A high flow rate thermal bubble-driven micropump with induction heating

A thermal bubble-driven micropump with magnetic induction heating is successfully demonstrated in this paper. Energy is transferred from the planar coil outside the microchamber to the metal heating plate inside the microchamber through the electromagnetic field, and Joule heat is induced by the eddy current in the heating plate. Sequential photographs of bubble nucleation, growth and shrink in open environment were recorded by a CCD camera. One advantage of the micropump is that there is no physical contact between the heating plate and the external power supply circuit, which resulted in an easy fabrication process. What’s more, compared with other thermal bubble-driven micropump with resistive microheater, the flow rate and the pump stroke have been improved significantly due to its larger dimension of the heating plate and larger bubbles volume. The experiments show that the maximum flow rate of this micropump is about 102.05 μL/min, which can expand the potential applications, especially for microfluidic system that requires higher flow rate.     

Using bulk micromachined structures to enhance pool boiling heat transfer

This paper presents the important results of enhancing the boiling heat transfer of the pressurized water reactors (PWRs) by using LIGA or LIGA-like techniques to add microstructures on the surface of heater elements. The heater elements were made of 10 mm × 80 mm silicon strips with different in-line square micro-pin-fin configurations of 200 μm fin width, 35 μm fin height, and different inter-fin spacing values of 200, 400, 600, 800, 1000 μm and infinity. The experiments were conducted in de-ionized water at the atmospheric pressure. The input power, heater temperature, steam generation rate and video images of boiling phenomena were continuously recorded. Their relationships was studied and used to evaluate the total boiling heat transfer performance. The optimized microstructures can then be mass-fabricated on PWR tubes by using LIGA or LIGA-like technology. The experimental results suggest that by adding micro-sized in-line pin-fin arrays on heater surface and modifying heater surface morphology, the boiling process can be greatly enhanced through the improvements of vapor nucleation and vapor evolution processes at heater surface, which yields a low wall superheat and achieves a higher boiling heat transfer efficiency. The video images showed that the bubble nucleation sites are located immediately on top of each micro-pin fins. At current experimental setup, the 200 μm-spacing heater has the highest steam generation efficiency.     

High throughput micro droplet generator array controlled by two-dimensional dynamic virtual walls

A chamber-free two-dimensional-array micro droplet generator has been realized by precise time-delayed control of micro bubble arrays as virtual chamber walls. Droplets can be ejected out by the bubbles around the ejection site in specific configuration of excitation, thus replacing physical chamber walls for pressure preservation. The micro droplet generator array was fabricated by heater lithography and direct nozzle formation on a laminated SU-8 dry film without any solid chamber wall among heaters. The nozzle density of this compact droplet generator can be five to ten times higher than that of commercial inkjet printheads in one-dimensional formats. The volume and initial speed of the generated droplets was 3.6–5.7 pL and 14–15 m/s, respectively, meeting the standard of commercial printheads. The micro droplet generator is free of satellite droplets due to the precise meniscus control. The analyzed data shows the meniscus undergoes a “push–pull–push” progress which effectively cuts the liquid column short. The refilling time of the innovative micro droplet generator was estimated to be 0.296 μs from the simplified chamber model, and it was one-tenth of the commercial printheads. In addition, the frequency response was estimated to be higher than 20 kHz by observing the meniscus fluctuation condition. Finally, a 3 × 5 heater array was used to generate two droplets simultaneously, which shows that the crosstalk problem can be eliminated by precise time-delayed control. An interlacing operation was also proposed to address the large array control algorithm. To summarize, a 330-dpi monolithic micro droplet generator prototype has been proposed for high speed and large 2D format printing.     

Research on a large power thermal bubble micro-ejector with induction heating

The present study investigates a large power thermal bubble micro-ejector with induction heating device. The traditional thermal-bubble ejectors adopted resistors as the heating resources, it can only work with lower power and convey liquid with lower flow rate. Induction heating devices are adopted to replace the resistor for heating liquid in this paper. With this heating method, there is no physical contact between the heating core and the external power supply circuit. The liquid in the chamber of micro-ejector is heated by the induction heating device and changes from liquid phase to gas phase, generating vapor bubbles in the micro chamber of the micro ejector. The bubble expands rapidly and ejects droplets through the nozzle. The prototype of the micro-ejector is fabricated and experiments are carried out. Continuous droplets are ejected out from the nozzle as the applied AC current is 0.6–0.65 A with the power frequency of 100 kHz. The total volume of the continuous droplets is ranging from 18.84 to 49.87 nL, and the corresponding flow rate is about 0.52–1.36 μL/min. Furthermore, this new micro-ejector can be adopted in conveying of micro-scale liquid, the injection of trace drugs and the 3D printing.     

Electro-thermal analysis of an embedded boron diffused microheater for thruster applications

One of the important design criteria of micropropulsion systems in particular VLM is the type of microheater, its layout and placement with a view to achieve uniform heating of propellant, fast heat transfer efficiency with minimum input power. Thrust produced by microthruster not only depends on the structural geometry of the thruster and propellant flow rate, but also on the chamber temperature to produce super saturated dry stream at the exit nozzle. Detailed design of microheater in thermal and electrical domains using co-solvers available in MEMS software tools along with material’s thermal property, temperature dependence of electrical resistivity and thermal conductivity have been considered in the present work to achieve precise modeling and experimental accuracy of heater operation. The chamber temperature was analytically calculated and subsequently the required resistance and power were estimated. The boron diffused microheaters of meanderline configuration in silicon substrate has been designed and its finite element based electro-thermal modeling was employed to predict the heater characteristics. The variation of microheater temperature with time, applied voltage and along chamber length has been determined from the modeling. Subsequently the designed microheater was realized on silicon wafer by lithography and boron diffusion process and its detailed testing was evaluated. It was found that boron diffused resistor of 820 Ω can generate 405 K temperature with applied input power 2.4 W. Finally the simulated results were validated by experimental data.     

Seed bubbles trigger boiling heat transfer in silicon microchannels

The smooth channel surface of microsystems delays boiling incipience in heated microchannels. In this paper, we use seed bubbles to trigger boiling heat transfer and control thermal non-equilibrium of liquid and vapor phases in parallel microchannels. The test section consisted of a top glass cover and a silicon substrate. Microheater array was integrated at the top glass cover surface and driven by a pulse voltage signal to generate seed bubbles in time sequence. Each microheater corresponds to a specific microchannel and is located in the microchannel upstream. Five triangular microchannels with a hydraulic diameter of 100 μm and a length of 12.0 mm were etched in the silicon substrate. A thin platinum film was deposited at the back surface of silicon chip with an effective heating area of 4,500 × 1,366 μm, acting as the main heater for the heat transfer system. Acetone liquid was used. With the data range reported here, boiling incipience was not initiated if wall superheats are smaller than 15°C without seed bubbles assisted. Injection seed bubbles triggers boiling incipience and controls thermal non-equilibrium between liquid and vapor phases successfully. Four modes of flow and heat transfer are identified. Modes 1, 2, and 4 are the stable ones without apparent oscillations of pressure drops and heating surface temperatures, and mode 3 displays flow instabilities with apparent amplitudes and long periods of these parameters. The four modes are divided based on the four types of flow patterns observed in microchannels. Seed bubble frequency is a key factor to influence the heat transfer. The higher the seed bubble frequency, the more decreased non-equilibrium between two phases and heating surface temperatures are. The seed bubble frequency can reach a saturation value, at which heat transfer enhancement attains the maximum degree, inferring that a complete thermal equilibrium of two phases is approached. The saturation frequency is about a couple of thousand Hertz in this study.     

Low power highly sensitive platform for gas sensing application

This paper reports a low power miniaturized MEMS based integrated gas sensor with 36.84 % sensitivity (ΔR/R₀) for as low as 4 ppm (NH₃) gas concentration. Micro-heater based gas sensor device presented here consumes very low power (360 °C at 98 mW/mm²) with platinum (Pt) micro-heater. Low powered micro-heater is an essential component of the metal oxide based gas sensors which are portable and battery operated. These micro-heaters usually cover less than 5 % of the gas sensor chip area but they need to be thermally isolated from substrate, to reduce thermal losses. This paper elaborates on design aspects of micro fabricated low power gas sensor which includes ‘membrane design’ below the microheater; the ‘cavity-to-active area ratio’; effect of silicon thickness below the silicon dioxide membrane; etc. using FEM simulations and experimentation. The key issues pertaining to process modules like fragile wafer handling after bulk micro-machining; lift-off of platinum and sensing films for the realization of heater, inter-digitated-electrodes (IDE) and sensing film are dealt with in detail. Low power platinum microheater achieving 700 °C at 267 mW/mm² are fabricated. Temperature calculations are based on experimentally calculated thermal coefficient of resistance (TCR) and IR imaging. Temperature uniformity and localized heating is verified with infrared imaging. Reliability tests of the heater device show their ruggedness and repeatability. Stable heater temperature with standard deviation (σ) of 0.015 obtained during continuous powering for an hour. Cyclic ON–OFF test on the device indicate the ruggedness of the micro-heater. High sensitivity of the device for was observed for ammonia (NH₃), resulting in 40 % response for ~4 ppm gas concentration at 230 °C operating temperature.     

High-performance MEMS-based gas chromatography column with integrated micro heater

A high-performance MEMS-based gas chromatography (GC) device is proposed comprising a miniature serpentine column with dimensions of 3.2 m × 200 μm × 250 μm (length × width × depth) and with an integrated Pt micro heater. The column is fabricated on a Si die measuring 3.5 × 1.8 mm² using a wet etching process and is bonded to a Pyrex cover plate incorporating the Pt micro heater via a thermal fusion process. The experimental results reveal that an applied voltage of 9.7 V is sufficient to maintain a constant temperature of 85°C for elution purposes. In addition, it is shown that the proposed device successfully detects the concentrations of both pure and mixed samples of four volatile organic compound gases, namely acetone, toluene, methanol, and benzene. Finally, the theoretical plate number obtained by the proposed MEMS-based GC device is shown to be 2–3 times higher than that obtained from a conventional capillary-based GC system under the same injection conditions.     

Heat and Fluid Flow in an Optical Switch Bubble

The Agilent all-optical bubble switch uses bubbles in an organic fluid index matched to a silica planar lightwave circuit. The bubble is created and sustained by heaters that are deposited on an attached silicon substrate. Testing of the bubble shows how heater power and ambient pressure affect bubble shape, size, and optical reflection characteristics. Heat and fluid flow in the bubble were modeled in 2D and 3D using the homogeneous bubble model in the Flow3D modeling software. Fluid condensing on the trench wall causes a dimple on the bubble and hence nonoptimum optical reflection. To aid understanding, the bubble, silica walls, and heaters were also modeled as a thermal resistance network. Because the pressure drop across the bubble wall is fixed, the bubble size is determined by P_res/DeltaT_t , where P_res is the heater power and DeltaT_t is the temperature difference between the bubble and the substrate. Heating the trench walls beyond the bubble temperature with heaters located underneath the trench wall will dry out the trench wall and give a stable optical reflection. As DeltaT_t approaches zero, a bubble is sustained without any heater power and with zero fluid flow. This "static" bubble provides for a very stable optical reflection     

Numerical study of seed bubble-triggered evaporation heat transfer in a single microtube

High boiling incipience temperature and flow instabilities in silicon-based microchannels with smooth surface are challenging issues. This work numerically investigates the seed bubble-triggered evaporation heat transfer in a microtube, with a length of 5.0 mm and diameter of 106 μm. Acetone was the working fluid. Seed bubbles were assumed to be generated periodically at the microtube upstream. The fixed grid allocation technique was proposed to successfully perform the parallel computation via a set of computer core solvers. It is found that the seed bubble-guided heat transfer consists of a start-up stage and a steady operation stage. The start-up time equals to the residence time of the first seed bubble growing and traveling in the microtube. The seed bubble frequency is a key parameter to influence the performance. Low-frequency seed bubbles cause alternative flow patterns of liquid flow and elongated bubble flow, corresponding to the apparent spatial-time oscillations of wall and bulk fluid superheats. High-frequency seed bubbles result in quasi-stable elongated bubble flow, corresponding to quasi-uniform and stable wall and fluid superheats. There is a saturation seed bubble frequency beyond which no further performance improvement can be made. There are residual fluid superheats specifying the required minimum superheats to sustain the evaporation heat transfer between the two phases. Elongated bubbles with thin liquid films are responsible for the heat transfer enhancement. Contrary to wall temperatures, the transient local Nusselt numbers are slightly changed due to the fact that heat transfer is more closely related to the dynamic elongated bubble flow evolution within millisecond timescale in the microchannel. The heat transfer coefficients can be 2.0 to 3.5 times of that for the superheated liquid flow before seed bubble injections.     

Thermocapillary actuation of droplet in a planar microchannel

A study on thermocapillary actuation of liquid droplet in a planar microchannel has been carried out by both theoretical modeling and experimental characterization. The driving temperature gradients are provided by four heaters at the channel boundaries. In the modeling, the temperature distributions corresponding to transient actuation are calculated, and are coupled to the droplet through the surface tensions which drive the droplet to move inside the channel. The droplet trajectories and final positions are predicted, and are compared with the experimental observations, in which a silicon oil droplet was actuated inside a 10 mm  ×  10 mm planar channel with four heater fabricated on the substrate plate. The results show that the droplet can be positioned anywhere in the channel, determined by a heating code related to the heating strengths. Qualitative agreement between the modeling results and experimental data, in terms of temperature distributions, droplet trajectories and positions, has been obtained.     

Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples

This work reports the development and the characterization of a microthermoelectric generator (μTEG) based on planar technology using electrochemically deposited constantan and copper thermocouples on a micro machined silicon substrate with a SiO₂/Si₃N₄/SiO₂ thermally insulating membrane to create a thermal gradient. The μTEG has been designed and optimized by finite element simulation in order to exploit the different thermal conductivity of silicon and membrane in order to obtain the maximum temperature difference on the planar surface between the hot and cold junctions of the thermocouples. The temperature difference was dependent on the nitrogen (N₂) flow velocity applied to the upper part of the device. The fabricated thermoelectric generator presented maximum output voltage and power of 118 mV/cm² and of 1.1 μW/cm², respectively, for a device with 180 thermocouples, 3 kΩ of internal resistance, and under a N₂ flow velocity of 6 m/s. The maximum efficiency (performance) was 2 × 10^?3 μW/cm² K².     

Micro solar energy harvesting using thin film selective absorber coating and thermoelectric generators

The use of a nanometer-scale solar selective absorber coating to enhance the performance of a thermoelectric generation (TEG) module in solar thermal energy harvesting is presented. The thin film coating is fabricated by electrochemical deposition of a bimetallic layer of tin and nickel on copper substrate. The coating has a dendrite structure with grain size of 100 nm. Testing indicates the ability of these collectors to transform incident radiation into thermal energy. The collectors utilizing the selective coating achieved a final temperature 10 °C higher than the baseline copper device. More importantly, the coating demonstrates the ability to collect and transmit over 90 % of the available heat flux. The harvested thermal energy is applied to drive a TEG module for useful power generation. The device utilized with selective absorber coating shows an output power 4.5 times more than the baseline device. Overall area of the collector plate is 16 cm².     

Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method

The chamber is an important part of the inkjet printhead. However, the present fabrication methods of chamber suffer from a low alignment resolution between nozzle plates and piezoelectric structure and residual SU-8 removing problems during chamber fabricating process. In this paper, a SU-8 chamber was fabricated by using ultraviolet (UV) photolithography and SU-8 thermal bonding method. By this method, the infilling problem of the chamber during thermal bonding process was solved, and low alignment resolution problem of conventional UV exposure system during assembly process was avoided. The thickness of the SU-8 nozzle plate was optimized, and the influence of bonding parameters on the deformation of chamber was analyzed. The simulation results show that the optimal thickness of the SU-8 nozzle plate is 40 μm and the optimal bonding parameters are bonding temperature of 50 °C, bonding pressure of 160 kPa and bonding time of 6 min. The tensile test results show the bonding strength of the SU-8 chamber is 2.1 MPa by using the optimized bonding parameter.     

Effects of heated seat and foot heater on thermal comfort and heater energy consumption in vehicle

Subjective experiments involving 12 different conditions were conducted to investigate the effects of heated seats and foot heaters in vehicles on thermal sensation and thermal comfort. The experimental conditions involved various combinations of the operative temperature in the test room (10 or 20°C), a heated seat (on/off) and a foot heater (room operative temperature +10 or +20°C). The heated seat and foot heater improved the occupant's thermal sensation and comfort in cool environments. The room operative temperature at which the occupants felt a ‘neutral’ overall thermal sensation was decreased by about 3°C by using the heated seat or foot heater and by about 6°C when both devices were used. Moreover, the effects of these devices on vehicle heater energy consumption were investigated using simulations. As a result, it was revealed that heated seats and foot heaters can reduce the total heater energy consumption of vehicles.

Statement of Relevance: Subjective experiments were conducted to investigate the effects of heated seats and foot heaters in vehicles on thermal comfort. The heated seat and foot heater improved the occupant's thermal sensation and comfort in cool environments. These devices can reduce the total heater energy consumption in vehicles.     

Sensitivity improvement using optimized heater design for dual axis thermal accelerometers

This paper investigates the sensitivity improvement of an air filled cavity based thermal accelerometer. The accelerometer does not contain any solid proof mass and it is realizable in CMOS technology. The sensitivity has been improved by a new square ring shaped heater structure. The sensitivity of accelerometer performance is compared with other different heater shapes. It is found that, heater design having higher heat dissipation in the suspended beam gives higher sensitivity. The simulation is carried out using commercial FEM simulator COMSOL Multiphysics. For the peak heater temperature of 609 K, the proposed square ring shaped heater provides a sensitivity of 0.335 K/g. Under same conditions, sensitivity of an accelerometer with a meander shaped heater structure is only 0.098 K/g and diamond shaped structure is 0.229 K/g.     

Effect of operating conditions and liquid physical properties on the size of monodisperse microbubbles produced in a capillary embedded T-junction device

The aim of this study was to investigate the effect of operating parameters such as liquid flow rate, gas inlet pressure, and capillary diameter as well as the influence of the physical properties of the liquid, in particular viscosity, on the generation of monodisperse microbubbles in a circular cross section T-junction device. Aqueous glycerol solutions with viscosities ranging from 1- to 100 mPa s were used in the experiments. The bubble diameter generated was studied for systematically varied combinations of gas inlet pressure, liquid flow rate, and liquid viscosity with a fixed capillary inner diameter of 150 μm for the liquid and gas inlet channels as well as the outlet channel. In addition, the effect of channel geometry on bubble size was studied using capillaries with inner diameters of first 100 and then 200 μm. In all the experiments the distance between the coaxial capillaries at the junction was set to be 200 μm. All the microbubbles produced in this study were highly monodisperse (polydispersity index <1 %) and it was found, as expected, that bubble formation and size were influenced by the ratio of liquid to gas flow rate, capillary size, and liquid viscosity. The experimental data were then compared with empirical scaling laws derived for rectangular cross-section junctions. In contrast with these previous studies, which have found bubble size to be dependent on either the flow rate ratio (the squeezing regime) or capillary number (the dripping regime), in this experimental study bubble size was found to depend on both capillary number and flow ratio.     

Efficient transfer and concentration of energy between explosive dual bubbles via time-delayed interactions

The dynamics of a high heat flux thermal bubble is constrained by the thermal energy carried on the bubble surface right after the bubble formation because of thermal isolation of vapor. This article proposes a way by assigning time delays between dual bubbles to transfer effectively energy from one bubble into the other, thus, breaks energy limitation that one single bubble can usually carry. Experiment result has demonstrated that the useful work as large as 40% can be transferred from one bubble into the other for the ignition time delay set between 2 and 3 μs in a dual bubble system. At the same time, the total extractable useful work in a dual bubble system is 20% higher than twice that of a single-bubble system with the same input heat energy. This phenomenon opens up a new way to transfer or concentrate energies from distributed energy sources with limit energy density into a much higher one for higher power application.     

Experimental and computational study of gas bubble removal in a microfluidic system using nanofibrous membranes

This paper presents a simple and efficient method for removing gas bubbles from a microfluidic system. This bubble removal system uses a T-junction configuration to generate gas bubbles within a water-filled microchannel. The generated bubbles are then transported to a bubble removal region and vented through a hydrophobic nanofibrous membrane. Four different hydrophobic Polytetrafluorethylene membranes with different pore sizes ranging from 0.45 to 3 μm are tested to study the effect of membrane structure on the system performance. The fluidic channel width is 500 μm and channel height ranges from 100 to 300 μm. Additionally, a 3D computational fluid dynamics model is developed to simulate the bubble generation and its removal from a microfluidic system. Computational results are found to be in a good agreement with the experimental data. The effects of various geometrical and flow parameters on bubble removal capability of the system are studied. Furthermore, gas–liquid two-phase flow behaviors for both the complete and partial bubble removal cases are thoroughly investigated. The results indicate that the gas bubble removal rate increases with increasing the pore size and channel height but decreases with increasing the liquid flow rate.

     

Slit design for the thermal flying height control slider

In this work, we propose a novel thermal flying height control (TFC) slider, by designing a slit near the thermal heater in the slider. Design of the slit can reduce the mechanical constraints on the head elements and concentrate the heat around head elements. In turn, head elements can achieve more thermal protrusion and flying height reduction compared to the traditional TFC slider. The simulation results show that the application of the slit achieves a flying height reduction of 1.4 nm at writer and 1.7 nm at reader. Parametric study indicates that a trade off among the slit thickness (a), the distance of the slit to ABS (d) and thermal heater (t) should be optimized to achieve both large flying height reduction and small difference of flying height between reader and writer.