反应溅射(Al,Ti)(O,N)涂层的微结构与力学性能

采用Al-Ti镶嵌复合靶在Ar、N2和O2混合气体中反应溅射制备了一系列(Al,Ti)(O,N)涂层.并采用EDS、XRD、TEM和微力学探针研究了薄膜的化学成分、微结构和力学性能.结果表明,随氧分压的提高,涂层中氧含量逐步增加,氮含量相应减少,(Al Ti):(O N)的化学计量比仍约为1:1,涂层保持与(Al,Ti)N涂层相同的NaCl结构.低氧含量时薄膜在(111)方向上择优生长,随着氧含量的提高,涂层生长的择优取向发生改变,高氧含量薄膜样品呈现强烈(200)织构的柱状晶.与此同时,(Al,Ti)(O,N)涂层的硬度和弹性模量也仍保持在与(Al,Ti)N涂层相当的35GPa和370～420GPa的高值.由于涂层中形成了相当含量的氧化物,这类涂层的抗氧化能力有望得到提高.     

电弧离子镀梯度（Ti，Al）N涂层的结构与机械性能研究

采用电弧离子镀（AIP）技术，在航空发动机压气机用1Cr11Ni2W2MoV不锈钢上沉积了TiN涂层、（Ti，Al）N涂层和梯度（Ti，Al）N涂层。运用带能谱的扫描电镜（SEM／EDAX）、电子探针（EPMA）、X射线衍射仪（XRD）、显微硬度仪、多功能摩擦磨损实验机等仪器和热震实验对上述涂层的结构、机械性能和基体与涂层的结合性能进行了研究。结果表明，梯度涂层的Al含量由涂层／基体界面向涂层表面逐渐增多，内层Al含量为3％（原子分数），外层Al含量为47％（原子分数）；梯度涂层具有Bl型（NaCl）单相结构和（220）择优取向；梯度涂层的硬度和耐磨与（Ti，Al）N涂层相近，且明显高于TiN涂层，结合性能优于（Ti，Al）N涂层。     

Al含量对(Ti,Al)N涂层结构性能的影响

(Ti，A1)N是20世纪80年代末期在TiN基础上发展起来的一种新型多元涂层材料。由于加入Al元素，(Ti，Al)N不但硬度、耐磨性优于TiN，而且大大改善了涂层的抗高温氧化性能。综述了Al元素在(Ti，Al)N涂层中的作用机理，以及Al含量对(Ti，Al)N涂层的晶体结构、抗高温氧化、硬度和耐磨性的影响。指出当Ti和Al的比例近似为1：1时，(Ti，Al)N涂层将获得优越的综合使用性能。     

Al含量对Ti1-XAlXN涂层组织结构的影响

通过不同Al含量的Ti—Al粉末冶金靶．采用多弧离子镀技术制备了Ti1-xAlxN涂层。用SEM、XRD、GAXRD以及XTEM等手段研究了Al元素对涂层组织结构的影响。研究表明，TiAlN涂层呈柱状多晶组织，(Ti，Al)N为涂层的主要组成相；随着Al含量的增加。涂层中的(Ti，Al)N相减少，且其晶格常数降低。     

电弧离子镀制备（TiCr）N薄膜的微观结构及性能

利用电弧离子镀（Arc Ion Plating）方法，通过对独立的Ti靶和Cr靶的弧电流进行控制，成功地在高速钢（HSS）基体上制备了不同成分配比的（TiCr）N薄膜。采用X射线衍射（XRD）分析显示：薄膜为单一的fcc的结构、没有TiN或CrN相存在；薄膜呈（220）结构，薄膜的晶格常数随着Cr含量的增加而减小。透射电子显微镜（TEM）结果表明：（TiCr）N薄膜的晶粒尺度为20nm左右。显微硬度测试表明：薄膜具有很高的硬度，而且随弧流比的变化，硬度值有一极大值。同时，本探讨了(TiCr)N薄膜的宏观残余力、显微硬度和Cr含量之间的关系及其微观机制。     

Cr在多弧离子镀（Ti，Cr）N复合膜中的作用

利用AlP—01多弧离子镀膜机，通过改变铬靶电流，在高速钢基体上沉积出不同Cr含量的（Ti，Cr）N复合膜涂层，用扫描电子显微镜、微纳米力学测试仪和X射线对薄膜的表面颗粒、硬度及内应力进行了分析。结果表明：薄膜中添加Cr能减小表面颗粒尺寸，提高硬度，当Cr的含量达到31％（wt）时，薄膜硬度达到最高值，此时薄膜的内应力也最大。     

磁控溅射TiAlNO薄膜的结构与力学性能

采用独立的Ti靶和Al靶,用射频反应磁控溅射方法,逐步控制氧流量在高速钢（W18Cr4V）基体上沉积了一系列具有不同氧含量的TiAlNO薄膜。研究了氧流量对薄膜组织结构、硬度和摩擦性能的影响。结果表明,在（Ti,Al）N中加入氧形成由（Ti,Al）（N,O）纳米晶和（TiO2,Al2O3）非晶组成的复合结构。随着氧流量的增加,薄膜中晶体相晶格常数逐步减小,其取向则逐步从（111）为主转变为（111）和（200）混合。同时薄膜硬度缓慢地下降,摩擦系数和磨损量先减少后增大,在氧流量为0．9sccm时达到最小值。研究同时表明,当氧流量为0．9sccm时薄膜具有最小摩擦系数和高耐磨性,同时保持了高硬度,综合性能最好。     

磁控溅射再硒化法制备Cu（In，Al）Se2薄膜

本文采用磁控溅射的方法制备Cu-In-Al薄膜，然后固态源硒化制成Cu（In，Al）Se2薄膜。采用EDX分析薄膜的成分，SEM观察薄膜的表面形貌，XRD表征薄膜的组织结构。结果表明，由CuIn相为主相的预制膜制成的Cu（In，Al）Se2薄膜具有单一的黄铜矿结构，且随着Al含量的增加，晶面间距减小。     

射频磁控溅射制备 HA(+ZrO2+Y2O3)/Ti6Al4V 复合生物活性涂层

采用射频磁控溅射法制备了HA（＋ZrO2＋Y2O3）／Ti6Al4V生物复合涂层．借助于XRD、SEM、FTIR和AFM等对溅射涂层的相组成、微观形貌和界面结合进行了研究，并以模拟体液试验探讨了涂层的生物活性．实验结果表明：磁控溅射的复合涂层呈非晶态，经过退火处理，可以使其转化为晶态；复合涂层的微观表面凹凸不平，并呈现网状结构和较多的孔隙，其孔隙直径约为0．5-2．0μm，孔隙面积占涂层表面积的30％-40％；HA（＋ZrO2＋Y2O3）／Ti6Al4V复合涂层的界面结合强度随（ZrO2＋Y2O3）复合颗粒含量的增大和溅射功率的提高而增强，最高可达59．6MPa．复合涂层在模拟体液中浸泡一段时间后，表面覆盖一层新生物质—含有CO^2-3的类骨磷灰石，其晶粒非常小，它与自然骨中无机相的结构成分相似，表明复合涂层具有良好的生物活性．     

磁控溅射HA（＋YSZ）／Ti6A14V复合涂层的微观形貌和生长方式

采用磁控溅射方法在钛合金（Ti6A14V）基体上制备了HA（4-YSZ）复合涂层。利用X射线衍射仪（XRD）分析涂层的物相组成，扫描电镜（SEM）观察涂层的表面形貌，原子力显微镜（AFM）分析涂层的生长状况，划痕法测定涂层与基体的附着力。结果表明，用磁控溅射法可在Ti6A14V基体上制备HA（＋YSZ）复合涂层，涂层组成与靶材基本相似，涂层呈多孔状，划痕法测量涂层的附着力约为80N，涂层的生长模式为层状生长加岛状生长。     

射频反应溅射(Al,Ti)N涂层的微结构与力学性能

采用Al-Ti镶嵌复合靶在不同氮分压下制备了一系列(Al,Ti)N涂层,并采用EDS,AFM,XRD,TEM和微力学探针表征了涂层的沉积速率、化学成分、微结构和力学性能,研究了氮分压对涂层的影响.结果表明,氮分压对(Al,Ti)N涂层影响显著:合适的氮分压可以得到化学计量比的(Al,Ti)N涂层,涂层为单相组织,并呈现(111)择优取向,最高硬度和弹性模量分别达到36.9GPa和476GPa.过低的氮分压不但会造成涂层贫氮,而且涂层中的Al含量偏低,硬度不高.氮分压过高,由于存在"靶中毒"现象,尽管涂层的成分无明显变化,但会大大降低其沉积速率,并使涂层形成纳米晶或非晶态结构,涂层的硬度也较低.     

Deposition of a nanocomposite (Ti,Al, Si)N coating with high thickness by high-speed physical vapor deposition

Nanocomposite coatings such as (Ti, Al, Si)N have been demonstrated as promising candidates for the use as protection against solid particle erosion for compressor blades. Typically, nanocomposite (Ti, Al, Si)N coatings are deposited by different physical vapor deposition (PVD) techniques. However, the relatively low coating thickness up to a few micrometers due to low deposition rates leads to a limited lifetime of the coatings under erosive particle bombardment. In this study, the deposition of a nanocomposite (Ti, Al, Si)N coating was performed by a hollow cathode gas flow sputtering method, the high-speed physical vapor deposition, which enables the high-rate deposition of thick coatings. Morphology and microstructure of the coating were investigated via scanning electron microscopy and transmission electron microscopy, respectively. Tribological characterization by impact tests and erosion tests demonstrates that the nanocomposite (Ti, Al, Si)N coated sample reveals a promising resistance against impact loads and the solid particle erosion. Summarily, nanocomposite (Ti, Al, Si)N coatings deposited by the high-speed physical vapor deposition provide a high potential for the erosion protection of compressor blades.     

Ti6Al4V钛合金表面Ta2O5/Ta2O5-Ti/Ti多涂层的制备与性能研究

采用磁控溅射技术在Ti6Al4V钛合金表面制备了Ta_2O_5/Ta_2O_5-Ti/Ti多层涂层;利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)和X射线光电子能谱仪 (XPS),分析了涂层的微观结构、物性组成和化学价态;通过划痕仪、纳米压痕仪、摩擦磨损试验机和电化学工作站,检测了涂层的结合强度、力学性能、摩擦系数和耐腐蚀性。研究结果表明,Ta_2O_5/Ta_2O_5-Ti/Ti多层涂层表面由峰型颗粒组成,粒径大小均匀,涂层结构致密。与Ti6Al4V相比,Ta_2O_5/Ta_2O_5-Ti/Ti多层涂层试样具有较小的摩擦系数,较高的腐蚀电位和较小的腐蚀电流密度,表现出良好的耐磨和耐腐蚀性能,能对Ti6Al4V合金植入材料起到较好的保护作用。     

Ti—Al—N系功能梯度薄膜的相结构

实验证明Ｔｉ－Ａｌ－Ｎ系功能梯度薄膜在厚度方向上有金属（Ａｌ９（Ｔｉ９Ａｌ）Ｎ和（Ｔｉ２Ａｌ）Ｎ（１１０）三种相结构，在（Ｔｉ０Ａｌ）Ｎ相中又有（１１１）和（２００）两种择优取向，随着氮分ＰＮ的不断增加，薄膜中金属相含量急剧下降，陶瓷相含量则急剧增加，当ＰＮ〉１．５Ｐａ后两种相含量的变化均趋势平缓。     

High temperature stability of multicomponent TiAlSiN and CrAlSiN coatings

The high temperature oxidation behavior of TiAlSiN and CrAlSiN coatings was studied. These coatings were deposited on silicon substrates by using a cathodic-arc deposition system with lateral rotating arc cathodes. Titanium, chromium and Al88Si12 cathodes were used for the deposition of TiAlSiN and CrAlSiN coatings. All the deposited Ti(0.49)Al(0.44)Si(0.07)N, Ti(0.41)Al(0.51)Si(0.08)N and Cr(0.50)Al(0.440Si(0.06)N coatings showed B1-NaCl crystal structure and possessed nano-grain sizes of 6-8 nm. For the high temperature oxidation test, the coated samples were annealed at 900 degrees C in air for 2 hours. The Ti(0.41)Al(0.51)Si(0.08)N with higher Al and Si contents possessed lower oxidation rate than that of Ti(0.49)Al(0.44)Si(0.07)N. The oxide layer formed on the Ti(0.49)Al(0.44)Si(0.07)N coatings consisted of large TiO2 and TiAlSiN grains at the oxide-coating interface, followed by a layer of Al2O3 in the near-surface region. The oxidation rate of the Cr(0.50)Al(0.44)Si(0.06)N coated sample was much lower than that of the Ti(0.49)Al(0.44)Si(0.07)N and Ti(0.41)Al(0.51)Si(0.08)N. The dense Al2O3 with amorphous top layer at the oxide-coating interface retarded the diffusion of oxygen into the Cr(0.50)Al(0.44)Si(0.06)N. The deposited Cr(0.50)Al(0.44)Si(0.06)N showed a high temperature performance superior to those of the Ti(0.49)Al(0.44)Si(0.07)N and Ti(0.41)Al(0.51)Si(0.08)N.     

A study of the nanostructure and hardness of electron beam evaporated TiAlBN Coatings

TiAlBN coatings have been deposited by electron beam (EB) evaporation from a single TiAlBN material source onto AISI 316 stainless steel substrates at a temperature of 450 °C and substrate bias of − 100 V. The stoichiometry and nanostructure have been studied by X-ray photoelectron spectroscopy, X-ray diffraction and transmission electron microscopy. The hardness and elastic modulus were determined by nanoindentation. Five coatings have been deposited, three from hot-pressed TiAlBN material and two from hot isostatically pressed (HIPped) material. The coatings deposited from the hot-pressed material exhibited a nanocomposite nc-(Ti,Al)N/a-BN/a-(Ti,Al)B₂ structure, the relative phase fraction being consistent with that predicted by the equilibrium Ti-B-N phase diagram. Nanoindentation hardness values were in the range of 22 to 32 GPa. Using the HIPped material, coating (Ti,Al)B_0.29N_0.46 was found to have a phase composition of 72-79 mol.% nc-(Ti,Al)(N,B)_1 − x+ 21-28 mol.% amorphous titanium boride and a hardness of 32 GPa. The second coating, (Ti,Al)B_0.66N_0.25, was X-ray amorphous with a nitride+boride multiphase composition and a hardness of 26 GPa. The nanostructure and structure-property relationships of all coatings are discussed in detail. Comparisons are made between the single-EB coatings deposited in this work and previously deposited twin-EB coatings. Twin-EB deposition gives rise to lower adatom mobilities, leading to (111) (Ti,Al)N preferential orientation, smaller grain sizes, less dense coatings and lower hardnesses.     

Refining effect of nitrogen on M7C3 carbides in hypereutectic Fe–25Cr–4C–0.5Ti–0.5Nb hardface coatings

Hypereutectic Fe–Cr–C–Ti–Nb coatings with N additives were developed by surface-hardening welding (hardfacing). The experimental results showed that the primary M₇C₃ carbides were refined by the N additives in the coatings. Based on the micro-morphologies of M₇C₃ and (Ti,Nb)(C,N), the (Ti,Nb)(C,N) was present inside the primary M₇C₃ carbides, and they were tightly combined. The mismatch between the (010) crystal plane of M₇C₃ and the (110) crystal plane of (Ti,Nb)(C,N) was 6.15%, which indicated that (Ti,Nb)(C,N) was moderately effective as a heterogeneous nucleus of M₇C₃ carbides. Therefore, the preferentially precipitated (Ti,Nb)(C,N) in the Fe–Cr–C–Ti–Nb coating was the heterogeneous nucleus of the primary M₇C₃ carbides and thereby refined the primary M₇C₃ carbides .     

多元合金化强化TiN复合镀层的研究进展

多元合金化是提高TiN镀层的有效途径之一,也是目前研究的热点.本研究综述了多元合金强化TiN复合镀层的最新进展,详述了Ti(CxN1-x),(Ti,Al)N,(Ti,Nb)N,Ti-Si-N,Ti-B-N,Ti-C3N4复合镀层的工艺、结构和性能,指出了今后TiN镀层的研究方向.     

Influence of particulate morphology on microstructure and tribological properties of cold sprayed A380/Al_2O_3 composite coatings

In this study, three kinds of A380/Al_2O_3 composite coatings were prepared by cold spray(CS) using spherical, irregular and spherical + irregular shaped Al_2O_3 particulates separately mixed in the original A380 alloy powders. The influence of Al_2O_3 particulates' morphology on the microstructural characteristics(i.e.retention of Al_2O_3 content in coatings, coating/matrix interfacial bonding, pore size distribution and morphology etc.) and wear performance of the coatings was investigated by scanning electron microscopy(SEM), X-ray computed tomography(XCT) and 3-D optical profilometry. Results indicated that the spherical Al_2O_3 shows obvious tamping effect during deposition process. As a result, the interface showed a wavy shape while the matrix and particulates were mechanical interlocked with much improved adhesion. In addition, the porosity of the coating was minimized and the pores exhibited curved spherical structure with reduced dimensions. The irregular Al_2O_3 particles predominantly displayed the embedding effect together with fragmentation of Al_2O_3 particulates. Consequently, poor coating/matrix interfacial bonding, high porosity and the formation of angular-shaped pores were resulted in the coating. Dry sliding wear tests results revealed that the wear resistance of the coating is directly related with the retained content of Al_2O_3 in the coating. The coating containing irregular Al_2O_3 particulates displayed superior wear performance with its wear rate one seventh of that of the pure A380 alloy coating. The coating containing both kinds of Al_2O_3 particulates showed mixed characteristics of above two kinds of Al_2O_3 composite coatings.     

Filter effects on the wear and corrosion behaviors of arc deposited (Ti,Al)N coatings for application on cold-work tool steel

In this study, (Ti,Al)N coatings were deposited on Japanese Industrial Standard SKD11 modified cold-work tool steel using a cathodic arc deposition system with and without magnetic filter attachment. Coating morphology and properties such as coating structure, adhesion, hardness, abrasion and corrosion behaviors were analyzed to evaluate the effects of magnetic filter on the coatings. The results showed that magnetic filtering slowed down (Ti,Al)N deposition rate, but it improved component homogeneity, roughness and adhesion of the coatings. Although (Ti,Al)N coated specimens produced with or without filter both showed superior abrasion resistance in service, however, filtered (Ti,Al)N coatings yielded better corrosion protection of the steel than unfiltered ones in 3.5 wt.% NaCl aqueous medium.