DXY—1型线宽轮廓测量仪的设计

微细图形几何尺寸的测量是VLSI 生产中的一个重要工序。DXY-1型线宽轮廓测量仪采用显微镜—电视摄象—图象采集—微机处理方案。本文介绍了它的原理及设计中有关问题。实验结果表明:测量精密度≤±0.005μm,仪器精度σ≤±0.02μm,台阶测量精度<2.5nm。     

轮廓光电自动调焦系统

本文叙述我所研制的轮廓光电自动调焦的原理。实验证明:移动范围在±10μm时,重复精度为±0.5μm;大于±10μm 时,重复精度为±1μm。     

数显技术讲座：第十讲 国内外数显装置及其选用

一、常用位移传感器 (一)感应同步器 1.直线分离式单块尺标准长度250mm,GZD-1型有0级±1.5μm(国外±1μm)和1级±2.5μm,2级±5μm三种,前两种成品率达95％以上。标准长度400～1100mm有:00级±1.5μm,0级±3μm,按有的企业标准GZD-2型窄尺精度与GZD-1型基本相同。GZH-1(标准式)、GZH-2型(窄式)滑尺精度也分为0级(±0.8μm)、1级(±1.5μm)和2级(±2.5μm)三种,与相应精度等级的定尺配套使用。 2.组装式尺将定尺、滑尺组装在一个封闭的金属壳内并准确地调整好其相对位置和间隙,密封型结构,安装方便。国内组装尺型号较多,精度一般为±0.005     

像差在临界角方法探焦技术中的影响

分析了在临界角方法探焦技术中像差对测量灵敏度的影响。并给出了对两个显微物镜测量的结果。焦点探测试验精度为±1×10^-2μm.     

基准环规检定和传递

内径环规基准件的检定至今仍是一个很伤脑筋的问题 ,因为希望环规的不确定度能保证在± 0 5μm范围内 ,而这样高的精度是很难达到的。表 1列出了在现有水平下测量环规直径所用的仪器及测量方法。表 1　测量环规所用仪器、方法和精度仪器名称规格型号测量方法 仪器精度μm卧式测长仪4J、JD5、JDY -1 0 0T -UIM -5 0 0、ZEISEOPTON绝对测量± (2 +L/1 0 0 )测量仪MUT -1 0 0 0、TJA相对测量± (0 6+9L/1 0 0 0 0 )象点反射比长仪 2 0 0型数字式比长仪直接测量± (0 5 +L/3 0 0 +H/1 0 0 )孔径测量仪 70 1A干涉比较测量± 0 5…     

光电内窥参数检测装置

报导一种新的光电内窥参数测量装置。将一半导体激光器发出的光束经柱面镜汇聚成一细线,通过特殊设计的折反棱镜将其沿轴线方向投影到管孔内壁,得到管孔内壁的光截轮廓,该轮廓经物镜成像到CCD光敏面,通过图像卡采集到计算机。在计算机图像测量及辅助提示下,完成参数测量。此外,该装置还可在测量显微镜横向移动导轨及读数手轮的配合下测量内孔中径。实验结果表明轴向测量的重复精度为±17μm;中径测量的重复精度为±12μm.它在工业制造领域内具有广阔的应用前景。     

双纵模双频激光精密测距仪的研究

介绍了一种双纵模双频激光精密测距的工作原理,信号处理及误差分析。测距仪是以频差800MHz(对应波长长度为380mm)的波长为测量基准进行测量的,对不足半个波长的长度是利用双频激光干涉仪的原理进行测量的。对该测量方法精度的理论和实验研究后,可以确定出总的测量精度为±(50±1.5×10-6L)μm。     

一种新型结构光栅测微传感器

介绍一种新型结构光栅测微传感器,测量范围0～20mm,采用双轴直线运动轴承导轨,结构新颖紧凑,测量精度为±1μm.     

透镜间隔的高精度在线测量

介绍了一种物镜透镜间隔非接触式测量系统。适用于平场复消色差物镜等高性能物镜的生产。文中详细叙述了测量原理、结构和精度分析。最大测量误差不超过±2μm。     

基于LVDT的台阶信号拾取方法研究

大规模集成电路检测设备之一台阶测量仪是采用LVDT传感器拾取信号的,其设计合理与否直接关系到仪器的测量精度。文中采用零点残余电压补偿,合理地选择LVDT特性曲线的不同区域,以及正确设计传感器的安装角度等措施,有效地减小了零点残余电压的影响,并消除测量机构本身固有的二次项误差,提高了仪器的测量精度。实验表明,该仪器垂直方向测量分辨率可达0．5μm,重复测量精度为±0．015μm．     

微机械系统中精密弹性微动工作台的研制及其精度分析

研制了一种低成本、高精度的双层精密弹性微动工作台及其闭环控制系统，并对其精度进行了分析。试验结果表明其分辨力优于０．１μｍ，定位精度优于±０．５μｍ，可作为一般微机械系统中的精密工作台。     

A precision CNC turn-mill machining center with gear hobbing capability

With ever increasing demand for small parts with complex shapes and high dimensional accuracy, many traditional machine tools have become ineffective for machining these miniature components. Typical examples include dental implants, parts used in mechanical watch movements, and parts used in medical endoscopes. This paper introduces our PC-controlled CNC turn-mill machining center. It has 5 axes, an automatic bar feeder, an automatic part collection tray, and a tool changer. It features a special control algorithm for the synchronization of its axes that produces not only higher accuracy but also makes the machine easier to use. In addition, a volumetric error compensation algorithm is implemented to improve accuracy. Based on experiments, the machining error is ±3 μm for turning, ±7 μm for milling and the maximum profile error is less than ±7.5 μm for gear hobbing.     

亚微米级微位移工作台及其微计算机数字闭环控制系统

本文介绍一种单尾X-Y强性微动工作台及其微计算机数字闭环控制系统,采用自适应P-PID选择控制算法,达到了±0.03μm的位置控制精度和优良的动态品质.     

自聚焦伺服的激光测微技术

以激光ＣＤ 光学头为基础,提出新颖的自聚焦伺服测微工作原理,并以此原理试制测微仪。利用半导体激光器作光源,ＣＤ 光学头作高精度位移检测传感器,并利用高分辨率、高动态响应的压电晶体作微位移驱动源,建立实时闭环反馈的自聚焦伺服系统,由单片机进行控制,实现自动跟踪测量。系统首先在±５００μｍ 范围内进行寻焦搜索,实现光学头聚焦于被测表面,随后立即进入闭环聚焦伺服状态,对微位移进行检测。可获得±０．１μｍ 以上的测量精度,测量范围±１０μｍ ,测量形式为非接触测量。同时,该测微仪还有成本低、体积小、使用方便等优点,是一种值得推广的新方法。     

采用三向光纤照明成像的三维微结构观测系统

为弥补普通光学显微镜照明系统的不足,针对一般三维微结构的显微成像,提出并设计了一个可实现实时调节的三向光纤照明成像观测系统.系统采用计算机、D/A卡、驱动电路等硬件以及自主研制的控制软件,实现对任一光源的光强进行稳定连续的实时调节.通过自主设计的机械结构将光源、光纤、耦合头以及显微镜连接为一整体,实现光束入射方向、入射角和入射距离的任意调节.与通常的底部透射光照明系统进行实验比较,成像质量显著提高,不仅可以清晰观察目标对像的表面结构,还能得到立体感强的三维图像.针对面阵CCD显微测量系统的标定和标定误差问题,提出了螺旋微缝标定法.将螺旋测微计两铁钻形成的微缝作为标定的样本,配以适当的观测手段和计算方法,有效地消除或减小了各种误差,提高了系统的标定精度.通过系统标定和测量比较,系统的标定精度达到±0.0015μm,测量精度达到±1μm.实验结果表明,螺旋微缝标定法可以基本满足CCD测量系统标定的要求.     

光纤石英玻璃基板微V槽阵列的精密磨削

针对脆性石英玻璃的微加工,利用自主研发的金刚石砂轮微尖端修整工艺,研发了光纤阵列石英玻璃微V槽磨削技术。分析了60°的微V槽形状偏差对光纤耦合损耗的影响,然后,研究了砂轮微尖端的误差补偿修整工艺。最后,实验分析了微V槽的磨削精度。理论分析显示:微V槽角度、间距和宽度的偏差分别控制在±0.42°、±1.04μm和±1.2μm以内时,耦合损耗小于0.5dB。实验结果表明:开发的数控磨削工艺可加工高精度的60°微V槽阵列;采用数控轨迹和角度补偿修整后,砂轮微尖端半径可平均达到10.46μm,角度精度为(60±0.22)°;对石英玻璃进行微磨削后,微V槽的角度偏差达到0.4°,尖端半径为10.5μm,宽度偏差为0.3μm,间距偏差为0.5μm,可保证光纤阵列的精密对接。     

基于ISA总线的活塞自动检测及分选机

介绍了一种基于ISA总线的活塞自动检测及分选机。该测量机利用电涡流传感器把活塞规定的三个断面直径尺寸转换为频率信号 ,用 82 5 3芯片对频率信号进行F/D转换 ,用并行接口芯片 82 5 5扩展I/O接口 ,通过ISA总线连接计算机 ,实现活塞三个规定断面直径尺寸的计算机数据采集。试验表明 ,该测量机测量精度可达±1 5 μm ,重复性达± 1 5 μm。     

3D additive manufacture of oral and maxillofacial surgical models for preoperative planning

This paper investigates the errors generated during the fabrication stage for producing complex anatomical replicas derived from computed tomography coupled with the 3D additive manufacturing methods. Based on this research work, it is shown that patient-specific model based on computed tomography data can be converted into computer numerically controlled G-code. It is shown that 3D extrusion-based additive manufacturing technology is accurate to ±3 % equating to ±200 μm surface deviations due to plastic shrinkage and distortion formed during the process. Polylactic acid plastic extrusion through a 200-μm bore nozzle has resulted in a model being produced with an R_a roughness of 35.5 μm. An evaluation on the errors generated during the fabrication process has been used to accurately produce an adult female mandible. Internal nerve channels and complex external bone geometry has been produced within the model. It is shown that using this process results in bone complexity and accuracy required for producing low-cost surgical grades models which is in comparison with traditional selective laser sintering manufacturing techniques. The surface accuracies suggest that the reproduction of anatomically complex representative structures by 3D plastic extrusion additive manufacturing which can be used for pre-surgical planning.     

Wire electrochemical machining using reciprocated traveling wire

Wire electrochemical machining (WECM) is a cutting process in which the workpiece acts as an anode and the wire as a cathode. WECM is typically used to cut plates and exhibits a great advantage over wire electro-discharge machining, namely, the absence of a heat-affected zone around the cutting area. The enhancement of WECM accuracy is a research topic of great interest. In WECM, the homogeneity of the machined slit has a decisive influence on the machining accuracy. This is the first study in which the integration of pulse electrochemical machining (ECM) and a reciprocated traveling wire electrode was used to improve the homogeneity of this slit. The experimental results show that the combination of pulse ECM and a reciprocated traveling wire electrode could enhance the accuracy of WECM and that generally a low applied voltage, pulse duty cycle, and electrolyte concentration; an appropriate traveling wire velocity; and a high pulse frequency and feeding rate enhance the accuracy and stability of WECM. Finally, a microstructure with a slit width of 177 μm, with a standard deviation of 1.5 μm, and with an aspect ratio of 113 was fabricated on a stainless steel substrate measuring 20 mm in thickness.