纳米压印光刻中抗蚀剂膜厚控制研究

研究了纳米压印光刻匀胶工艺中抗蚀剂膜厚与抗蚀剂粘度、匀胶转速、匀胶时间和滴胶量之间的关系。实验研究表明,抗蚀剂膜厚与抗蚀剂粘度、匀胶转速和匀胶时间均呈幂指数关系;当匀胶转速达到一定值,匀胶时间足够大时,膜厚不再随匀胶时间变化而变化,存在最小厚度,即抗蚀剂膜厚与滴胶量无关。建立了抗蚀剂膜厚与抗蚀剂粘度、匀胶转速和匀胶时间之间的量化关系公式,实现了对抗蚀剂膜厚的控制。     

Grey theory applied to evaluate the tribological performances of the a-C:H(N) coating films prepared by differing the nitrogen content and the film thickness

The purpose of this paper is to study the tribology performances of the aC:H(N) films by using a nanotester under different scratch loads and velocities. From the measurements of the friction coefficient and wear volume, the tribological performances including wear resistance and friction coefficients were evaluated for the hydrogenated amorphous carbon films prepared by differing film thickness and nitrogen volume friction in the gas mixture of (C₂H₂+N₂). Taguchi experimental design and the grey relational analysis were used to investigate the influence of specimen parameters (film’s thickness, nitrogen content in the film), and operating conditions in tribological tests (scratch load and scratch velocity) on the friction coefficients and the wear volume arising in the specimens with different coating films. It is found that the wear volume of thin film is increased by increasing either the nitrogen volume fraction or film thickness. Moreover, the optimal combination of the testing parameters was also determined in the use of the present model.     

Effect of proprietary oil additives on elastohydrodynamic film thickness

A study is reported of the effect on a simulated elastohydrodynamic contact of the addition of three proprietary products to the lubricating oil. Chromatic interferometry was used to study changes in lubricant film thickness. Under the conditions employed it was found that Molyslip did not affect film thickness markedly, but there is evidence that solid particles of molybdenum disulphide did enter the contact. STP and Redex both increased the film thickness as a result of increasing the viscosity, but this effect was greatly reduced at high shear rates. No evidence was found for the formation of permanent or semi-permanent surface films, although results have so far only been obtained at room temperature.     

Thin film thickness measurements in two phase annular flows using ultrasonic pulse echo techniques

The electric power generation and oil/gas production industries have a strong interest in the physical characterization of conducting and non-conducting liquid films that are formed during the flow of liquids in pipes. Conducting and non-conducting liquid films do not lend themselves to the same characterization techniques due to the different requirements originating from their electrical properties. Techniques based on the use of ultrasound are extremely attractive for that purpose as they do not depend on the electrical properties of the liquid and are also non-invasive. This paper presents the application of ultrasonic techniques for measuring the thickness of wavy thin liquid films (<6 mm) in vertical pipes. Initial benchtop experiments were performed, and different signal processing methods were implemented in order to identify the most suitable depending on the film thickness. For a film thickness >0.5 mm a time of flight method was utilized whereas for a film thicknesses <0.5 mm a frequency method and time domain method were utilized. These methods were validated using a theoretical volume measurement on a static system. The studied methods were then tested on downward and upward vertical flow experimental rigs with pipe diameters of 127 mm and 34.5 mm respectively. The results of the experiments using ultrasonic methods showed good agreement with the measurements obtained using a multi pin film sensor and a concentric conductance probe, highlighting the potential that ultrasound offers in thin film measurements.     

Central film thickness formula for shear thinning lubricants in EHL point contacts under pure rolling

Based upon an extensive set of full EHL point contact simulations, this paper offers a central film thickness formula pertaining to shear-thinning lubricants with Carreau-type behavior. In order to develop a more generic and accurate version of film thickness formula, a recent work is extended by carrying out the simulations for widely varying operating loads and piezo-viscous coefficients along with the more realistic Doolittle's free volume based pressure–viscosity model. This equation is found to conform very well with the published experimental data for EHL lubricants with widely varying rheological and piezo-viscous behaviors, i.e., polyalpha olefins and polydimethyl siloxane.     

Simultaneous monitoring of oil film thickness and temperature in fluid film bearings

This paper reports on the application of an eddy current sensor with an active compensation for changes in sensor temperature to simultaneous monitoring oil film thickness and temperature in a tilting pad thrust bearing. Sensor design, calibration procedure, sensitivity and accuracy are described. Test equipment along with sensor mounting is also presented. Tests were run at different rotational speeds and bearing loads as well as different supplied oil flow rates to evaluate sensor performance in various operating conditions. During the tests film thickness and temperature were simultaneously measured. Temperatures were compared with data from thermocouples installed in the pads and thermistors mounted in the collar. Tests have shown that the sensor can successfully be used to reliably monitor the conditions within the bearing.     

A method for quantifying electron staining,obtaining the dry specific gravity of specimens in sections,and measuring section thickness

Methods are described for the estimation of the dry specific gravities (SG) of specimens in thin sections, especially for the comparison of one group with another and for the quantification of electron stains. Variations in section thickness are overcome by using the naked supporting film as a base-line, and relating the SG of the specimen to that of the resin, which acts as a standard. Section thicknesses may also be estimated by using similar methods. The optical densities of their images are compared with those of standards; knowledge of the SG of the resin allows one to calculate its thickness.     

Oscillations induced in EHD film thickness by a step in entrainment speed

Transient elastohydrodynamic (EHD) lubrication conditions occur in the contacts of many machine elements, such as gears, cams, and reciprocating devices, as a result of their working cycles. These conditions also occur in rolling‐element bearings at the onset or cessation of motion. The aspect of film thickness in elastohydrodynamically lubricated contacts subjected to a very rapid change in entrainment speed has not received much attention from researchers, probably because it is seen as less problematic than a sudden fall of the entrainment speed, which theoretically can lead to film failure. For a sudden stop, however, it has been shown previously that the lubricant forms an entrapment, which is able to protect the contact in many cases when the motion resumes. In this paper, EHD film behaviour under sudden acceleration is investigated; the study covers three cases ‐ starting from zero film, starting from an entrapped film, and starting from a continuous, steady film.     

The wrapping phenomenon in air-dried and negatively stained preparations

We demonstrate that the interface energies involved in the direct preparation of supramolecular structures onto supporting films leads very frequently to a smooth wrapping of the supporting film around approximately one third to one half of the structure. We conclude that in such cases the structure is more rigid than the supporting film; examples being ribosomes, small viruses and small glass fragments. Other structures are less rigid and become significantly flattened. Complete flattening is frequently observed with empty virus capsids. The sandwich technique, by which a specimen is placed between two supporting films, in general leads to increased flattening. Only in few cases (e.g. ribosomes) are biological particles rigid enough to resist flattening and become wrapped from both sides.     

Transient elastohydrodynamic lubrication film thickness in sliding and rolling line contacts

The contact behavior between cam and follower is greatly influenced by the kinematics and dynamics of the whole valve train system. This is the reason that both shape and thickness of the fluid film in the contact gap are mainly determined by applied loads and relative contact speeds as well as the curvatures of contacting elements. Most of the studies about lubricant film behavior between cam and follower have been performed without a consideration of transient effects in the contact gap. For the computational difficulties of transient effects, most contact conditions such as relative contacting speeds have been regarded as quasi-steady state during the whole operating cycle. In this work, in order to obtain stable convergence, a multigrid multi-level method is used for the computation of load capacity in the lubricant film. Nonlinear valve spring dynamics are also considered in the same way as Hanachi’s. From the computational results, transient EHL film thicknesses under the conditions of different contact geometries are computed for a pushrod type valve train system during an engine cycle. Several results show the squeeze film effect, which is generally not found with conventional EHL computations of the cam and follower contact. The results are also compared with those by the Dowson-Hamrock (D-H) formula, which does not consider the dynamic film effect. Without the dynamic film effect as in D-H’s formula, the minimum film thickness is highly dependent on the entraining lubricant velocity, whereas the minimum film thickness including the squeeze film effect is dependent on the applied load.     

Tribological Enhancement of Aluminum by Porous Anodic Films Containing Solid Lubricants of MoS2 Precursors©

Porous anodic films containing molybdenum disulfide precursors were developed for self-lubricating purposes on aluminum by an initial anodizing and a subsequent re-anodizing process. The self-lubricating films were then examined with respect to the morphology, microstructure, and composition of the anodic film material and the lubricant, using X-ray diffraction, electron microscopy, energy dispersive X-ray analysis and X-ray photo-electron spectroscopy. The dry sliding wear of aluminum supporting such self-lubricating films was significantly reduced, as a result of greatly reduced coefficients of friction. The enhanced lubricity, due to the MoS₂ precursors contained within the porous anodic film, leads to wear mode changes from severe abrasive and adhesive wear for uncoated aluminum, to a mild film fatigue wear, for aluminum supporting the self-lubricating anodic films. The wear mechanism change is suggested by the wear and friction curves, as well as confirmed by wear track morphology.     

线支承扇形瓦推力轴承热动力润滑性能分析

建立了线支承扇形瓦推力轴承中油膜压力、油膜厚度、能量方程和粘温方程等的无量纲表达式，研究了各种刮瓦形式和支承线的倾斜度对推力轴承的油有膜厚度分布和温度分布的影响，研究表明，对于可倾瓦来说，各种刮瓦形式并不能有效降低润滑油的温升，不会明显改善推力轴承的润滑性能；推力轴承在经过长期运行后，推力瓦块支承线因受压缩将会向内倾斜，瓦块外半径处沿圆周方向上的油膜厚度显著减小，从而使润滑油温升大大提高，明显降低了推力轴承的润滑性能。     

The investigation of oil film thickness in heavily-loaded contact

An experimental study of the shape and thickness of the oil film during rolling in a thrust ball bearing has been carried out by the interference method.The experimental results showed good agreement with theory. Oil film thickness was affected mainly by the rolling velocity, viscosity of oil and maximum Hertzian stress. The groove radius had no effect on the film thickness. With increase of rolling velocity the film thickness increases and then reduces sharply owing to temperature rise and the non-Newtonian properties of the lubricant. A qualitative similarity was derived from the experimentally observed dimensionless shapes of the film and of the dimensionless theoretical shapes of the oil film for the lubricant in the non-Newtonian state. The flat “squashed” contact area diminished and disappeared with rise in velocity, which agreed with theoretical predictions.Good agreement was found between the theoretical and the experimental values of the oil film thickness and the friction coefficients for a ball sliding on a plane. Values of relaxation time for oil agree with values observed by the vibration method.The interference method is proposed to estimate the relation of the relaxation time for lubricants to the pressure and temperature up to maximum Hertzian pressures of 14,000 kg/cm². Experimental studies by the interference method and the solution of the non-isothermal hydrodynamic contact problem for liquids both in the Newtonian and non-Newtonian state provide a method of calculation of the friction coefficient.     

Simple equation for elastohydrodynamic film thickness under acceleration

A simple approximation of EHD film thickness under varying speed conditions is proposed. The equation is based on continuity of flow, by which the film formed at the contact inlet moves downstream within the contact with little subsequent change in its thickness even though the boundary velocities are changing. The approximation is supported by experimental results of non-steady state film thickness measurement using ultra-thin film interferometry. It is also shown by numerical simulation that the approximation holds for film thickness in the rigid piezoviscous regime under line contact so long as the squeeze film effect is insignificant.     

Film thickness and roughness of ZDDP antiwear films

The two experimental techniques, spacer layer interferometry imaging (SLIM) and atomic force microscopy (AFM), have been used to measure the thickness and roughness of zinc dialkyl dithiophosphate (ZDDP) reaction films formed in a rolling-sliding minitraction machine (MTM) tribometer. The AFM method has been complemented by a novel ZDDP film removal method based on ethylenediaminetetraacetic acid (EDTA) solution. It has been found that the two approaches measure very similar ZDDP film thickness values, lending credence to both methods. However the AFM approach measures much rougher ZDDP reaction films than MTM-SLIM and it is believed that SLIM underestimates the film roughness. Based on this, the use of MTM-SLIM is recommended for monitoring the evolution of antiwear film thickness during rubbing, while AFM should be employed for studying the morphology of antiwear films.     

Effect of wear on EHD film thickness in sliding contacts

A theoretical solution to the elastohydrodynamic (EHD) lubrication problem in sliding contacts, which takes into consideration the effect of the change in shape of the gap due to wear on the load‐carrying capacity, is presented. The model of such a contact is based on assumptions of Grubin and Ertel (von Mohrenstein). The resultant dimensionless Reynolds and film profile equations have been solved numerically for a number of cases with several values of thickness of the worn layer. Iteration of the EHD film thickness is performed by means of the secant method. Values of the calculated dimensionless film thickness are presented as a function of dimensionless wear. The conclusions concern the influence of the linear wear on the film thickness in heavily loaded sliding contacts. Copyright © 2006 John Wiley & Sons, Ltd.     

Transient increase of film thickness in micro-textured EHL contacts

In this paper, the transient lubrication phenomena induced by isolated circular micro-cavities passing through an EHL point contact are analysed. A 52 100 steel ball was micro-machined using a femtosecond pulse laser, and is tested with an EHL tribometer. The experiments are simulated numerically with a 2D-multigrid solver. Under rolling–sliding conditions, the film thickness distribution is modified, and two opposite effects are observed. Deep micro-cavities induce an oil film decrease. On the contrary, a shallow micro-cavity locally generates a large increase in the film thickness. When the ball surface is the slowest, the propagation velocity of the local oil film reinforcement increases.     

Experimental studies on the effects of reduction in gear tooth stiffness and lubricant film thickness in a spur geared system

Gears are one of the most common mechanisms for transmitting power and motion and their usage can be found in numerous applications. Studies on gear teeth contacts have been considered as one of the most complicated applications in tribology. Depending on the application, the speed and load conditions of teeth may change triggering several types of failures on teeth surface such as wear, scuffing, micro-pitting and pitting. The above-mentioned faults influence changes in vibration and acoustic signals, due to changes in operating conditions such as increase in temperature and decrease in lubricant film thickness and specific film thickness. These abnormal changes result in cumulative effects on localised or distributed faults on load bearing surfaces of gears. Such damages cause reduction in tooth stiffness and severity of damage can be assessed by evaluating the same using vibration-based signals.This paper presents the results of experimental investigations carried out to assess wear in spur gears of back-to-back gearbox under accelerated test conditions. The studies considered the estimation of operating conditions such as film thickness and their effects on the fault growth on teeth surface. Modal testing experiments have been carried out on the same gear starting from healthy to worn out conditions to quantify wear damage. The results provide a good understanding of dependent roles of gearbox operating conditions and vibration parameters as measures for effective assessment of wear in spur gears.     

A unified shear-thinning treatment of both film thickness and traction in EHD

A conclusive demonstration has been provided that the nature of the shear-thinning, that affects both film thickness and traction in EHL contacts, follows the ordinary power-law rule that has been described by many empirical models of which Carreau is but one example. This was accomplished by accurate measurements in viscometers of the shear response of a PAO that possesses a very low critical stress for shear-thinning and accurate measurements in-contact of film thickness and traction under conditions which accentuate the shear-thinning effect. The in-contact central film thickness and traction were entirely predictable from the rheological properties obtained from viscometers using simple calculations. These data should be invaluable to researchers endeavoring to accurately simulate Hertz zone behavior since the shear-thinning rheology is extensively characterized and accurate in-contact data are available to test. In addition, a new model has been introduced that may be useful for the rheological characterization of mixtures.     

单色光干涉面接触润滑膜厚在线测量

提出了滑块-玻璃盘形成的面接触润滑油膜厚度光干涉在线测量方法。以单色激光为光源,根据油膜厚度变化引起平行干涉条纹平移的物理特征,基于光流和动态时间规整技术构造复合算法,测量干涉图像相邻帧空间域上一维光强曲线的位移,从而得到相邻帧之间的油膜厚度差。从零速度开始记录每一帧干涉图像对应的膜厚变化,实时计算出当前帧对应的膜厚,实现了膜厚的在线测量。当前算法的测量结果与离线膜厚测量结果进行了对比,验证了该系统的测量准确性。进行了阶跃载荷、匀加速及匀减速工况下的膜厚测量,揭示了膜厚变化规律。