高性能CVD金刚石薄膜涂层刀具的制备和试验研究

采用电子增强热丝EACVD法,以WC-Co硬质合金刀具为衬底制备金刚石涂层刀具,研究了提高涂层附着力的衬底预处理新方法,探讨了抑制Co催石墨化作用的有效措施,提出了改善金刚石薄膜表面粗糙度CVD后处理新工艺。研究结果表明,采用了Ar-H2微波等离子体刻蚀脱碳预处理方法对于提高金刚石薄膜涂层的附着力有明显效果,添加适量粘结促进剂,可有效地抑制CVD沉积过程中钴向表层扩散引起的催石墨化作用。采用分步沉积新工艺是减小金刚石薄膜表面粗糙度的有效方法。所制备的高附着力和低粗糙度的金刚石薄膜涂层刀具切削性能明显改善,对实现高效高精度切削加工具有十分重要的意义。     

超精密车削时切屑形成及表面微观形貌形成机理的研究

在亚微米级CNC超精密车床上进行了单晶金刚石刀具切削试验 ,根据试验结果分析了切屑形成机理和最小切削厚度与表面粗糙度之间的关系 ,建立了加工表面微观形貌的几何模型。研究结果表明 :通过计算最小切削厚度值可预测金刚石车削加工可获得的表面粗糙度值。     

Application of Taguchi and response surface methodologies for surface roughness in machining glass fiber reinforced plastics by PCD tooling

This paper discusses the use of Taguchi and response surface methodologies for minimizing the surface roughness in machining glass fiber reinforced (GFRP) plastics with a polycrystalline diamond (PCD) tool. The experiments have been conducted using Taguchi’s experimental design technique. The cutting parameters used are cutting speed, feed and depth of cut. The effect of cutting parameters on surface roughness is evaluated and the optimum cutting condition for minimizing the surface roughness is determined. A second-order model has been established between the cutting parameters and surface roughness using response surface methodology. The experimental results reveal that the most significant machining parameter for surface roughness is feed followed by cutting speed. The predicted values and measured values are fairly close, which indicates that the developed model can be effectively used to predict the surface roughness in the machining of GFRP composites. The predicted values are confirmed by using validation experiments.     

An integrated method for measurement of diamond tools based on AFM

The measurement and evaluation technology of high precision diamond tools is critically important for supporting the ultra-precision machining. In practical cutting process, the edge profile quality of the diamond tool, including sharpness, micro defects, roughness and tip arc waviness, greatly affects the cutting quality. It is very difficult to measure and evaluate the diamond tool edge profile due to the high precision of tool edge profile and complexity of various measurement parameters. In this paper, an integrated method for measurement and characterization of diamond tools is proposed, which is based on an Atomic Force Microscope (AFM) module. Multiple technical indexes of diamond tools are obtained and validated based on the presented research and cutting experiments, and the evaluation model for each technical index is also proposed. The integrated measurement equipment, including an AFM, precision adjustment device and aerostatic bearings, has been established based on the accuracy requirement of measurement parameters. The edge sharpness, micro defects, surface roughness and tip arc waviness have been obtained based on the evaluation model and experimental data. The experimental results show that the measurement accuracy meets the requirements of the comprehensive evaluation of the diamond tool edge profile. The research work will also contribute to the development of ultra-precision machine.     

CVD金刚石薄膜涂层刀具精密切削表面质量的研究

CVD金刚石薄膜刀具的表面粗糙度和加工过程中的切削用量是影响加工工件表面质量的关键因素.为改进CVD沉积工艺,减小金刚石薄膜表面粗糙度,提出了合理控制沉积气压的新工艺方法,并通过切削试验研究了不同沉积工艺下制备的CVD薄膜涂层刀具和加工过程中不同切削用量对精密切削表面质量的影响.     

高精度金刚石刀具研磨关键技术研究

金刚石刀具刃口锋利度对所加工零件的表面质量有着重要影响。通过确定合理的研磨设备结构和合理的研磨工艺参数,获得的刀具刃口锋利度从300 nm提高到了50nm,刀面表面粗糙度从15nm提高到了0.5nm,刀具刃口质量得到了明显改善。     

超精密车削表面粗糙度的控制与优化

金刚石车削是利用高精度机床与锋利的单晶金刚石刀具加工出尺寸精度高、表面完整性好的零件的一种金属加工技术。用回归分析的方法，根据金刚石车削铝合金的实验结果可以建立表面粗糙度预测模型，这种方法能够以较少的实验次数获得大量的加工信息。在一定条件下，利用优化设计软件可以实现切削参数的优选，用优选得到的最优切削参数组合进行超精密加工，能够获得超光滑加工表面。     

A study on critical depth of cuts in micro grooving

Ultra precision diamond cutting is a very efficient manufacturing method for optical parts such as HOE, Fresnel lenses, diffraction lenses, and others. During micro cutting, the rake angle is likely to become negative because the tool edge radius is considerably large compared to the sub-micrometer-order depth of cut. Depending on the ratio of the tool edge radius to the depth of cut, different micro-cutting mechanism modes appear. Therefore, the tool edge sharpness is the most important factor which affects the qualities of machined parts. That is why diamond, especially monocrystal diamond which has the sharpest edge among all other materials, is widely used in micro-cutting. The majar issue is regarding the minimum (critical) depth of cut needed to obtain continuous chips during the cutting process. In this paper, the micro machinability near the critical depth of cut is investigated in micro grooving with a diamond tool. The experimental results show the characteristics of micro-cutting in terms of cutting force ratio (Fx/Fy), chip shape, surface roughness, and surface hardening near the critical depth of cut.     

天然金刚石振动与气体保护切削黑色金属技术研究

对天然金刚石切削黑色金属的磨损机理进行了分析 ,提出了天然金刚石超声振动结合气体保护方法对黑色金属材料进行微量切削的新思路 ,并进行了不锈钢零件的切削实验。实验表明 ,当切削路程达到 2 0 0 0m时 ,工件表面粗糙度Ra小于 0 .15 μm ,后刀面磨损带宽小于 5 μm。     

Development of an electrolyte jet type apparatus for manufacturing electroplated diamond wires

Multi-wire sawing with a fixed diamond wire is widely used for the mass production of wafers. In this study, a novel electrolyte jet type electroplating method was devised to improve the productivity of these wires. The method is based on increasing the limiting current density (LCD) in the electroplating unit. First, an electrolyte jet type electroplating unit was designed, and the plating characteristics were investigated. To increase the LCD during plating process, the method of decreasing the depletion layer of nickel ions around the core wire was approached. The experimental results indicated that the LCD can be increased by increasing the flow rate of the electrolyte. Next, the influences of composite plating conditions on the state of abrasive distribution and density of the diamond wires were experimentally verified, and the process of selecting the optimal fabricating conditions was clarified. Lastly, the cutting performance of the prototype diamond wires was verified by slicing a polycrystalline silicon ingot. The relationship between the surface roughness of the sliced wafers and the abrasive density of the diamond wires was studied.     

微结构功能表面的金刚石超精密加工仿真与试验

为解决微结构功能表面的金刚石超精密加工过程中,难以经济而灵活地预测表面质量及加工条件对加工表面质量的影响的问题,以自行设计的带有快速伺服刀架的超精密机床为基础,采用Matlab/ Simulink模块建立正弦波微结构功能表面金刚石超精密加工过程的动态仿真模型。利用该模型,不仅可以预测加工表面质量,还可以对加工条件如进给速度、主轴转速对加工表面质量的影响进行仿真进而对加工条件进行优化。通过微结构功能表面的金刚石超精密切削加工验证试验,加工出表面粗糙度约为45 nm、形状精度约为0.65 µm的正弦波微结构功能表面,试验结果表明,该模型的建立对于微结构功能表面的金刚石超精密加工具有重要的指导意义。     

Optimization of drilling parameters on surface roughness in drilling of AISI 1045 using response surface methodology and genetic algorithm

Modeling and optimization of cutting parameters are one of the most important elements in machining processes. The present study focused on the influence machining parameters on the surface roughness obtained in drilling of AISI 1045. The matrices of test conditions consisted of cutting speed, feed rate, and cutting environment. A mathematical prediction model of the surface roughness was developed using response surface methodology (RSM). The effects of drilling parameters on the surface roughness were evaluated and optimum machining conditions for minimizing the surface roughness were determined using RSM and genetic algorithm. As a result, the predicted and measured values were quite close, which indicates that the developed model can be effectively used to predict the surface roughness. The given model could be utilized to select the level of drilling parameters. A noticeable saving in machining time and product cost can be obtained by using this model.     

聚晶金刚石复合片的电火花线切割精密加工试验

为了提高聚晶金刚石(PCD)刀具的生产效率,改进加工表面质量并减少刃磨余量,利用慢走丝电火花线切割机床(WEDM)对PCD复合片进行了加工工艺试验.对PCD复合片进行了5次切割,并分别测量了每次加工后的表面粗糙度、富钴界面层凹槽深度及宽度和PCD层刃口加工质量.试验结果表明:PCD复合片经慢走丝线切割多次加工,能够得到较好的表面质量,在众多影响因素中金刚石颗粒大小对加工质量影响较大;其中CTH025型号和CTB010型号的最终表面粗糙度分别为Ra=0.85 μm和Ra=0.57 μm,富钴界面层凹槽的深度分别为16.3 μm和5.7 μm,刃口处切口缺陷的尺寸也与金刚石颗粒的尺寸相当.经WEDM加工后的PCD复合片的刃磨余量可控制在4～15 μm左右.     

A theoretical and experimental investigation of surface generation in diamond turning of an Al6061/SiCp metal matrix composite

In this paper, the surface generation in ultra-precision diamond turning of Al6061/15SiC_p metal-matrix composites was investigated based on different analytical approaches which include parametric analysis, cutting mechanic analysis, finite element method (FEM) analysis and power spectrum analysis. Parametric analysis was performed to explore the in situ inter-relationships between the process parameters and the surface roughness. The surface properties of the diamond turned surface were extracted and analyzed by the power spectrum analysis of the surface roughness profiles. Different surface generation mechanisms were deduced based on the cutting mechanics and FEM analysis. The results of the theoretical analyses were verified through a series of cutting tests conducted under various cutting conditions and a good correlation between the theoretical and experimental results was obtained.     

金刚石磨头刀具磨铣加工对高体份SiCp/Al复合材料加工表面质量的影响

针对高体份SiCp／Al复合材料,采用佥刚石磨头刀具磨铣切削的加工方法,研究了高速磨铣加工中机床主轴转速、工件进给速度及背吃刀量对材料加工表面形貌损伤以及表面粗糙度的影响规律。研究表明,机床主轴转速的提高、工件进给速度的减小都能够减小材料表面形貌的损伤情况,改善加工表面粗糙度质量：背吃刀量的改变对材料表面形貌损伤以及表面粗糙度的影响不大。     

An analysis of the catalysis of Fe, Ni or Co on the wear of diamonds

The desorption probability for hydrogen chemisorbed on diamond surface is discussed. A model including the equilibrium partial pressure of H₂O resulting from oxidation of methane by metal oxides allows the wear rate of diamond to be computed based on the assumption that the wear mechanism involves diffusion. The calculated partial pressure of H₂O suggests that diamond–graphite phase transformation occurs at the surface layer of diamond tools cutting Cu, Ni, Co or Fe. The calculated wear amount of diamond agrees well with the experimental data, when the temperatures of the cutting interfaces are assumed 560 °C for the cutting of Fe and 600 °C for Ni.     

Research on electrochemical discharge-assisted diamond wire cutting of insulating ceramics

Insulating ceramics are difficult to cut because of their high hardness and brittleness properties. This research proposes an electrochemical discharge-assisted diamond wire method for cutting insulating ceramics. The high temperature generated from electrochemical discharge facilitates the spalling of ceramics by the moving diamond wire. Experimental results showed that the material removal rate (MRR) of the new cutting method increased compared with the conventional diamond wire cutting process. Besides, electrochemical discharge had limited influence on the surface roughness and the wear of diamond wire. Additionally, the influence of the process parameters (DC voltage, wire speed, and counterweight mass) on the MRR and surface roughness was analyzed through experiments. The results showed that the MRR and surface roughness initially increased and then decreased with the increasing DC voltage; however, the variation was little. The higher wire speed resulted in an increased MRR and had little influence on the surface roughness. The MRR and surface roughness increased with the increasing counterweight mass.     

A dynamic surface topography model for the prediction of nano-surface generation in ultra-precision machining

Materials induced vibration has its origin in the variation of micro-cutting forces caused by the changing crystallographic orientation of the material being cut. It is a kind of self-excited vibration which is inherent in a cutting system for crystalline materials. The captioned vibration results in a local variation of surface roughness of a diamond turned surface. In this paper, a dynamic surface topography model is proposed to predict the materials induced vibration and its effect on the surface generation in ultra-precision machining. The model takes into account the effect of machining parameters, the tool geometry, the relative tool–work motion as well as the crystallographic orientation of the materials being cut. A series of cutting experiments was performed to verify the performance of the model and good correlation has been found between the experimental and simulation results.     

Finite element simulation of diamond tool geometries affecting the 3D surface topography in fly cutting of KDP crystals

Diamond tool has significant influences on the finished surface quality in fly cutting of potassium dihydrogen phosphate (KDP) crystals. In this work, the nanoindentation and dimensional analysis are employed to establish the material constitutive equation of KDP crystals, i.e., the variation curve of flow stress vs. plastic strain. As expected, a novel 3D finite element (FE) model is developed for diamond fly cutting of KDP crystals, and the generation of 3D surface topography is simulated by multi-run cutting calculations, in which the movements of diamond tool are configured to be identical to the actual feed rate and cutting velocity. Subsequently, the coordinates of the nodes on the topmost surface as freshly machined are collected to evaluate the surface roughness, which enables the detailed analyses of the effect of diamond tool geometries on the achieved surface roughness of KDP crystals. The results suggest an optimal selection of tool geometries, i.e. ?25° rake angle and 8° clearance angle. With the increment of tool nose radius, surface roughness decreases correspondingly. Moreover, the larger defect or sharpness of tool cutting edge produces the worse surface roughness. Diamond fly cutting experiments are carried out with different rake angles, in which the cutting parameters are the same as the values used in FE simulations. The measured surface roughness has a satisfied consistency with the simulated data, which demonstrates that the developed 3D FE cutting model and the related simulations are reliable.     

In-process modeling of dynamic tool-tip temperatures of a tunable vibration turning device operating at ultrasonic frequencies

The development of a model used to describe the mechanism by which vibration assisted machining reduces tool temperature is discussed, and correlations to resulting reduction in tool wear are presented. This model is applied to a newly developed ultrasonic, vibration assisted diamond turning device that allows for variation of vibration frequency and vibration amplitude via a direct drive actuator. It accommodates a wide range of vibration parameters, including vibration frequencies up to 40 kHz and amplitudes up to 8 μm, where the tool operates. The model uses the finite element method to predict cutting temperatures under conventional turning conditions (i.e., without vibration assistance). The results from the finite element analysis are then used in conjunction with a model developed for vibration assisted machining to predict the new temperature profiles. The modeling techniques and temperature histories for various vibration conditions are presented as well as experimental results that show the thermal advantages of applying tool vibration.