype

The Multiplex Fabry-Perot interferometer (MFPI) consists of a Fabry-Perot interferometer in which the étalon plate separation is changed over a large optical distance. Fourier transformation of the resultant interferogram allows one to treat the multiple reflections within the étalon cavity in a manner analogous to an array of Michelson-type interferometers. However, the scan distance required by the MFPI is much less than for a comparable Michelson. The design and construction of the MFPI are described. Solar absorption spectra measured with this instrument are compared with results from the FASCODE atmospheric model.     

2 m激光干涉测长基准装置

阐述了2 m激光干涉测长基准装置工作原理及系统组成,以线间距测量功能为基础,研究了接触式和非接触式的几何测长对准方法,实现了其测长功能拓展应用。介绍了实现纳米精度测长的技术措施。对称布局的双光电显微镜同步扫描测量接长的方式实现2 m刻线间距测量,信号处理系统具有标准间距位置脉冲发生功能,可以实现位移传感器动态触发校准和其它应用。对于高质量的线纹尺,2 m激光干涉测长基准装置单次测量刻线间距的最佳瞄准精度优于10 nm(1σ),1 m测量范围内的线纹测量不确定度U=（20+40 L） nm （k=2）。     

Quantum information technology with Sagnac interferometer: interaction-free measurement,quantum key distribution and quantum secret sharing

The interferometry of single-photon pulses has been used to implement quantum technology systems, like quantum key distribution, interaction-free measurement and some other quantum communication protocols. In most of these implementations, Mach–Zehnder, Michelson and Fabry–Pérot interferometers are the most used. In this work we present optical setups for interaction-free measurement, quantum key distribution, quantum secret sharing and secure classical prisoners' dilemma game using the Sagnac interferometer. The proposed setups are described and as well the quantum protocols using them are explained.     

Compactness of lateral shearing interferometers

Imaging lateral shearing interferometers are good candidates for airborne or spaceborne Fourier-transform spectral imaging. For such applications, compactness is one key parameter. In this article, we compare the size of four mirror-based interferometers, the Michelson interferometer with roof-top (or corner-cube) mirrors, and the cyclic interferometers with two, three, and four mirrors, focusing more particularly on the last two designs. We give the expression of the translation they induce between the two exiting rays. We then show that the cyclic interferometer with three mirrors can be made quite compact. Nevertheless, the Michelson interferometer is the most compact solution, especially for highly diverging beams.     

智能加载激光洛氏硬度标准装置

介绍了一种新型的智能加载激光洛氏硬度标准装置,装置采用电动结合砝码的加载方式,实现了力值加载的智能化过程控制;采用外差激光干涉测量技术,实现了压痕深度的无接触、高精度测量。试验表明:该装置稳定、可靠、准确度高,技术指标达到了国际洛氏硬度新定义的要求,具有很高的实用价值。     

Development of stable monolithic wide-field Michelson interferometers

Bulk wide-field Michelson interferometers are very useful for high precision applications in remote sensing and astronomy. A stable monolithic Michelson interferometer is a key element in high precision radial velocity (RV) measurements for extrasolar planets searching and studies. Thermal stress analysis shows that matching coefficients of thermal expansion (CTEs) is a critical requirement for ensuring interferometer stability. This requirement leads to a novel design using BK7 and LAK7 materials, such that the monolithic interferometer is free from thermal distortion. The processes of design, fabrication, and testing of interferometers are described in detail. In performance evaluations, the field angle is typically 23.8° and thermal sensitivity is typically -2.6×10(-6)/°C near 550 nm, which corresponds to ～800 m/s/°C in the RV scale. Low-cost interferometer products have been commissioned in multiple RV instruments, and they are producing high stability performance over long term operations.     

接触定位式量块干涉仪测量不确定度的分析

分析了一台用于测量量块的激光干涉仪的测量不确定度。着重介绍了干涉信号质量,空气折射率及材料热膨胀等因素对测量不确定度的影响。