Fringe analysis method for electronic speckle pattern interferometry using only speckle patterns before and after deformation

Electronic speckle pattern interferometry is employed in many industrial fields as a useful deformation measurement method. However, two speckle patterns obtained before and after the deformation are necessary for measurement. Furthermore, at least three speckle patterns are required for high resolution measurement using ordinary fringe scanning technologies. In this paper, a novel method that can measure high speed deformations using a limited number of speckle patterns without using high speed cameras is proposed. The method enables application to dynamic deformation analysis because the method involves analysis using only two speckle patterns obtained before and after the deformation. A novel optical system that can record some spatial information into each speckle is set up for the method. In experimental results, it is confirmed that the out-of-plane deformation measurement can be precisely performed by the method and that the resolution power is almost equivalent to that of the ordinary method.     

Electronic speckle pattern interferometry based on spatial information using only two sheets of speckle patterns

Abstract

Speckle interferometry is an important deformation measurement method for an object with a rough surface. In this paper, a novel fringe analysis method is proposed that uses a new optical system, which uses a plane wave as the reference beam of the speckle interferometer. When the optical system is employed in fringe analysis, the deformation information and the bias components of the speckle patterns are clearly separated in the frequency domain. Therefore, the deformation information can be readily extracted using a Fourier transform, which gives a pair of real and imaginary components concerning the information. The specklegram is calculated using such a pair of components, and the phase map is obtained from the specklegram. Experimental results confirmed that the resolution power of this measurement method is higher than 1/261 of the wavelength of the light source of the optical system.     

基于数字散斑的大型机翼弹性形变测量技术

飞机机翼在飞行过程中受气动力影响会发生弹性形变,导致机翼外载荷大小与分布变化,危及飞行安全。该文针对民用飞机在飞行过程中机翼弹性形变测量的需求,分析大型飞机的结构负荷,采用多组摄像机组合标定、机载摄像机位姿修正、大倾角散斑图像解算等视觉测量技术,开展多摄像机组合的大翼展数字散斑形变测量方法研究,设计适用于C919飞机飞行试验的机载翼面弹性形变测试系统。通过实验室仿真试验与精度对比分析,形变测量精度能够满足机翼弹性形变测量要求。     

Speckle interferometry by using virtual speckle pattern based on Carré algorithm

Dynamic deformation measurement with a large deformation is effectively performed by using virtual speckle patterns. The virtual speckle pattern has been generally produced by using the operation based on Fourier transform. However, it takes a long calculating time to produce a virtual speckle pattern, because the method requires Fourier transform operation at each pixel of CCD. In the proposed method, virtual speckle patterns are produced by Carré algorithm without any operation by Fourier transform. The method is applied to the in-plane deformation measurement in this paper. As the results, it is confirmed that the calculating cost of virtual speckle patterns is improved remarkably, and that the measurement accuracy of the new method is also equal to the ordinary methods. It is also confirmed that the proposed method will expand the use of the speckle interferometry based on virtual speckle pattern technology.     

Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry

Speckle interferometry is generally known as a method for measuring the deformation of an object with rough surfaces. In this paper, a three-dimensional (3D) shape measurement method is proposed for superfine structures beyond the diffraction limit using the basic property of speckle interferometry. Since the differential coefficient distribution of the shape of such an object can be detected in speckle interferometry by imparting a known lateral shift to the measured object, the shape can be reconstructed by integrating the differential coefficient distribution. Based on experimental results obtained using diffraction gratings as measured objects, it is confirmed that the proposed method can measure 3D shapes that are beyond the diffraction limit of the lens.     

激光多普勒爆破容器高速变形动态测量技术的研究

为了获取爆破过程中爆炸容器变形参数来分析爆破强度,设计了激光多普勒效应外差纵向测量系统,利用高斯光束理论和束腰特性优化了光路结构.根据爆破过程多普勒信号的特点,研究了相应的数字滤波和频谱分析方法,实现了爆破容器高速形变过程的动态测量.系统的测量形变量程为±30mm,测量形变速度的量程为-10 m/s～+20 m/s,遥测距离为4.5 m.与标准振动台的试验对比,位移测量相对误差小于1%.最后,还给出了圆柱形钢制罐体在20gTNT当量炸药爆破过程中变形的测量结果.     

Mirau干涉型微纳台阶高度测量系统的研究

为了实现纳米量级到微米量级的微观三维台阶样板高度的快速测量,在普通光学显微镜的基础上改造完成了一台微纳台阶高度测量装置,设计了整体硬件结构,编写了测量控制软件和数据处理软件,并结合Hilbert变换和小波变换实现三维表面形貌测量。使用不同高度的台阶样品进行测试,测试结果表明:系统测量准确度较高,测量重复性较好,垂直测量范围大于50 μm。     

Investigation of membrane deformation by a fringe projection method

An optical method has been developed to measure the deformation of a membrane in a microphone. A fringe projector that consists of an optical fiber and an optical wedge is described and analyzed by geometric optics. A three-step phase-shifting technique that involves the introduction of an arbitrary phase is discussed. The fine fringe patterns projected onto a small test surface are captured by a CCD camera mounted on a long-distance microscope. With the aid of a phase-shifting technique and signal-demodulating techniques, the proposed setup is capable of measuring deformation of the membrane of the order of as much as submicrometers.     

一种新的高精度测相方法

提出采用光学移相办法测量超高频调制光相位特性的一种方法。它具有精度高、实用性强等特点。     

圆分度角测量检定中的分段内插测量法

圆分度角用排列互比法测量时,一般选用较大的测量间隔角。为了测出大间隔角范围内的小角度偏差,提出了分段内插测量法。由于组成间隔角的两角位置的偏差已由排列互比法测出,因此可作为控制点。通过和小角度陪检工具的连续比较,消减陪检工具角度偏差的影响,得到间隔角范围内的小角度偏差。分段内插测量法是排列互比法的扩展与补充。     

成像式光栅自准直测角方法研究

针对目前光电自准直仪难以做到既有高分辨力同时又有大的测量范围的不足,提出一种成像式光栅自准直测角方法。该方法将成像式光栅方法、自准直测角技术相结合,利用标尺光栅像和指示光栅形成的光栅副反映被测物体的角度变化。试验结果表明,该系统接收到的光栅信号稳定,满足光栅计数的要求,成像式光栅自准直测角方法原理可行。该方法避免了光栅副间隙带来的误差,具有大量程及较高的分辨力。     

基于反向共轴的大口径平面光学元件面形测量

提出了一种基于反向共轴的大口径平面光学元件面形测量方法。将双位移传感器反向共轴线扫描测量模式和多角度旋转三面互检技术结合,借助直线长导轨有效扩大平面光学元件测量口径,同时测量过程中不需要使用标准平晶,避免引入标准平晶参考面不确定度分量,测量结果直接溯源到激光波长基准。利用该测量方法对3块400mm口径光学平晶进行面形测量,验证了该测量方法的可行性。     

High resolution speckle interferometry using virtual speckle pattern produced by information of deformation process

A high resolution new fringe analysis method for ESPI with only one camera is proposed by using features of speckle interferometry in a deformation process of a measured object. The profile of intensity of each speckle of the speckle patterns in the deformation process is analyzed by the Hilbert transform. A virtual speckle pattern for creating a carrier fringe image is produced artificially by using the information of profiles of intensities of speckles. The deformation map of the measured object can be detected by the virtual speckle pattern in an operation based on the spatial fringe analysis method. Experimental results show that the difference between the results by the new and the ordinary methods is 0.1 rad as standard deviation. From the results, it is confirmed that the high resolution measurement can be performed by this method the same as compared to the ordinary measurement method which needs to employ three speckle patterns.     

光电经纬仪测量飞行器三维坐标方法及误差分析

介绍一种用于光电经纬仪精确测量飞行器三维坐标的计算方法，该方法利用空间两异面光轴公垂线估计交会点位置，克服了常规处中的模型误差，分析了观测量误差 产生的原因并提出了改正方法，对定位测量误差进行了仿真，结果表明，利用该方法并合理布站可显著提高从标测量精度，对于机动大目标的坐标测量误差小于0．20m。     

Colorimetric method for phase evaluation

Measurements of very small phase changes in optical measurement techniques are usually performed with interferometric methods that are based on evaluation of interference patterns, which correspond to a phase change of the investigated wave field. If values of the phase change are small, it is difficult to determine accurately the phase values, and one needs very expensive measurement systems. We present a simple method for evaluation of small phase variations that uses the interference of polychromatic light. The phase change affects the color of the interference pattern, and the color of the interference pattern corresponds to a specific phase change that can be evaluated using colorimetric analysis. We describe and analyze our colorimetric phase evaluation method. The proposed method offers accurate results, and it may be suitable for practical utilization in the optical industry.     

移相干涉仪环境微扰的外差检测及信号处理

对环境微振动干扰进行补偿可减小移相干涉测量的误差,其中振动量的检测是实现振动补偿的前提。以声光调制器作为光学移频器,在移相式平面干涉仪中组合成外差干涉测振系统,可以实现光程差微小变化(范围为0到1/2波长)的实时检测。在外差信号处理中采用单片RF/IF相位测量芯片直接对两路40MHz模拟信号进行比相,简化了通常使用的数字测相方法,其精确测相的典型非线性值小于1度。用该系统实际测量了周期性振动和地面冲击振动对干涉仪的影响,获得了干涉仪所受微振动的幅度和相位。     

全视场外差白光干涉测量技术

为了解决传统白光干涉测量技术中对线性位移机构的位移精度要求过高的问题,本文提出了一种全视场外差白光干涉测量技术。该技术主要通过使用存在差频的白光干涉信号作为光源来实现在大扫描步长和低扫描精度条件下相干峰位置的高精度检测。本文首先建立了白光外差干涉的数学模型,再根据数学模型提供的光强信号特性提出了整体系统设计方案,然后对测量方案的可行性进行了实验验证。最后针对多种误差对算法计算精度的影响进行了理论分析和数据对比。误差分析的结果表明:白光外差干涉测量技术提供更高的测量精度和更好的抗干扰性能,有效地降低了传统白光干涉测量对线性位移机构精度的严苛依赖,为光学自由曲面检测技术提供了更多的可选解决方案。     

An interference method for measuring parallelism of miniature optical components

A method for measuring parallelism of transparent optical components with small aperture size is described. It uses a Haidinger-type laser interferometer adapted for the measurement of optical components with millimeter and sub-millimeter aperture size. The method is based on the measurement of the optical thickness variation when the plate under test is translated across a focused laser beam. Measurement results for optical parts with 0.8 mm–10 mm aperture size are presented.     

确定纳米压入面积函数的改进方法

针对薄膜等微小结构材料力学性能测试中面积函数测量问题,提出了一种改善微小压入深度下压头面积函数准确性的方法。该方法将压头与被测样品之间的投影接触面积与压头针尖曲率半径和角度相关联,解决常用的面积函数确定方法在50 nm以下浅压痕测量中不可靠的问题。经实验验证,该面积函数确定方法,可以提高微小接触深度下压入硬度和折合模量的测量准确度。     

Control of phase of fringes in speckle interferometry for application of fringe scanning method

The speckle interferometry is an effective technique in the displacement measurement of a structure with a rough surface. However, when the fringe scanning technique is introduced to speckle interferometry for improving the measurement resolution, generally two speckle patterns before and after the deformation of the measurement object and another speckle pattern obtained under different conditions from these two speckle patterns are required at least. So, three speckle patterns are generally required for precise fringe analysis as a minimum condition. In this paper, a method for introducing the fringe scanning method is proposed by controlling the phase of the specklegram as a fringe image using filtering techniques. Then, the temporal fringe analysis method that uses only two speckle patterns are proposed for speckle interferometry. As the result of experiments, it is shown that high precise fringe analysis can be realized by the fringe scanning methods using only two speckle patterns for the displacement measurement with a large deformation.