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1.
在CdO-SnO_2体系中加入La ̄(3+)可以提高学钛铁矿型β-CdSnO_3的热稳定性。通过对掺镧材料的物相及微结构的研究、认为La ̄(3+)部分固溶到β-CdSnO_3品格中是提高其稳定性的主要原因。并可控制掺镧方式及热处理温度来合成不同相组成的气敏材料,改善CdO-SnO_2系的气敏性能。  相似文献   

2.
掺镉纳米SnO2的热稳定性,电导及气敏性能   总被引:3,自引:0,他引:3  
张天舒  沈瑜生 《功能材料》1995,26(4):294-297
本文研究了CdO掺杂对纳米SnO2粉料的热稳定性,电导及气敏特性的影响。结果表明,以非晶状态均匀分散在SnO2颗粒表面的CdO能阻止SnO2之间的相互扩散,提高了纳米SnO2的热稳定性;固溶于SnO2昌粒中的CdO量(Cd/Sn〈0.05)很小,但对元件的电导影响显著;纳米级的晶粒尺寸(〈6nm)及CdO的掺杂大大改善了SnO2的气敏特性。  相似文献   

3.
本文根据实验结果,分析了以SnO_2为主体材料的CuO作添加剂的CuO-SnO_2气敏传感器的敏感性能,并从理论上对其气敏机理进行了探讨。  相似文献   

4.
镧掺杂对CdO—SnO2系物相及性能的影响   总被引:2,自引:1,他引:1  
张天舒  沈瑜生 《功能材料》1995,26(5):409-412,392
在CdO-SnO2体系中加入La&3+可以提高钛铁矿型β-CdSnO3的热稳定性。通过对掺镧材料的物相及微结构的研究,认为La^2+部分固溶到β-CdSnO2晶格中要提高其稳定性的主要原因。并可控制掺镧方式及热处理温度来合成不同相组成的气敏材料,改善CdO-SnO2系的气敏性能。  相似文献   

5.
多功能NiO—SnO2气敏材料的敏感特性   总被引:5,自引:0,他引:5  
采用化学共淀淀法合成了不同配比的NiO-SnO2气敏材料,用X射线衍射法分析材料的结构与组成,测试了元件的气敏性能,并利用表面催化作用较好的解释了材料的敏感机理,通过改变NiO的掺杂量及气敏元件的加热功率,NiO-SnO2材料可分别实现对H2,C2H5OH的选择性检测以及对C2H5OH、H2、CO、C4H10和汽油等气体的广谱检测。  相似文献   

6.
Sol—Gel法制备ZrO2—SnO2薄膜的常温气敏机理   总被引:4,自引:0,他引:4  
根据Sol-Gel工艺制备的ZrO2-SnO2薄膜的气敏性能数据,提出了常温下SnO2(ZrO2)薄膜对H2S的气敏机理模型。根据此模型所得定量分析结果与实验结果一致。  相似文献   

7.
微结构气敏传感器敏感薄膜制备方法的研究   总被引:5,自引:1,他引:4  
随着微结构气敏传感器的出现,金属氧化物半导体薄膜因具有灵敏度高、热质量小、批量制备一致性好等特点受到日益广泛的重视,本比较了在微结构气敏传感器中三种方法制备的SnO2敏感薄膜的结构和气敏响应特性。结果表明,用液涎生长和热氧化技术制备Sn2薄膜虽然能采用Lift-off技术成形,但由于膜中晶粒结构和Sn/O比不合适使得它的气敏响应特性很差;室温混合气氛(Ar/O2比为8:2)下射频溅射SnO2靶然  相似文献   

8.
多孔SnO2薄膜的导电和气敏特性   总被引:1,自引:0,他引:1  
用RGTO方法制备多孔,颗粒状SnO薄膜;根据SEM观察结果建立简单导电模型,并验证其导电机制主要是晶界导电;研究纯SnO2薄膜及掺杂SnO2薄地CO,乙醇等气体的气敏特性,掺Pt的薄对CO有很好的气敏响应;选择合适工作温度,可提高灵敏度改善选择性。  相似文献   

9.
SnO2超细粉体应用于低温气敏材料   总被引:10,自引:0,他引:10  
陆凡  陈诵英 《功能材料》1995,26(4):298-301
采用超临界流体干燥技术制备了纳米级SnO2粉体。通过简单的掺杂,测试了其对CO、H2气敏效果,使其检测温度分别降至30℃和120℃左右。同时,通过对元件成型温度的考察,使其烧结温度比传统SnO2元件下降100 ̄200℃。从而肯定了超细SnO2可以大大节省能耗,适用于低温气敏材料。  相似文献   

10.
ZrO2掺杂对SnO2薄膜电性及气敏性的影响   总被引:2,自引:2,他引:0  
本研究不用金属醇盐而以无机盐SnCl2.2H2O为主体原料,以Zr(OC3H7)4为掺杂剂,无水乙醇为溶剂,采用溶胶-疑胶Sol-Gel)工艺制备了不同ZrO2掺杂份量的SnO2薄膜,发现ZrO2薄膜在常温下对H2S气体具有较好的气敏性能,同时本文研究了ZrO2掺杂份量对SnO2薄膜导电率及气敏性能的影响。  相似文献   

11.
李支文  冯蕴道 《功能材料》1993,24(2):123-128
以金属有机化合物(MO)四甲基锡[sn(CH_3)_4]为源物质,利用等离子体增强化学气相沉积技术,分别在单晶硅片、三氧化二铝陶瓷基片上淀积了纯净的SnO_(2-x)薄膜,对淀积的一些工艺条件,膜的结构、成分和薄膜元件的气敏性能进行了研究,并与普通PECVDSnO_(2-x)薄膜元件的气敏性能作了比较,对SnO_(2-x)膜的气敏机理作了探讨。  相似文献   

12.
ZnO/SnO_2,SnO_2/ZnO UPF复合膜的制备及气敏特性研究   总被引:3,自引:0,他引:3  
用直流气体放电活化反应蒸发沉积技术在普通玻璃基片上制备了ZnO/SnO2及SnO2/ZnO超微粒子(UPF)双层复合薄膜。样品经扫描电子显微镜(SEM)和X射线衍射仪分析,结论为超微粒子的复合薄膜。同时提出了最佳制备工艺。气敏测试结果表明:ZnO/SnO2及SnO2/ZnOUPF复合膜较单层ZnO及SnO2UPF表现出优良的选择性,其灵敏度和最佳工作温度也得到相应的改善。  相似文献   

13.
制备了SnO3/ZnO及ZnO/SnO3多层结构的气敏薄膜,用能谱结合氩离子刻蚀的方法及X射线衍射法,对薄膜的表面吸附。膜间的相互与组成等进行了研究,结果表明:薄膜表面存在少量的吸附多层膜中锌的扩散远比锡一个模型,对吸附现象作了初步的解释,讨论了造成锌锡扩散的原因。  相似文献   

14.
采用反应磁控溅射法制备SnO2薄膜经常出现化学计量比的失衡问题。通过控制溅射过程中的氧分压制备不同化学计量比的SnO2-x薄膜,研究非化学计量比对薄膜结构、成分以及气敏性能的影响。XRD结果表明氧分压对材料结构和取向的影响非常显著。薄膜的O/Sn和表面化学成分通过XPS进行确定,分析发现氧分压的增加促使薄膜接近化学计量比,但表面化学吸附氧含量在0.33Pa氧分压下达到最大。气敏性能测试表明,非化学计量比主要影响薄膜表面的化学吸附氧数量,从而影响导电性和气体敏感性。氧分压对薄膜化学吸附氧的影响趋势与对气敏性能的影响趋势一致。0.33Pa氧分压下制备的薄膜拥有最多的表面吸附氧,同时对氢气的灵敏度高达45.6%。另外,在0.2~0.5Pa氧分压下制备的薄膜对氢气具有较好的选择性。  相似文献   

15.
In this paper nanosized BaTiO3 thick films based gas sensor has been fabricated for liquid petroleum gas (LPG). Doping with different concentrations of metal oxides influenced the sensitivity of BaTiO3 thick films for LPG sensor. We present the characterization of both their structural properties by means of X-ray powder diffraction (XRD) and the electrical characteristics by using gas-sensing properties. X-ray powder diffraction analyses revealed the persistence of cubic phase with grain growth 65 nm. The LPG-sensing properties of BaTiO3 thick films doped with CuO and CdO are investigated. It was found that 10 wt.% CuO: 10 wt.% CdO doped BaTiO3 based LPG sensor shows better sensitivity and selectivity at an operating temperature 250 °C which is an important commercial range for LPG alarm development. Incorporation of 0.3 wt.% Pd doped CuO:CdO:BaTiO3 element shows maximum sensitivity with high cross selectivity to the other gases including CO, H2 and H2S at an operating temperature 225 °C for low concentrations of LPG sensor.  相似文献   

16.
A.B. Bodade 《Vacuum》2008,82(6):588-593
This paper reports the preparation and gas-sensing characteristic of ZnO:TiO2-based hydrogen sulfide (H2S) gas sensor with different mol% of CdO by polymerized complex method. The structural and gas-sensing properties of ZnO:TiO2 materials have been characterized using X-ray diffraction and gas-sensing measurement. The electrical resistance response of the sensor based on the materials was investigated at different operating temperatures and different gas concentrations. The sensor with 10 mol% CdO-doped ZnO:TiO2 shows excellent electrical resistance response toward H2S gas. The cross sensitivity was also checked for reducing gases like CH4, CO and H2 gas. The selectivity and sensitivity of ZnO:TiO2-based H2S gas sensor were improved by the addition of 10 mol% of CdO at an operating temperature of 250 °C.  相似文献   

17.
稀土Dy掺杂纳米SnO_2薄膜的结构与气敏特性   总被引:2,自引:0,他引:2  
采用真空蒸发法在玻璃衬底上制备稀土Dy掺杂Sn薄膜,对薄膜进行合适的氧化、热处理后获得Dy掺杂SnO2薄膜.用X射线衍射、场发射扫描电子显微镜、静态配气法对薄膜性能进行测试,研究不同掺Dy含量和热处理条件对SnO2薄膜的影响.结果显示,制备的SnO2薄膜呈金红石结构为n型;在相同热处理条件下,Dy掺杂可明显缩短薄膜氧化、热处理的时间;适当掺入稀土Dy可明显改善SnO2薄膜的结构、气敏特性.掺Dy 3at%后可大大提高SnO2薄膜对丙酮气体的灵敏度.  相似文献   

18.
Several boron-doped CdO with different boron composition thin films have been prepared on glass substrate by a vacuum evaporation technique. The effects of boron doping on the structural, electrical and optical properties of the host CdO films were systematically studied. The X-ray diffraction study shows that some of B3+ ions occupied locations in interstitial positions and/or Cd2+-ion vacancies of CdO lattice. The band gap of B-doped CdO suffers narrowing by 30–38% compare to undoped CdO. Such band gap narrowing (BGN) was studied in the framework of the available models. Furthermore, a phenomenological evaluation of the dependence of band gap on the carrier concentration in the film samples is discussed. The electrical behaviours show that all the prepared B-doped CdO films are degenerate semiconductors. However, the boron doping influences all the optoelectrical properties of CdO. Their dc-conductivity, carrier concentration and mobility increase compare to undoped CdO film. The largest mobility of 45–47 cm2/V s was measured for 6–8% boron-doped CdO film. From near infrared transparent-conducting oxide (NIR-TCO) point of view, boron is effective for CdO donor doping.  相似文献   

19.
Yb-doped CdO thin films with different Yb contents were prepared on glass and silicon substrates by vacuum evaporation technique. The effects of Yb-doping on the structural and optoelectrical properties of the host CdO films were systematically studied. The X-ray diffraction study shows that some of Yb3+ ions substituted for Cd2+ and the solubility of Yb in CdO is very limited and may be around ~0.2 at.%. The Yb-doping influences all the optoelectrical properties of CdO. The bandgap of Yb-doped CdO suffers narrowing by about 20% with a very small (0.03 at.%) doping level. The electrical behaviours show that all the prepared Yb-doped CdO films are degenerate semiconductors. Their dc-conductivity, carrier concentration, and mobility increase compared with undoped CdO film. The largest mobility of about 87 cm2/V s was measured for 0.13 at.% Yb-doped CdO film. From transparent-conducting-oxide point of view, Yb is sufficiently effective for CdO-doping.  相似文献   

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