飞秒激光烧蚀材料表面产生纳米波纹结构的实验

利用飞秒脉冲激光烧蚀可以获得远小于激光中心波长（775nm）量级的周期条纹．通过多脉冲飞秒激光烧蚀Ni、Al、Cu、Ti和Si等材料表面的实验,得到材料表面产生光栅的周期均小于飞秒激光中心波长;采用对比实验,改变入射光的偏振特性,发现波纹周期方向随入射光偏振方向的改变而改变;不改变激光偏振态、脉冲能量为4．2J／cm^2时,沿波纹周期走向,发现平台移动速度为0．1mm／s时,可获得清晰的551nm的金属周期结构;最后应用上述实验结果,在铜片表面制备了长为几十微米、周期为551nm的微纳光栅结构。     

基于狭缝整形的低损耗飞秒光纤光栅制备

为了解决飞秒激光逐点法制备的光纤布拉格光栅（Fiber Bragg Gratings, FBG）损耗较高的问题,利用逐面法完成飞秒光纤光栅制备的实验研究。运用高斯光束传播的基本理论,通过狭缝整形技术对聚焦的飞秒激光能量分布进行等高宽整形,突破在光纤横截面内诱导产生圆形折射率调制的难点,最终制备得到低损耗的飞秒光纤光栅。开展不同狭缝宽度制备FBG的光谱特性对比实验,结果表明：利用光斑直径为5.0 mm的飞秒激光光束刻写FBG时,采用宽度为1.7 mm的狭缝制备得到的FBG插入损耗降低至0.15 dB,短波损耗降低至0.5 dB,验证了基于狭缝整形的低损耗飞秒光纤光栅制备方法的有效性。针对狭缝法制备的FBG反射率分散问题,提出控制折射率匹配液填充量以及调整飞秒激光能量的方法,并优化光束聚焦流程,成功降低FBG反射率的分散度。本研究对推动飞秒光纤光栅在大容量、高链路损耗等环境中的实际应用具有重要意义。     

纳焦飞秒激光在有机材料表面刻划微结构光栅的研究

使用振荡器产生的飞秒激光在透明有机材料PMMA表面进行了刻划微结构光栅的研究．通过理论分析得到了飞秒激光参数和平台移动速度对线宽的影响，进行了系统的加工实验，加工结果与理论分析基本吻合．在透明有机材料PMMA表面进行了多种光栅的刻划，并对刻划的光栅进行了衍射和色散测试，调整光栅的尺寸和排列方式，得到了形状各异的衍射图案。     

飞秒激光空间选择性诱导玻璃微结构及应用

利用飞秒激光与玻璃的非线性相互作用，可以对玻璃进行空间选择性微观改性与修饰，赋予新的光功能．本文介绍飞秒激光的持点及其对玻璃微结构的改性，以及近年来利用飞秒激光进行玻璃的缺陷控制、光活性离子(稀土、过渡和重金属离子)价态操作、微晶析出与折射率调控及其在光开关、波分复用、波导型有源器件、光子晶体等微光学器件的制备及光学集成领域应用的进展．     

基于激光诱导表面周期结构的微纳防伪结构色

激光诱导表面周期结构由于其周期相关的光栅衍射特性在明场下显示出鲜艳的结构色,备受研究人员的广泛关注,而微纳结构在显微镜暗场显示的颜色通常容易被忽略.本文报道通过飞秒激光对氧化铟锡薄膜加工形成双周期光栅结构,利用其在明场和暗场的观察下具有不同的颜色特性实现图像加密应用.通过控制飞秒激光的偏振、脉冲能量和扫描速度在氧化铟锡...     

基于差频产生的中红外飞秒激光技术研究

针对国内中红外激光光源光谱范围小、脉冲宽度宽等问题,开展了基于差频（DFG）产生的中红外飞秒激光技术研究。差频产生的中红外飞秒激光具有光谱范围宽、脉宽窄等优势。研究了差频技术中选用不同的非线性晶体对产生的中红外激光的影响,在此基础上搭建了一套基于差频技术的、利用PPLN晶体产生的中红外激光的产生系统,利用光栅对压缩脉宽,实现飞秒激光输出。最终获得了波长范围在2.9～4.7μm的中红外飞秒激光,在中心波长3.2μm处获得了最高10.46 mW的输出光平均功率。研究结果为中红外激光光谱测量技术在大气监测、燃烧场组分探测等的应用提供了参考。     

FBG光纤的飞秒激光刻蚀特性及传感应用

在布拉格光栅（FBG）光纤的包层中制作微槽,结合敏感材料提高了FBG光纤传感器的灵敏度,拓宽了其传感应用领域。利用飞秒（fs）激光对I型布拉格光栅光纤进行刻蚀,通过调节激光功率和辐照时间,分析光纤折射率变化以及光纤表面和内部结构的刻蚀特性,并探讨fs激光对光纤光栅微沟槽形貌和反射光谱的影响。实验结果表明,微槽表面由于碎屑的凝固而产生许多柱状结构,且随着激光能量的增加,柱状结构不断长大,槽深和形状服从高斯能量分布;随着激光功率和辐照时间的增加,反射率谱永久红移,带宽增加。利用微结构光纤增敏性能,有效提高微结构光纤光栅磁场探头和氢气探头的传感性能。     

半导体可饱和吸收镜的光损伤阈值测量

半导体可饱和吸收镜(SESAM)在飞秒脉冲激光器锁模中，是一种非常有潜力的锁模启动器．其损伤闽值的高低与连续锁模阈值比较相近，极易损伤，因而研究在飞秒激光作用下SESAM的损伤阈值很有必要．利用飞秒激光分别对单晶硅、自然生长SESAM及腐蚀后SESAM在50fs、200fs和400fs脉宽下进行了表面烧蚀研究，并且保证每次烧蚀的激光脉；中个数为50个．结果发现单晶硅和自然生长SESAM的损伤阈值要高于腐蚀乓SESAM，随脉宽的增加而逐渐增大；而腐蚀后SESAM的损伤阈值却随脉宽的增加而逐渐减小．     

倾斜切趾光纤光栅的理论与实验研究

针对飞秒激光刻写均匀光纤布拉格光栅的反射主峰存在较高旁瓣,容易对主峰形成串扰的问题,开展基于倾斜切趾光纤光栅的理论与实验研究。根据飞秒激光诱导产生的折射率特点,修正耦合模模型中的交流耦合系数,并利用有限元仿真的形式,验证了倾斜切趾法的切趾类型为高斯型。之后对影响切趾效果的关键参数进行实验研究,结果表明：实验结果与仿真计算基本一致;初始横向位移为5~10 μm,且不对称偏移量小于±2 μm时,边模抑制比可提高到15 dB。研究成果为提高光纤光栅边模抑制比提供了重要理论支撑与实践指导,对于推动光纤光栅制备工艺技术发展具有重要意义。     

高频超短脉冲激光诱导玻璃内LiNbO3晶体生长

使用聚焦的800nm，120fs，200kHz的高频超短脉冲激光在Li20-Nb20s-SiO2系玻璃内部空间选择性析出了LiNbO3晶体．经一定条件的飞秒激光照射数秒钟后，玻璃内部激光会聚点的发光由原来的白色转变为强的蓝绿色．发光光谱测定表明，所产生韵蓝绿光为飞秒激光的倍频光．显微拉曼光谱测定表明，飞秒激光会聚处析出了LiNbO3晶体。     

Application of femtosecond-laser induced nanostructures in optical memory

The femtosecond laser induced micro- and nanostructures for the application to the three-dimensional optical data storage are investigated. We have observed the increase of refractive index due to local densification and atomic defect generation, and demonstrated the real time observation of photothermal effect after the femtosecond laser irradiation inside a glass by the transient lens (TrL) method. The TrL signal showed a damped oscillation with about an 800 ps period. The essential feature of the oscillation can be reproduced by the pressure wave creation and propagation to the outward direction from the irradiated region. The simulation based on elastodynamics has shown that a large thermoelastic stress is relaxed by the generation of the pressure wave. In the case of soda-lime glass, the velocity of the pressure wave is almost same as the longitudinal sound velocity at room temperature (5.8 microm/ns). We have also observed the localized photo-reduction of Sm3+ to Sm2+ inside a transparent and colorless Sm(3+)-doped borate glass. Photoluminescence spectra showed that some the Sm3+ ions in the focal spot within the glass sample were reduced to Sm2+ ions after femtosecond laser irradiation. A photo-reduction bit of 200 nm in three-dimensions can be recorded with a femtosecond laser and readout clearly by detecting the fluorescence excited by Ar+ laser (lambda = 488 nm). A photo-reduction bit can be also erased by photo-oxidation with a cw Ar+ laser (lambda = 514.5 nm). Since photo-reduction bits can be spaced 150 nm apart in a layer within glass, a memory capacity of as high as 1 Tbit can be achieved in a glass piece with dimensions of 10 mm x 10 mm x 1 mm. We have also demonstrated the first observation of the polarization-dependent periodic nanostructure formation by the interference between femtosecond laser light and electron acoustic waves. The observed nanostructures are the smallest embedded structures ever created by light. The period of self-organized nanostructures can be controlled from approximately 140 to 320 nm by the pulse energy and the number of irradiated pulses. Furthermore, we have also observed the self-assembled sub-wavelength periodic structures created in silica glass by femtosecond pulses on the plane of the propagation of light.     

Silicon precipitation via photoinduced reaction using femtosecond laser

Silicon precipitation inside a glass is an important technique for silicon photonics. We successfully precipitated silicon inside silicate glasses containing an Al metal film using femtosecond laser irradiation. First, the Al-inserted sandwiched glass was fabricated by the direct bonding method. The results of a tensile test indicated that the adhesive strength of the sandwich structure reached approximately 4 MPa. Next, femtosecond laser pulses were focused at the Al/glass interface in the sandwich structure. A transmission electron microscopy photograph at the focus of the laser showed that the Al particles were dispersed into the glass substrate to a depth of approximately 2 microm from the initial Al layer. In addition, Raman spectra indicated that silicon had formed at the interface between the glass and Al film after the laser irradiation. The morphology or the particle size of the precipitated silicon was successfully modified by changing the repetition rate or the pulse energy of the laser.     

飞秒激光诱导玻璃内Ba2TiSi2O8晶体的析出

使用聚焦后的800nm,150fs,250kHz的高重复频率飞秒脉冲激光器能够在BaO-TiO₂-SiO₂组分的玻璃内部三维选择性地诱导Ba₂TiSi₂O₈晶体的析出. 发光光谱显示这种晶体把入射的800nm光转化成了400nm的蓝光,因此这种析出的晶体具有非线性倍频特性. 通过拉曼光谱测定,在当前的玻璃组分中析出的晶体是Ba₂TiSi₂O₈. 研究表明,经250kHz的飞秒激光辐照一段时间后,在玻璃内部由于脉冲能量的连续沉积会使得激光辐照区域出现热积累效应,因此,该辐照区域的温度会不断升高以致超过玻璃析晶温度,最终诱导玻璃熔融析晶. 此外,对飞秒激光辐照区域不同部位进行拉曼光谱检测,结果表明：在整个区域Ba₂TiSi₂O₈晶体的析出呈现中间比外围明显的分布特点,因此晶体析出与辐照形成的温度梯度场有密切关系.     

Fabrication of spiral-shaped microfluidic channels in glass by femtosecond laser

Long spiral-shaped microfluidic channels in glass have been fabricated by femtosecond laser direct writing. After hydrofluoric acid etching and post baking, the laser modified regions in glass formed hollow microstructures. The diameter size and the screw-pitch of the channels can be set freely. The experimental results showed that the etched internal surface of the microchannel by hydrofluoric acid will become smoother after the subsequent baking. The incident laser power and scanning speed can also influence the channel quality.     

Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed.     

Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching

We present a study of the sidewall surface quality inside microchannels fabricated in fused silica glass by femtosecond laser pulses and chemical etching. Multiple combinations of laser exposure and etching solution parameters were examined. Results of scanning electron microscopy, atomic force microscopy, and optical reflection analyses of the surfaces are presented. The results obtained demonstrate the feasibility of optical quality surface fabrication, which in turn demonstrates the feasibility of fabricating complex integrated devices containing microfluidic channels and optical waveguides in the glass substrates.     

A second-order autocorrelator for single-shot measurement of femtosecond laser pulse durations

A second-order autocorrelator for single-shot measurement of ultrashort laser pulse durations has been set up. It is based on recording the spatial profile of non-collinear phase-matched second harmonic generation in a KDP crystal using a CCD camera-framegrabber combination. Performance of the system is described from measurement of 250 femtosecond transform-limited laser pulses from a passively mode-locked, diode pumped Nd:glass laser. It can also be used for measurement of picosecond laser pulses in the multi-shot scanning mode.     

Formation of void array inside transparent and absorptive glasses by femtosecond laser irradiation

We demonstrate self-fabrication of void arrays in a fused silica transparent in the visible and a color-filter borosilicate glass strongly absorptive at 800 nm using tightly focused Ti-sapphire femtosecond laser pulses at 1 kHz without scanning. The period, the size, the number of voids, and the length of the aligned void structure were controlled by changing the laser pulse energy, and the position of the focal point inside two materials. The void arrays were observed by an optical microscope and also estimated by an optical diffraction experiment. The void size and period were smaller in the absorptive glass than in the transparent glass. The submicrometer-sized void was observed by a scanning electron microscope. The smaller and clearer void arrays were formed in the color filter than the fused silica glass. With increasing the laser focal depth, the void-array length increased in the fused silica and decreased in the color filter.     

Periodic nanovoid structures via femtosecond laser irradiation

We have observed periodically aligned nanovoid structures inside a conventional borosilicate glass induced by a single femtosecond (fs) laser beam for the first time, to our knowledge. The spherical voids of nanosized diameter were aligned spontaneously with a period along the propagation direction of the laser beam. The period, the number of voids, and the whole length of the aligned void structure were controlled by changing the laser power, the pulse number, and the position of the focal point.