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炫耀光栅位移测量系统采用尤学倍增与电子细分相結合的方法,使系统的分辨率达到0.4微米。与金属线纹尺比较测量,系统在300毫米内的极限误差为1.5微米。试验证明炫耀光栅位移测量系统具有较高的精度,如能进一步提高标尺光栅的刻划精度,并相应地提高分辨率,系统的实际精度还可以提高。 相似文献
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1引言
随着现代科技的发展应用,对零件的加工E精度要求从微米级提升到亚微米级、纳米级。超精密加工技术是实现这一目标的重要途径,其发展程度体现了一个国家制造技术的发展水平。 相似文献
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本文首先扼要地阐述了作为电子束曝光机主要组成部分的工件台系统的功能要求,分析了影响工件台位移测量精度的各种因素并进行了粗略比较。指出了降低测量误差的具体措施,对能制作微米、亚微米线条的精密工件台的直线运动精度和反射镜的精度提出了具体的设计参数。 相似文献
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描述了一种新的亚波长光栅的微细加工技术,即X光光刻得到相应的亚微米级的线宽图形,再利用显影技术获得了高深宽比的立体亚波长光栅.用此纳米加工技术获得了栅距为500nm、250nm、150nm,光栅高度为1900nm的特殊纳米光栅模具,开发了纳米无反射结构,并研制成功了亚波长光栅.该亚微米线宽微细加工技术可用于布拉格光栅、DVD读写头、无反射表面等需要亚微米结构的器件中. 相似文献
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《中国新技术新产品》2015,(11)
长度测量技术是近几年工程建设、工业生产等领域研究最多的问题,其测量系统分辨率早已经达到微米、亚微米乃至纳米等级。本文就长度光栅测量工作中出现的误差来源分析,简单的阐述了有关误差修正技术,仅供同行工作参考。 相似文献
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介绍了一种基于光栅干涉测量原理的大量程、高精度触针杠杆式表面形貌传感器,并对传感器在大量程测量时的非线性误差进行了分析。测量时轮廓仪在水平和垂直方向上都会由于测杆绕固定支点的转动而产生非线性误差,为此提出了一种对水平和垂直方向上非线性误差进行校正的新方法。通过使用大量程、高精度的一维垂直微位移工作台和标准楔形斜块进行误差校正。最后分别给出校正前后误差曲线,并进行对比。通过分析可知,此方法可以有效减小测量时的非线性误差,大大提高轮廓仪在进行大量程测量时的精度,从而实现大量程、高精度测量。 相似文献
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《International journal for numerical methods in engineering》2018,113(9):1488-1506
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method. 相似文献
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Steffen Müller-Probandt 《材料科学与工程:中英文B版...》2018,(4):161-177
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di... 相似文献
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Janet Lang 《Materials and Manufacturing Processes》2017,32(7-8):857-866
ABSTRACTThe production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them. 相似文献
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Standards are the basis for production enterprises to organize production ex-factory inspection trade 《中国标准化(英文版)》2008,25(1):24-25
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.…… 相似文献
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A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils. 相似文献
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A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa. 相似文献
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S. K. Malhotra Paramanand Singh A. Thirunavukkarasu 《Materials and Manufacturing Processes》2006,21(7):652-657
Al2O3-ZrO2 nanocomposites were developed starting with the solgel process. Composite alumina-zirconia nanopowders were synthesized from metallorganic precursors (Aluminium secondary butoxide and zirconium Iso propoxide) using the solgel process. The parameters affecting the synthesis—solvent, concentration of precursor, R/H ratio (i.e., dilution of water in solvent)—were varied as also the temperature and pH. BET and TEM were used to measure nanosize. Diffuse reflectance spectroscopy and also qualitative optical absorption led to identical particle size estimate. The variation of process parameters was used to study the effect and interdependence of process parameters. Artificial Neural Networks was used to rigorously analyze the process. Although this led to confirmation of interdependence of parameters, the presence of a single overwhelming solvent variable was also established. Then the optimal process was used to synthesize more nanopowder. To produce bulk nanocomposite the nanopowders were sintered by varying the temperature and time period. The sintered lithoids were probed with a vickers hardness tester to measure elastic modulus, hardness, and fracture toughness. The results showed high elastic modulus, modest hardness, and very high fracture toughness. 相似文献
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On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.…… 相似文献
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Friction Stir Processing Strategies for Uniform Distribution of Reinforcement in a Surface Composite
Vipin Sharma Yashpal Gupta Ujjwal Prakash 《Materials and Manufacturing Processes》2016,31(10):1384-1392
Friction stir processing (FSP) is an important technique for preparing surface composites. Fabricating defect-free surface composites with uniform particle distribution by FSP is a challenging task. In this study, silicon carbide particles reinforced AA5083 alloy surface composites was fabricated using different FSP strategies including variation in process parameters, dual-tool processing and tool offset overlapping. Material flow of the processed material with reinforcement particles demonstrated that the distribution of particles was influenced by the stirring action of the probe as well as the extrusion of the plasticized material due to the movement of the tool. Process parameters, particularly rotational speed, showed a dominant influence on the distribution of silicon carbide particles. 相似文献